• 제목/요약/키워드: TFT (thin-film transistor)

검색결과 502건 처리시간 0.022초

Electrical stabilities of half-Corbino thin-film transistors with different gate geometries

  • Jung, Hyun-Seung;Choi, Keun-Yeong;Lee, Ho-Jin
    • Journal of Information Display
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    • 제13권1호
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    • pp.51-54
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    • 2012
  • In this study, the bias-temperature stress and current-temperature stress induced by the electrical stabilities of half-Corbino hydrogenated-amorphous-silicon (a-Si:H) thin-film transistors (TFTs) with different gate electrode geometries fabricated on the same substrate were examined. The influence of the gate pattern on the threshold voltage shift of the half-Corbino a-Si:H TFTs is discussed in this paper. The results indicate that the half-Corbino a-Si:H TFT with a patterned gate electrode has enhanced power efficiency and improved aperture ratio when compared with the half-Corbino a-Si:H TFT with an unpatterned gate electrode and the same source/drain electrode geometry.

Mg0.1Zn0.9O/ZnO 활성층 구조의 박막트랜지스터 연구 (A Study of Thin-Film Transistor with Mg0.1Zn0.9O/ZnO Active Structure)

  • 이종훈;김홍승;장낙원;윤영
    • 한국전기전자재료학회논문지
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    • 제27권7호
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    • pp.472-476
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    • 2014
  • We report the characteristics of thin-film transistor (TFT) to make the bi-channel structure with stacked $Mg_{0.1}Zn_{0.9}O$ (Mg= 10 at.%) and ZnO. The ZnO and $Mg_{0.1}ZnO_{0.9}O$ thin films were deposited by radio frequency (RF) co-sputter system onto the thermally oxidized silicon substrate. A total thickness of active layer was 50 nm. Firstly, the ZnO thin films were deposited to control the thickness from 5 nm to 30 nm. Sequentially, the $Mg_{0.1}ZnO_{0.9}O$ thin films were deposited to change from 45 nm to 20 nm. The bi-layer TFT shows more improved properties than the single layer TFT. The field effect mobility and subthreshold slope for $Mg_{0.1}ZnO_{0.9}O$/ZnO-TFT are $7.40cm^2V^{-1}s^{-1}$ and 0.24 V/decade at the ZnO thickness of 10 nm, respectively.

DUV와 열의 하이브리드 저온 용액공정에 의해 형성된 Al2O3 게이트 절연막 연구 (Study of Low Temperature Solution-Processed Al2O3 Gate Insulator by DUV and Thermal Hybrid Treatment)

  • 장현규;김원근;오민석;권순형
    • 한국전기전자재료학회논문지
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    • 제33권4호
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    • pp.286-290
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    • 2020
  • The formation of inorganic thin films in low-temperature solution processes is necessary for a wide range of commercial applications of organic electronic devices. Aluminum oxide thin films can be utilized as barrier films that prevent the deterioration of an electronic device due to moisture and oxygen in the air. In addition, they can be used as the gate insulating layers of a thin film transistor. In this study, aluminum oxide thin film were formed using two methods simultaneously, a thermal process and the DUV process, and the properties of the thin films were compared. The result of converting aluminum nitrate hydrate to aluminum oxide through a hybrid process using a thermal treatment and DUV was confirmed by XPS measurements. A film-based a-IGZO TFT was fabricated using the formed inorganic thin film as a gate insulating film to confirm its properties.

Molybdenum 게이트를 적용한 저온 SLS 다결정 TFT′s 소자 제작과 특성분석에 관한 연구 (A Study on Low Temperature Sequential Lateral Solidification(SLS) Poly-Si Thin Film Transistors(TFT′s) with Molybdenum Gate)

  • 고영운;박정호;김동환;박원규
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권6호
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    • pp.235-240
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    • 2003
  • In this paper, we present the fabrication and the characteristic analysis of sequential lateral solidification(SLS) poly-Si thin film transistors(TFT's) with molybdenum gate for active matrix liquid displays (AMLCD's) pixel controlling devices. The molybdenum gate is applied for the purpose of low temperature processing. The maximum processing temperature is 55$0^{\circ}C$ at the dopant thermal annealing step. The SLS processed poly-Si film which is reduced grain and grain boundary effect, is applied for the purpose of electrical characteristics improvements of poly-Si TFT's. The fabricated low temperature SLS poly-Si TFT's had a varying the channel length and width from 10${\mu}{\textrm}{m}$ to 2${\mu}{\textrm}{m}$. And to analyze these devices, extract electrical characteristic parameters (field effect mobility, threshold voltage, subthreshold slope, on off current etc) from current-voltage transfer characteristics curve. The extract electrical characteristic of fabricated low temperature SLS poly-Si TFT's showed the mobility of 100~400cm$^2$/Vs, the off current of about 100pA, and the on/off current ratio of about $10^7$. Also, we observed that the change of grain boundary according to varying channel length is dominant for the change of electrical characteristics more than the change of grain boundary according to varying channel width. Hereby, we comprehend well the characteristics of SLS processed poly-Si TFT's witch is recrystallized to channel length direction.

Applying Theory of Constraint on Logistic Management in Large Scale Construction Sites - A Case Study of Steel Bar in TFT-LCD Factory Build-Up

  • Huang, Chih-Yao;Chen, Ching-Piao;Li, Rong-Kwei;Tsai, Chih-Hung
    • International Journal of Quality Innovation
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    • 제9권1호
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    • pp.68-93
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    • 2008
  • The steel bars account for a high percentage of material costs for the current construction projects. At the present time, most of the construction projects for the factories of thin-film transistor liquid crystal display (TFT-LCD) complete the transactions of steel bars when the suppliers ship the steel bars to the temporary storage/processing sites. This paper applies the buy-in concept in the Theory of Constraint (TOC) on the supply chain of steel bars. In this study, suppliers are required to establish warehouses at the construction sites and complete the transactions when the formed and processed steel bars are shipped into the factory sites. The aim is to find a win-win solution to meet with the expectations from constructors as they hope that there is no need to build up inventories but supply is ready at any time. Also, this paper compares and analyzes the traditional supply/inventory model of steel bars and the Demand-Pull (D-P) model under the TOC framework. It is proved that Vendor Management Inventory (VMI) in the D-P model is able to more effectively manage steel bars as a material.

트리즈 기법을 활용한 삼성전자의 TFT-LCD 기술혁신 사례연구 (Case study of SAMSUNG TFT-LCD Technology Innovation using TRIZ method)

  • 반병섭
    • 한국산학기술학회논문지
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    • 제15권6호
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    • pp.3429-3434
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    • 2014
  • TFT-LCD 패널 제조 산업에서 삼성전자는 후발기업으로써 선발기업인 일본의 샤프를 추월하여 선도하고 있다. 트리즈 시스템 분석을 활용하여 디스플레이 산업은 노트, 모니터, TV & 모바일 제품 시장으로 변화를 하였으며 시장(고객)의 요구속성도 변화를 함을 제시하였다. 또한 삼성의 TFT-LCD 기술 중 빠른 응답 기술 혁신 사례를 제시하였다. 예를 들면, 응답속도 개선을 위해 기존 사용하고 있는 액정 혼합물에 트리즈의 모순성, 물질-장 방법 등을 활용하여 개발된 고복굴절률 액정물질을 첨가하여 광시야 각, 빠른응답 특성을 갖는 신규 액정 혼합물을 개발하였다. 새로운 액정혼합물의 응답속도는 60%정도로 단축 개선되었다(기존 액정 사용 시 16 ms, 새로운 액정혼합물 사용 시 10ms).

나노결정 InGaZnO 산화물 박막트랜지스터와 비결정 InGaZnO 산화물 박막트랜지스터의 소자 신뢰성에 관한 비교 연구 (Comparison of Stability on the Nano-crystalline Embedded InGaZnO and Amorphous InGaZnO Oxide Thin-film Transistors)

  • 신현수;안병두;임유승;김현재
    • 한국전기전자재료학회논문지
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    • 제24권6호
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    • pp.473-479
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    • 2011
  • In this paper, we have compared amorphous InGaZnO (a-IGZO) thin-film transistor (TFT) with the nano-crystalline embedded-IGZO ($N_c$-embedded-IGZO) TFT fabricated by solid-phase crystallization (SPC) technique. The field effect mobility (${\mu}_{FE}$) of $N_c$-embedded-IGZO TFT was 2.37 $cm^2/Vs$ and the subthreshold slope (S-factor) was 0.83 V/decade, which showed lower performance than those of a-IGZO TFT (${\mu}_{FE}$ of a-IGZO was 9.67 $cm^2/Vs$ and S-factor was 0.19 V/decade). This results originated from generation of oxygen vacancies in oxide semiconductor and interface between gate insulator and semiconductor due to high temperature annealing process. However, the threshold voltage shift (${\Delta}V_{TH}$) of $N_c$-embedded-IGZO TFT was 0.5 V, which showed 1 V less shift than that of a-IGZO TFT under constant current stress during $10^5$ s. This was because there were additionally less increase of interface trap charges in Nc-embedded-IGZO TFT than a-IGZO TFT.

3.5-Inch QCIF AMOLED Panels with Ultra-low-Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate

  • Kim, Yong-Hae;Chung, Choong-Heui;Moon, Jae-Hyun;Lee, Su-Jae;Kim, Gi-Heon;Song, Yoon-Ho
    • ETRI Journal
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    • 제30권2호
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    • pp.308-314
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    • 2008
  • In this paper, we describe the fabrication of 3.5-inch QCIF active matrix organic light emitting display (AMOLED) panels driven by thin film transistors, which are produced by an ultra-low-temperature polycrystalline silicon process on plastic substrates. The over all processing scheme and technical details are discussed from the viewpoint of mechanical stability and display performance. New ideas, such as a new triple-layered metal gate structure to lower leakage current and organic layers for electrical passivation and stress reduction are highlighted. The operation of a 3.5-inch QCIF AMOLED is also demonstrated.

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비정질실리콘 박막트랜지스터의 캐패시턴스특성 (Capacitance Characteristics of a-Si:H Thin Film Transistor)

  • 정용호;이우선;김남오;이이수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.118-121
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    • 1995
  • Fabrication and a new analytical expression for the capacitance characteristics of hydrogenerated amorphous silicon thin film transistors(a-Si:H TFTs) is presented and experimentally verified. The results show that the experimental capacitance characteristics are easily measeured. Measured transfer and DC output characteristic curves of a-Si:H TFT are similar to those of the standard MOSFET-IC. The capacitances on bias voltages are in good agreement with experimental data. This capacitance characteristics is suitable for incorporation into a circuit simulator and can be used for computer-aided design of a-Si thin film transistor integrated circuits.

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Effect of the Hydrophobicity of Hybrid Gate Dielectrics on a ZnO Thin Film Transistor

  • Choi, Woon-Seop;Kim, Se-Hyun
    • Transactions on Electrical and Electronic Materials
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    • 제11권6호
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    • pp.257-260
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    • 2010
  • Zinc oxide (ZnO) bottom-contact thin-film transistors (TFTs) were prepared by the use of injector type atomic layer deposition. Two hybrid gate oxide systems of different polarity polymers with silicon oxide were examined with the aim of improving the properties of the transistors. The mobility and threshold voltage of a ZnO TFT with a poly(4-dimethylsilyl styrene) (Si-PS)/silicon oxide hybrid gate dielectric had values of 0.41 $cm^2/Vs$ and 24.4 V, and for polyimide/silicon oxide these values were 0.41 $cm^2/Vs$ and 24.4 V, respectively. The good hysteresis property was obtained with the dielectric of hydrophobicity. The solid output saturation behavior of ZnO TFTs was demonstrated with a $10^6$ on-off ratio.