• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.1
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• pp.33-40
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• 1992

Several etching phenomena were observed and analyzed in diaphragm process performed on 4-inch (100) Si wafers for sensor application. In case of deep etching to above 300$\mu$m depth, the etch-defects appeared at etched surface could be classified into three categories such as hillocks, reaction products, and white residues. It was known that the hillock had a pyramidal shape or trapizoidal hexahedron structure depending on the density and size of the reaction products. The IR spectra showed that the white residue, which was due to the local over-saturation of Si dissolved in solution, was mostly Si-N-O compounds mixed with a small amount of H and C etc. Also, the difference in both the existence of etch-defects and etch rate distribution over a whole wafer was investigated when the etched surfaces were downward, upward horizontally and erective in etching solutions. The obtained data were analyzed through flow pattern in the etching bath. As the results, the downward and erective postures were favorable in the etch rate uniformity and the etch-defect removal, respectively.

• Food Science of Animal Resources
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• v.21 no.1
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• pp.56-63
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• 2001

In this study, three domestic and one foreign formulas for the infants up to 5 month old were examined to detect chemical changes such as pH, reactive sulfhydryl groups(RSH) content, 5-hydroxymethylfurfral(HMF) content, available lysine content, electrophoresis, and surface color caused by heat treatment for long term storage. In the SDS-polyacrylamide gel electrophoresis, A and B products showed similar pattern, while C product had a clearly distinguishable $\beta$-lacto-globulin band, but in casein, only D product showed a few strong casein band. RSH content, which indicate the extent of whey protein denaturation, ranged from 4.40 to 5.93 mmole/g protein. HMF content. which indicate the extent of Maillard reaction, ranged from 192 to 432 $\mu$mole/100g in formulas. B product showed the highest RSH and HMF content. Available lysine content ranged from 31 to 46 mg/g protein. Among them D product contain the highest available lysine content and others showed no significant difference. In conclusion, the domestic infant formulas showed higher RSH and HMF content than the foreign product and the available lysine content of the domestic products were lower than of the foreign product.

• Membrane and Water Treatment
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• v.13 no.6
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• pp.291-301
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• 2022

In this study, cement/PVDF hollow-fiber hybrid membranes were prepared via a mixed process of diffusion-induced phase separation and hydration. The presence of X-ray diffraction peaks of Ca(OH)₂, an AFt phase, an AFm phase, and C-S-H phase confirmed the hydration reaction. Good hydrophilicity was obtained. The cross-sectional and surface morphologies of the hybrid membranes showed that an asymmetric pore structure was formed. Hydration products comprising parallel plates of Ca(OH)₂, fibrous ettringite AFt, and granulated particles AFm were obtained gradually. For the hybrid membranes cured for different time, the pore-size distribution was similar but the porosity decreased because of blocking of the hydration products. In addition, the water flux decreased with hydration time, and carbon retention was 90% after 5 h of rejection treatment. Almost all the Zn²⁺ ions were adsorbed by the hybrid membrane. The above results proved that the obtained membrane could be alternative as basement membrane for separation application.

• Journal of Energy Engineering
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• v.27 no.4
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• pp.64-69
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• 2018

The purpose of this study is to expand the use of coal ash and coal slag in thermal power plants. In addition, controlled low strength materials was developed to prevent mine settlement. Bottom ash and KR slag are mixed at ratio of 7:3 to expand the use of industrial by-products through carbonate reaction and inhibit the exudation of heavy metals. In order to efficiently fill the abandon mine, workability and physical properties were evaluated according to flow. As a result of elution of harmful substance experiment, it was confirmed that the carbonation reaction inhibited the elution of heavy metals. It was confirmed that the difference in water ratio was the difference in specific surface area of the controlled low strength materials. It was confirmed that the working efficiency is excellent when the flowability is 300mm compared to 260mm. compressive strength measurement result was relatively high at 260mm compared to 300mm because the number of pores due to decrease of water ratio was small.

• Journal of the Korean Wood Science and Technology
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• v.39 no.1
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• pp.75-85
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• 2011

The main purpose of this study is to evaluate the potential of producing bioethanol from yellow poplar ($Liriodendron$ $tulipifera$) wood chips by oxalic acid pretreatment and to examine the pretreatment conditions by response surface methodology (RSM). Based on $2^3$ factorial design, adjusted variables were reaction temperature ($^{\circ}C$), residence time (min), and acid loading (g/g), and a series of distinct 15 experimental conditions was organized with duplication at central point (total 16 performances). After pretreatment, simultaneous saccharification and fermentation (SSF) was subjected on solid fraction with yeast strain $Pichia$ $stipitis$. Maximum ethanol yields of the most samples were measured at 72 hours and applied to RSM as a dependent variable. 9.7 g/${\ell}$ of ethanol was produced from the solid pretreated at $180^{\circ}C$ for 40 min with 0.013 g/g of oxalic acid loading. According to the response surface methodology, it was determined that the temperature is the most governing factor via statistic analysis.

• Journal of the Korean Society of Safety
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• v.23 no.1
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• pp.66-71
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• 2008

A new route to phthalocyanine complexes were developed to synthesize these products by fusion in the absence of solvent. This new method of synthesis without using solvent has advantages over the conventional synthetic methods since there are no risk of explosion and formation of harmful vapor from organic solvent. Reaction of PcFe with axial ligands such as $PcFe(4-VP)_2$[Pc: Phthalocyanine, 4-VP: 4-Vinylpyridine] and $PcFe(VIM)_2$[VIM: 1-Vinylimidazole] afforded powderlike, pure dark greenish blue colored products. The resulted products are soluble in $CH_2Cl_2$ and found to be complexes of the type $PcFeL_2$. Spectral properties were studied with ATR-FTIR and UV/Vis. Thermal and electrical characterization was also performed. Phthalocyanine complexes exhibit useful properties such as UV/Vis blocking, antistatic characteristics and excellent thermal stability and we anticipate various applicability in numerous products.

• 한국신재생에너지학회:학술대회논문집
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• 2008.10a
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• pp.67-70
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• 2008

Biological conversion of biomass into fuels and chemicals requires hydrolysis of the polysaccharide fraction into monomeric sugars. Hydrolysis can be performed enzymatically, and with dilute or concentrate mineral acids. In this study, dilute sulfuric acid used as a catalyst for the hydrolysis of rapeseed straw. The purpose of this study is to optimize the hydrolysis process in a 15ml bomb tube reactor and investigate the effects of the acid concentration, temperature and reaction time on the hemicellulose removal and consequently on the production of sugars (xylose, glucose and arabinose) as well as on the formation of by-products (furfural, 5-hydroxymethylfurfural and acetic acid). Statistical analysis was based on a model composition corresponding to a $3^3$ orthogonal factorial design and employed the response surface methodology (RSM) to optimize the hydrolysis conditions, aiming to attain maximum xylose extraction from hemicellulose of rapeseed straw. The obtained optimum conditions were: acid concentration of 0.77%, temperature of $164^{\circ}C$ with a reaction time of 18min. Under these conditions, 75.94% of the total xylose was removed and the hydrolysate contained 0.65g $L^{-1}$ Glucose, 0.36g $L^{-1}$ Arabinose, 3.59g $L^{-1}$ Xylose, 0.51g $L^{-1}$ Furfural, 1.36g $L^{-1}$ Acetic acid, and 0.08g $L^{-1}$ 5-hydroxymethylfurfural.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.190-194
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• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.9
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• pp.695-699
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• 2001

Cerium dioxide (CeO$_2$) was used as the intermediate layer between the ferroelectric thin film and Si substrate in a metal-ferroelectric-semiconductor field effect transistor (MFSFET), to improve the interface property by preventing the interdiffusion of the ferroelectric material and the Si substrate. In this study, CeO$_2$ thin films were etched with a CF$_4$/Ar gas combination in inductively coupled plasma (ICP). The maximum etch rate of CeO$_2$ thin films was 270$\AA$/min under CF$_4$/(CF$_4$+Ar) of 0.2, 600 W/-200V, 15 mTorr, and $25^{\circ}C$. The selectivities of CeO$_2$ to PR and SBT were 0.21, 0.25, respectively. The surface reaction in the etching of CeO$_2$ thin films was investigated with x-ray photoelectron spectroscopy (XPS). There is a chemical reaction between Ce and F. Compounds such as Ce-F$_{x}$ remains on the surface of CeO$_2$ thin films. Those products can be removed by Ar ion bombardment. The results of secondary ion mass spectrometry (SIMS) were consistent with those of XPS. Scanning electron microscopy (SEM) was used to examine etched profiles of CeO$_2$ thin films. The etch profile of over-etched CeO$_2$ films with the 0.5${\mu}{\textrm}{m}$ line was approximately 65$^{\circ}$.>.

• Journal of the Speleological Society of Korea
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• no.82
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• pp.1-4
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• 2007

In this paper, the etching of Au films using photoresist masks on Si substrates was investigated using a capacitively coupled plasma etch reactor. The advantages of plasma etch techniques over current methods for Au metalization include the ability to simplify the metalization process flow with respect to resist lift-off schemes, and the ability to cleanly remove etched material without sidewall redeposition, as is seen in ion milling. The etch properties were measured for different gas mixing ratios of CF4/Ar, and chamber pressures while the other conditions were fixed. According to statistical design of experiment (DOE), etching process of Au films was characterized and also 20 samples were fabricated followed by measuring etch rate, selectivity and etch profile. There is a chemical reaction between CF4 and Au. Au- F is hard to remove from the surface because of its high melting point. The etching products can be sputtered by Ar ion bombardment.