• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.62-62
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• 2003

금속-실리콘간 화합물인 실리사이드 중에서, 코발트다이실리사이드(CoSi$_2$)는 비저항이 낮고 선폭이 좁아짐에 따라 면저항이 급격히 증가하는 선폭의존성이 없으며 화학적으로 안정한 재료로 현재 널리 이용되고 있는 재료이다. 또한, 실리콘 (100) 기판과 에피택셜하게 성장한 CoSi$_2$는 우수한 열안정성 과 낮은 juction leakage의 특성을 가지며, shallow junction 형성을 가능하게 하는 많은 장점을 가지고 있어 각광받고 있다. 그러나 순수한 Co의 증착 후속 열처리에 의해 형성된 CoSi$_2$는 (110), (111), (221)등의 다양한 결정방위를 가지게 되어 에피택셜 하게 형성되기 어렵다. 현재까지 Ti, Ta, Zr과 화학 산화막 등의 확산 방지막을 이용하여 에피 택셜하게 성장시키는 많은 방법들이 연구되어 왔으며, 최근에는 본 연구실에서 반응성화학기상증착법으로 Co-C 박막을 증착하여 in-Situ로 에피택셜 CoSi$_2$를 형성하는 새로운 방법을 보고하였다. 본 연구는 반응성 스퍼터링에 의해 증착된 Co-N 박박으로부터 후속 열처리를 통하여 에피택셜 CoSi$_2$를 성장시키는 새로운 방법을 제시하고자 한다. Co-N 박박은 Ar과 $N_2$의 혼합가스 분위기 속에서 Co를 스퍼터링하여 증착하였다. 증착시 혼합가스 내의 $N_2$함량의 변화에 따라 다양한 Co-N 박막이 형성됨을 확인하였다. 후속열처리시 Co-N 박막의 산화를 방지하기 위하여 Ti층을 마그네트론 스퍼터링으로 증착하였으며, Ar 분위기에서 온도에 따른 ex-situ RTA 열처리를 통하여 에피택셜 CoSi$_2$를 성장시킬 수 있었다. 이러한 에피택셜 CoSi$_2$는 특정 한 Ar/$N_2$ 비율 내에서 성장이 가능하였으며, 약 $600^{\circ}C$이상의 열처리 온도에서 관찰되었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.965-968
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• 2004

Effective transverse Piezoelectric Coefficients $(e_{31,f})$ of thick PZT $(Pb(Zr_{0.52}Ti{0.48}Ti_{0.48})O_3)$ films on $SiN_x/Si$ substrates were measured with PZT thicknesses and top electrode dimensions. $e_{31,f}$ is one of important Parameters characterizing Piezoelectricity of PZT films. Thick PZT films have been used as various sensors and actuators because of their high driving force and high breakdown voltage. Thick PZT films were fabricated on Pt/Ta/$SiN_x$/Si substrates using sol-gel method. Thicknesses of PZT films were $1{\mu}m$ and $1.8{\mu}m$. $|e_{31,f}|$ values of $1.8{\mu}m$-thick-PZT films were higher than those of $1{\mu}$-thick-PZT films. Maximum $|e_{31,f}|$ of $1.8{\mu}$-thick-PZT films was about $50^{\circ}C/m^2$.

• Korean Chemical Engineering Research
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• v.58 no.2
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• pp.176-183
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• 2020

In this study, synthesis of a hydrogel consisted of a coordination bond network between small organic molecules and transition metals had been carried out. By adding a tackifying material to the gel, the potential of the gel to be used as an adhesive material had been also confirmed. Synthesis of the adhesive had been done with simple mixing of 3 components: tannic acid, transition metal, and polymer. The tannic acid molecule possesses multiple hydroxyl groups that can form coordination bonds with the transition metals and hydrogen bonds with the hydrophilic polymers. Due to the morphology of the metal-organic complex and polymer dispersed in water, the fabricated material exhibited high adhesiveness and cohesiveness. Optimizing the rheological property had been conducted for use in adhesive by the synthesis with varying the transition metal (Fe³⁺, Ti⁴⁺), polymer, and treatment conditions. Rheological measurement results demonstrate the promising potential of the material as a bio-compatible and versatile pressure-sensitive adhesive with both high adhesiveness and cohesiveness.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.24-24
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• 2015

최근 생체재료의 개발이 눈부시게 발전되고 생체적합성이 우수한 표면을 요구함에 따라 생체재료의 표면처리에 대한 연구가 활발히 진행되고 있다. Laser Deposition법은 항공기 부품제조 분야에 주로 사용되고 있으며 최근에 오하이오 주립대 타이타늄합금연구센터를 중심으로 표면처리에 관한 연구가 주로 이루어졌다. 특히 이를 이용하여 치과재료의 표면처리에 응용을 시도하였다. 치과에서 응용될 수 있는 경우는 주로 임플란트는 부분 또는 완전 무치악 환자의 보철수복에 사용되는 보철물의 제작등에 사용될 수 있으며 이중에서도 특히 생체용 임플란트의 표면처리응용으로 임플란트와 조직간의 접합성을 개선하는 표면처리법으로 연구되었다. 임플란트의 성공과 실패는 물성적인 측면에서 임플란트의 형태, 표면거칠기 및 표면처리방법, 초기하중 등에 의하여 좌우되며 임플란트 재료에 작용하는 응력차폐는 생체적합성을 좌우하는 큰 요인이 되고 있다. 이를 위하여 저 탄성계수합금을 설계하지만 하중을 버티는 강도가 낮아지는 단점이 있어 레이저증착법을 이용하여 임플란트재료인 Ti6Al4V합금에 탄성계수가 낮은 Ta, Nb등을 코팅하는 방법을 통하여 이를 해결하고자하는 시도가 이루어지고 있다. 이 방법은 최근의 3D 프린팅의 원리가 되고 있다. 따라서 발표에서는 Laser Deposition방법을 이용하여 치의학분야에서 응용되고 있는 예를 강연하고 응용 가능 분야에 대하여 토론 하고자한다. 또한 펨토레이저를 이용하여 생체합금의 표면처리는 생체활성화를 더욱 증진시키며 이를 위하여 많은 연구 수행되고 있다. 본 발표에서는 매식용 합금 표면에 펨토레이저를 이용하여 텍스춰링하여 세포가 잘 성장 할 수 있는 크기의 조절함으로써 기존의 표면처리와는 다른 효과를 얻을 수 있는 장점을 알아본다. 펨토레이저를 이용하면 여러 가지 형태의 텍스춰링이 가능하며 원형, 사각형등등 자유자제로 형태의 묘사가 가능하고 깊이 또한 쉽게 조절할 수 있는 장점이 있다. 지금까지는 표면 개질에 사용되는 레이저는 주로 Nd:YAG 레이저의 파장을 반으로 줄인 녹색레이저 (${\lambda}=532nm$)를 사용하거나, 자외선파장영역의 레이저를 사용하는 경우가 일반적으로 가장 보편화되었다. 이를 이용하여 제조된 Ti합금에 펨토 초(10-15 second) 펄스폭 대역을 갖는 레이저를 이용하여 나노크기의 미세 요철을 표면에 형성한 후, 나노튜브를 형성하여 그 표면특성의 변화를 알아보고 펨토레이저가 의료분야에 적용되고 있는 예를 살펴보고자 한다.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• The Korean Journal of Quaternary Research
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• v.16 no.1
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• pp.1-16
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• 2002

A total of 4 muddy sediment samples collected from the Central Yellow Sea were analyzed for chemical composition. The results are compared with the previously published Huanghe, Changjiang and Keum River geochemical data in order to understand provenance and sedimentation of fine-grained mud, and the sediment accumulation rates estimated. The sandy sediment facies is distributed in the eastern area, a patch of fine-grained mud exists in the western central prat, and the sandy mud and clay sedimentary facies shot. north to south zonal distribution in the central region. The content of calcium carbonate ranges from 2.8 to 10.5%, and its distributional trends to be more concentrated on the western muddy sediments near toward the China side rather than on the eastern sandy sediments. The accumulation rates obtained using Pb-210 geochronologies for the muddy sediments in the Central Yellow Sea showed ranges from 0.21 to 0.68 cm/yr or 0.176 to 0.714 g/$\textrm{cm}^2$. yr. The sedimentation rate from core CY96010 located in the eastern near side of Shandong Peninsula which is affected by the Huanghe River shows 0.68 cm/yr or 0.714 g/$\textrm{cm}^2$ . yr. The sediment cores CY96008 and CY96002 in the Central Yellow Sea, the estimated of sediment accumulation rates shows 0.21~0.23cm1yr or 0.176~0.220 9/$\textrm{cm}^2$.Vr respectively, which are much lower than above samples. These indicate that the muddy sediments in central area of the Yellow Sea may have received influence of the sediment discharge from the Huanghe River. The concentrations of Ca, Na, Sr, Ho, La, Tb, Ta and Ca/Ti ratio of the muddy sediments in the Central Yellow Sea are higher than those of the Changjiang sediments and lower than those of the Huanghe sediments. However, these element values showed similar concentration patterns than those of the Huanghe sediment. The element contents such as Fe, Ti, Nl, Co, Cr, Cu, Pb, Sc, Ce, Nd, Sm, Eu, Cd and Dy in the study area are higher than those of the Huanghe sediments and lower than the Changjiang River sediments, but these values showed close to resemblance content trends those of the Changjiang sediment. The concentration of Mn, K and Sr in sediments of the study area are similar to those of the Keum River and eastern Yellow Sea sediment. They are rich in Zn, Rb, Cd, U, Cs and Li than those of the other comparison legions. Therefore, the terrigenous materials sources of the muddy sediment in the Central Yellow Sea comes mainly from Huanghe River in the past and present, and also have party derived from the Changjiang and Keum River, while the biological deposit in this area are carried by the Yellow Sea Warm Current.

• Economic and Environmental Geology
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• v.41 no.3
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• pp.299-314
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• 2008

The NE-trending Honam shear zone is a broad, dextral strike-slip fault zone between the southern margin of the Okcheon Belt and the Precambrian Yeongnam Massif in South Korea and is parallel to the trend of Sinian deformation that is conspicuous in Far East Asia. In this paper, we report geochemical and isotopic(Sr and Nd) data of mylonitic quartz-muscovite Precambrian gneisses and surrounding foliated hornblende-biotite granitoids near the Myeongho area in the Yecheon Shear Zone, a representative segment of the Honam Shear Zone. Foliated hornblende-biotite granitoids commonly plot in the granodiorite field($SiO_2=61.9-67.1\;wt%$ and $Na_2O+K_2O=5.21-6.99\;wt%$) on $SiO_2$ vs. $Na_2O+K_2O$ discrimination diagram, whereas quartz-muscovite Precambrian orthogneisses plot in the granite field. The foliated hornblende-biotite granitoids are mostly calcic and calc-alkalic and are dominantly magnesian in a modified alkali-lime index(MALI) and Fe# [$=FeO_{total}(FeO_{total}+MgO)$] versus $SiO_2$ diagrams, which correspond with geochemical characteristics of Cordilleran Mesozoic batholiths. The foliated hornblende-biotite granitoids have molar ratios of $Al_2O_3/(CaO+Na_2O+K_2O)$ ranging from 0.89 to 1.10 and are metaluminous to weakly peraluminous, indicating I type. In contrast, Paleoproterozoic orthogneisses have peraluminous compositions, with molar ratios of $Al_2O_3/(CaO+Na_2O+K_2O)$ ranging from 1.11 to 1.22. On trace element spider diagrams normalized to the primitive mantle, the large ion lithophile element(LILE) enrichments(Rb, Ba, Th and U) and negative Ta-Nb-P-Ti anomalies of foliated hornblende-biotite granitoids and mylonitized quartz-muscovite gneisses in the Yecheon Shear Zone are features common to subduction-related granitoids and are also found in granitoids from a crustal source derived from the arc crust of active continental margin. ${\varepsilon}_{Nd}(T)$ and initial Sr-ratio ratios of foliated hornblende-biotite granitoids with suggest the involvement of upper crust-derived melts in granitoid petrogenesis. Foliated hornblende-biotite granitoids in the study area, together with the Yeongju Batholith, show not changing contents of specific elements(Ti, P, Zr, V and Y) from shear zone to the area near the shear zone. These results suggest that no volume changes and geochemical alterations in fluid-rich foliated hornblende-biotite granitoids may occur during deformation, which mass transfer by fluid flow into the shear zone is equal to the mass transfer out of the shear zone.

• Corrosion Science and Technology
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• v.5 no.2
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• pp.45-51
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• 2006

Properties of the anode for cathodic protection need low overvoltage for oxygen evolution and high corrosion resistance. It is well known that DSA (Dimensionally Stable Anode) has been the best anode ever since. DSA is mainly composed of $RuO_2$, $IrO_2$, $ZrO_2$, $Co_2O_3$, and also $Ta_2O_5$, $TiO_2$, $MnO_2$ are added to DSA for better corrosion resistance. The lifetime of DSA for cathodic protection is also one of the very important factors. $RuO_2$, $IrO_2$, $RhO_2$, $ZrO_2$ are well used for life extension, and many researches are focused on life extension by lowering oxygen evolution potential and minimizing dissolution of oxide coatings. This work aims to evaluate the influence of constituents of MMO and coating cycles and $ZrO_2$ coating on the electrochemical properties and lifetime of DSA electrodes. From the results of lifetime assessment in the anodes coated with single component, $RuO_2$ coating was more effective and showed longer lifetime than $IrO_2$ coating. Also, an increased coating cycle and an electrochemically coated $ZrO_2$ could enhance the lifetime of a DSA.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.72-76
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• 2003

The $Sr_{0.7}Bi_{2.6}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode(Pt/$TiO_2/SiO_2$/Si) using RF magnetron sputtering method. The structural and electrical properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealed atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grains largely grew in oxygen annealing atmosphere. The maximum remanent polarization and the coercive electric field in oxygen annealing atmosphere are $12.40[{\mu}C/cm^2]$ and 30[kV/cm] respectively. The fatigue characteristics of SBT capacitors did not change up to $10^{10}$ switching cycles.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.447-449
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• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.