• 제목/요약/키워드: Substrate angle

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Surface Analysis of Copper-Tin Thin Films Synthesized by rf Magnetron Co-sputtering

  • 강유진;박주연;강용철
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.272.2-272.2
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    • 2016
  • Copper-Tin (CuSn) thin films were synthsized by rf magnetron co-sputtering method with pure Cu and Sn metal targets with various rf powers and sputtering times. The obtained CuSn thin films were characterized by a surface profiler (alpha step), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), and contact angle measurement. The deposition rates were calculated by the thickness of CuSn thin films and sputtering times. We observed hexagonal Cu20Sn6 and cubic Cu39Sn11 phases from the films by XRD measurement. From the survey XPS spectra, the Cu and Sn main peaks were observed. Therefore, we could conclude CuSn thin films were successfully fabricated on the substrate in this study. The changes of oxidation states and chemical environment of the films were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. Surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG) using the contact angle measurement. The total SFE of CuSn thin films decreased as rf power on Cu target increased. The contribution to the total SFE of dispersive SFE was relatively superior to polar SFE.

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Thermal Behavior Variations in Coating Thickness Using Pulse Phase Thermography

  • Ranjit, Shrestha;Chung, Yoonjae;Kim, Wontae
    • 비파괴검사학회지
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    • 제36권4호
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    • pp.259-265
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    • 2016
  • This paper presents a study on the use of pulsed phase thermography in the measurement of thermal barrier coating thickness with a numerical simulation. A multilayer heat transfer model was ussed to analyze the surface temperature response acquired from one-sided pulsed thermal imaging. The test sample comprised four layers: the metal substrate, bond coat, thermally grown oxide and the top coat. The finite element software, ANSYS, was used to model and predict the temperature distribution in the test sample under an imposed heat flux on the exterior of the TBC. The phase image was computed with the use of the software MATLAB and Thermofit Pro using a Fourier transform. The relationship between the coating thickness and the corresponding phase angle was then established with the coating thickness being expressed as a function of the phase angle. The method is successfully applied to measure the coating thickness that varied from 0.25 mm to 1.5 mm.

Surface analysis of CuSn thin films obtained by rf co-sputtering method

  • 강유진;박주연;정은강;강용철
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.175.1-175.1
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    • 2015
  • CuSn thin films were deposited by rf magnetron co-sputtering method with pure Cu and Sn metal targets with a variety of rf powers. CuSn thin films were studied with a surface profiler (alpha step), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), X-ray diffraction (XRD), and contact angle measurement. The thickness of CuSn thin films was fixed at $200{\pm}10nm$ and deposition rate was calculated by the measured with a surface profiler. From the survey XPS spectra, the characteristic peaks of Cu and Sn were observed. Therefore, CuSn thin films were successfully synthesized on the Si (100) substrate. The oxidation state and chemical environment of Cu and Sn were investigated with the binding energy regions of Cu 2p XPS spectra, Sn 3d XPS spectra, and Cu LMM Auger spectra. Change of the crystallinity of the films was observed with XRD spectra. Using contact angle measurement, surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG).

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$Al/Al_2O_3$ 계면의 젖음특성 및 계면반응 (Wetting Characteristics and Interfacial Reaction at $Al/Al_2O_3$ Interface)

  • 권순용;정대영;최시경;구형회;이종수
    • 한국세라믹학회지
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    • 제31권8호
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    • pp.815-822
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    • 1994
  • Sessile drop studies of molten Al on single crystal sapphire substrate were conducted to understand the wetting behavior and interfacial reaction at Al/Al2O3 interface. To investigate the wetting mechanism, the variation in contact angle was determined with time. The contact angle obtained in this study decreased exponentially with time. This result means that the driving force for wetting is the reduction in interfacial energy between liquid Al and sapphire caused by the interfacial reaction. The closer examination revealed that the reaction was the dissolution of sapphire by molten Al. Ti has been frequently used to improve wetting on ceramic materials. Therefore, the influence of Ti content on the wetting behaviour was investigated in this work. The equilibrium wetting angles of pure Al, Al-0.3 wt%Ti, and Al-1.0 wt%Ti at 100$0^{\circ}C$ were 63$^{\circ}$, 59$^{\circ}$, and 54$^{\circ}$respectively. The difference is considered as the result of the change in interfacial energy caused by the reaction between Ti and sapphire and the interfacial reaction formed the reaction products of varying stoichiometry (TiO, Ti2O3, TiO2 etc.).

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기생 패치의 결합 특성을 이용한 빔 틸팅 마이크로스트립 패치 배열 안테나 설계 (Design of a Tilted Beam Microstrip Patch Array Antenna using Parasitic Patch Coupling Characteristics)

  • 하재권;박동철
    • 한국전자파학회논문지
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    • 제14권2호
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    • pp.202-208
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    • 2003
  • 본 논문에서는 기생 패치와 구동기 패치가 서로 다른 층에서 H-plane 에지 결합과 broadside 결합을 통해 고이득과 큰 틸팅 각도를 얻을 수 있는 위성 방송 수신용의 마이크로스트립 패치 배열 안테나를 제안하였다. 제안된 안테나는 고가의 유전체 기판 대신에 폴리에스터 동장 적층 필름과 폼을 사용하여 16$\times$8 배열로 설계 제작되었으며, 이득 22.9 dBi, 3dB 빔 폭 4.6$^{\circ}$, 그리고 broadside 방향에서 43.9$^{\circ}$기울어진 빔 특성을 가지고 있다.

PEMFC용 분리판 표면코팅 및 부식성 평가 (Surface Coating and Corrosion Characteristics of Bipolar Plates of PEMFC Application)

  • 강경민;김동묵;최정식;차인수;윤영훈
    • 한국수소및신에너지학회논문집
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    • 제22권2호
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    • pp.199-205
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    • 2011
  • Stainless steel 304 and 316 plates were deposited with the multi-layered coatings of titanium film (0.1 um) and gold film (1-2 um) by an electron beam evaporation method. The XRD patterns of the stainless steel plates modified with the multi-layered coatings showed the crystalline phases of the external gold film and the stainless steel substrate. Surface microstructural morphologies of the stainless steel bipolar plates modified with multi-layered coatings were observed by AFM and FE-SEM images. The external gold films formed on the stainless steel plates showed micro structure of grains of about 100 nm diameter. The grain size of the external surface of the stainless steel plates increased with the gold film thickness. The electrical resistance and water contact angle of the stainless steel bipolar plates covered with multi-layered coatings were examined with the thickness of the external gold film.

다중노광 나노구 리소그라피를 이용한 쌍-광자결정 어레이 제작 (Fabrication of Pair-Photonic Crystal Arrays using Multiple-Exposure Nanosphere Lithography)

  • 여종빈;한광민;이현용
    • 한국전기전자재료학회논문지
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    • 제23권3호
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    • pp.245-249
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    • 2010
  • Two dimensional(2D) pair-photonic crystals (pair-PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns and the collimated laser beam as a multiple-exposing source. The arrays of the 2D pair-PCs exhibited variable lattice structures and shape the control of rotating angle (${\Theta}$), tilting angle (${\gamma}$) and the exposure conditions. In addition, the base period or filling factor of pair-PCs as well as their shapes could be changed by experimental conditions and nanosphere size. A 1.18-${\mu}m$-thick resist was spincoated on Si substrate and the multiple exposure was carried out at change of ${\gamma}$ and ${\Theta}$. Images of prepared 2D pair-PCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the pair-periodic arrays of large area.

Fabrication and characterization of $YBa_2Cu_3O_7$ step-edge Josephson junctions prepared on sapphire substrates

  • Lim, Hae-Ryong;Kim, In-Seon;Kim, Dong-Ho;Park, Yong-Ki;Park, Jong-Chul
    • Progress in Superconductivity
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    • 제1권2호
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    • pp.146-150
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    • 2000
  • Step edge Josephson junctions in c-axis oriented $YBa_2Cu_3O_7$ films were fabricated on $CeO_2$ buffered sapphire substrates. The step angle was controlled in the wide range of $20^{\circ}\sim75^{\circ}$ by the Ar ion milling technique. I-V curves of junction fabricated on the thickness ratio of $\sim$0.8 and the step angle of $35^{\circ}$ were exhibited RSJ-like behavior with $I_CR_N$ product of $\sim250{\mu}A$ and critical current density of $\sim2\times10^4A/cm^2$ at 77 K. Critical current of step edge junction was increased linearly with decreasing temperature but the normal resistance was almost constant. Total samples of step edge Josephson junction was satisfied a scaling behavior of $I_CR_N{\propto}(J_C)^{0.5}$.

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광자결정 제작을 위한 홀로그라피 공정 연구 (A Study on the Holographic Process for Photonic Crystal Fabrication)

  • 여종빈;윤상돈;이현용
    • 한국전기전자재료학회논문지
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    • 제20권8호
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    • pp.726-730
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    • 2007
  • Two dimensional photonic crystals (2D PCs) have been fabricated by a double exposure holographic method using a He-Cd laser with a wavelength of 442nm. The arrays of the 2D PCs exhibit variable lattice structures from square to triangle according to a change of rotating angle $({\gamma})$ for double exposure beams. In addition, the period and filling factor of PCs as well as the forms (dot or antidot) could be controlled by experimental conditions. $A l.18-{\mu}m-thick$ resist was spin-coated on Si substrate and the 1st holographic exposure was carried out at incident angle $({\theta})$ of $11^{\circ}$. Then the sample was rotated to ${\gamma}=45^{\circ}{\sim}90^{\circ}$ and the 2nd holographic process was performed at ${\theta}=11^{\circ}$. The variation of diffraction efficiency during the exposure process was observed using a He-Ne laser in real time. The images of 2D PCs prepared were analyzed by SEM and AFM. We believe that the double holographic method is a tool suitable to realize the 2D PCs with a periodic array of large area.

Reactive Magnetron Sputtering법으로 제조된 $TiO_2$의 친수성/소수성 변환 특성 (Hydrophilic/Hydrophobic Conversion of $TiO_2$ Films by Reactive Magnetron Sputtering)

  • 이영철;박용환;안재환;고경현
    • 한국세라믹학회지
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    • 제36권11호
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    • pp.1211-1216
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    • 1999
  • TiO2 thin films were prepared by reactive magnetron sputtering on glass substrate and subjected into investigation about their hydrophilic properties. Varing Ar/O2 ration and post annealing at 50$0^{\circ}C$ for 12h anatase and rutile phases of TiO2 films were obtained. Hydrophilic properties were evaluated by determination of contact angle of water droplet on TiO2 surface. On as-annealed TiO2 films water droplet spreaded widely with ~0$^{\circ}$contact angle. Sonication(60 Hz, 28kHz 40kHz) and following dark room treatments turned these hydrophilic TiO2 films into hydrophobic state. All of hydrophobic films were converted recersibly into their original state after UV illumination. Hydrophobic states of anatase films were saturated after sonication and remain same during dark room treatment. But it was found that the conversion into hydrophobic state of rutile films progressed. further after sonication. Therefore it was concluded that Ti3+/Ti+4 ratio is the key to determine hydrophilicity of TiO2 surface so that different surface structure of polymorphs could lead to unique characteristics.

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