• JSTS:Journal of Semiconductor Technology and Science
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• 제13권6호
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• pp.617-621
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• 2013

This study examined the effect of electron-beam (E-beam) irradiation on the electrical properties of n-GaN, AlGaN and AlGN/GaN structures on sapphire substrates. E-beam irradiation resulted in a significant decrease in the gate leakage current of the n-GaN, AlGaN and HEMT structure from $4.0{\times}10^{-4}A$, $6.5{\times}10^{-5}A$, $2.7{\times}10^{-8}A$ to $7.7{\times}10^{-5}A$, $7.7{\times}10^{-6}A$, $4.7{\times}10^{-9}A$, respectively, at a drain voltage of -10V. Furthermore, we also investigated the effect of E-beam irradiation on the AlGaN surface in AlGaN/GaN heterostructure high electron mobility transistors(HEMTs). The results showed that the maximum drain current density of the AlGaN/GaN HEMTs with E-beam irradiation was greatly improved, when compared to that of the AlGaN/GaN HEMTs without E-beam irradiation. These results strongly suggest that E-beam irradiation is a promising method to reduce leakage current of AlGaN/GaN HEMTs on sapphire through the neutralization the trap.

• 대한기계학회논문집B
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• 제29권3호
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• pp.322-329
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• 2005

The flow characteristics in the blade passage and in the wake region of a low speed axial flow fan have been investigated by experimental analysis using a rotating hot-wire sensor for design and off-design operating conditions. The results show that the tip leakage vortex is moved upstream when flow rate is decreased, thus disturbing the formation of wake flow near the rotor tip. The tip leakage vortex interfaces with blade pressure surface, and results in high velocity fluctuation near the pressure surface. From axial velocity distributions downstream of the fan rotor, large axial velocity decay near the rotor tip is observed at near stall condition, which results in large blockage compared to that at the design condition. Although the wake flow downstream of the rotor blade is clearly measured at all operating conditions, the trough of the high velocity fluctuation due to Karmann vortex street in the wake flow is mainly observed at a higher flow condition than the design flow rate.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2003년도 춘계학술발표회 초록집
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• pp.53-53
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• 2003

Plasma polymerized organic thin films were deposited on Si(100) glass and metal substrates using thiophene and ethylcyclohexane precursors by PECVD method. In order to compare electrochemical properties of the as-grown thin films, the effects of the RF plasma power in the range of 30~100 W. AFM showed that the polymer films with smooth surface and sharp interface could be grown under various deposition conditions. Impedance analyzer was utilized for the determination of I-V curve for leakage current density and C-V for dielectric constants, respectively. To obtain C-V curve, we used a MIM structure of metal(Al)-insulator(plasma polymerized thin film)-metal(Pt) structure. Al as the electrode was evaporated on the thiophene films that grew on Pt coated silicon substrates, and the dielectric constants of the as-grown films were then calculated from C- V data measured at 1MHz. From the electrical property measurements such as I-V and C-V characteristics, the minimum dielectric constant and the best leakage current of thiophene thin films were obtained to be about 3.22 and $1{\;}{\times}10^{-11}{\;}A/cm^2$. However, in case of ethylcyclohexane thin films, the minimum dielectric constant and the best leakage current were obtained to be about 3.11 and $5{\;}{\times}10^{-12}{\;}A/cm^2$.

• 한국재료학회지
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• 제19권11호
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• pp.601-606
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• 2009

$BiFeO_3$ (BFO) thin films were prepared on $Pt/TiO_2/Si$ substrate by r.f. magnetron sputtering. The effects of deposition pressure on electrical properties were investigated using measurement of dielectric properties, leakage current and polarization. When BFO targets were prepared, Fe atoms were substituted with Mn 0.05% to increase electrical resistivity of films. (Fe+Mn)/Bi ratio of BFO thin films increases with increasing partial pressure of $O_2$ gas. The deposited films showed the only BFO phase at 10 mTorr, the coexistence of BFO and $Bi_2O_3$ phase at 30-50 mTorr, and the only $Bi_2O_3$ phase at 70 mTorr. The crystallinity of BFO films was reduced due to the higher Bi contents and the decrease of surface mobility of atoms at high temperature. The porosity and surface roughness of films increased with the increase of the deposition pressure. The films deposited at high pressure showed low dielectric constant and high leakage current. The dielectric constant of films deposited at various deposition pressures was 84${\sim}$153 at 1 kHz. The leakage current density of the films deposited at 10${\sim}$70 mTorr was about $7{\times}10.6{\sim}1.5{\times}10.2A/cm^2$ at 100 kV/cm. The leakage current was found to be closely related to the morphology and composition of the BFO films. BFO films showed poor P-E hysteresis loops due to high leakage current.

• 한국세라믹학회지
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• 제34권8호
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• pp.803-810
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• 1997

Ba0.5Sr0.5TiO3박막을 RF 마그네트론 스퍼터링법을 이용하여 Pt/Ti/SiO2/Si(100) 기판에 증착하였다 .누설전류에 영향을 주는 것으로 알려진 열처리 조건, dopant 효과 등을 평가하고자 이온반경이Ti와 유사하고 대부분이 Ti 자리를 치환하는 것으로 알려진 Nb와 Al을 각각 danor와 acceptor로 선택하여 BST 박막에 첨가한 후 누설전류를 측정하였다. 고온에서 in-situ 증착된 BST 박막은 거친 표면 형상을 보이며 낮은 전압에서 파괴가 발생하고, Nb 첨가로 누설전류가 증가하였다. 삼온 증착후 후열처리된 박막은 표면 형상도 평할도가 증가하였으며 in-situ로 제조된 박막에 비해 높은 파괴전압과 낮은 누설전류를 나타내었다. 특히 Al이 첨가된 BST 박막의 누설전류밀도는 ~10A/cm2로 도핑을 하지 않은 박막이나 Nb가 첨가된 박막에 비해 매우 낮은 누설전류밀도를 나타내었으며, 이는 산화로 인한 산소공공의 감소, 이동 가능한 hole의 감소와 후열처리과정중 계면 및 입계의 산화로 Schottky 장벽에 높아진 결과로 판단된다.

• 한국가스학회지
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• 제17권3호
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• pp.14-19
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• 2013

본 연구에서는 특수가스용기용 밸브의 안전성에 관한 실험적 연구를 수행하였다. 시험용 밸브는 특수가스용기에 부착되었던 것을 무작위로 수거한 것으로 가스누출 및 작동 안전성에 대한 시험을 실시하였다. 실험결과에 의하면, 밸브의 몸체, 나사 체결부, 안전판, 방출구, 스템부, 핸들에서 가스누출 안전성에 영향을 미칠 정도의 크랙, 마모, 부식, 변형이 발생하지 않았다. 다만, 핸들의 페인트 일부가 벗겨지고, PT나사와 몸체에서 녹이 국부적으로 형성되어 있지만, 가스누출 안전성에 영향을 미칠 정도는 아니었다. 또한, 탈거한 밸브에서 가스누출은 발생되지 않았다. 다만, 밸브스템의 영구변형과 오링의 마찰표면 일부에서 손상이 관찰되었다. 따라서, 탈거된 밸브의 가스누출 안전성을 보장하기 위해서 밸브시트와 오링 교체하는 것이 바람직함을 알 수 있다. 또한, 핸들의 조임력을 주기적으로 점검하는 것이 필요함을 알 수 있었다.

• Restorative Dentistry and Endodontics
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• 제18권1호
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• pp.197-204
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• 1993

This study was conducted to evaluate and compare the apical leakage in the following retrofilling techniques after apical resection; No apical cavity preparation and no retrofilling(control group), Amalgam(group I) or silver glass ionomer cement(group II) retrofilling after apical cavity preparation with mini contra-angle and bur, Amalgam(group III) or silver glass ionomer cement(group N) retrofilling after apical cavity preparation with ultrasonic micro endo tip. Extracted ninety upper anterior and lower canine teeth were fixed in skull simulators and root canals were prepared with step-back method and obturated with gutta-percha and zinc oxide eugenol sealer. Obturated roots were resected 2mm from apical ends and apical cavities of 1mm width and 2mm depth were prepared and retrofilled by above mentioned methods. After application of nail varnish on all surface except resected surface, apical 1/3 of the roots were placed in 1% methylene blue solution for 3 days. After longutudinal sectioning to expose central parts of filled materials, depths of penetrated dye were measured by measuring microscope and were analyzed statistically. The results were as follows. 1. Having no relation with instruments used in apical cavity preparation, amalgam retrofilling groups(group I and II) showed less apical leakage which was not significant statistically than no retrofilling group(control group) (P<0.05), but silver glass ionomer cement retrofilling gruoups(group II and IV) showed significantly less apical leakage than no retrofilling group(control group) (P<0.01). 2. In the groups retrofilled with the same material, the apical leakage in cavities prepared with ultrasonic micro endo tip (group III and IV) was less than that in cavities prepared with mini contra-angle and bur(group I and II), but not significant statistically(P>0.05). 3. When apical cavities were prepared with same instrument. the egroups retrofilled with silver glass ionomer cement(group II and IV) showed significantly less apical leakage than the groups retrofilled with amalgam(group I and III)(<0.01).

• 대한기계학회논문집B
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• 제27권1호
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• pp.84-94
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• 2003

It is known that tip clearance flows reduce the pressure rise, flow range and efficiency of the turbomachinery. So, the clear understanding about flow fields in the tip region is needed to efficiently design the turbomachinery. The Navier-Stokes code with the proper treatment of the boundary conditions has been developed to analyze the three-dimensional steady viscous flow fields in the transonic rotating blades and a numerical study has been conducted to investigate the detail flow physics in the tip region of transonic rotor, NASA Rotor 67. The computational results in the tip region of transonic rotors show the leakage vortices, leakage flow from pressure side to suction side and their interaction with a shock. Depen ding on the operating conditions, toad distributions and the position of shock-wave on the blade surface are very different close to the blade tip of the transonic compressor rotor. The load distribution and the shock-wave position close to the blade tip had the close relationship with the starting position of leakage vortex and the direction of leakage flow.

• 한국재료학회지
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• 제9권5호
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• pp.509-514
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• 1999

Interest in the integrated capacitors, which make it possible to reduce the size of and to obtain improved electrical performance of an electronic system, is expanding. In this study, $Ta_2$O\ulcorner thin film capacitors for MCM integrated capacitors were fabricated on a Upilex-S polymer film by DC magnetron reactive sputtering and the effects of low temperature annealing at various atmospheres and substrate surface morphology on the capacitor characteristics were discussed. The low temperature($150^{\circ}C$) annealing produced improved capacitor yield irrespective of the annealing at mosphere. But the leakage current of the $O_2$-annealed film was larger than that of any other films. This is presumably mosphere. But the leakage current of the $O_2$-annealed film was larger than that of any other films. This is presumably due to the change of the $Ta_2$O\ulcorner film surface by oxygen, which was explained by conduction mechanism study. Leakage current and breakdown field strength of the capacitors fabricated on the Upilex-S film were 7.27$\times$10\ulcornerA/$\textrm{cm}^2$ and 1.0 MV/cm respectively. These capacitor characteristics were inferior to those of the capacitors fabricated on the Si substrate but enough to be used for decoupling capacitors in multilayer package. Roughness Analysis of each layer by AFM demonstrated that the properties of the capacitors fabricated on the polymer film were affected by the surface morphology of the substrate. This substrate effect could be classified into two factors. One is the surface morphology of the polymer film and the other is the surface morphology of the metal bottom electrode determined by the deposition process. Therefore, the control of the two factors is important to obtain improved electrical of capacitors deposited on a polymer film.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2004년도 유체기계 연구개발 발표회 논문집
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• pp.140-150
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• 2004

In this study, the effect of relative position of the blade for the fixed vane has been investigated on blade surface heat transfer. The experiments were conducted in a low speed stationary annular cascade, and heat transfer of blade was examined for six positions within a pitch. Turbine test section has one stage composed of sixteen guide vanes and blades. The chord length of the tested blade is 150 mm and the mean tip clearance of the blade having flat tip is about $2.5\%$ of the blade chord. For the detailed mass transfer measurements on the blade surfaces, a naphthalene sublimation technique was used. The inlet flow Reynolds number is fixed to $1.5{\times}10^5$. Complex heat transfer characteristics are observed on the blade surface due to various flow characteristics, such as separation bubble, relaminarization, transition to turbulence and leakage vortices. The distributions of velocity and turbulence intensity change significantly with the relative position due to the blockage effect of the blade. This causes the variation of heat transfer patterns on the blade surface. The results show that the flow near the leading edge get highly disturbed and deflected toward the either side of the blade when the blade leading edge is positioned close to the trailing edge of the vane. Therefore, separation bubble disappears on the pressure side and overall heat transfer on the relaminarization region is increased. But, due to reduced tip gap flow at the upstream region, the effect of leakage flow on the upstream region of the blade surface is weakened. Thus, the heat transfer characteristics significantly change with the blade positions.