• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.51-58
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• 2002

In this paper, the characteristics of silicon wafer surface which is textured by KOH anisotropic etching method and mechanical polishing are investigated from the viewpoint of stiction and friction. It was found that the characteristics of stiction and friction of each textured surface are dependent on the contact area characterized by surface parameters such as bearing length ratio and peak count. To find the mechanism of the variation of stiction and friction in textured surface, OTS SAM coated wafer was used. In this case, the variation of stiction and friction was diminished, Therefore, it is concluded that the reason of variation of stiction and friction on textured surface is mainly caused by capillary which in turn is affected by the surface topography

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.842-845
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• 2000

It is essential to reduce stiction between the slider and the disk for super-smooth media such as glass disk for high density recording. We developed a stiction-reduced slider by fabricating mechanical bumps on the air bearing surface of the slider by indentation technique. This paper presents a possibility and concept of Stiction-Free-Slider which can operate on the data zone of a magnetic disk. The slider hat many bumps and their heights are in the tens of nm range. The SFS shows good performance on the data zone. Moreover, little wear of the bumps was observed when the preload was small.

• Tribology and Lubricants
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• v.17 no.1
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• pp.1-9
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• 2001

Hard disk drives operate in various environmental conditions. Thus, it is necessary to assess the reliability of the head/disk interface under these conditions. In this work, stiction and acoustic emission signals were investigated under different temperature, humidity, and ambient pressure conditions. Also, track average amplitude was observed for disk failure in N$_2$environment. It is shown that failure of the head/disk interface occurs more readily at high temperature and low ambient pressure conditions.

• Journal of Sensor Science and Technology
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• v.9 no.3
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• pp.233-241
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• 2000

This paper presents comparative results of various commonly used anti-stiction methods for polysilicon surface micromachining using identical test structures. Four different types of cantilevers - single cantilevers, cantilevers with dimples, cantilevers with anti-stiction tip, cantilevers with plate - with different widths and lengths were employed as test structures. The detachment length of cantilevers was examined depending on the anti-stiction methods and test structure types. After sacrificial layer was removed, evaporation and sublimation drying methods were used in the drying step when takes place the stiction between structure and substrate. Various final rinsing liquids such as methanol, IPA, and DI water were employed to compare anti-stiction results depending on surface tension and rinsing temperature. For sublimation drying method, methanol was used as an intermediate rinsing liquid. Also, the influence of a stress gradient of the polysilicon was investigated by performing the identical anti-stiction experiments on identical test structures with a stress gradient. In conclusion, sublimation drying method showed superior results to various evaporation drying methods and hence it is considered the best method for releasing polysilicon microstructure in polysilicon surface micromachining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.619-620
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.20 no.1
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• pp.240-247
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• 2003

The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1997.10a
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• pp.45-50
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• 1997

In recent years the recording density of hard disk has been increasing largely due to the decreasing flying height of head. However, as the flying height is decreased the reliability issue becomes ever more critical. This is because the reliability and durability of hard disk is related to the head/disk interaction as the two components come into partial or full contact. In this work characteristics of friction and stiction in head/disk interface was investigated using constant speed drag test and CSS(contact-start-stop) test. The purpose of this research is to identify the frictional properties of head/disk interface

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.599-600
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.512-515
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• 2002

The lubrication characteristics of SAM(self-assembled monolayer) have been investigated according to the change of surface group and surface temperature treatment with FDTS(1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM and OTS(octadecyltrichlorosilane) SAM in micro scale. From the experimental results, it was found that OTS SAM gets destroyed at $200^{\circ}C$ and stiction and fiction coefficient increased, but FDTS SAM was stable up to $400^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM is lower than that of FDTS SAM, but stiction is vice versa. This work shows the importance of surface group of self-assembled monolayer to control the lubrication characteristics and thermal stability.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.8 s.179
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• pp.2050-2058
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• 2000

A method for the inverse dynamic analysis of constrained multibody systems considering friction forces acting on kinematic joints is presented in this paper. The stiction and the sliding which represent zero and non-zero relative motions are considered during the inverse dynamic analysis. Actuating forces to control the position or the orientation of constrained multibody systems are usually calculated in the inverse dynamic analysis. An iterative procedure need to be employed to calculate the actuating forces when the friction is considered. Furthermore, the actuating forces are not uniquely determined during the stiction. These difficulties are resolved by the method presented in this paper.