• Journal of ILASS-Korea
• /
• v.8 no.4
• /
• pp.39-45
• /
• 2003

The Objective of this study is to investigate the effect of internal swiller angle and swirl chamber aspect ratio of nozzle on spray characteristics for application of spray system in micro fabrication process. The macro-spray characterictics such as the spray angle and breakup process were obtained by photographs illustrating atomization. The micro-spray characteristics such as droplet size and axial velocity were measured by using PDA with swirler angle and swirl chamber aspect ratio. The swiller angles were $13.5^{\circ},\;27^{\circ},\;and\;40.5^{\circ}$. The swirl chamber aspect ratios were 1.2, 1.6, and 2.0. It was found that the smaller swirl chamber aspect ratio was, the larger axial velocity and drop size were.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.28 no.11
• /
• pp.1459-1466
• /
• 2004

The purpose of this study is to investigate the effect of swirler angle and the aspect ratio of swirl chamber of nozzle on the characteristics of single and twin spray. The characteristics of sprays have been investigated by measuring the spray angle, droplet size and velocity. Visualization of spray was conducted to obtain the spray angle and breakup process. The spray characteristics such as droplet size and velocity were measured by Phase Doppler Anemometry(PDA). It was found that the spray angle was increased with increasing the swirler angle. For both sprays, the axial velocity and SMD were decreased with increasing the swirler angle. It was also shown that the axial velocity and SMD were decreased with increasing the aspect ratio of swirl chamber, but for the twin spray, the axial velocity and SMD were not influenced significantly by the changing the aspect ratio of swirl chamber. The effect of swirler angle on the spray characteristics was greater than the aspect ratio of swirl chamber for single spray. The nozzle pitch was one of the important factors affecting the spray characteristics of twin spray.

• Journal of ILASS-Korea
• /
• v.10 no.4
• /
• pp.1-7
• /
• 2005

The purpose of this study is to investigate the effect of swirler vane angle and the aspect ratio of swirl chamber of nozzle on the characteristics of single spray. The characteristics of sprat's have been investigated by measuring the spray angle, droplet size and velocity Visualization of spray was conducted to obtain the spray angle and breakup process. The spray characteristics such as droplet size and velocity were measured by Phase Doppler Anemometry(PDA). It was found that the spray angle was increased with increasing the swirler angle. For both sprays, the axial velocity and SMD were decreased with increasing the swirler vane angle. It was also shown that the axial velocity and SMD were decreased with increasing the aspect ratio of swirl chamber The effect of vane angle un the spray characteristics was greater than the aspect ratio of swirl chamber for single spray.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.28 no.7
• /
• pp.842-849
• /
• 2004

The objective of this work is to study the improvement of etching characteristics in wet etching process. The etching characteristics such as etching factor were investigated under different etching conditions and compared with the spray characteristics. The spray characteristics of nozzle with different geometries such as swirler angle and swirl chamber aspect ratio were analyzed by using PDA system to predict the effect of the spray characteristics on the etching factor. The swirler angles were 49,5$^{\circ}$, 63$^{\circ}$ and 76.5$^{\circ}$. The swirl chamber aspect ratios were 1.2, 1.6 and 2.0. It was found that the etching factor was correlated with the spray characteristics and also the smaller swiller angle, the larger etching factor became.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.1522-1527
• /
• 2004

The purpose of this study is to investigate the effect of swirler angle and swirl chamber aspect ration of nozzle on the characteristics of single and twin spray. The performances of nozzle has been investigated by measurements of spray angle, droplet size, velocity and Weber number at a water pressure 0.4MHz. Visualization of spray was conducted to obtain the spray angle and breakup process. The spray characteristics such as droplet size and velocity were measured by Phase Doppler Anemometry(PDA). It was found that the smaller swirler angle, the larger axial velocity became. It was also shown that the larger aspect ratio, the smaller droplet diameter became.