Evolution of surface morphology and roughness in Si and $_{0.7}$ Ge$_{0.3}$ thin fimls
(Si 및Si$_{0.7}$ Ge$_{0.3}$ 박막의 표현형태 및 조도의 전개)
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- Journal of Surface Science and Engineering
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- v.31 no.6
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- pp.345-358
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- 1998