• 한국세라믹학회지
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• 제29권5호
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• pp.383-390
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• 1992

We investigated the effect of substrate on the properties of the Ni-Zn-Cu ferrite thin films deposited on SiO2 (1000∼3000${\AA}$) / Si (100) substrate at various conditions by rf magnetron sputtering. A disktype Ni-Zn-Cu ferrite sintered by conventional ceramic process and argon gas were used as a target and a sputtering gas, repectively. The compositions of the thin films measured by EPMA were similar to target composition (Fe: 65.8 at%, Ni: 12.7 at%, Cu: 6.7 at%, Zn: 14.8 at%) irrespective of substrate temperature. Amorphous thin films were deposited when substrate was not intentionally heated, but the films came to crystallize with increasing substrate temperature, and crystalline thin films were deposited at substrate temperature above 200$^{\circ}C$. Below 250$^{\circ}C$ saturation magnetization (Ms), remanence (Mr) and coercivity (Hc) of the ferrite thin film increased with the substrate temperature due to the increase of grain size and the improvement of crystallinity. And above 250$^{\circ}C$, Ms, Mr increased slightly, but Hc of the amorphous thin films increased due to crystallization, whereas that of the crystalline thin films decreased because of grain growth and stress release.

• 열처리공학회지
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• 제4권4호
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• pp.1-14
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• 1991

In PECVD(Plasma-Enhanced Chemical Vapor Deposition) process, titanium nitride is thin and its adhesion is poor for the protective coatings. Therefore it has been studied that intermediate layer forms between substrate and TiN thin film. Using R.F. plasma nitriding, nitride layer was first formed, then TiN thin film coated by PECVD. The chemical composition of the coatings has been characterized using AES, EDS and their crystallographic structure by means of XRD. Mechanical properties such as microhardness and film adhesion have also been determined by vickers hardness test, scratch test and indentation test. As a result, there was no difference in chemical composition and structure between the TiN deposition only and the composite of TiN deposition on nitrided steel. It was found that nitrided substrate increased the hardness of TiN coatings and was beneficial in preventing the plastic deformation in the substrate. Therefore the effective load bearing capacity of the TiN coatings on nitrided steel was increased and their adhesion was improved as well. According to the results of this study, the processes that lead to the formation of composite layers characterized by good working properties, i.e., high microhardness, adhesion and resistance to deformation.

• 한국표면공학회지
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• 제29권6호
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• pp.829-833
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• 1996

Superconducting YBaCuO thin films were deposited on MgO (100) single crystal substrate by rf reactive sputtering method. Sputtering target was prepared by mixing the original powders of $Y_2O_3$, $BaCO_3$, and CuO at $830^{\circ}C$, and its composition was $YBa_2Cu_{3.3}O_x$ adding the excess CuO to compensate for the loss of Cu in the deposition process. The sputtering conditions for a high quality of YBCO thin film were: substrate temperature of 13$0^{\circ}C$; gas pressure of 10 mTorr; gas mixture ($O_2$: Ar =10: 90); distance of 2.5 inch; and rf power density of 4.87 W /$\textrm{cm}^2$. The deposition rate was 2.4~2.6 nm/min. From the RBS results, it was found that Cu and Ba contents in thin films decreased with the increase of substrate temperature. The increase of gas pressure resulted in significant deficiency of Ba elements.

• 한국세라믹학회지
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• 제43권5호
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• pp.293-298
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• 2006

For substrate glass applied to PDP (Plasma Display Panel), it has been developed many glass compositions that have to not only meet the specifications of PDP but also satisfy the float process as production technology. In the present work several compositions with no deformation at PDP processing temperature and thermal expansion coefficient of $83{\sim}9{\times}10^{-7}/K$ were designed. Based on viscosity at high temperature and liquidus temperature for those compositions, three candidate compositions named T-2, T-4, T-6 were selected finally. It was examined additionally that thermal shrinkage at PDP processing temperature and visible transmittance. The properties of T-series were compared with those of commercial glasses and discussed from the view point of PDP device and glass production.

• 한국표면공학회지
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• 제27권5호
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• pp.261-272
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• 1994

Both Cu-Cr and Cu-Ti alloy films with different composition were prepared by dc magnetron sputtering onto polyimide substrate and their adhesion and microstructure were observed. In addition, the effect of heat treatment at $400^{\circ}C$ for 2 hours on the variation of adhesion properties and on the changess of microstructure were investigated. Cu-Cr alloy films have crystalline structure of either for or bcc phase depending on the composition of the film. However, the Cu-Ti alloy film forms fcc phase at low Ti concentration while it forms an amorphous phase as the Ti concentration in the films is increased to more than 25at.%. TEM analysis reveal that the microstructure of Cu-Cr and Cu-Ti films forms an open structure with vacant spaces. The adhesion between Cu-Cr, Cu-Ti alloy films and polyimide substrate is relatively good before the heat treatment, but is noticeably reduced after the heat treatment. In particular, the adhesion strength is significantly reduced in the Cu-Ti alloy films after the heat treatment. The reduction of adhesion strength after the heat treatment is identified to relate with the formation of oxide phases at the metal/polyimide interface by AES(Auger Electron Spectroscopy).

• 한국전기전자재료학회논문지
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• 제20권7호
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• pp.600-605
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• 2007

Process variables for manufacturing the $CuInSe_2$ thin film were established in order to clarify optimum conditions for growth of the thin film depending upon process conditions (substrate temperature, sputtering pressure, DC/RF Power), and then by changing a number of vapor deposition conditions and Annealing conditions variously, structural and electrical characteristics were measured. Thereby, optimum process variables were derived. For the manufacture of the $CuInSe_2$, Cu, In and Se were vapor-deposited in the named order. Among them, Cu and In were vapor-deposited by using the sputtering method in consideration of their adhesive force to the substrate, and the DC/RF power was controlled so that the composition of Cu and In might be 1 : 1, while the surface temperature having an effect on the quality of the thin film was changed from $100^{\circ}C\;to\;300^{\circ}C$ at intervals of $50^{\circ}C$. The diffract fringe of X-ray, which depended upon the substrate temperature and the Annealing temperature of the manufactured $CuInSe_2$ thin film, was investigated. scanning electron microgaphs of represents a case that a sample manufactured at the substrate temperature of $100^{\circ}C$ was thermally treated at $200{\times}350^{\circ}C$. As a result, at $500^{\circ}C$ of the Annealing temperature, their chemical composition was measured in the proportion of 1 : 1 : 2. It could be known that under this condition, the most excellent thin film was formed, compared with the other conditions.

• KSBB Journal
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• 제26권4호
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• pp.347-351
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• 2011

In this study, we investigated the effect of reaction factors on enzymatic hydrolysis of Hizikia fusiforme, which is brown algae in marine biomass resource, using commercial enzymes. The composition of H. fusiforme is 38.9% of reducing sugar, 4.8% of moisture, 17.8% of ash, and 38.5% of others. In the condition of 1-5% substrate, the increase of substrate concentration enhanced the increase of reducing sugar formation; however, the hydrolysis yield did not increase after 24 h. After reaction of 75 h, conversion yield of reducing sugar were obtained to 16.45%, 17.99%, and 14.55% at 1, 2.5, and 5% substrate, respectively. As a result of effect of enzyme amount, the formation of reducing sugar did not show considerable change at 1% substrate. However, in the condition of 2.5% substrate, the great change of reducing sugar formation was observed by the increase of enzyme amount. The conversion yields of reducing sugar were obtained to 18.77% and 22.83% at 1% and 2.5% substrate with 30% enzyme, respectively. As a result of heat treatment of biomass, the high yield was obtained in 2.5% substrate and the yields were increased to 0.06-7.2% by the heat treatment. This result will provide the basic information for production process of biofuels and chemicals from marine biomass H. fusiforme.

• Journal of Microbiology and Biotechnology
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• 제3권2호
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• pp.129-133
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• 1993

The effect of different compositions of organic acids on the flavor profile of 10% sugar solution was investigated by the response surface methodology, and the results were used to evaluate the flavor characteristics of lactic acid fermented cereal beverages. A mixture of extruded rice flour (10%) and soymilk (7.8% dry matter) was fermented with Leuconostoc mesenteroides (Sikhae). Depending on the substrate pretreatments, for example, the malt or amylase digestion and the proteolytic enzyme hydrolysis, the sugar and organic acid composition of the product varied. The organic acid composition of the fermented beverages was in the ranges of 0.44-0.55% lactic acid, 0.05-0.09% acetic acid and 0.07-0.09% citric acid, while that of commercial apple juice was 1.59% malic acid and 0.49% acetic acid. The flavor profiles of fermented beverages added with 10% sucrose were compared to those of apple juice and a model mixture containing 0.48% citric acid, 0.39% lactic acid and 0.12% acetic acid in 10% sugar solution. The QDA diagram of fermented beverages approached to that of apple juice, when the substrate was digested by amylase but not by protease.

• 한국재료학회지
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• 제9권4호
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• pp.341-344
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• 1999

We reported compositional separation(CS) into Co-enriched and Cri-enriched components inside the grains of Co-Cr based thin films prepared by rf sputtering. CS strongly depends on the sputtering conditions of substrate temperature and target composition. Tuning the microstructure of the Co-Cr films is important in order to employ the CS for high-density magnetic recording. We investigated the origin of CS from thermodynamic viewpoint. We employ a spinodal decomposition-like model to describe the origin of the CS in Co-Cr films. We consider the total free energy of the Co-Cr films as the sum of several free energies of; 1) thermodynamic mixing entropy of a binary solid solution, 2) magnetic ordering interaction(MOI) energy below the Curie temperature, and 3) excess interaction energy(XS) caused by the sputtering process as a function of temperature and composition. Those energies distorted the total free energy like the spinodal decomposition and caused the compositionally separated fine microstructure inside the grains. If the second derivative of the total free energy with respect to Cr composition becomes negative at a given substrate temperature, we may observe a metastable compositional separation inside the Co-Cr alloy films. We expect to exploit the microstructure of CS for ultra-high density magnetic recording.

• 한국결정성장학회지
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• 제11권3호
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• pp.96-101
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• 2001

본 연구에서는 열벽 적층 성장법으로 GaAs(100) 기판 위에 $Zn_{1-x}Mn_{x}Te$ 에피층을 성장하여 그 특성을 조사하였다. $Zn_{1-x}Mn_{x}Te$ 에피층의 Mn 조성비는 x = 0.97까지 얻을 수 있었으며 성장된 시료의 결정구조는 징크브랜드이었다. 성장된 면은 GaAs (100) 기판과 동일한 방향으로 성장되었다. 성장시 기판 온도가 $350^{\circ}C$에서 $400^{\circ}C$로 증가함에 따라 Mn 조성비 x는 0.02에서 0.23으로 증가하였다. $Zn_{1-x}Mn_{x}Te$ 에피층의 격자상수는 Mn 조성비 x가 증가할수록 선형으로 증가하였고 띠 간격 에너지는 x에 대하여 비선형으로 증가하였다.