• 한국분말재료학회지
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• 제25권2호
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• pp.99-103
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• 2018

Spherical monosized pure aluminum (Al) particles are successfully fabricated by the pulsated orifice ejection method (POEM). The surface reaction between Al and the graphite crucible is investigated by analysing the microstructure and chemical composition of the materials. No significant chemical reaction occurs between Al and the graphite owing to the crystalline Al oxide (${\gamma}-Al_2O_3$) layer generated in the initial state. The ${\gamma}-Al_2O_3$ layer is clearly observed in all regions between the Al particles and graphite via transmission electron microscopy and confirmed by the selected area diffraction pattern. The morphology of the ${\gamma}-Al_2O_3$ layer perfectly follows the surface morphology of the graphite crucible, which showed nanoscale roughness. This implies that molten Al could not directly contact graphite even though the surface of the crucible became rough to some extent. However, this passivation phenomenon allowed the successful fabrication of monosized pure Al particles. Therefore, POEM is a useful process at least to manufacture monosized pure Al particles.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.976-979
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• 2002

This research presents the new method to fabricate small features through applying chemical mechanical micro machining(C3M) for Al5052 and single crystal silicon. To improve machinability of ductile and brittle material, reacted layer was formed on the surface before micro-drilling process by chemical reaction with $HNO_3$(10wt%) and KOH(10wt%). And then workpieces were machined to compare conventional micro-drilling process with newly suggested one. To evaluate whether or not the machinability was improved by the effect of chemical condition, surface defects such as burr, chipping and crack generation were measured. Finally, it is confirmed that C3M is one of the feasible tools for micro machining with the aid of effect of the chemical reaction.

• Korea-Australia Rheology Journal
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• 제14권2호
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• pp.63-70
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• 2002

Chemical mechanical planarization (CMP) is the polishing process enabled by both chemical and mechanical actions. CMP is used in the fabrication process of the integrated circuits to achieve adequate planarity necessary for stringent photolithography depth of focus requirements. And recently copper is preferred in the metallization process because of its low resistivity. We have studied the effects of chemical reaction on the polishing rate and surface planarity in copper CMP by means of numerical simulation solving Navier-Stokes equation and copper diffusion equation. We have performed pore-scale simulation and integrated the results over all the pores underneath the wafer surface to calculate the macroscopic material removal rate. The mechanical abrasion effect was not included in our study and we concentrated our focus on the transport phenomena occurring in a single pore. We have observed the effects of several parameters such as concentration of chemical additives, relative velocity of the wafer, slurry film thickness or ash)tract ratio of the pore on the copper removal rate and the surface planarity. We observed that when the chemical reaction was rate-limiting step, the results of simulation matched well with the experimental data.

• 한국세라믹학회지
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• 제46권3호
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• pp.288-294
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• 2009

The platelet AlO(OH) nano colloids were prepared by hydrothermal reaction of the $\gamma-Al_2O_3$ obtained with dehydration of $\gamma$-AlO(OH) and dilute $CH_3COOH$ solution. In hydrothermal reaction process, reversible reaction was accompanied between $\gamma-Al_2O_3$ and AlO(OH), and hydrothermal reaction temperature, hydrothermal reaction time and $CH_3COOH$ concentration had an effect on the crystal structure, surface chemical property, surface area, pore characteristics and crystal morphology of the AlO(OH) nano colloid particles. In this study, it was investigated to the hydrothermal reaction condition of the AlO(OH) nano colloid for using catalyst support, heat resisting agent, adsorbents, binder, polishing agent and coating agent. The crystal structure, surface area, pore volume and pore size of the platelet AlO(OH) nano colloids were investigated by XRD, TEM, TG/DTA, FT-IR and $N_2$ BET method in liquid nitrogen temperature.

• Bulletin of the Korean Chemical Society
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• 제20권10호
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• pp.1136-1144
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• 1999

The collision-induced reaction of gas-phase atomic hydrogen with hydrogen atoms chemisorbed on a silicon (001)-(2×1) surface is studied by use of the classical trajectory approach. The model is based on reaction zone atoms interacting with a finite number of primary system silicon atoms, which then are coupled to the heat bath, i.e., the bulk solid phase. The potential energy of the Hads‥Hgas interaction is the primary driver of the reaction, and in all reactive collisions, there is an efficient flow of energy from this interaction to the Hads-Si bond. All reactive events occur on a subpicosecond scale, following the Eley-Rideal mechanism. These events occur in a localized region around the adatom site on the surface. The reaction probability shows the maximum near 700K as the gas temperature increases, but it is nearly independent of the surface temperature up to 700 K. Over the surface temperature range of 0-700 K and gas temperature range of 300 to 2500 K, the reaction probability lies at about 0.1. The reaction energy available for the product states is small, and most of this energy is carried away by the desorbing H2 in its translational and vibrational motions. The Langevin equation is used to consider energy exchange between the reaction zone and the bulk solid phase.

• Korean Chemical Engineering Research
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• 제56권2호
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• pp.291-296
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• 2018

구리 촉매를 이용하여 실리콘으로부터 기체상태의 methylchlorosilanes을 직접 생성하는 공정이 Rochow에 의해 제시되었고 이 후로 직접 생산 반응에 관하여 많은 연구가 진행되어 오고 있다. 직접 반응 촉매로서의 구리 외에 조촉매들을 첨가함으로서 반응의 활성을 증가시키고, 주 생산물인 DMDC 로의 선택도를 증가시키는 연구도 많이 보고되었다. 하지만 반응 기구에 있어서는 DMDC 의 생성을 설명하는 연구 외에 부산물로 함께 생성되는 여러 종류의 methylchlorosilanes 들의 생성과정을 설명하는 연구는 없는 실정이다. 그래서 본 연구에서는 실리콘 표면에 존재하는 것으로 보여지는 실리콘 활성점인 $=SlCl_2$와 $=Si(CH_3)Cl$의 존재를 제시하고 이 활성점 들에 메틸, 염소 및 수소가 첨가되어 methylchlorosilanes이 생성된다고 간주하였다. Methyl chloride ($CH_3Cl$)의 해리 흡착으로 인한 메틸-실리콘 결합의 생성과 해리 흡착한 후 표면에 존재하여 표면 이동을 하는 것으로 간주되는 Cl와 H을 이용하여 각 silanes 의 생성 경로를 제시하였다. 제시된 각 silanes 들의 생성 경로는 반응 결과 생성된 각 silanes의 종류뿐만 아니라 TPD 과정에서 생성되는 silanes 종류의 생성도 정확하게 설명해 주고 있다.

• Bulletin of the Korean Chemical Society
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• 제31권6호
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• pp.1681-1688
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• 2010

Density functional theory was adopted to study the various surface products and their reaction channels focusing on the on-dimer configuration which has not been suggested before. Energetic results show that the most stable on-dimer configuration is the 6,6-[2+2] structure which resembles the typical [2+2] cycloaddition product. The 6,6-[2+2] product is also more stable than any other possible surface structures of inter-dimer configuration further suggesting its existence. Potential energy surface scan along various possible initial surface reactions show that some of the possible on-dimer surface products require virtually no reaction barrier indicating that initial population of on-dimer surface products is thermodynamically determined. Various surface isomerization reaction channels exist further facilitating thermal redistribution of the initial surface products.

• 한국표면공학회지
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• 제38권3호
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• pp.112-117
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• 2005

In this paper, CdS thin films, which were widely used as a window layer of the CdS/CdTe and the $CdS/CuInSe_2$heterojunction solar cell, were grown by chemical bath deposition, and the structural, optical and electrical properties of the films on reaction temperatures were investigated. Cadmium acetate and thiourea were used as cadmium and sulfur source, respectively. And Ammonium acetate was used as the buffer solution. As the reaction temperatures were increased, the deposition rate of CdS fllms prepared by CBD was increased and the grain size was large due to increasing reaction rate in solution, also optical transmittance of the films in visible lights was increased on rising reaction temperatures.

• Biotechnology and Bioprocess Engineering:BBE
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• 제8권4호
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• pp.213-220
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• 2003

Polymerase chain reaction (PCR) is one of the most widely used analytical tool and is an important module that would benefit from being miniaturized and integrated onto diagnostic or analytical chips. There are potentially two different approaches for the miniaturization of the PCR module: chamber-type and flow-type micro-PCR. These miniaturized PCRs have distinct characteristics and advantages. In this article, we review the necessity of micro-PCR, the materials for the chip fabrication, the surface modification, and characteristics of the two types of micro-PCR. The motivation underlying the development of micro-PCR, the advantages and disadvantages of the various materials used in fabrication and the surface modification methods will be discussed. And finally, the precise features of the two different types of micro-PCR will be compared.

• Korean Chemical Engineering Research
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• 제53권1호
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• pp.83-90
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• 2015

본 연구에서는 multi-walled carbon nanotube (MWCNT) 표면에 자유 라디칼 중합 가능한 methacrylate기를 다량으로 도입하기 위한 연구를 수행하였다. 먼저, MWCNT 표면에 카르복실기(-COOH)를 도입하기 위하여 황산과 질산의 혼산으로 초음파로 처리하면서 2시간 산화시켜 MWCNT-COOH를 합성하였다. 합성된 MWCNT-COOH를 염화티오닐(thionyl chloride)와 반응시켜 MWCNT-COCl을 합성하고, triethylenetetramine (TETA)와 반응시켜 MWCNT-$NH_2$를 합성하였다. 합성된 MWCNT-$NH_2$와 3-(acryloyloxy)-2-hydroxypropyl methacrylate (AHM)의 투입 몰 비를 변화시키면서 Michael 부가 반응으로 MWCNT 표면에 methacrylate기가 도입된 MWCNT-AHM을 합성하였다. MWCNT의 표면 개질정도는 fourier transform infrared (FTIR) spectroscopy, thermogravimetric analysis (TGA)와 원소분석(elemental analysis, EA) 분석을 통해 개질 반응의 진행 정도와 최적 개질 조건을 확인하였다. 그 결과 MWCNT-$NH_2$에 접목되어 있는 TETA에 대하여 AHM의 반응 몰 비를 1:10로 하고 8시간 반응시켰을 때 methacrylate기가 가장 많이 도입되는 조건임을 확인하였다.