Evaluation of Thin Film Residual Stress through the Analysis of Stress Relaxation Path and the Modeling of Contact Morphology (응력완화 경로분석과 압입자/시편간 접촉형상 모델링에 바탕한 박막재료의 국소 잔류응력 평가)
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- Proceedings of the KSME Conference
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- 2001.06a
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- pp.237-242
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- 2001