Influence of the Deposition Temperature on the Structural and Electrical Properties of LPCVD Silicon Films (증착온도가 LPCVD 실리콘 박막의 물성과 전기적 특성에 미치는 영향)
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- The Transactions of the Korean Institute of Electrical Engineers
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- v.41 no.7
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- pp.760-765
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- 1992
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