• Title/Summary/Keyword: Substrate angle

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$CHF_3/C_2F_6$ 반응성이온 건식식각에 의한 실리콘 표면의 변형에 관한 연구 (A study on a silicon surface modification by $CHF_3/C_2F_6$ reactive ion etching)

  • 박형호;권광호;곽병화;이수민;권오준;김보우;성영권
    • 한국재료학회지
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    • 제1권4호
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    • pp.214-220
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    • 1991
  • 실리콘 산화막을 $CHF_{3/}C_2F_6$ 혼합가스를 사용하여 반응성이온 건식식각을 행할 때 실리콘 표면에 형성되는 잔류막과 손상층을 X-선 광전자 분광기(XPS)와 이차이온 질량 분석기(SIMS)를 사용, 연구하였다. 실리콘, 탄소, 산소 및 불소의 angle-resolved XPS분석기술을 이용한 비파괴적 화학결합상태의 깊이분포 분석을 통하여 잔류막의 표면부에 O-F 결합이 존재하며 잔류막은 주로 탄소와 불소의 결합체인 C-F 플리머로 구성되어져 있고 Si-O, Si-C 및 Si-F 결합 등이 존재함을 알았다. 손상층은 실리콘 표면에서 약 60nm 깊이까지 탄소와 불소의 침투에 의해 형성되어져 있음을 알았다.

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자기변형잉크젯헤드에서 토출된 액적의 정적 착지정확도 모델링 및 실험적 검증 (Modeling and Experimental Verification on Static Landing Accuracy of Droplets from Magnetostrictive Inkjet Head)

  • 유은주;박영우
    • 한국정밀공학회지
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    • 제30권1호
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    • pp.77-84
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    • 2013
  • Most research on the inkjet printing technology has focused on the development of inkjet head itself, and of process, not on the landing accuracy of the droplets to a target. Thus, this paper presents the modeling and experimental verification on the static landing accuracy and precision of the droplets from the magnetostrictive inkjet head. A simple model based on the angle deviation of a nozzle tip and on a distance to a substrate is considered, assuming that there is no ambient effect. The angle deviation of the nozzle tip is determined by using its digital image with the aid of a pixel calculation program, and the distance to the substrate is set to 1 mm. Three experiments have planned and preformed. The first experiment is to collect the initial data for the landing distribution of the droplets. The second experiment is to collect the repeatability data of the stage used. Then, these data are used to rederive the equation for the final landing position of the droplet. The final experiment is to verify the equation and to show the calibration results. The respective landing accuracy of the droplet after calibration on the x-axis and on y axis has improved from $338.51{\mu}m$ and $-133.63{\mu}m$ to $7.06{\mu}m$ and $13.11{\mu}m$. The respective percent improvement on the x-axis and on y axis reaches about 98 and about 90. The respective landing precision of the droplet after calibration on the x-axis and on y axis has improved from ${\pm}182.6{\mu}m$ and ${\pm}182.88{\mu}m$ to ${\pm}24.64{\mu}m$ and ${\pm}42.76{\mu}m$. The respective percent improvement on the x-axis and on y axis reaches about 87 and about 77.

Tripod polishing을 이용한 IBAD/RABiTS 기판의 TEM 분석 (TEM analysis of IBAD/RABiTS substrates prepared by Tripod polishing)

  • 최순미;정준기;유상임;박찬;오상수;김철진
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권1호
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    • pp.9-14
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    • 2006
  • Sample preparation plays a critical role in microstructure analysis using TEM. Although TEM specimen has been usually prepared by jet-polishing or Ar-ion beam milling technique. these methods could not be applied to YBCO CC which is composed of IBAD or RABiTS substrates, several buffet layers, and YBCO superconducting layer because of big difference in mechanical strengths between the metallic phase and oxide phases. To obtain useful cross-sectional information such as interface between the phases or second phases in YBCO CC, it is prerequisite to secure the large area of thin section in the cross-sectional direction. The superconducting layer or the buffer layers are relatively weak and fragile compared to the metallic substrate such as Ni-5wt%W RABiTS of Hastelloy-based IBAD, and preferential removal of weak ceramic phases during polishing steps makes specimen preparation almost impossible. Tripod polisher and small jig were home-made and employed to sample preparation. The polishing angle was maintained <$1^{\circ}$ throughout the polishing steps using 2 micrometers attached to the tripod plate. TEM specimens with large and thin area could be secured and used for RABiTS/IBAD substrate analyses. In some cases, additional Ar-beam ion milling with low beam current and impinging angle was used for less than 30 sec. to remove debris or polishing media attacked to the specimens.

소수성 UV 경화형 우레탄 아크릴레이트와 아크릴 점착제 사이의 계면 부착력 향상을 위한 에폭시 실란의 영향 (Effect of Silane Coupling Agent on Adhesion Properties between Hydrophobic UV-curable Urethane Acrylate and Acrylic PSA)

  • 노지은;변민선;조태연;함동석;조성근
    • 공업화학
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    • 제31권2호
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    • pp.230-236
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    • 2020
  • 본 연구에서는 모바일 기기용 방수 및 내충격 기능성 소재로 사용되는 우레탄-아크릴레이트 점착테이프의 부착력 향상 연구를 수행하였다. 소수성 표면을 가진 기재(substrate) 필름과 아크릴 점착제 사이의 젖음성 및 밀착력 하락으로 인한 점착테이프의 물성 저하를 개선하기 위해, 에폭시 작용기를 가진 실란 커플링제인 3-glycidoxy-propyl trimethoxysilane (GPTMS)을 UV 경화형 우레탄-아크릴레이트 수지에 함량별로 첨가하여 필름을 제조하였다. FT-IR, EDS, XPS를 이용하여 실란 커플링제의 함량에 따른 기재 필름의 표면 결합 특성을 확인하였고, 인장강도, 접촉각, 겔 분율(gel fraction)을 측정하여 기계적 물성 변화를 비교하였다. 또한 우레탄-아크릴레이트 필름의 양쪽에 아크릴 점착제를 코팅하여 양면 점착테이프를 제조하고, 180, 90° 박리강도(peel strength)를 측정하여 실란 커플링제 함량별로 기재 필름과 점착제 사이의 접착력(밀착력)을 비교하였다. 실란 커플링제 함량이 증가할수록 기재필름의 다양한 물성의 변화를 보였지만, 0.5~1 wt% 정도의 첨가는 기타 물성의 손실 없이 효과적으로 점착층과의 계면 부착력을 향상시켰다.

코로나방전 표면 처리시 이동속도 및 공급전력 변화에 따른 폴리프로필렌 표면 안전성 특성 (Surface Safety Characteristics of Polypropylene Surface Treatment by Variation of Rolling Speed and The Electric Power of Corona Discharge)

  • 이수환;이동훈
    • 한국안전학회지
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    • 제33권1호
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    • pp.41-46
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    • 2018
  • Experiments were carried out the phenomenal observation on effect of corona treated hotmelt laminating film in process of manufacture by 2 kinds of rolling speed and electric power variatons. Surface treatment by corona which is exposure of film surface to electron of ion bombardment, rather than mere exposure to active species, like atomic oxygen or ozone, can enhance adhesion by removing contaminant, electret, roughening surface, and introducing reactive chemical group. Reactive neutrals, ions, electron and photons generated during the corona treatment interact simultaneously with polymers to alter surface chemical composition, wettability, and thus film adhesion. However, it is highly recommended that extensive chains scission is avoided because it can lead to side-effect by forming sticky matter, resulting in dropouts. This paper reviews principles of surface preparation of polypropylene substrate by corona discharging. In addition, the experimental section provides a description of parameter optimization on corona discharging treatment and its side-effect. Experimental results are discussed in terms of surface wetting as determined by contact angle and SEM measurements. When the rolling speed of the film decreased from 1.666 [m / sec] to 0.083 [m / sec], contact angle decreased from $80[^{\circ}]$ to $64[^{\circ}]$, and the wettability was greatly improved. As the supply power increased from 0.4 [kVA] to 2 [kVA] at the corona discharge surface treatment, the contact angle decreased from $77[^{\circ}]$ to $65[^{\circ}]$, and the wettability was greatly improved.

Superhydrophobic nanostructured non-woven fabric using plasma modification

  • Shin, Bong-Su;Lee, Kwang-Reoul;Kim, Ho-Young;Moon, Myoung-Woon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.320-320
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    • 2011
  • We describe fabrication of superhydrophobic surface on non-woven fabric (NWF) having nano-hairy structures and a hydrophobic surface coating. Oxygen plasma was irradiated on NWF for nano-texuring and a precursor of HMDSO (Hexamethydisiloxane) was introduced as a surface chemical modification for obtaining superhydrophobicity using 13.56 MHz radio frequency-Plasma Enhanced Chemical Vapor Deposition (rf-PECVD). O2 plasma treatment time was varied from 1 min to 60 min at a bias voltage of 400V, which fabricated pillar-like structures with diameter of 30 nm and height of 150 nm on NWF. Subsequently, hydrophobic coating using hexamethyldisiloxane vapor was deposited with 10 nm thickness on NWF substrate at a bias voltage of 400 V. We evaluate superhydrophobicity of the modified NWF with sessile drop using goniometer and high speed camera, in which aspect ratio of nanohairy structures, contact angle and contact angle hysteresis of the surfaces were measured. With the increase of aspect ratio, the wetting angle increased from $103^{\circ}$ to $163^{\circ}$, and the contact angle hysteresis decreased dramatically below $5^{\circ}$. In addition, we had conducted experiment for nucleation and condensation of water via E-SEM. During increasing vapor pressure inside E-SEM from 3.7 Torr to over 6 Torr which is beyond saturation point at $2^{\circ}C$, we observed condensation of water droplet on the superhydropobic NWF. While the condensation of water on oxygen plasma treated NWF (superhydrophilic) occurred easily and rapidly, superhydrophobic NWF which was fabricated by oxygen and HMDSO was hardly wet even under supersaturation condition. From the result of wetting experiment and water condensation via E-SEM, it is confirmed that superhydrophobic NWF shows the grate water repellent abilities.

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18K 레드 골드 정함량 솔더의 In 첨가에 따른 물성변화 (Properties of the 18K Red Gold Solder Alloys with Indium Contents)

  • 송정호;송오성
    • 한국재료학회지
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    • 제28권2호
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    • pp.89-94
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    • 2018
  • The properties of 18 K red gold solder alloys were investigated by changing the content of In up to 10.0 wt% in order to replace the hazardous Cd element. Cupellation and energy dispersive X-ray spectroscopy (EDS) were used to check the composition of each alloy, and FE-SEM and UV-VIS-NIR-Colormeter were employed for microstructure and color characterization. The melting temperature, hardness, and wetting angle of the samples were determined by TGA-DTA, the Vickers hardness tester, and the Wetting angle tester. The cupellation result confirmed that all the samples had 18K above 75.0wt%-Au. EDS results showed that Cu and In elements were alloyed with the intended composition without segregation. The microstructure results showed that the amount of In increased, and the grain size became smaller. The color analysis revealed that the proposed solders up to 10.0 wt% In showed a color similar to the reference 18 K substrate like the 10.0 wt% Cd solder with a color difference of less than 7.50. TGA-DTA results confirmed that when more than 5.0 wt% of In was added, the melting temperature decreased enough for the soldering process. The Vickers hardness result revealed that more than 5.0 wt% In solder alloys had greater hardness than 10.0 wt% Cd solder, which suggested that it was more favorable in making a wire type solder. Moreover, all the In solders showed a lower wetting angle than the 10.0 wt% Cd solder. Our results suggested that the In alloyed 18 K red gold solders might replace the conventional 10.0 wt% Cd solder with appropriate properties for red gold jewelry soldering.

에어로졸성막법으로 성막한 Bi:YIG 막의 광학적/자기적특성에 미치는 에어로졸 입사각도의 영향 (Aerosol Incident Angle Dependence of Optical and Magnetic Properties of Bi:YIG Films Deposited with Aerosol Deposition Method)

  • 신광호
    • 한국자기학회지
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    • 제18권1호
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    • pp.9-13
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    • 2008
  • 에어로졸 성막법으로 제작된 Bi:YIG($Bi_{0.5}Y_{2.5}Fe_5O_{12}$) 막에 있어서, 에어로졸 입사각도가 광학적 특성과 자기적 특정에 미치는 영향에 대하여 조사하였다. 에어로졸입사각도를 0도에서 30도로 증가시킴으로써 입사광의 파장이 450 nm일 때 광투과율은 약 80%의 향상이 얻어졌다. 그 이유는 에어로졸 입사각도를 높임으로써 입자간 응집체 등에 의해서 생성되는 막표면 혹은 막내부의 결함을 줄일 수 있기 때문으로 고찰되었다. 또한, 에어로졸 입사각도를 높임으로써 Bi:YIG막의 보자력을 크게 줄일 수 있다는 것을 실험적으로 검증할 수 있었다. 그 이유로는 에어로졸 입사각도를 높임으로써 입자와 기판간의 충돌에너지의 변화와 자벽이동의 방해가 되는 결함의 감소가 정성적으로 예상되었다.

아르곤 플라즈마를 이용하여 유리기판에 증착된 PTFE 박막의 초친수 특성 연구 (Hydrophobic Properties of PTFE Film Deposited on Glass Surface Etched by Ar-plasma)

  • 이병로;배강;김화민
    • 한국전기전자재료학회논문지
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    • 제27권8호
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    • pp.516-521
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    • 2014
  • An excellent hydrophobic surface has a high contact angle over 147 degree and the contact angle hysteresis below $5^0$ was produced by using roughness combined with hydrophobic PTFE coatings, which were also confirmed to exhibit an extreme adhesion to glass substrate. To form the rough surface, the glass was etched by Ar-plasma. A very thin PTFE film was coated on the plasma etched glass surface. Roughness factors before or after PTFE coating on the plasma etched glass surface, based on Wensel's model were calculated, which agrees well with the dependence of the contact angle on the roughness factor is predicted by Wensel's model. The PTFE films deposited on glass by using a conventional rf-magnetron sputtering. The glass substrates were etched Ar-plasma prior to the deposition of PTFE. Their hydrophobicities are investigated for application as a anti-fouling coating layer on the screen of displays. It is found that the hydrophobicity of PTFE films mainly depends on the sputtering conditions, such as rf-power, Ar gas content introduced during deposition. These conditions are closely related to the deposition rate or thickness of PTFE film. Thus, it is also found that the deposition rate or the film thickness affects sensitively the geometrical morphology formed on surface of the rf-sputtered PTFE films. In particular, 1,950-nm-thick PTFE films deposited for 30 minute by rf-power 50 watt under Ar gas content of 20 sccm shows a very excellent optical transmittance and a good anti-fouling property and a good durability.

이온빔 조사 각도와 에너지강도에 의한 수직 배향막의 특성 분석 (Characteristic Analysis of Vertical Alignment by Ion-beam Irradiation Angle and Energy Density)

  • 강동훈;오병윤;김병용;한진우;김영환;옥철호;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.398-398
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    • 2007
  • The Liquid Crystal (LC) alignment uniformity is very important in LC devices. The alignment mechanism of LC molecules on a rubbed polyimide (PI) surface is very important for both LC fundamental research and application. So, Generally a rubbing method to align LC has been widely used to mass-produce LCD panels. But because rubbing method is contact method between rubbing fabric and indium-tin-oxide glass or flexible substrate, rubbing method has some defects, such as the electrode charges and the creation of contaminating particles. Thus we strongly recommend a non-contact alignment technique for getting rid of some defects of rubbing method. Most recently, the LC aligning capabilities achieved by ion-beam exposure on the organic and nonorganic thin film surface have been reported successfully. In this research, we studied the tilt angle generation and electro-optical performances for a NLC on homeotropic polyimide surfaces with ion-beam exposure. The LC aligning capabilities of a nematic liquid crystal (NLC) on a homeotropic PI surface using a new ion-beam method were studied. On the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good. And we achieved satisfactory result for EO character.

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