• Title/Summary/Keyword: Substrate system

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A Study on the Characteristics of Sputter ion Plating by ion Energy Analysis (이온 에너지 분석에 의한 Sputter Ion Plating의 동작 특성 연구)

  • Sung, Y.M.;Lee, C.Y.;Cho, J.S.;Park, C.H.
    • Proceedings of the KIEE Conference
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    • 1994.11a
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    • pp.228-230
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    • 1994
  • A Spotter ion Plating(SIP) system with a r. f. coil electrode and the Facing Target Sputter(FTS) source was designed for high-quality thin film formation. The rf discharge was combined with DC facing target sputtering in order to enhance ionization degree of a sputtered atoms. The discharge voltage-discharge characteristics curves of a FTS source could be characterized by the fern of $I{\propto}V^n$ with n in the range of $8{\sim}12$. The energy of ions incident on the substrate depended on the sheath potential of DC biased substrate. The mean impact ion energy increased with negative bias voltage and rf power. The adhesive force of the TiN film formed was in the range of $30{\sim}50N$, and markedly influenced by substrate bias voltage.

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Fabrication of metal line on plastic substrate by hot embossing and CMP process (핫 엠보싱 공정과 CMP 공정을 이용한 플라스틱 기판에 메탈 라인 형성)

  • Cha, Nam-Goo;Kang, Young-Jae;Park, Chang-Hwa;Rim, Hyung-Woo;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.655-656
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    • 2005
  • In the future, plastic based system will play a crucial role in modem life, for examples, transparent display or disposable electronics and so on. In this paper, we introduced a new method to fabricate the metal line on the plastic substrate. Metal lines were fabricated by hot embossing and CMP process on PMMA (polymethylmethacrylate) substrates. A Si mold was made by wet etching process and a PMMA wafer was cut off from I mm thick PMMA sheet. A 100 nm thick Al was deposited on PMMA wafers. The Al deposited PMMA wafer and the Si mold carefully sandwiched which was directly imprinted by hot embossing. After imprinting process, a residual Al layer was removed by CMP process. Finally, we found the entire process may be very useful to fabricate the metal line on plastic substrates.

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Characteristics of Indium Zinc Tin Oxide films grown by RF magnetron sputtering for organic light emitting diodes (RF magnetron sputtering system으로 성장시킨 OLED용 IZTO 박막의 특성연구)

  • Park, Ho-Kyun;Jeong, Soon-Wook;Kim, Han-Ki
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.412-413
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    • 2007
  • We report on the electrical, optical, and structural properties of indium zinc tin oxide (IZTO) anode films grown at room temperature on glass substrate. The IZTO anode films grown by a RF magnetron sputtering were investigated as functions of RF power, working pressure, and process time in pure Ar ambient. To investigate electrical, optical and structural properties of IZTO anode films, 4-point probe, Hall measurement, UV/Vis spectrometer, Field Emission Scanning Electron Microscopy (FE-SEM), and X-ray diffraction (XRD) were performed, respectively. A sheet resistance of $13.88\;{\Omega}/{\square}$, average transmittance above 80 % in visible range were obtained from optimized IZTO anode films grown on glass substrate. These results shown the amorphous structure regardless of RF power and working pressure due to low substrate temperature.

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Synthesis and Printability of Aqueous Ceramic Ink with Graft Polymer (Graft Polymer를 이용한 수계 세라믹 잉크의 합성 및 프린팅 특성평가)

  • Lee, Ji-Hyeon;Hwang, Hae-Jin;Kim, Jin-Ho;Hwang, Kwang-Taek;Han, Kyu-Sung
    • Korean Journal of Materials Research
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    • v.29 no.10
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    • pp.639-646
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    • 2019
  • Ink-jet printing is a manufacturing process technology that directly prints a digitalized design pattern onto a substrate using a fine ink jetting system. In this study, environmentally friendly yellow aqueous ceramic ink is synthesized by mixture of distilled water, yellow ceramic pigment and additives for ink-jet printing. The graft polymer, which combines electrostatic repulsion and steric hindrance mechanism, is used as a surfactant for dispersion stability of aqueous ceramic ink. Synthesized ceramic ink with graft polymer surfactant shows better dispersion stability than did ceramic ink with PAA surfactant; synthesized ink also shows desirable ink-jet printability with the formation of a single ink droplet during printability test. Finally, ceramic ink printed on glass substrate and ceramic ink with graft polymer surfactant shows a high contact angle without surface treatment on glass substrate. Consequently, it is confirmed that the ceramic ink with graft polymer surfactant can achieve high printing resolution without additional surface treatment process.

Effects on Heat Treatment Methods in Indium-Tin-Oxide Films by DC Magnetron Sputter of Powder Target

  • Kim, H.H.;Shin, J.H.;Baek, J.Y.;Shin, S.H.;Park, K.J.
    • Transactions on Electrical and Electronic Materials
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    • v.2 no.1
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    • pp.22-26
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    • 2001
  • ITO (Indium-tin-oxide) thin films were deposited on glass substrates by a dc magnetron sputtering system using ITO powder target. The methods of heat treatment are important factor to obtain high quality ITO films with low electrical resistivity and good optical transmittance. Therefore, both methods of the substrate temperature and post-deposition annealing temperature have been compared on the film structural, electrical and optical properties. A preferred orientations shifts from (411) to (222) peak at annealing temperature of 200$\^{C}$. Minimum resistivity of ITO film is approximately 8.7$\times$10$\^$-4/ Ωcm at substrate temperature of 450$\^{C}$. Optical transmittances at post annealing temperature above 200$\^{C}$ are 90%. As a result, the minimum value of annealing temperature that is required for the recrystallization of as-deposited ITo thin films is 200$\^{C}$.

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Design and Implementation of irrigation management embedded system controlling substrate moisture directly (배지수분 직접제어에 의한 급액관리 임베디드 시스템 설계 및 구현)

  • Lee, Han-Kwon;Byun, Young-Ki;Lee, Seung-Hyuk;Pack, Hyun-Ok;Cho, Tae-Kyung;Kim, Young-Shik;Park, Byoung-Soo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.2
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    • pp.188-194
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    • 2006
  • Since the late 1920's possibility of commercial hydroponics was testified practically. Hydroponics is used as environmentally friendly agriculture production system recently with high effectiveness. Now that existing irrigation control systems such as time control or solar radiation control cannot satisfy stable water content in root substrates, the needs for new irrigation system keep increasing. In this paper, we proposed environmentally friendly automatic irrigation management system by employing automation system based on electronic control system, which could solve problems based on manual irrigation management system. In addition, it suggested to be applied to any crops and will be able to overcome existing limit in irrigation by measuring the water content of root substrate in realtime.

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Electronic Structure and Magnetism of Fe Monolayer on Ir(001) (Ir(001) 위의 철 단층의 자성에 대한 전자구조 연구)

  • Kim, Dong-Chul;Lee, Jae-Il
    • Journal of the Korean Magnetics Society
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    • v.19 no.5
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    • pp.171-175
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    • 2009
  • The magnetism of the Fe monolayer on Ir(001) substrate [Fe/Ir(001)] was investigated by the first-principles energy band method. For comparison, the Fe and Ir ordered-alloyed monolayer on Ir(001) [Fe$_{0.5}$Ir$_{0.5}$/Ir(001)] was also considered. The calculated magnetic moments for Fe atoms in Fe/Ir(001) system and Fe$_{0.5}$Ir$_{0.5}$/Ir(001) system are 2.95 and 2.83 bohr magnetons, respectively. The detailed aspects of the magnetism and electronic structures for these systems are discussed with the calculated denisty of states and spin densities. The optimized atomic sites for the overlayer Fe and Ir atoms were determined by the total energy and atomic force calculations. The Fe atoms in Fe/Ir(001) move closer to the substrate Ir layer than the Fe atoms in Fe$_{0.5}$Ir$_{0.5}$/Ir(001) do to the Ir substrate.

A Study of Material Removal Characteristics by Friction Monitoring System of Sapphire Wafer in Single Side DMP (사파이어 웨이퍼 DMP에서 마찰력 모니터링을 통한 재료 제거 특성에 관한 연구)

  • Jo, Wonseok;Lee, Sangjik;Kim, Hyoungjae;Lee, Taekyung;Lee, Seongbeom
    • Tribology and Lubricants
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    • v.32 no.2
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    • pp.56-60
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    • 2016
  • Sapphire has a high hardness and strength and chemical stability as a superior material. It is used mainly as a material for a semiconductor as well as LED. Recently, the cover glass industry used by a sapphire is getting a lot of attention. The sapphire substrate is manufactured through ingot sawing, lapping, diamond mechanical polishing (DMP) and chemical mechanical polishing (CMP) process. DMP is an important process to ensure the surface quality of several nm for CMP process as well as to determine the final form accuracy of the substrate. In DMP process, the material removal is achieved by using the mechanical energy of the relative motion to each other in the state that the diamond slurry is disposed between the sapphire substrate and the polishing platen. The polishing platen is one of the most important factors that determine the material removal characteristics in DMP. Especially, it is known that the geometric characteristics of the polishing platen affects the material removal amount and its distribution. This paper investigated the material removal characteristics and the effects of the polishing platen groove in sapphire DMP. The experiments were preliminarily carried out to evaluate the sapphire material removal characteristics according to process parameters such as pressure, relative velocity and so on. In the experiment, the monitoring apparatus was applied to analyze process phenomena in accordance with the processing conditions. From the experimental results, the correlation was analyzed among process parameters, polishing phenomena and the material removal characteristics. The material removal equation based on phenomenological factors could be derived. And the experiment was followed to investigate the effects of platen groove on material removal characteristics.

Solid-State Fermentation for the Production of Meroparamycin by Streptomyces sp. strain MAR01

  • El-Naggar, Moustafa Y.;El-Assar, Samy A.;Abdul-Gawad, Sahar M.
    • Journal of Microbiology and Biotechnology
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    • v.19 no.5
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    • pp.468-473
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    • 2009
  • The antibiotic meroparamycin was produced in the free culture system of Streptomyces sp. strain MAR01. Five solid substrates (rice, wheat bran, Quaker, bread, and ground corn) were screened for their ability to support meroparamycin production in solid-state fermentation. In batch culture, wheat bran recorded the highest antibacterial activity with the lowest residual substrate values. The highest residual substrate values were recorded for both ground corn and Quaker. On the other hand, no antibacterial activity was detected for rice as a solid substrate. The use of the original strength of starch-nitrate medium in the solid-state fermentation gave a lower antibacterial activity compared with the free culture system. Doubling the strength of this medium resulted in the increase in the activity to be equivalent to the free culture. The initial pH (7.0) of the culture medium and 2 ml of spore suspension (1 ml contains $5{\times}10^{9}spores/ml$) were the optima for antibiotic production. The water was the best eluent for the extraction of the antibiotic from the solid-state culture. Ten min was enough time to extract the antibiotic using a mixer, whereas, 60 min was required when shaking was applied. Semicontinuous production of meroparamycin using a percolation method demonstrated a more or less constant antibacterial activity over 4 runs ($450-480{\mu}g/ml$). The semicontinuous production of the antibiotic was monitored in a fixed-bed bioreactor and the maximum activity was attained after the fourth run ($510{\mu}g/ml$) and the overall process continued for 85 days.

Properties of Glass-Ceramics in the System CaO-TiO2-SiO2 with the Additives of Al2O3, ZrO2 and B2O3 for Use in the Solid Oxide Fuel Cells.

  • Lee, Jun-Suk;Park, Min-Jin;Shin, Hyun-Ick;Lee, Jae-Chun
    • The Korean Journal of Ceramics
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    • v.5 no.4
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    • pp.336-340
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    • 1999
  • Glasses in the system $CaO-TiO_2-SiO_2-Al_2O_3-ZrO_2-B_2O_3$ were investigated to find the glass seal compositions suitable for use in the planar solid oxide fuel cell (SOFC). Glass-ceramics prepared from the glasses by one-stage heat treatment at $1,000^{\circ}C$ showed various thermal expansion coefficients (i,e., $8.6\times10^{-6^{\circ}}C^{-1}$ to $42.7\times10^{-6^{\circ}}C^{-1}$ in the range 25-$1,000^{\circ}C$) due to the viscoelastic response of glass phase. The average values of contact angles between the zirconia substrate and the glass particles heated at 1,000-$1,200^{\circ}C$ were in the range of $131^{\circ}\pm4^{\circ}$~$137^{\circ}\pm9^{\circ}$, indicating that the glass-ceramic was in partial non-wetting condition with the zirconia substrate. With increasing heat treatment time of glass samples from 0.5 to 24 h at $1,100^{\circ}C$, the DC electrical conductivity of the resultant glass-ceramics decreased from at $800^{\circ}C$. Isothermal hold of the glass sample at $1100^{\circ}C$ for 48h resulted in diffusion of Ca, Si, and Al ions from glass phase into the zirconia substrate through the glass/zirconia bonding interface. Glass phase and diffusion of the moving ion such as $Ca^{2+}$ in glass phase is responsible for the electrical conduction in the glass-ceramics.

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