• 제목/요약/키워드: Sublimation technique

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MOCVD Deposition of AlN Thin Film for Packaging Materials

  • Chang-Kyu, Ahna;Seung-Chul Choi;Seong-Hoon Cho;Sung-Hwan Han;Je-Hong Kyoung
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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    • pp.118-118
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    • 2000
  • New single-source precursor, [AlCI3:NH2tBu] was synthesized for AlN thin f film processing with AICI3 (Aluminum Chloride) and tBuNH2 (tert-butylamine). AlN thin films for packaging aspplication were deposited on sapphire substrate by a atmosph하ie-pressure MOCVD. In most of other study methyl-based AI precursors w were used for source, But herein Aluminum Chloride was used for as AI source i in order to prevent the carbon contamination in the films and stabilize the p precursor. New precursor showed the very high gas vapor pressure so it allowed to m make the film under atmospheric-pressure and get the high purified film. High q quality AlN thin film was obtained at 700 to $900^{\circ}C$. The new precursor was p purified by a sublimation technique and help to fabricate high purity film. It s showed high vapor pressure, which is able to a critieal factor for the high purity a and atmospheric CVD of AlN. High Quality AIN thin film was obtained at $700-900^{\circ}C$. The AIN film was characterized by RBS

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덕트내 요철의 단락위치 변화에 따른 열/물질전달 및 압력강하 특성 - 정렬 단락배열 요철 - (Heat/Mass Transfer and Friction Characteristic in a Square Duct with Various Discrete Ribs -In-Lined Gap Arrangement Ribs-)

  • 이세영;최청;이동호;조형희
    • 대한기계학회논문집B
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    • 제25권11호
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    • pp.1640-1649
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    • 2001
  • The present study investigates the effects of various rib arrangements on heat/mass transfer in the cooling passage of gas turbine blades. A complex flow structure occurs in the cooling passage with rib turbulators which promote heat transfer on the wall. It is important to increase not only the heat transfer rates but also the uniformity of heat transfer in the cooling passage. A numerical computation is performed using a commercial code to calculate the flow structures and experiments are conducted to measure heat/mass transfer coefficients using a naphthalene sublimation technique. A square channel (50 mm $\times$ 50 mm) with rectangular ribs (4 mm $\times$ 5 mm) is used fur the stationary duct test. The experiments focus on the effects of rib arrangements and gap positions in the discrete ribs on the heat/mass transfer on the duct wall. The rib angle of attack is 60°and the rib-to-rib pitch is 32 mm, that is 8 times of the rib height. With the inclined rib angle of attack (60°), the parallel rib arrangements make a pair of counter rotating secondary flows in the cross section, but the cross rib arrangements make a single large secondary flow including a small secondary vortex. These secondary flow patterns affect significantly the heat/mass transfer on the ribbed wall. The heat/mass transfer in the parallel arrangements is 1.5 ∼2 times higher than that in the cross arrangements. However, the shifted rib arrangements change little the heat/mass transfer from the inline rib arrangements. The gap position in the discrete rib affects significantly the heat/mass transfer because a strong flow acceleration occurs locally through the gap.

초기 횡방향 유동이 존재하는 충돌제트/유출냉각에서 원형핀이 설치된 유출면에서의 열/물질전달 특성 (Heat/Mass Transfer on Effusion Plate with Circular Pin Fins for Impingement/Effusion Cooling System with Intial Crossflow)

  • 홍성국;이동호;조형희
    • 대한기계학회논문집B
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    • 제29권7호
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    • pp.828-836
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    • 2005
  • Impingement/effusion cooling technique is used for combustor liner or turbine parts cooling in gas turbine engine. In the impingement/effusion cooling system, the crossflow generated in the cooling channel induces an adverse effect on the cooling performance, which consequently affects the durability of the cooling system. In the present study, to reduce the adverse effect of the crossflow and improve the cooling performance, circular pin fins are installed in impingement/effusion cooling system and the heat transfer characteristics are investigated. The pin fins are installed between two perforated plates and the crossflow passes between these two plates. A blowing ratio is changed from 0.5 to 1.5 for the fixed jet Reynolds number of 10,000 and five circular pin fin arrangements are considered in this study. The local heat/mass transfer coefficients on the effusion plate are measured using a naphthalene sublimation method. The results show that local distributions of heat/mass transfer coefficient are changed due to the installation of pin fins. Due to the generation of vortex and wake by the pin fin, locally low heat/mass transfer regions are reduced. Moreover, the pin fin prevents the wall jet from being swept away, resulting in the increase of heat/mass transfer. When the pin fin is installed in front of the impinging let, the blockage effect on the crossflow enhances the heat/mass transfer. However, the pin fin installed just behind the impinging jet blocks up the wall jet, decreasing the heat/mass transfer. As the blowing ratio increases, the pin fins lead to the higher Sh value compared to the case without pin fins, inducing $16\%{\~}22\%$ enhancement of overall Sh value at high blowing ratio of M=1.5.

팁간극높이가 전면스퀼러팁 표면의 열전달 특성에 미치는 영향 (Effect of Tip Gap Height on Heat/Mass Transfer over a Cavity Squealer Tip)

  • 강동범;문현석;이상우
    • 한국유체기계학회 논문집
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    • 제16권6호
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    • pp.19-25
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    • 2013
  • The effect of tip gap height on heat/mass transfer characteristics on the floor of cavity squealer tip has been investigated in a turbine cascade for power generation by employing the naphthalene sublimation technique. The squealer rim height is chosen to be an optimal one of $h_{st}/c$ = 5.51% for the tip gap height-to-chord ratios of h/c = 1.0, 2.0, 3.0 and 4.0%. The results show that heat transfer on the cavity floor is strongly dependent upon the behavior of the cavity flow falling down onto the floor. For lower h/c, the floor heat transfer is influenced by the tip leakage flow falling down along the inner face of the suction-side squealer, whereas the floor heat transfer for higher h/c is augmented mainly due to the impingement of leakage flow on the floor near the leading edge. Compared to the plane tip surface heat transfer, the cavity floor heat transfer is less influenced by h/c. For h/c = 1.0%, the average thermal load is as low as a half of the plane tip surface one, and the difference in the thermal load between the two cases tends to decrease with increasing h/c.

균일 전단류내에 있는 원봉주위의 국소 대류 물질 전달에 관한 실험적 연구 (Experimental Study on Local Convective Mass Transfer From a Circular Cylinder in Uniform Shear Flow)

  • 류명석;성형진;정명균
    • 대한기계학회논문집
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    • 제13권4호
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    • pp.789-798
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    • 1989
  • 본 연구에서는 평균속도구배를 용이하게 변화시킬 수 있는 전단유동 발생기를 제작하였다. 최고속도구배는 38se $c^{-1}$까지 얻을 수 있으며 최대중심선 속도는 15m/sec까지이다. 10개의 채널(두께 2mm인 알루미늄판)로 유동단면을 등분하 였으며, 각 채널의 내부저항조절 방법으로 마름모형태의 막대인 knob을 설치하였다.

고정된 터빈 블레이드의 베인에 대한 상대위치 변화가 끝단면 및 슈라우드의 열/물질전달 특성에 미치는 영향 (Effect of Vane/Blade Relative Position on Heat/Mass Transfer Characteristics on the Tip and Shroud for Stationary Turbine Blade)

  • 이동호;조형희
    • 대한기계학회논문집B
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    • 제30권5호
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    • pp.446-456
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    • 2006
  • The effect of relative position of the stationary turbine blade for the fixed vane has been investigated on blade tip and shroud heat transfer. The local mass transfer coefficients were measured on the tip and shroud fur the blade fixed at six different positions within a pitch. A low speed stationary annular cascade with a single turbine stage was used. The chord length of the tested blade is 150 mm and the mean tip clearance of the blade having flat tip is 2.5% of the blade chord. A naphthalene sublimation technique was used for the detailed mass transfer measurements on the tip and the shroud. The inlet flow Reynolds number based on chord length and incoming flow velocity is fixed to $1.5{\times}10^5$. The results show that the incoming flow condition and heat transfer characteristics significantly change when the relative position of the blade changes. On the tip, the size of high heat/mass transfer region along the pressure side varies in the axial direction and the difference of heat transfer coefficient is up to 40% in the upstream region of the tip because the position of flow reattachment changes. On shroud, the effect of tip leakage vortex on the shroud as well as tip gap entering flow changes as the blade position changes. Thus, significantly different heat transfer patterns are observed with various blade positions and the periodic variation of heat transfer is expected with the blade rotation.

주유동의 난류강도가 막냉각홀 주위의 열/물질전달 특성에 미치는 영향 (Effect of Free Stream Turbulence Intensity on Heat/Mass Transfer Characteristics Around a Film Cooling Hole)

  • 이동호;김병기;조형희
    • 한국추진공학회지
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    • 제2권2호
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    • pp.56-63
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    • 1998
  • 본 논문에서는 주유동의 난류강도 변화에 따른 복합각도로 분사되는 단일 막냉각홀 주위에서의 국소 열/물질전달계수 특성을 살펴보기 위하여 실험을 수행하였다. 단일 막냉각홀 시편은 평면에 대하여 $30^{\cire}$의 경사각을 가지고 있으며, 횡방향으로는 주유동에 대해 $45^{\cire}$의 각도로 분사하여 복합각도 분사시 주유동의 난류강도 변화에 따른 효과를 살펴보았다. 또한 막냉각제트의 분사율을 0.5에서 2.0까지 변화시켜가며, 주유동의 높은 난류강도조건에서 분사율 변화시 막냉각홀 주위의 열/물질전달특성에 미치는 효과를 살펴보았다. 주유동의 난류강도를 변화시키기 위하여 막냉각홀 상류에 난류발생격자를 설치하였다. 격자를 설치하지 않은 경우, 주유동의 난류강도는 0.5%이며, 난류발생격자의 종류 및 설치위치를 달리하여 난류강도를 3%에서 10%까지 변화시켜가며 실험하였다. 막냉각홀 주위에서 국소적인 열/물질전달계수 값을 얻기 위하여 물질전달 실험방법인 나프탈렌 승화법을 사용하였다. 주유동의 난류강도가 낮은 경우 분사홀 주변에서 막냉각제트 혹은 주유동에 의한 열/물질전달 촉진영역이 뚜렷한 경계를 갖지만, 난류강도가 증가하면서 전 영역에 걸쳐 열/물질전달이 촉진되었으며 주유동과 막냉각제트의 활발한 혼합작용으로 인해 영역의 구분이 점차 소멸되었다. 또한 주유동의 높은 난류강도 효과는 막냉각제트의 분사율이 높은 경우 뚜렷이 나타났다.

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진공 증착법에 의하여 제작한 Europium complex 유기 박막 전기발광소자의 광학적.전기적 특성에 관한 연구. (Studies on the Optical and the Electrical Characterization of Organic Electroluminescence Devices of Europium Complex Fabricated with PVD(Physical Vopor Deposition) Technique)

  • 이명호;이한성;김영관;김정수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권5호
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    • pp.285-295
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    • 1999
  • Electroluminescent(EL) devices based on organic materials have been of great interest due to their possible applications for large-area flat-panel displays. They are attractive because of their capability of multi-color emission, and low operation voltage. An approach to realize such device characteristics is to use active layers of lanthanide complexes with their inherent extremely sharp emission bands in stead of commonly known organic dyes. In general, organic molecular compounds show emission due to their $\pi$-$\pi*$ transitions resulting in luminescence bandwidths of about 80 to 100nm. Spin statistic estimations lead to an internal quantum efficiency of dye-based EL devices limited to 25%. On the contrary, the fluorescence of lanthanide complexes is based on an intramolecular energy transfer from the triplet of the organic ligand to the 4f energy states of the ion. Therefore, theoretical internal quantum efficiency is principally not limited. In this study, Powders of TPD, $Eu(TTA)_3(phen) and AlQ_3$ in a boat were subsequently heated to their sublimation temperatures to obtain the growth rates of 0.2~0.3nm/s. Organic electrolumnescent devices(OELD) with a structure of $glass substrate/ITO/Eu(TTA)_3(phen)/AI, glass substrate/ITO/TPD/Eu(TTA)_3(phen)/AI and glass substrate/ITO/TPD/Eu(TTA)_3(phen)/AIQ_3AI$ structures were fabricated by vacuum evaporation method, where aromatic diamine(TPD) was used as a hole transporting material, $Eu(TTA)_3(phen)$ as an emitting material, and Tris(8-hydroxyquinoline)Aluminum$(AlQ_3)$ as an electron transporting layer. Electroluminescent(EL) and current density-voltage(J-V) characteristics of these OELDs with various thickness of $Eu(TTA)_3(phen)$ layer were investigated. The triple-layer structure devices show the red EL spectrum at the wavelength of 613nm, which is almost the same as the photoluminescent(PL) spectrum of $Eu(TTA)_3(phen)$.It was found from the J-V characteristics of these devices that the current density is not dependent on the applied field, but on the electric field.

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한국 전통춤과 K-pop 댄스의 융합 : 2018 MMA 방탄소년단 'IDOL' 유튜브 댓글 분석 (Convergence of Korean Traditional Dance and K-Pop Dance : An Analysis of Comments on 2018 MMA BTS 'IDOL' Videos on YouTube)

  • 유지영;김미경
    • 한국엔터테인먼트산업학회논문지
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    • 제13권8호
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    • pp.189-198
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    • 2019
  • 이 연구는 2018년 12월 MMA의 인트로 공연 유튜브 댓글의 텍스트 마이닝을 통해 국내 대중의 반응을 의미화 하는것에 목적이 있다. 이를 위해 지난 10개월간 15개의 유튜브 영상에 달린 댓글을 수집하였다. 데이터의 수집은 Python과 BeautifulSoup프로그램을 통해 총 5,135개의 데이터를 크롤링하였고, 총 3차시에 걸쳐 데이터를 정제한 후 최종 5,080의 데이터를 분석자료로 활용하였다. 데이터 분석에는 텍스트 마이닝 기법이 적용되였고, 정제, 분석, 시각화의 모든 과정은 텍스톰(Textom) 프로그램을 이용하였다. 연구결과 키워드 분석에서는 '무대', '한국', '영상', '최고', '멋', '춤', '아이돌', '레전드', '사랑', '감사'등의 키워드 순으로 나타났고, '국뽕'이나 '올림픽'과 같은 키워드도 빈번하게 나타났다. N-gram 분석에서는 '한국의 아이돌 무대 중 전설로 남을법한 최고의 무대', '한국의 전통문화를 보여준 아이돌의 무대'라는 문맥의 댓글이 상위권에 랭킹되었다. 이와같은 키워드 분석결과를 바탕으로 토픽모델링을 적용하여 총 5개의 토픽에서 상위 5개의 키워드를 추출하였다. 토픽의 내용과 분포도를 분석한 결과 이 공연영상에 대한 댓글의 토픽은 크게 '공연무대에 대한 극찬', '한국전통춤을 융합하여 예술적으로 승화시킨 것에 대한 애정', '멋진 춤 영상을 올려준 것에 대한 감사한 마음'으로 크게 3가지의 반응으로 이루진 것을 확인하였다.