• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.4
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• pp.135-140
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• 2005

Thermal-fluid analysis was performed to understand the thermal behavior in the horizontal CVD reactor thereby to design a susceptor which has a uniform deposition rate during silicon EPI growing. Four different types of susceptor designs, standard (no hole susceptor), hole $\sharp$1 (240 mm), hole $\sharp$2 (150 mm) and hole $\sharp$3 (60 mm), were simulated by CFD (Computational Fluid Dynamics) tool. Temperature, gas flow, deposition rate and growth rate were calculated and analyzed. The degree of flatness of EPI wafer loaded on the susceptor was computed in terms of silicon growth rate. The simulation results show that the temperature and thermal distribution in the wafer are greatly dependent on inner diameter of hole susceptor and demonstrate that the introduction of hole in the susceptor can degrade wafer flatness. Maximum temperature difference appeared around holes. As the diameter of the hole decreases, flatness of the wafer becomes poor. Among the threes types of susceptors with the hole, optimal design which resulted a good uniform flatness ($5\%$) was obtained when using hole $\sharp$1.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.10
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• pp.947-954
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• 2014

Performance of next generation susceptor is affected by temperature uniformity in order to produce reliably large-sized flat panel display. In this paper, we propose a learning estimation model of susceptor to predict and appropriately assess the temperature uniformity. Artificial Neural Networks (ANNs) and Support Vector Machines (SVMs) are compared for the suitability of the learning estimation model. It is proved that SVMs provides more suitable verification of uniformity modeling than ANNs during each stage of temperature variations. Practical procedure for uniformity estimation of susceptor temperature was developed using the SVMs prediction algorithm.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.26 no.3
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• pp.133-138
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• 2020

As HMR (home meal replacement) food market grows rapidly, a new packaging with more HMR specialized functions is highly required to promote consumers' convenience. A susceptor is defined as a material generating heat by absorbing electromagnetic energy such typically as radiofrequency or microwave radiation. In microwave cooking, susceptors are made of conductive metal thin film deposited on paper or plastic sheet and have generally been used to help crispen or brown foods by converting microwave energy into heat. This mini review article deals with current status of microwave susceptor packaging including commercial products, technical theory, types of susceptor and a test method for heating performance.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.6
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• pp.3714-3721
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• 2015

Although sheath-type heating line is generally used for susceptor heater, performance deterioration problems in temperature uniformity occurs in the case of large scale and high temperature condition. We developed new design and prototype of the susceptor using sheet metal to provide performance improvement in temperature uniformity. Temperature uniformity below 1.4% in the surface temperature condition of $450^{\circ}C$ was verified in the susceptor prototype. Also we developed Kernel regression algorithm to estimate measured temperature using temperature learning data. The reliability of the measured temperature uniformity was confirmed by comparative analysis between predicted data and measured data.

• Journal of Electrochemical Science and Technology
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• v.13 no.3
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• pp.390-397
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• 2022

The use of microwaves as the energy source for synthesis and sintering of ceramics offers substantial advantages compared to conventional gas-fired and electric resistance furnaces. Benefits include much shorter processing times and reaching the sintering temperature more quickly, resulting in superior final product quality. Most oxide ceramics poorly interact with microwave irradiation at low temperatures; thus, a more complex setup including a susceptor is needed, which makes the whole process very complicated. This investigation pursued a new approach, which enabled us to use microwave irradiation directly in poorly coupled oxides. In many solid-state electrochemical devices, the support is either metal or can be reduced to metal. Metal powders in the support can act as an internal susceptor and heat the entire cell. Then sufficient interaction of microwave irradiation and ceramic material can occur as the sample temperature increases. This microwave heating and exothermic reaction of oxidation of the support can sinter the ceramic very efficiently without any external susceptor. In this study, yttria stabilized zirconia (YSZ) and a Ni-YSZ cermet support were used as an example. The cermet was used as the support, and a YSZ electrolyte was coated and sintered directly using microwave irradiation without the use of any susceptor. The results were compared to a similar cell prepared using a conventional electric furnace. The leakage test and full cell power measurement results revealed a fully leak-free electrolyte. Scanning electron microscopy and density measurements show that microwave sintered samples have lower open porosity in the electrode support than conventional heat treatment. This technique offers an efficient way to directly use microwave irradiation to sinter thin film ceramics without a susceptor.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1475-1480
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• 2004

Plasma Enhanced Chemical Vapor Deposition (PECVD) process uses unique property of plasma to modify surfaces and to achieve the high deposition rates. In this study, a vertical thermal RF-PECVD (Radio Frequency-PECVD) reactor is modeled to investigate thermal flow and the deposition rates with various shapes of the showerhead. The showerhead in the CVD reactor has the shape of a ring and gases are injected in parallel with the susceptor, which is a rotating disk. In order to achieve the high deposition rates, we have simulated the thermal flow fields in the reactor with several showerhead models. Especially the effects of the number of injection holes and the rotating speed of the susceptor are studied. Using a commercial code, CFDACE, which uses FVM (Finite Volume Method) and SIMPLE algorithm, governing equations have been solved for the pressure, mass-flow rates and temperature distributions in the CVD reactor. With the help of the Nusselt number and Sherwood number, the heat and mass transfers on the susceptor are investigated. In order to characteristics of measure the flatness of the layer, furthermore, the relative growth rate (RGR) is considered.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.67-72
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• 2003

Numerical calculation has been performed to investigate the effect of inlet configuration on the growth rate of GaN layer on the heated susceptor. The conventional single inlet, where the gas is mixed by force in the inlet, is compared with separated flow inlet. Two-parallel gas flow $H_{2}$ and $NH_{3}$ are separated by a plate with finite length which are also parallel to the susceptor. The effect of separated plate length, carrier gas and flow rate of each precursor on the mixing of reactant gases and growth rate were investigated. Furthermore the three dimensional model is employed to predict the transverse variation of growth rate.

• Korean Chemical Engineering Research
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• v.57 no.4
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• pp.553-558
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• 2019

In present study, the cylindrical susceptor by the slip casting method was designed to apply high-temperature induction heating by using $(Mo,W)Si_2$ ceramics. $MoSi_2$-based materials were synthesized by SHS (Self-propagating High-temperature Synthesis) method. The phase and crystal structure of $MoSi_2$-based materials were confirmed by XRD analysis. The shape of cylindrical mold was synthesized for various thickness by using the slip casting method. Finally, the susceptor for induction heating was processed by sintering and heat treatment to form $SiO_2$ layer, which was confirmed on the surface of susceptor by SEM/EDS analysis. To evaluate the heating performance of $(Mo,W)Si_2$ cylinder susceptor, we measured the maximum surface temperature and heating rate in comparison with the rod heating element under constantly applied power. The induction heating of the $(Mo,W)Si_2$ cylinder showed excellent heating performance, reaches the maximum temperature of $1457^{\circ}C$, with the average heating rate of $19^{\circ}C/s$ at 2 kW

• Journal of the Korean Society for Precision Engineering
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• v.19 no.8
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• pp.92-99
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• 2002

This work investigated the optimal condition for an uniform deposition growth rate in the vertical cylindric CVD chamber. Heat transfer, surface chemical reaction and mass diffusion in the flow field of CVD chamber h,id been computed using Fluent v5.3 code. A SIMPLE based finite Volume Method (FVM) was adopted to solve the fully elliptic equations for momentum, temperature and concentration of a chemical species. The numerical analysis results show good agreements with the measurements obtained by N. Yoshikawa. The results obtained by the numerical analysis showed that the film growth rate in the center of a susceptor is increasing, as the inner flow approaches to the forced convection. To the contrast, as it approaches to the natural convection, that in the outside of a susceptor is increasing. As the Reynolds number increases, the uniformity may not hold due to the larger temperature gradient at a susceptor surface. Therefore, when the temperature gradient on the surface of a susceptor is zero, the film growth rate becomes uniform on most surface.

• Journal of Aerospace System Engineering
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• v.16 no.1
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• pp.12-16
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• 2022

Currently, Induction welding is attracting attention as a non-contact, clean and fast welding process. However, since thermoplastic resins are not affected by electromagnetic fields, induction welding requires a heating element called a susceptor. Researches are being conducted with the aim of achieving high-quality bonding, however, the factor of a heating element is an issue, hence the need to set a standard. Specimen fabrication and testing are conducted according to ASTM D5868. In this study, we propose that the evaluation criteria be judged on the basis of three factors; the condition of the welded joint surface, void content, and lap shear strength. Since the adhesive surface to be welded melts and solidifies as it cools, rapid temperature changes can generate pores. In addition, if the heating is not uniform, it is difficult to expect the desire performance. Using PA6 (CF 30%) thermoplastic, susceptor fabrication, induction welding and performance verification were conducted.