• JSTS:Journal of Semiconductor Technology and Science
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• 제11권3호
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• pp.135-145
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• 2011

Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.

• 응용통계연구
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• 제12권1호
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• pp.309-313
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• 1999

To overcome current hardship during recent years of university reform, statistics departments of Korean universities should form a new shape with efficient strategies: First, they should value interdisciplinary and open education to foster scientific generalists rather than specialists (Bode.Mosteller.Tukey.Winsor, 1949). Second, they should work out on developing curriculum and improving educational quality for non-statistics majors (Ahn.Cho.Huh, 1994). The service market is widely open and its value is certainly worthy. Third, they may change their department name from "statistics", of which the social image is not quite right, to "data science" or "data information". Statistics is a field of learning on data methodology (Friedman, 1997). methodology (Friedman, 1997).

• Journal of Preventive Medicine and Public Health
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• 제56권2호
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• pp.100-110
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• 2023

Qualitative research methodology has been applied with increasing frequency in various fields, including in healthcare research, where quantitative research methodology has traditionally dominated, with an empirically driven approach involving statistical analysis. Drawing upon artifacts and verbal data collected from in-depth interviews or participatory observations, qualitative research examines the comprehensive experiences of research participants who have experienced salient yet unappreciated phenomena. In this study, we review 6 representative qualitative research methodologies in terms of their characteristics and analysis methods: consensual qualitative research, phenomenological research, qualitative case study, grounded theory, photovoice, and content analysis. We mainly focus on specific aspects of data analysis and the description of results, while also providing a brief overview of each methodology's philosophical background. Furthermore, since quantitative researchers have criticized qualitative research methodology for its perceived lack of validity, we examine various validation methods of qualitative research. This review article intends to assist researchers in employing an ideal qualitative research methodology and in reviewing and evaluating qualitative research with proper standards and criteria.

• Communications for Statistical Applications and Methods
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• 제22권6호
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• pp.557-573
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• 2015

In this paper we develop a Bayesian inference for a multiplicative double seasonal autoregressive (DSAR) model by implementing a fast, easy and accurate Gibbs sampling algorithm. We apply the Gibbs sampling to approximate empirically the marginal posterior distributions after showing that the conditional posterior distribution of the model parameters and the variance are multivariate normal and inverse gamma, respectively. The proposed Bayesian methodology is illustrated using simulated examples and real-world time series data.

• Communications for Statistical Applications and Methods
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• 제14권1호
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• pp.111-119
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• 2007

In this paper, we develop a nonparametric Bayesian methodology of estimating an unknown distribution function F at the given survival time with current status data under the assumption of Dirichlet process prior on F. We compare our algorithm with the nonparametric maximum likelihood estimator through application to simulated data and real data.

• 한국통계학회:학술대회논문집
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• 한국통계학회 2004년도 학술발표논문집
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• pp.105-110
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• 2004

Decision Analysis(DA) using Value Focused Thinking(VFT) can be an excellent process to deal with hard decisions. The intent of this research is to provide better understanding of the United States Air Force(USAF) officer retention problem. This thesis effort involves building a VFT model to find out more effective alternatives in retaining pilots and non pilots. This model, in conjunction with the results of the post analysis, shows an example of the application of a VFT approach to the USAF officer retention problem.

• Communications for Statistical Applications and Methods
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• 제17권4호
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• pp.551-560
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• 2010

This paper considers a Bayesian approach to modeling a flexible regression function under structural measurement error model. The regression function is modeled based on semiparametric regression with penalized splines. Model fitting and parameter estimation are carried out in a hierarchical Bayesian framework using Markov chain Monte Carlo methodology. Their performances are compared with those of the estimators under structural measurement error model without a semiparametric component.

• Communications for Statistical Applications and Methods
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• 제12권1호
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• pp.11-18
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• 2005

Assume that the life times of the units under test follow the Rayleigh distribution and the test is terminated at a pre assigned time. Acceptance sampling plans are developed for this situation. The minimum sample size necessary to ensure the specified average life are obtained and the operating characteristic values of the sampling plans and producer's risk are given. An example is given to illustrate the methodology.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.116.3-116
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• 2001

A diagnosis methodology for thickness quality in hot finishing mill is proposed based on multivariate statistical analysis. The thickness of hot strip is a key quality factor that is measured by x-ray thickness gauge. Currently, the thickness quality is guaranteed by upper and lower limit of thickness deviation from target thickness. But if any over-limit is occurred, there is no in-line method to identify the causes. In this paper, many parameters are extracted from the thickness deviation signal such as mean deviation(top, middle, tail), rms deviation(top, middle, tail) and peak deviation(top, middle, tail) as time domain parameters ...

• Communications for Statistical Applications and Methods
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• 제7권3호
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• pp.817-827
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• 2000

In this paper, we investigate the Bayesian approach to random effect binomial regression models with improper prior due to the absence of information on parameter. We also propose a method of estimating the posterior moments and prediction and discuss some general methods for studying model assessment. The methodology is illustrated with Crowder's Seeds Data. Markov Chain Monte Carlo techniques are used to overcome the computational difficulties.