• Title/Summary/Keyword: Surface treatment patterns

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Heat Treatment of Carbonized Photoresist Mask with Ammonia for Epitaxial Lateral Overgrowth of a-plane GaN on R-plane Sapphire

  • Kim, Dae-sik;Kwon, Jun-hyuck;Jhin, Junggeun;Byun, Dongjin
    • Korean Journal of Materials Research
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    • v.28 no.4
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    • pp.208-213
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    • 2018
  • Epitaxial ($11{\bar{2}}0$) a-plane GaN films were grown on a ($1{\bar{1}}02$) R-plane sapphire substrate with photoresist (PR) masks using metal organic chemical vapor deposition (MOCVD). The PR mask with striped patterns was prepared using an ex-situ lithography process, whereas carbonization and heat treatment of the PR mask were carried out using an in-situ MOCVD. The heat treatment of the PR mask was continuously conducted in ambient $H_2/NH_3$ mixture gas at $1140^{\circ}C$ after carbonization by the pyrolysis in ambient $H_2$ at $1100^{\circ}C$. As the time of the heat treatment progressed, the striped patterns of the carbonized PR mask shrank. The heat treatment of the carbonized PR mask facilitated epitaxial lateral overgrowth (ELO) of a-plane GaN films without carbon contamination on the R-plane sapphire substrate. Thhe surface morphology of a-plane GaN films was investigated by scanning electron microscopy and atomic force microscopy. The structural characteristics of a-plane GaN films on an R-plane sapphire substrate were evaluated by ${\omega}-2{\theta}$ high-resolution X-ray diffraction. The a-plane GaN films were characterized by X-ray photoelectron spectroscopy (XPS) to determine carbon contamination from carbonized PR masks in the GaN film bulk. After $Ar^+$ ion etching, XPS spectra indicated that carbon contamination exists only in the surface region. Finally, the heat treatment of carbonized PR masks was used to grow high-quality a-plane GaN films without carbon contamination. This approach showed the promising potential of the ELO process by using a PR mask.

Effect of Laser Processing Patterns on the Bonding Interface Quality during Laser Sintering of Magnesium Alloys with Zirconia (마그네슘 합금 표면의 지르코니아 분말 레이저 소결과정에서 조사 패턴이 접합 계면 품질에 미치는 영향)

  • Yoon, Sangwoo;Kim, Joohan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.2
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    • pp.51-57
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    • 2021
  • The quality of the ceramic sintered coating on a metal surface through laser surface treatment is affected by the laser irradiation pattern. Depending on the laser irradiation pattern, the amount of residual stress and heat applied or accumulated on the surface increases or decreases, affecting the thickness attained in the ceramic sintering area. When the heat energy accumulated in the sintering area is high, the ceramic and the metal alloy melt and sufficiently mix to form a homogeneous and thick bonding interface. In this study, the thermal energy accumulation in the region sintered with zirconia was controlled using four types of laser processing patterns. The thickness of the diffusion region is analyzed by laser-induced breakdown spectroscopy of Mg-ZrO2 generated by laser sintering zirconia powder on the magnesium alloy surface. On the basis of the analysis of the Mg and Zr present in the sintered region through LIBS, the effect of the irradiation pattern on the sintering quality is confirmed by comparing and analyzing the heat and mass transfer tendency of the diffusion layer and the degree of diffusion according to the irradiation pattern. The derived diffusion coefficients differed by up to 9.8 times for each laser scanning pattern.

Fabrication of Mo Nano Patterns Using Nano Transfer Printing with Poly Vinyl Alcohol Mold (Poly Vinyl Alcohol 몰드를 이용한 Nano Transfer Printing 기술 및 이를 이용한 Mo 나노 패턴 제작 기술)

  • Yang, Ki-Yeon;Yoon, Kyung-Min;Han, Kang-Soo;Byun, Kyung-Jae;Lee, Heon
    • Korean Journal of Materials Research
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    • v.19 no.4
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    • pp.224-227
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    • 2009
  • Nanofabrication is an essential process throughout industry. Technologies that produce general nanofabrication, such as e-beam lithography, dip-pen lithography, DUV lithography, immersion lithography, and laser interference lithography, have drawbacks including complicated processes, low throughput, and high costs, whereas nano-transfer printing (nTP) is inexpensive, simple, and can produce patterns on non-plane substrates and multilayer structures. In general nTP, the coherency of gold-deposited stamps is strengthened by using SAM treatment on substrates, so the gold patterns are transferred from stamps to substrates. However, it is hard to apply to transfer other metallic materials, and the existing nTP process requires a complicated surface treatment. Therefore, it is necessary to simplify the nTP technology to obtain an easy and simple method for fabricating metal patterns. In this paper, asnTP process with poly vinyl alcohol (PVA) mold was proposed without any chemical treatment. At first, a PVA mold was duplicated from the master mold. Then, a Mo layer, with a thickness of 20 nm, was deposited on the PVA mold. The Mo deposited PVA mold was put on the Si wafer substrate, and nTP process progressed. After the nTP process, the PVA mold was removed using DI water, and transferred Mo nano patterns were characterized by a Scanning electron micrograph (SEM) and Energy Dispersive spectroscopy (EDS).

Ceramic Ink-jet Printing on Glass Substrate Using Oleophobic Surface Treatment

  • Lee, Ji-Hyeon;Hwang, Hae-Jin;Kim, Jin-Ho;Hwang, Kwang-Taek;Han, Kyu-Sung
    • Journal of the Korean Ceramic Society
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    • v.53 no.1
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    • pp.75-80
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    • 2016
  • Ink-jet printing has become a widespread technology with the society's increase in aesthetic awareness. Especially, ink-jet printing using glazed ceramic ink can offer huge advantages including high quality decoration, continuous processing, glaze patterning, and direct reproduction of high resolution images. Recently, ceramic ink-jet printing has been rapidly introduced to decorate the porcelain product and the ceramic tiles. In this study, we provide an effective method to apply ceramic ink-jet decorations on the glass substrates using a oleophobic coating with perfluorooctyl trichlorosilane. The ink-jet printed patterns were much clearer on the oleophobically coated glass surface than the bare glass surface. The contact angle of the ceramic ink was maximized to the value of $64.0^{\circ}$ on the glass surface, when it was treated with 1 vol% PFTS solution for 1 min. The effects of the printing conditions and firing process on the ink-jet printed patterns on the oleophobically coated glass were also investigated.

Nano-Structures on Polymers Evolved by Ion Beam/Plasma

  • Moon, Myoung-Woon;Lee, Kwang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.76-76
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    • 2012
  • Surface engineering of polymers has a broad array of scientific and technological applications that range from tissue engineering, regenerative medicine, microfluidics and novel lab on chip devices to building mechanical memories, stretchable electronics, and devising tunable surface adhesion for robotics. Recent advancements in the field of nanotechnology have provided robust techniques for controlled surface modification of polymers and creation of structural features on the polymeric surface at submicron scale. We have recently demonstrated techniques for controlled surfaces of soft and relatively hard polymers using ion beam irradiation and plasma treatment, which allows the fabrication of nanoscale surface features such as wrinkles, ripples, holes, and hairs with respect to its polymers. In this talk, we discuss the underlying mechanisms of formation of these structural features. This includes the change in the chemical composition of the surface layer of the polymers due to ion beam irradiation or plasma treatment and the instability and mechanics of the skin-substrate system. Using ion beam or plasma irradiation on polymers, we introduce a simple method for fabrication of one-dimensional, two-dimensional and nested hierarchical structural patterns on polymeric surfaces on various polymers such as polypropylene (PP), polyethylene (PE), poly (methyl methacrylate) PMMA, and polydimethylsiloxane (PDMS).

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Laser Copper Patterning by wettability improvement of Silicon (레이저에 의한 실리콘 표면의 습윤성 향상과 구리 패터닝)

  • Kim, Dong-Yung;Lee, Kyoung-Cheol;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.1080-1083
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    • 2002
  • In this paper, we have studied with regard to the use of lasers for modifying the surface properties of silicon in order to improve it's wettability and adhesion characteristics. Using an Nd:YAG pulse laser, the wettability and adhesion characteristics of silicon surface have been developed by an Nd:YAG pulse laser. It was found that the laser treatment of silicon surfaces modified the surface energy. In the result of wetting experiments, by the sessile drop technique using the distilled water, wetting characteristic of silicon after the laser irradiation shows a decreased value of the contact angle. In case of the laser treated silicon surface, laser direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films$(Cu(HCOO)_2{\cdot}4H_2Q)$, using a focused $Ar^+$ laser beam$(\lambda=514.5nm)$ on the silicon substrates. The deposited patterns were measured by energy dispersive X-ray(EDX), Scanning Electron Microscopy(SEM) and surface profiler($\alpha$-step) to examine the cross section of deposited copper lines and linewidth.

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Development of Hybrid Machining System and Hybrid Process Technology for Ultra-fine Planing and Micro Punching (초정밀 평삭가공과 마이크로 펀칭가공을 위한 하이브리드 가공장비 및 공정기술 개발)

  • Kim, Han-Hee;Jeon, Eun-Chae;Cha, Jin-Ho;Lee, Je-Ryung;Kim, Chang-Eui;Choi, Hwan-Jin;Je, Tae-Jin;Choi, Doo-Sun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.6
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    • pp.10-16
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    • 2013
  • Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

COMPARISON OF THE SHEAR BOND STRENGTH OF GLASS IONOMER CEMENTS AND COMPOMER ACCORDING TO DENTIN SURFACE TREATMENT (상아질표면처리에 따른 글래스아이오노머 및 Compomer의 전단결합강도의 비교)

  • Jeong, Hyun-Suk;Lee, Hea-Joo;Hur, Buck
    • Restorative Dentistry and Endodontics
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    • v.24 no.2
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    • pp.416-425
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    • 1999
  • The purpose of this study was to evaluate shear bond strength of glass ionomer cements and compomer according to dentin surface treatment method. The materials used in this study were dentin conditioner and cavity conditioner for dentin treatment: Ketacfil, Fuji II LC, and Dyract for restoration. In this study, 90 sound bovine teeth were selected and then the teeth were embeded in improved stone and were grounded with 400 to 600 grit silicon carbide paper to create a flat dentin surfaces. The teeth were divided into nine groups as follows ; Group 1A : Samples bonded to dentin surface with Ketacfil after no treatment Group 1B : Samples bonded to dentin surface with Ketacfil after applicating dentin conditioner Group 1C : Samples bonded to dentin surface with Ketacfil after applicating cavity conditioner Group 2A : Samples bonded to dentin surface with Fuji II LC after no treatment Group 2B : Samples bonded to dentin surface with Fuji II LC after applicating dentin conditioner Group 2C : Samples bonded to dentin surface with Fuji II LC after applicating cavity conditioner Group 3A : Samples bonded to dentin surface with Dyract after no treatment Group 3B : Samples bonded to dentin surface with Dyract after applicating dentin conditioner Group 3C : Samples bonded to dentin surface with Dyract after applicating cavity conditioner Treated dentin surfaces were observed under SEM. After filling of each materials, shear bond strenth was evaluated and then debonded surfaces were observed under SEM. The following results were obtained; 1. The shear bond strengths obtained were decreased as Fuji II LC, Dyract, Ketacfil in that order and there was statistically significant difference(p<0.05). 2. About Group 1. the shear bond strengths were decreased as 1C, 1B and 1A in that order. But there was no significant difference between group 1B and 1C (p<0.05). 3. About Group 2, the shear bond strengths were decreased as group 2B, 2A and 2C in that order. And there was significant difference between group 2B and 2C (p<0.05). 4. About Group 3, the shear bond strengths were decreased as group 3A, 3C and 3B in that order. And there was signicant difference between group 3A and 3B (p<0.05). 5. As a result of observation under SEM, the fracture patterns of Fuji II LC and Dyract were adhesive failures, but those of Ketacfil were cohesive failure of material and mixture of cohesive and adhesive failure.

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Effects of Silver Treatment and the Physical and Chemical Properties of Spherical Activated Carbon

  • Oh, Won-Chun;Kim, Jong-Gyu;Kim, Hyuk;Chen, Ming-Liang;Zhang, Kan;Meng, Ze-Da;Zhang, Feng-Jun
    • Korean Journal of Materials Research
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    • v.19 no.11
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    • pp.569-575
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    • 2009
  • In this study, the effects of silver treatment and activation on the physical and chemical properties of spherical activated carbon (SAC) were studied. The textural properties of SAC were characterized by BET surface area, XRD, SEM, iodine adsorption, strength intensity, pressure drop and antibacterial effects. BET surface areas of SACs decreased with an increase of the amount of PR before and after activation, and the BET surface areas of SACs were found to be about 2-3 times the size of those before activation. The XRD patterns showed their existing state as stable Ag crystals and carbon structure. The Ag particles are seaweedlike and uniform, being approximately 5-10 μm in size deposited on the surface of activated carbon. All of the samples had much more iodine adsorption capability after activation than before activation. The strength values of SACs increased with an increase of the amount of PR, and there was a smaller drop in the strength values of SACs with silver treatment than with non-silver treatment after activation. The Ag-SAC composites showed strong antibacterial activity against Escherichia coli (E. Coli).

Preparation of Porous Cordierite by Using Water-Vapour Treatment (수증기처리공정에 의한 다공성 코디어라이트의 제조)

  • 문교태;서신석;노재성;조득희;김동표
    • Journal of the Korean Ceramic Society
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    • v.34 no.9
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    • pp.986-992
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    • 1997
  • Cordierite ceramic was prepared by sol-gel method. It was analyzed by Infrared spectroscopy and X-ray diffraction patterns that the ceramic was chemically mixed in molecular level and transformed to $\alpha$-cordierite at 125$0^{\circ}C$. Water vapour treatments for aging and drying process were conducted to get porous cordierite with thermally stable pore structure. It resulted in 220-410 $m^2$/g BET surface area and mesoporous structure with mean pore diameter, 40$\AA$. Compared to naturally dried ceramic, the ceramic showed superior thermal stability of surface area up to $700^{\circ}C$. Surfaces of porous cordierite ceramics were observed by SEM.

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