• Proceedings of the KSME Conference
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• 대한기계학회 2004년도 춘계학술대회
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• pp.336-341
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• 2004

This research investigates the feasibility of ultrasonic microscope for nondestructive assessment of thermal degradation in artificially aged commercial Co-base superalloy, FSX414. This alloy has been used for high temperature structure applications such as stationary gas turbine blade and nozzle chamber in fossil plant. Microstructural change was found that the fine carbides became coarser and spheroidized in matrix as aging time increased. The leaky surface acoustic wave velocity gradually decreases by a maximum of 4.7% with increasing aging time up to 4,000hours. However, the longitudinal wave velocity has a little change. Also, it has a good correlation between leaky surface acoustic wave velocity and Vickers hardness. Consequently, LSAW can be used to examine the degree of degradation in thermally aged Co-base superalloy.

• Journal of the Korean Society for Nondestructive Testing
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• 제34권2호
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• pp.171-175
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• 2014

In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

• Journal of the Korean Society for Precision Engineering
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• 제14권10호
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• pp.119-126
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• 1997

The relationship between the applied stresses and the change of elastic wave velocity has been established based on the acoustoelasticity theory. The non-uniform stress field in a loaded specimen has been evaluated from the surface acoustic wave velocity measured by the line-focus acoustic microscopy with the acoustoelastic constants obtained form a calibration test. The evaluated stresses are in good agreement with the results calculated by finite element method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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• pp.144-146
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• 1992

Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

• Korean Journal of Materials Research
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• 제12권4호
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• pp.279-282
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• 2002

The effect of field annealing on the velocity changes of magneto surface acoustic wave (MSAW) devices has been investigated for deposited $(Fe_{1-x}Co_x)_{89}Zr_{11}$ (x = 0~1.0) amorphous films. By means of two step field annealing at $195^{\circ}C$ for 10 minute in the magnetic field of 130 Oe, the MSAW device with x=0.4 film among the devices showed the superior velocity change of 0.1 %. This gigantic value was obtained in the DC bias field of 40 Oe at the exciting frequency of 8.7 MHz. It was confirmed that such behavior was due to the variation of differential permeability caused by an optimal stress within the magnetic film.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.236-239
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• 2014

Most naval underwater weapon system can be simplified to a circular cylindrical structure which has vibrating machineries inside. In order to predict efficiently the total acoustic radiation power of cylindrical structure, surface velocity is measured and radiation efficiency of surface element is calculated. Then, they are substituted to the surface pressure in the simplified Helmholtz integral equation which assumes acoustic far-field and plane-wave approximation at the surface. Surface velocity and total acoustic radiation power for a submerged cylinder are measured in water-tank. In this example, it is found that total acoustic power output obtained from the prediction is in good agreement with that of measurement in mid-high frequency range.

• Journal of the Korean Society for Nondestructive Testing
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• 제26권5호
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• pp.291-296
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• 2006

The residual stress in shot-peened Al 7075 alloy was evaluated using surface acoustic wave (SAW). Shot peening was conducted to produce a variation in the residual stress with the depth below the surface under a shot velocity of 30 m/s. The SAW velocity was measured from the V(z) curve using a scanning acoustic microscopy (SAM). The Vickers hardness profile from the surface showed a significant work hardening near the surface layer with a thickness of about 0.25 mm. As the residual stress became more compressive, the SAW velocity increased, whereas as the residual stress became more tensile, the SAW velocity decreased. The variation in the SAW velocity through the shot peened surface layer was in good agreement with the distribution of the residual stress measured by X-ray diffraction technique.

• Korean Journal of Materials Research
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• 제11권6호
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• pp.477-482
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• 2001

The velocity changes of magneto surface acoustic wave (MSAW) have been investigated in the MSAW devices composed of wedge type transducer and as-sputtered ($Fe_{1-x}$ $Co_{x}$ )$_{89}$ $Zr_{ 11}$ (x=0~1.0)amorphous films on glass substrates. The velocity changes of devices depended sensistively on exciting frequency of MSAW, applying the DC bias magnetic field. film thickness and film composition. Particularly. it was conformed that velocity changes increased with the increase of the exciting frequency of MSAW and the thickness of magnetic films. A device deposited x= 0.8 film along the MSAW propagation direction among the devices exhibited a large velocity change of 0.062% at 8.7 MHz for the applied field of 70 Oe.

• The Journal of the Acoustical Society of Korea
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• 제20권1호
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• pp.62-67
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• 2001

Velocities of leaky surface acoustic waves (LSAW/sub s/) were measured by using a line-focus polyvinylidene fluoride (PVDF) transducer and compared with theoretically calculated ones. Isotropic materials of Cu, Al, fused quartz, and anisotropic one of Z-cut α-quartz crystal were used as specimens. The velocities were obtained by the separation time between wave components reflected directly from the surface of specimen and LSAW components according to the defocusing distance. The measured velocities well agree with the theoretical results within 1％ error, and it was shown that the leaky pseudo-surface acoustic wave (LPSAW) as well as the LSAW propagates with the typical 6-fold anisotropy on the (0,0,1) surface of α-quartz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.111-111
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• 2009

In this work, we discuss simulation of surface acoustic wave device using Comsol Multiphysics. The structure SAW device based on piezoelectric thin film aluminum-nitride (AlN) on silicon was simulated. Some parameters of SAW device such as surface velocity, displacement of piezoelectric thin film were evaluated by software. Many modes and shapes of wave are also discussed in this paper. For evaluation physical parameters of AlN piezoelectric layer, the SAW resonator was modeled and simulation results were also compared with experiment results. we simulated arid evaluated the surface Rayleigh wave of AlN thin film on silicon substrate. Results simulation and experiment showed the surface velocity of AlN thin film was about 5200 m/s and shape of surface wave was also displayed. This paper has also proposed as method to study SAW characteristic of piezoelectric thin film and found out measurement values accurately of film such as stiffness matrix, piezoelectric matrix. These values are very important in calculation and design SAW device or MEMS device based on AlN piezoelectric layer.