• Journal of the Korean Society for Precision Engineering
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• v.30 no.9
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• pp.909-913
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• 2013

Various types of large substrate handling robots are used in the thin file solar cell manufacturing line as well as LCD or PDP production line. Because the robot handles the heavy substrate at high speed, there are some issues such as vibration control and the optimal design of arms and forks. As the substrate becomes larger and heavier, robot systems are also larger and the vibration issue of the robot end-effector becomes more important. In the paper, we established the robot modeling and the control architecture including the flexible part such as forks. Then, we performed dynamic simulation in the various condition and analyzed the characteristics of the fork vibration. We can reduce the vibration using the trajectory planning and input shaping algorithm and it was proved by experiment.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.498-503
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• 2016

Many types of robot systems are used in the mass production line of thin film solar cells and flat panel displays. There are some issues such as the deflection and the vibration of the end-effector because robots handle large and heavy substrates at high speed. Heavy payload and high speed cause much vibration because the end-effector (fork) is made of carbon fiber reinforced polymer because of its light weightiness and sufficient stiffness. This study performs a dynamic simulation of an 8.5G solar cell substrate handling robot, including rigid and flexible bodies and a vibration controller. The fifth polynomial trajectory and the zero vibration derivative input shaping algorithm are applied. The vibration reduction is also proved in the experiments.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.7 s.250
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• pp.741-749
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• 2006

For last couple of decades, uses of TFI-LCDs have been expanded to many FPD(Flat Panel Display) applications including mobile displays, desktop monitors and TVs. Furthermore, there has been growing demand for increasingly larger LCD TVs. In order to meet this demand as well as to improve productivity, LCD manufactures have continued to install larger-generation display fabrication facilities which are capable of producing more panels and larger displays per mother glass(substrate). As the size of mother glass becomes larger, a robot required to handle the glass becomes bigger accordingly, and its end effectors(arms) are extended to match the glass size. With this configuration, a considerable static deflection occurs at the end of the robot arms. In order to stack maximum number of mother glasses on a given footprint, the static deflection should be compensated. This paper presents a novel static deflection compensation algorithm. This algorithm requires neither measurement instrument nor additional vertical axis on the robot. It is realized by robot controller software. The forward and inverse kinematics considering compensation always guarantees a unique solution, so the proposed algorithm can be applied to an arbitrary robot position. The algorithm reduced static deflection by 40% in stationary robot state experiment. It also improved vertical path accuracy up to 60% when the arm was running at its maximum speed. This algorithm has been commercialized and successfully applied to a seventh-generation LCD glass-handling robot.

• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.1-5
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• 2008

There is a need to enlarge the mother glass substrate in OLED to raise its productivity and to realize OLED TV. On the other hand, some difficulties may arise regarding the deflection of a large glass substrate during its handling operation due to its thinness $(0.5\sim0.7t)$, which is not even enough to allow it to stand its own mass. This thesis proposes a conceptual plan for the application of the clamping- and bending-end conditions to the glass substrate handler. To verify proposed plan, the non-contact 3 dimensional measuring instrument is developed. The composition of the 3 dimensional measuring instrument measures shape of the product using X-Y stage robot and laser distance sensor. X-Y stage robot and laser distance sensor are controlled by LabVIEW language. To calibrate measuring instrument, the direction conversion of the Euler angle was used. In order to confirm deflection of the glass substrate, the experiment was carried out at the bending end boundary condition and the proposed effect was verified.