• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.743-747
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• 1997

Polishing work for a curved surface die demands simple and repetitive operations and requires much time while it also demands high precision. Therefore it is operated by skilled worker in handiwork. Howener workers avoid polishing work gradually because of the poor environments such as dust and noise. In order to reduce the polishing time and to alleviate the problem of shortage of skilled workers, researches for automation of polishing have been pursued in the developed countries. In the research, a polishing robot with 2 degrees of freedom motion attached to machining center with 3 degrees of freedom and pneumatic system forms an automatic polishing system which keeps the polishing tool vertically on the surface of die and maintains constant pneumatic pressure. A synchronization between machining center and polishing robot is accomplished by using M code of machining center. A rulled surface and shadow mask are polished by the developed polishing robot.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.4 s.97
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• pp.163-177
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• 1999

Polishing work for a curved surface die demands simple and repetitive operations and requires much time while it demands also high precision. Therefore it is operated by a skilled worker in handiwork. However the workers avoid gradually a polishing work because of the poor environmental conditions such as dust and noise. In order to reduce the polishing time and to alleviate the problem of shortage of skilled workers, an automatic polishing robot system which is composed of a polishing robot with two degrees of freedom motion and pneumatic system is developed, and it is attached to machining center with three degrees of freedom. The system keeps the polishing tool vertically on the surface of die and maintains constant pneumatic pressure. The polishing robot with DSP(digital signal processor) controller is controlled by sliding mode control. A synchronization between machining center and polishing robot is accomplished by using M code of machining center. A performance experiment for polishing work is executed by the developed automatic polishing robot system. The result shows that the developed automatic polishing robot has a good performance and well polished workpiece surface is obtained.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.8-13
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• 2000

Die polishing technology is very critical to determine quality and performance of the final products. Die polishing processes have not been automated because the automation requires a great deal of experience and skill of experts. Thus, to implement a fully automated polishing process, the development of polishing status monitoring system replacing the skill of experts is critical. AE is known to be closely related to material removal rate(MRR). As the surface is rougher, MRR gets larger and AE increased. The surface roughness can be indirectly estimated using the AE signal measured during automatic die polishing process. In this study, The polishing state monitoring system using AEms signal was developed. This system can be not only to monitor the abnormal state but also to estimate a state of surface roughness of polishing surface qualitatively.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.6
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• pp.162-168
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• 2000

The automatic die polishing machine by liquid honing has been developed and experimented on the surface of machined die. The goal of development in the automatic die polishing machine by liquid honing is to increase the accuracy and the productivity in die polishing. To reach this goal, the polishing machine consists of the automatic measuring device for contour of die, the nozzle and pumping system to spray the powder mixed with liquid, and the 3-axis guides. Before polishing, the measuring device with a semiconductor laser scans the surface of mould to get the data of contour. The data store a PC and use to control the nozzle head to move above a couple of centimeters on the machined surface of die. The experimental parameters are the spraying time, the pressure, the size of abrasive grain and the mixing ratio between abrasive grain and liquid. The surface roughness is measured on the polished die which are SKDl 1 and Al7075 machined by NC. The surface roughness indicates the values of Rmax 0.5${\mu}{\textrm}{m}$ for Al7075 and Rmax 1.4${\mu}{\textrm}{m}$ for SKDl 1. It reduces the polishing time significantly and reduces the monotonous work for labors. As the results, the liquid honing system is useful method to apply for the die polishing and the automatic die polishing machine using liquid honing shows that it's very effective processing ability.

• The Journal of Advanced Prosthodontics
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• v.9 no.3
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• pp.188-194
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• 2017

PURPOSE. This study was to evaluate the effect of repeated ultrasonic scaling and surface polishing with intraoral polishing kits on the surface roughness of three different restorative materials. MATERIALS AND METHODS. A total of 15 identical discs were fabricated with three different materials. The ultrasonic scaling was conducted for 20 seconds on the test surfaces. Subsequently, a multi-step polishing with recommended intraoral polishing kit was performed for 30 seconds. The 3D profiler and scanning electron microscopy were used to investigate surface integrity before scaling (pristine), after scaling, and after surface polishing for each material. Non-parametric Friedman and Wilcoxon signed rank sum tests were employed to statistically evaluate surface roughness changes of the pristine, scaled, and polished specimens. The level of significance was set at 0.05. RESULTS. Surface roughness values before scaling (pristine), after scaling, and polishing of the metal alloys were $3.02{\pm}0.34{\mu}m$, $2.44{\pm}0.72{\mu}m$, and $3.49{\pm}0.72{\mu}m$, respectively. Surface roughness of lithium disilicate increased from $2.35{\pm}1.05{\mu}m$ (pristine) to $28.54{\pm}9.64{\mu}m$ (scaling), and further increased after polishing ($56.66{\pm}9.12{\mu}m$, P<.05). The zirconia showed the most increase in roughness after scaling (from $1.65{\pm}0.42{\mu}m$ to $101.37{\pm}18.75{\mu}m$), while its surface roughness decreased after polishing ($29.57{\pm}18.86{\mu}m$, P<.05). CONCLUSION. Ultrasonic scaling significantly changed the surface integrities of lithium disilicate and zirconia. Surface polishing with multi-step intraoral kit after repeated scaling was only effective for the zirconia, while it was not for lithium disilicate.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.411-416
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• 2000

Cutting process has been automated by progress of CNC and CAD/CAM, but polishing process has been depended on only experiential knowledge of expert. To automate the polishing process, a polishing robot with w degrees of freedom which is attached to a machining center with 3 degrees of freedom has been developed. This automatic polishing robot is able to keep the polishing tool normal on the curved surface of die to improve a performance of polishing. Polishing task for a curved surface die demands repetitive operation and high precision, but conventional control algorithm can not cope with the problem of disturbance such as a change of load. In this research, a new sliding mode control algorithm is applied to the robot. The signal compression method is used to identify polishing robot system. to obtain an effect of 5 degrees of freedom motion, a synchronization between the machining center and polishing robot is accomplished by using M code of machining center. And also a trajectory for polishing the curved surface die by 5 degrees of freedom motion, a synchronization between the machining center and polishing robot is accomplished by using M code of machining center. And also a trajectory for polishing the curved surface die by 5 axes machining center is divided into data of two types for 3 axes machining center and 2 axes polishing robot. To evaluate polishing performance of the robot. various experiments are carried out.

• Journal of the Semiconductor & Display Technology
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• v.13 no.1
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• pp.13-17
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• 2014

Since the semiconductor manufacturing requires the silicon wafers with extraordinary degree of surface flatness, the surface polishing of wafers from ingot cutting is an important process for deciding surface quality of wafers. The present study introduces the development of wafer polishing equipment and, especially, the wafer polishing head that employs the forced self-driving of installed silicon wafer as well as the wax wafer mounting technique. A series of wafer polishing tests have been carried out to investigate the effects of self-driving function in wafer polishing head. The test results for wafer planarization showed that the LLS counts and SBIR of polished wafer surfaces were generally improved by adopting the self-driven polishing head in wafer polishing stations.

• Journal of Technologic Dentistry
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• v.37 no.4
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• pp.205-212
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• 2015

Purpose: The objective of this study was to compare the surface roughness according to polishing process in conventional laboratory techniques used for polishing three different acrylic denture base resins. Materials and methods: Specimen preparation and surface polishing procedures were conducted to manufacturer's recommendation with three heat-polymerized denture base resins. Surface roughness and gloss were measured by a contact type tester and a LED gloss checker using thickness 2 mm and diameter 10 mm. There were five specimens for each acrylic resin material and polishing procedures. Mean average surface roughness (Ra) values of each specimen group were analyzed using a one-way ANOVA analysis of variance and Scheffe's post hoc test. Surfaces after surface roughness and gloss testing according to each polishing process were evaluated under a stereoscopic microscope. Results: The highest mean average surface roughness was measured($Ra=2.43{\pm}0.47$) for surfaces finished with a denture tungsten carbide bur in Triplex. The lowest surface roughness values ($Ra=0.11{\pm}0.07$) were determined in Vertex polished with a lathe. In addition, all materials revealed that surface roughness determined highly in HP1 and HP2 than other procedures. All correlation between surface roughness and gloss showed highly with three heat-polymerized resins. Specially, topmost correlation revealed than other material in Triplex. Significant differences in mean average surface roughness were found between polishing process used high speed lathe and low speed hand-piece. Conclusion: Laboratory polishing used to high speed was found to produce the smoothest surface of heat-polymerized denture base acrylic resin. Therefore, we recommended that high polishing process need to get smooth surface.

• Design & Manufacturing
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• v.13 no.1
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• pp.13-18
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• 2019

The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.