• Title/Summary/Keyword: Steel oxide-layer

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Facilitation of the four-mask process by the double-layered Ti/Si barrier metal for oxide semiconductor TFTs

  • Hino, Aya;Maeda, Takeaki;Morita, Shinya;Kugimiya, Toshihiro
    • Journal of Information Display
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    • v.13 no.2
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    • pp.61-66
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    • 2012
  • The double-layered Ti/Si barrier metal is demonstrated for the source/drain Cu interconnections in oxide semiconductor thin-film transistors (TFTs). The transmission electromicroscopy and ion mass spectroscopy analyses revealed that the double-layered barrier structure suppresses the interfacial reaction and the interdiffusion at the interface after thermal annealing at $350^{\circ}C$. The underlying Si layer was found to be very useful for the etch stopper during wet etching for the Cu/Ti layers. The oxide TFTs with a double-layered Ti/Si barrier metal possess excellent TFT characteristics. It is concluded that the present barrier structure facilitates the back-channel-etch-type TFT process in the mass production line, where the four- or five-mask process is used.

Effects of Preoxidation on High Temperature Wear of Piercing Plug Tool Steel Sliding Against SA210C Steel Used for Production of Seamless Tube (심리스 튜브 제조용 피어싱 플러그 공구강과 SA210C강의 고온 미끄럼 마모에 미치는 예비산화의 영향)

  • Choi, Byung-Young;Gu, Yoon-Sik
    • Journal of the Korean institute of surface engineering
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    • v.46 no.6
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    • pp.264-270
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    • 2013
  • Effects of preoxidation on high temperature wear of piercing plug tool steel sliding against SA210C steel used for production of seamless tube have been studied using a pin-on-disc CETR tribometer, under applied normal load of 20 N at $900^{\circ}C$ in air. It was found in the preoxidized pin specimens of piercing plug tool steel that the coefficient of friction decreased to about 0.4 at an initial stage followed by showing nearly constant value of about 0.4 during high temperature wear testing. On the other hand, it was also found in the pin specimens without preoxidation that the coefficient of friction increased and fluctuated, ranging from about 0.3 to 0.6 during the tests until the running period of about 800 sec. The compact and continuous Fe-oxide layer was formed on the contact surface of the preoxidized pin specimens after high temperature wear testing followed by penetrating along the grain boundaries of coarse ferrite in the decarburized region beneath the oxide layer due to the lower hardness of the region.

미끄럼시험시 TiN 코팅볼과 스틸디스크에 형성되는 산화막의 특성과 마찰특성에 미치는 영향

  • 조정우;박동신;임정순;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.06a
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    • pp.401-405
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    • 2001
  • The effects of oxide layer formed on TiN coated ball and counter-body have been investigated from the frictional point of view during sliding tests. AISI52100 steel ball was used for the substrate of coated specimens. Two types of coated specimens were prepared by depositing TiN coating with 1 and 4$\mu\textrm{m}$ in coating thickness. AISI1045 steel was used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation.

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Analysis of Oxide Layers in Phase Boundary Crack of Cast Austenitic Stainless Steel (주조 오스테나이트 스테인리스강 상경계 균열부 산화물 분석)

  • Min-Jae Choi;Sung-Woo Kim
    • Transactions of the Korean Society of Pressure Vessels and Piping
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    • v.19 no.2
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    • pp.171-178
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    • 2023
  • For the phase boundary crack found in the gasket made of cast austenitic stainless steel in the nuclear power plant, the oxide layers were analyzed through SEM and TEM. The results showed that cracks initiated and propagated along the austenite/δ-ferrite phase boundary, the propagation path was changed to penetrate the inside of the phase. The oxide layer located at the periphery of the crack along the phase boundary was identified as a complex multi-layered spinel structure, and Cr-rich carbides were also detected in the oxide. The cracks that propagated inside the austenite matrix were attributed to the presence of high external stresses and impurities.

The Characteristics of the Oxide Layer Produced on the Plasma Nitrocarburized Compound Layer of SCM435 Steel by Plasma Oxidation (플라즈마 산질화처리된 SCM435강의 표면경화층의 미세조직과 특성)

  • Jeon Eun-Kab;Park Ik-Min;Lee Insup
    • Korean Journal of Materials Research
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    • v.14 no.4
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    • pp.265-269
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    • 2004
  • Plasma nitrocarburising and post oxidation were performed on SCM435 steel by a pulsed plasma ion nitriding system. Plasma oxidation resulted in the formation of a very thin ferritic oxide layer 1-2 $\mu\textrm{m}$ thick on top of a 15~25 $\mu\textrm{m}$ $\varepsilon$-F $e_{2-3}$(N,C) nitrocarburized compound layer. The growth rate of oxide layer increased with the treatment temperature and time. However, the oxide layer was easily spalled from the compound layer either for both oxidation temperatures above $450^{\circ}C$, or for oxidation time more than 2 hrs at oxidation temperature $400^{\circ}C$. It was confirmed that the relative amount of $Fe_2$$O_3$, compared with $e_3$$O_4$, increased rapidly with the oxidation temperature. The amounts of ${\gamma}$'-$Fe_4$(N,C) and $\theta$-$Fe_3$C, generated from dissociation from $\varepsilon$-$Fe_{2-3}$ /(N,C) phase during $O_2$ plasma sputtering, were also increased with the oxidation temperature.e.

Nozzle Clogging Mechanism in Continuous Casting for Titanium-Containing Steel (티타늄 첨가강의 연주 노즐막힘 기구)

  • Jung, Woo-Gwang;Kwon, Oh-Duck;Cho, Mun-Kyu
    • Korean Journal of Materials Research
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    • v.19 no.9
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    • pp.473-480
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    • 2009
  • In order to provide the mechanism of nozzle clogging, recovered nozzles for high strength steel grade were examined carefully after continuous casting. The thickness of clogged material in SEN is increased in the following order: from the bottom to the top of the nozzle, upper part of slag line, and the pouring hole. Nozzle clogging material begins to form due the adhesion of metal to nozzle wall, the decarburization, and reduction of oxide in the refractory by Al and Ti in the melt. The reduction of oxide in the refractory by Al and Ti improves the wettability of the melt on the refractory and forms a thin Al-Ti-O layer. Metal containing micro alumina inclusions is solidified on the Al-Ti-O layer, and the solid layer grows due to the heat evolution through the nozzle wall. Thermodynamic calculation has been made for the related reactions. The effect of superheat to the nozzle clogging is discussed on ultra low carbon steel and low carbon steel.

Comparison of the Performance of Thin Film Pressure Sensors with Polyimid and Silicon Oxide as a Insulating Layer (절연층으로 폴리이미드와 실리콘 산화막을 사용한 박막 압력 센서의 특성 비교)

  • Min, Nam-Ki;Lee, Seong-Rae;Chun, Jae-Hyung;Kim, Jeong-Wan
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.296-298
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    • 1997
  • The performance of thin film pressure sensors with polyimide and silicon oxide as a insulating layer between the stainless steel diaphragm and the Cu-Ni strain gauges is presented. The polyimide was spun on the stainless steel diaphragm and cured in an oven. The silicon oxide was deposited by rf sputtering. The thin film pressure sensor with silicon oxide as a insulating layer showed a better nonlinearity and a lower hysteresis.

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Mechanism Study of Sticking Occurring during Hot Rolling of Ferritic Stainless Steel (페라이트계 스테인리스강의 열간압연 시 발생하는 Sticking 기구 연구)

  • Ha, Dae Jin;Sung, Hyo Kyung;Lee, Sunghak;Lee, Jong Seog;Lee, Yong Deuk
    • Korean Journal of Metals and Materials
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    • v.46 no.11
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    • pp.737-746
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    • 2008
  • Mechanisms of sticking phenomena occurring during hot rolling of a modified STS 430J1L ferritic stainless steel have been investigated in this study by using a pilot-plant-scale rolling machine. As the rolling pass proceeds, the Fe-Cr oxide layer formed in a reheating furnace is destroyed, and the destroyed oxides penetrate into the rolled steel to form a thin oxide layer on the surface region. The sticking does not occur on the surface region containing oxides, whereas it occurs on the surface region without oxides by the separation of the rolled steel at high temperatures. This indicates that the resistance to sticking increases by the increase in the surface hardness when a considerable amount of oxides are formed on the surface region, and that the sticking can be evaluated by the volume fraction and distribution of oxides formed on the surface region. The lubrication and the increase of the rolling speed and rolling temperature beneficially affect to the resistance to sticking because they accelerate the formation of oxides on the steel surface region. In order to prevent or minimize the sticking, thus, it is suggested to increase the thickness of the oxide layer formed in the reheating furnace and to homogeneously distribute oxides along the surface region by controlling the hot-rolling process.

The Characteristics of Corrosion Resistance during Plasma Oxinitrocarburising for Carbon Steel (플라즈마 산질화처리 조건이 강의 내식성에 미치는 영향)

  • Lee, K.H.;Nam, K.S.;Lee, S.R.;Cho, H.S.;Shin, P.W.;Park, Y.M.
    • Journal of the Korean Society for Heat Treatment
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    • v.14 no.2
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    • pp.103-109
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    • 2001
  • Plasma nitrocarburising and post oxidation were performed on SM45C steel using a plasma nitriding unit. Nitrocarburising was carried out with various methane gas compositions with 4 torr gas pressure at $570^{\circ}C$ for 3 hours and post oxidation was carried out with 100% oxygen gas atmosphere with 4 torr at different temperatures for various times. It was found that the compound layer produced by plasma nitrocarburising consisted of predominantly ${\varepsilon}-Fe_{2-3}(N,C)$ and a small proportion of ${\gamma}-Fe_4(N,C)$. With increasing methane content in the gas mixture, ${\varepsilon}$ phase compound layer was favoured. In addition, when the methane content was further increased, cementite was observed in the compound layer. The very thin oxide layer on top of the compound layer was obtained by post oxidation. The formation of Oxide phase was initially started from the magnetite($Fe_3O_4$) and with increasing oxidation time, the oxide phase was increased. With increasing oxidation temperature, oxide phase was increased. However the oxide layer was split from the compound layer at high temperature. Corrosion resistance was slightly influenced by oxidation times and temperatures.

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Surface Hardness and Corrosion Behavior of AISI 420 Martensitic Stainless Steels Treated by Plasma Oxy-Nitriding Processing (플라즈마 산질화처리된 AISI 420 마르텐사이트 스테인레스 강재의 표면 경도 및 부식 거동)

  • Jinhan Kim;Kwangmin Lee
    • Korean Journal of Materials Research
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    • v.33 no.7
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    • pp.309-314
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    • 2023
  • This study aimed to address the limitations of traditional plasma nitriding methods by implementing a short-term plasma oxy-nitriding treatment on the surface of AISI 420 martensitic stainless steel. This treatment involved the sequential formation of nitride and oxide layers, to enhance surface hardness and corrosion resistance, respectively. The process resulted in the formation of a 20 ㎛-thick nitride layer and a 3 ㎛-thick oxide layer on the steel surface. Initially, the hardness increased by 2.2 times after nitriding, followed by a subsequent decrease of approximately 31 % after oxidation. While the nitriding process reduced corrosion resistance, the subsequent oxidation process led to the formation of a passive oxide film, effectively resolving this issue. The pitting corrosion of the oxide passive film started at 82.6 mVssc, providing better corrosion resistance characteristics than the nitride layer. Consequently, the trade-off between surface hardness and corrosion resistance in plasma oxy-nitrided AISI 420 martensitic stainless steel is anticipated to be recognized as an innovative and comprehensive surface treatment process for biomedical components.