• 제목/요약/키워드: TVS(Triangular Voltage Sweep) method

검색결과 2건 처리시간 0.015초

TVS법을 이용한 강유전체 박막내에서의 mobile charge밀도 산출 (Calculation of mobile charge density in ferroelectric films using TVS(Triangular Voltage)

  • 김용성;정순원;김채규;김진규;이남열;김광호;유병곤;이원재;유인규
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
    • /
    • pp.433-436
    • /
    • 1999
  • In this paper we applied TVS(Triangular Voltage Sweep) method to calculate the mobile ionic charge densities in some ferroelectric thin films. During the measurement, the temperature of specimens were maintained at 20$0^{\circ}C$. By this method, the amount of mobile ionic charge Q$_{m}$ and mobile ionic charge density N$_{m}$ of a MFIS structure were calculated 3.5 [pC] and about 4.3$\times$10$^{11}$ [ions/cm$^2$], respectively. In order to successful TVS measurement, the gate leakage current density of films must be low 10$^{-9}$ (A/cm$^2$) order.der.

  • PDF

삼각전압소인법을 이용한 강유전체 박막내에서의 분극 및 유동이온에 대한 평가 (Evaluation of polarization and mobile charge in ferroelectric films using TVS(Triangular Voltage Sweep) method)

  • 김용성;이남열;정순원;김진규;정상현;김광호;유병곤;이원재;유인구
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
    • /
    • pp.86-89
    • /
    • 2000
  • The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This method yields a polarizable and an ionic displacement current peaks whose areas are proportional to the total polarization reversal charge and the total moble ionic space charge, respectively. The calculated polarization and the mobile charge density were 0.42 [$\mu$C/$\textrm{cm}^2$] and 5.5$\times$10$^{11}$ (ions/$\textrm{cm}^2$) in the SBT film of MFIS structure measured at 25$0^{\circ}C$, and 1.4 [$\mu$C/$\textrm{cm}^2$] in the LiNbO$_3$ film of MFS structure measured at 30$0^{\circ}C$, respectively.

  • PDF