• 제목/요약/키워드: Superposing

검색결과 71건 처리시간 0.021초

Adaptive DeadBand를 애용한 반도체공정 제어 (Research for Adaptive DeadBand Control in Semiconductor Manufacturing)

  • 김준석;고효헌;김성식
    • 대한안전경영과학회지
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    • 제7권5호
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    • pp.255-273
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    • 2005
  • Overlay parameter control of the semiconductor photolithography process is researched in this paper. Overlay parameters denote the error in superposing the current pattern to the pattern previously created. The reduction of the overlay deviation is one of the key factors in improving the quality of the semiconductor products. The semiconductor process is affected by numerous environment and equipment factors. Through process condition prediction and control, the overlay inaccuracy can be reduced. Generally, three types of process condition change exist; uncontrollable white noise, slowly changing drift, and abrupt condition shift. To effectively control the aforementioned process changes, control scheme using adaptive deadband is proposed. The suggested approach and existing control method are cross evaluated through simulation.

Cross flow response of a cylindrical structure under local shear flow

  • Kim, Yoo-Chul;Rheem, Chang-Kyu
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제1권2호
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    • pp.101-107
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    • 2009
  • The VIV (Vortex-Induced Vibration) analysis of a flexible cylindrical structure under locally strong shear flow is presented. The model is made of Teflon and has 9.5m length, 0.0127m diameter, and 0.001m wall thickness. 11 2-dimensional accelerometers are installed along the model. The experiment has been conducted at the ocean engineering basin in the University of Tokyo in which uniform current can be generated. The model is installed at about 30 degree of slope and submerged by almost overall length. Local shear flow is made by superposing uniform current and accelerated flow generated by an impeller. The results of frequency and modal analysis are presented.

변후 용접판재에서의 피로균열성장거동에 미치는 잔류응력의 영향에 관한 파괴역학적 연구 (A Study on the Influece of Residual Stresses on Fatigue Crack Growth Behaviors in the Weldment Plate with Various Thickness)

  • 차용훈
    • 한국안전학회지
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    • 제8권1호
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    • pp.71-79
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    • 1993
  • The welding implementation used widely in the industrial field is gradually increasing due to weight reduction. unlimited material thickness. simplified structure design. and 1 manufacturing time and cost reduction. The most significant factor that influences the fatigue crack growth rate is the residual stress generated during the welding process. Many researchers have studied the effect of the residual stress on crack growth behavior. Through a fatigue test in a various-thickness welded specimen. redistributed residual stress is measured as the crack is developed. Then. by superposing the measured residual stress on the K value obtained by the finite element method.

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구분모드합성법을 이용한 증기터빈$\cdot$발전기축계의 진동해석 (Vibration Analysis of Steam Turbine-Generator Rotor System Using Component Mode Synthesis Method)

  • 양보석;김용한;최병근;이현
    • 소음진동
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    • 제9권2호
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    • pp.401-408
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    • 1999
  • A method is presented for the vibration analysis of steam turbine-generator rotor system based on the component mode synthesis method. The motion of each component of the system is described by superposing constraint mode associated with boundary coordinates and constrained normal modes associated with internal coordinates. This method using real fixed-interface modes allows for significant reduction in system model size while retaining the essential dynamic characteristics of the lower modes. The capability of this method is demonstrated in the natural frequency and unbalance response analysis of the steam turbine-generator rotor system in which the dynamics of the pedestal is considered. The results by the present method are compared with finite element method and trnasfer matrix method in terms of the accuracy and computing time.

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3축 머시닝센터와 치구를 이용한 금형의 정밀가공시의 특성해석 (Analysis of the Machinability of a Precision Machining of Molds/Dies by Using Jig and 3-Axis M/C)

  • 김병희;주종남
    • 한국정밀공학회지
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    • 제12권3호
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    • pp.119-129
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    • 1995
  • In this paper, the inclined endmilling process with a 3-axis machining center using inclined jigs is introduced for the purpose of reducing overall Dies/Molds machining time and improving the machining accuracies. In order to analyze the cutting mechanism of a given endmill more accurately, the unification of the cutting mechanism model of 3-different- kind endmills is carried out by using a nose radius as a parameter. By adding radial runouts as a parameter which influences on surface roughness, the superposition method which defines the effective cusp height superposing the cutter mark height and the conventional cusp height is advanced. And 3-D suface topography predicted in this paper looks like the surface normally observed in practice. Through machining experiments, the adequacy of the superposition method was confirmed.

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다중방전형 오존발생기의 試作 및 特性(I) (Trial Manufacture and Characteristics of a Multi-discharge Type ozonizer(I))

  • 송현직;이광식;박원주;이동헌;김금영;김이국
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권7호
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    • pp.533-541
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    • 1999
  • Multi-discharge type ozonizer(MDO) using superposed silent discharge has been designed and manufactured. It consists of three electrodes( central electrode, internal electrode, and external electrode ) and double gaps( gap between central electrode and internal electrode, gap between internal electrode and external electrode ). Therefore, ozone is generated by superposing silent discharges generated between the gaps respectively. And the MDO consists of three types of superposed discharge ozonizers according to voltage appling method for each electrode ; A.C. high voltages are applied two of three electrodes with phase difference of 180[˚], the other electrode is a ground. This paper describes that discharge and ozone generation characteristics of MDO which comprising central electrode and internal electrode applied A.C. high voltages with phase difference of 180[˚] respectively, and the grounded external electrode. As a result, the maximum ozone concentration, generation, and yield can be obtained 10208[ppm], 6.4[g/h], and 280[g/kwh] respectively.

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이진 위상 홀로그램과 광학적 간섭계를 이용한 디지털 워터마킹 (Digital watermarking using binary phase hologram and optical interferometer)

  • 김병열;서동환;조규보;신창목;김수중;김철수
    • 한국광학회지
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    • 제14권4호
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    • pp.377-382
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    • 2003
  • 본 논문에서는 이진 위상 홀로그램과 간섭계를 이용하여 디지털 데이터의 저작권을 보호할 수 있는 새로운 워터마킹 방법을 제안하였다. 먼저, SA알고리듬을 이용하여 숨겨질 마크영상의 이진 위상 홀로그램을 설계하였다. 이를 원 영상에 선형중첩 시킴으로써 워터마킹된 영상을 얻었다. 워터마킹된 영상에서 마크영상을 추출하기 위한 복호화 과정은 경로차가 같도록 구성된 마흐-젠더 간섭계를 이용하여 워터마킹된 영상의 위상변조 성분과 위상변조된 원 영상과의 간섭세기론 역푸리에 변환 함으로써 얻었다. 제안된 방법은 임의의 절단된 영상에 대해서 강인함을 컴퓨터 모의실험을 통해 확인하였으며, 위상 변조 특성이 있는 LCD를 사용하여 광학적으로 구현하였다.

디더 운동이 캡슐형 내시경의 마찰계수 감소에 미치는 영향 (Influence of Dither Motion on the Friction Coefficient of a Capsule-type Endoscope)

  • 홍예선;최민준
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1068-1073
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    • 2005
  • Development of a locomotive mechanism for the capsule type endoscopes will largely enhance the ability to diagnose disease of digestive organs. In connection with it, most of the researches have focused on an installable locomotive mechanism in the capsule. In this paper, it is introduced that the movement of a capsule type endoscope in digestive organ can be manipulated by magnetic force produced outside human body. Since the magnetic force is provided by permanent magnets, no additional power supply to the capsule is required. Using a robotic manipulator for locating the external magnet, the capsule motion control system can cover the whole human digestive organs. This study is particularly concentrated on dither motion effect to improve the mobility of capsule type endoscope. It was experimentally found out that the friction coefficient between the capsule and digestive organ can be remarkably reduced by superposing yawing or rolling dither motion on the translatory motion. In this paper, the experimental results obtained while the direction, amplitude and frequency of sinusoidal dither motion were changed are reported.

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영역 분할법을 이용한 깊은 홈을 가진 임의 형상 오목 멤브레인의 고유치 해석 (Eigenvalue Analysis of Arbitrarily Shaped, Concave Membranes With a Deep Groove Using a Sub-domain Method)

  • 강상욱;윤주일
    • 한국소음진동공학회논문집
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    • 제19권10호
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    • pp.1069-1074
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    • 2009
  • A sub-domain method for free vibration analysis of arbitrarily shaped, concave membranes with a deep groove is proposed in the paper. The proposed method divides the concave membrane of interest into two convex regions. The vibration displacement(approximate solution) of each convex region is assumed by linearly superposing plane waves generated at edges of the region. A sub-system matrix for each convex region is extracted by applying a provisional boundary condition to the approximate solution. Finally, a system matrix, which of the determinant gives eigenvalues of the concave membrane, is made by considering the fixed boundary condition(displacement zero condition) at edges and the compatibility condition(the condition of continuity in displacement and slope) at the interface between the two regions. Case studies show that the proposed method is valid and accurate when the eigenvalues by the proposed are compared to those by NDIF method, FEM, or the exact method.

반무한 다중 구조계의 비선형 유한요소 - 경계요소 해석 (Analysis of Multi-Layered Structural Systems Using Nonlinear Finite Elements-Boundary Elements)

  • 김문겸;장정범;이상도;황학주
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 1992년도 봄 학술발표회 논문집
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    • pp.58-64
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    • 1992
  • It is usual that underground structures are constructed within multi-layered medium. In this paper, an efficient numerical model ling of multi-layered structural systems is studied using coupled analysis of finite elements and boundary elements. The finite elements are applied to the area in which the material nonlinearity is dominated, and the boundary elements are applied to the far field area where the nonlinearity is relatively weak. In the boundary element model 1 ins of the multi-layered medium, fundamental solutions are restricted. Thus, methods which can utilize existing Kelvin and Melan solution are sought for the interior multi-layered domain problem and semi infinite domain problem. Interior domain problem which has piecewise homogeneous layers is analyzed using boundary elements with Kelvin solution; by discretizing each homogeneous subregion and applying compatibility and equilibrium conditions between interfaces. Semi-infinite domain problem is analyzed using boundary elements with Melan solution, by superposing unit stiffness matrices which are obtained for each layer by enemy method. Each methodology is verified by comparing its results which the results from the finite element analysis and it is concluded that coupled analysis using boundary elements and finite elements can be reasonable and efficient if the superposition technique is applied for the multi-layered semi-infinite domain problems.

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