• Title/Summary/Keyword: Subwavelength

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A Study of the Dependence on Incidence Angle of the Sensitivity of an Extraordinary Optical Transmission Sensor (특이 광 투과 센서에서 민감도의 입사각 의존성 연구)

  • Kwon, Yongjae;Lee, Seunghun;Kim, Taeyeon;Kim, Kyujung
    • Korean Journal of Optics and Photonics
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    • v.32 no.3
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    • pp.126-132
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    • 2021
  • In this research, we have investigated the sensitivity of an extraordinary optical transmission sensor depending on the angle of incident light. Three types of light, including a collimated beam and focused beams (4× and 10×), were designed for the sensor system. To compare the sensitivity of the sensor, we measured transmittance spectra using deionized water (n=1.333) and refractive-index-matching oils (n=1.360 and 1.380). Those spectra were analyzed in terms of redshifting of the peak, so that we could determine the sensitivity. The sensitivity tended to increase when the collimated beam is used on the system, and we have concluded that the sensitivity could be affected by the incidence angle on an extraordinary optical transmission sensor.

Color Filter Based on a Sub-Wavelength Patterned Poly-Silicon Grating Fabricated using Laser Interference Lithography (광파장 이하의 주기를 갖는 다결정 실리콘 격자 기반의 컬러필터)

  • Yoon, Yeo-Taek;Lee, Hong-Shik;Lee, Sang-Shin;Kim, Sang-Hoon;Park, Joo-Do;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.19 no.1
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    • pp.20-24
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    • 2008
  • A color filter was proposed and demonstrated by incorporating a subwavelength patterned 1-dimensional grating in poly silicon. It was produced by employing the laser interference lithography method, providing much wider effective area compared to the conventional e-beam lithography. A $SiO_2$ layer was introduced on top of the silicon grating layer as a mask for the etching of the silicon, facilitating the etching of the silicon layer. It was theoretically found that the selectivity of the filter was also improved thanks to the oxide layer. The parameters for the designed device include the grating pitch of 450 nm, the grating height of 100 nm and the oxide-layer height of 200 nm. As for the fabricated filter, the spectral pass band corresponded to the blue color centered at 470 nm and the peak transmission was about 40%. Within the effective area of $3{\times}3mm^2$, the variation in the relative transmission efficiency and in the center wavelength was less than 10% and 2 nm respectively. Finally, the influence of the angle of the incident beam upon the transfer characteristics of the device was investigated in terms of the rate of the relative transmission efficiency, which was found to be equivalent to 1.5%/degree.