• Title/Summary/Keyword: SrZrO3

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Dielectric properties with variation of doped mount $ZrO_2$ of BSCT ceramics ($ZrO_2$첨가량에 따른 BSCT 세라믹의 유전특성)

  • 조현무;이성갑;이영희;배선기
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.153-156
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    • 2001
  • (Ba$_{0.6-x}$Sr$_{0.4}$Ca$_{x}$)TiO$_3$ (x=0.10, 0.15, 0.20) ceramics were fabricated by the mixed-oxide method and their dielectric properties were investigated with variation of composition ratio, doped ZrO$_2$ (0.5, 1.0, 1.5, 2.0, 3.0 wt%) and sintered at 145$0^{\circ}C$. The dielectric constant and loss of the x=0.10 specimen applied field were 19.86 and 0.302 % at 0 V/cm, and 25.937 and 0.339 % at 300 V/cm, respectively. Dielectric constant were increased with increased applied field and decreased with increased frequency, and dielectric loss were within 0.1% at applied 800 MHz, respectively. all specimens showed fairly good applied field. Although, dielectric constant and loss of all specimen showed to tend of nearly the same. same.

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The Reliability and Electric Properties of High Voltage Multilayer Ceramic Capacitor According to Dielectric Materials (유전체 원료에 따른 고압용 적층칩 캐패시터 신뢰성 및 전기적 특성)

  • Yoon, Jung-Rag;Park, Jung-Won
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.21-22
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    • 2007
  • 내환원성을 가지는 (Ca,Sr)(ZrTi)$O_3$계 C0G 원료와 코어 쉘 구조를 가지는 $BaTiO_3$계 X7R 원료를 적용하여 고압용 적층 칩 캐패시터를 제작하여 내부전극 형상 및 원료에 따른 신뢰성 밑 전기적 특성을 연구하였다. C0G 특성의 원료는 X7R 원료에 비해 단위 두께당 내전압이 감소하는 경향이 적었으며 내전압 특성도 우수하게 나타났다. 또한, 내부 전극 설계에 있어 floating에 따른 영향은 C0G, X7R 특성 원료 모두 향상된 전기적 특성과 신뢰성을 가짐을 확인 할 수 있었다.

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The Structural Properties of the PZT/BST Heterolayered Thin Films with $Ar/O_2$ Ratio ($Ar/O_2$ 비에 따른 PZT/BST 이종층 박막의 구조적 특성)

  • Lee, Yoe-Bok;Nam, Sung-Pill;Lee, Sang-Chul;Kim, Ji-Heon;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.607-610
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    • 2004
  • The Pb $(Zr_{0.52}Ti_{0.48})O_3/(Ba_{0.6}Sr_{0.4}TiO_3$ [PZT(52/48)/BST(60/40)] heterolayered thin films were fabricated on the Pt/Ti/$SiO_2$/Si by RF sputtering method. The structural properties of the PZT(52/48)/BST(60/40) heterolayered thin films were investigated with Ar/$O_2$ ratio condition. All the PZT(52/48)/BST(60/40) heterolayered thin films had shown the PZT(111), (200) and BST(200) Peaks of the tetragonal structure. Increasing the Ar/$O_2$ ratio, the average roughness was increased. The thickness ratio of the to the PZT and BST thin film was 1:2. In the case of the PZT(52/48)/BST(60/40) heterolayered thin films with Ar/$O_2$ ratio of 80/20, the average roughness was 3.4 [nm].

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Chemical Mechanical Polishing Characteristics of High-k Thin Film (고유전율막의 CMP 특성)

  • Park, Sung-Woo;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.55-56
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    • 2006
  • In this paper, we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. BST ($Ba_{0.6}Sr_{0.4}TiO_3$), PZT ($Pb_{1.1}(Zr_{0.52}TiO_{0.48})O_3$) and BTO ($BaTiO_3$) ferroelectric film are fabricated by the sol-gel method. And then, we compared the structural characteristics before and after CMP process of BST, PZT, BTO films. Their dependence on slurry composition was also investigated. We expect that our results will be useful promise of global planarization for ferroelectric random access memories (FRAM) application in the near future.

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Ferroelectric properties of Pb[(Zr. Sn)Ti]NbO$_3$Thin Films prepared by RF Magnetron Sputtering Method (RF 마그네트론 스퍼터링 방법으로 제작된 Pb[(Zr. Sn)Ti]NbO$_3$박막의 강유전 특성)

  • 최우창;최혁환;이명교;권태하
    • Proceedings of the IEEK Conference
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    • 1999.11a
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    • pp.199-202
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    • 1999
  • 반강유전 물질인 Pb[(Zr. Sn)Ti]NbO₃를 La/sub 0.5/Sr/sub 0.5/CoO₃/Pt/Ti/SiO₂/Si 기판상에 RF 마그네트론 스퍼터링 방법으로 박막화하여 그 결정성과 전기적 특성을 조사하였다. 80 W의 RF power, 400℃의 기판온도, Ar:O₂= 9:0.5의 분위기에서 증착되고, 650 ℃에서 10초동안 RTP(Rapid Thermal Process) 방법으로 열처리된 박막이 가장 우수한 페로브스카이트 구조를 보였으며, 10 ㎑ 에서 유전상수(ε')는 721, 유전손실(tan δ)은 0.06을 나타내었다. 잔류분극(Pr)은 15.5 μC/㎠ 였으며, 항전계(Ec)는 51 ㎸/㎝로 비교적 낮은 값을 나타내었다.

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Effects on Dielectric, Piezoelectric, and Aging Properties of Ions Substituted for Pb in PZT Ceramics (PZT 세라믹스에서 Pb 대신 치환된 이온이 유전 및 압전특성과 압전열화에 미치는 영향)

  • 문학범;정윤해
    • Korean Journal of Crystallography
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    • v.7 no.2
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    • pp.165-174
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    • 1996
  • The effects of Ba2+, Sr2+, and Ca2+-substitutions for Pb2+ at Pb(Zr0.52Ti0.48)O3 composition were studied for thier dielictric, piezoelectric, and aging properties. For relative dielectric constants and electromechanical coupling factors, the Ba2+-substituted composition was the highest and the Ca2+-substityed composition was the lowest. In the case of mechanical quality factors, the opposite behavior occurred. Time dependence of frequency for various ion-substituted compositions is similar to that of non-substituted composition. The piezoelectric properties after aging at high temperature was the worse than that after aging at room temperature.

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The Geochemistry of Yuksipryeong Two-Mica Leucogranite, Yeongnam Massif, Korea (영남육괴내 육십령 복운모화강암에 대한 지화학적 연구)

  • Koh, Jeong-Seon;Yun, Sung-Hyo
    • The Journal of the Petrological Society of Korea
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    • v.12 no.3
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    • pp.119-134
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    • 2003
  • Yuksipryeong two-mica granite presents strongly peraluminous characteristics in both mineralogy and geochemistry. It has high aluminum saturation index with 1.15∼l.20 and high corundum with 2.20∼2.98 wt% CIPW norm. As the color index is <16% and FeO$\^$T/+ MgO + TiO$_2$is average 1.9 wt%, it corresponds to leucogranite. Yuksipryeong two-mica leucogranite shows negative linear trend for TiO$_2$, Al$_2$O$_3$, FeO, Fe$_2$O$_3$, MgO, CaO, K$_2$O, P$_2$O$\_$5/, Rb, Ba, and Sr as SiO$_2$increases, and the positive relation of Zr and Th, which result from feldspar, biotite, apatite and zircon fractionation. Pegmatitic dike has higher SiO$_2$and P$_2$O$\_$5/, but lower another major elements. Yuksipryeong two-mica leucogranite has lower Rb, but higher Ba and Sr than Manaslu, Hercynian two-mica leucogranites, and S-type granites in Lachlan Fold Belt. Pegmatitic dike has higher Rb and Nb but lower Ba, Sr, Zr, Th, and Pb contents than Yuksipryeong two-mica leucogranite, resulting in removing or mobilizing for some trace elements from the granitic melt. Yuksipryeong two-mica leucogranite has total REEs with 95.7∼l23.3 ppm, and chondrite-normalized REE pattern is very steep ((La/Yb)$\_$N/ = 6.9∼24.8), light REEs (LREEs)-enriched End heavy REEs (HREEs)- depleted pattern with low to moderate Eu anomalies (Eu/Eu*= 0.7∼0.9). While pegmatitic dike has low total REEs with 7.0 ppm, and chondrite-normalized REE pattern is flat-pattern ((La/Yb)$\_$N/ = 2.1) with strong negative Eu anomalies (Eu/Eu*= 0.2). The melt compositions having formed two-mica leucogranites depend on not only the source rock but also the amounts of the residual remaining after melting of source rocks. The CaO/Na$_2$O and Rb/Sr-Rb/Ba ratios depend mainly on the composition of source rocks in the strongly peraluminous granite, that is, plagioclase/clay ratio of the source rocks. Yuksipryeong two-mica leucogranite has higher CaO/Na$_2$O and lower Rb/Sr-Rb/Ba ratios than Manaslu and Hercynian two-mica leucogranites (Millevaches and Gueret) derived from clay-rich, plagioclase-poor (polite), which suggest that the probable source rocks for Yuksipryeong two-mica leucogranite is clay-poor, plagioclase-rich quartzofeldspathic rocks. As the concentrations of Al$_2$O$_3$remain nearly constant but those of TiO$_2$increases as increasing temperature in the strong peraluminous melt, the Al$_2$O$_3$/TiO$_2$ratio may reflect relative temperature at which the melts have formed. Comparing the polite-derived Manaslu and Hercynian two- mica leucogranites, Manaslu two-mica leucogranite has higher Al$_2$O$_3$/TiO$_2$ratio than latter, and its melt have formed at relatively lower temperature ($\leq$ 875$^{\circ}C$) than Hercynian two-mica leucogranites. Likewise, comparing the quartzofeldspathic rock-derived granites, Yuksipryeong two-mica granite has higher Al$_2$O$_3$/TiO$_2$, ratio than S-type granites in Lachlan Fold Belt (>875$^{\circ}C$). The melt formed Yuksipryeong two-mica leucogranite are considered to have been formed at temperature at below the maximum 875$^{\circ}C$C$.

A study of the inorganic element contents for the ginsengs of Keumsan, Chungnam

  • Song, Suck-Hwan;Sik, Chang-Gyu
    • Proceedings of the Ginseng society Conference
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    • 2008.05a
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    • pp.74-75
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    • 2008
  • This study is for geochemical relationships between ginsengs and soils from three representative soil types from Keumsan, shale, phyllite and granite. For these study, ginsengs, with the field and weathered soils were collected from the three regions, and are analysed for the major and trace elements. In the weathered soils(avg.), the granite and phyllite areas are high in the most of elements while the shale area is low. In the correlation coefficients, negative correlations are shown in the $Al_2O_3$-MgO pair while positive correlations, are shown in the Ba-Sr, Zr, Sr-Zr and Cs-Ge pairs. In the field soils(avg.), the granite and phyllite areas are, generally, high in the most of elements while the shale area is low. In the shale area, the major elements are high in the 4 year soils, but low in the 2 year soils. The LFS(Ba, Sr, Cs) and transitional elements are high in the 2 year soils, but low in the 4 year soils. The HFS(Y, Zr) is high in the 4 year soils. In the correlation coefficients, most of the elements from the 4 year show positive relationships. Positive correlations are shown in the $Al_2O_3$-CaO, MnO-MgO, V-Tl, and Ba-Sr pairs in all localities. In the ginseng contents, clear chemical differences with the ages are shown in the shale and granite ares, but not clear in the phyllite area. In the shale area Mn, Mg, Ba, Sr, and Y contents, increase with ages but decrease in Al, Cs, Be and Cd. In the correlation coefficients, degrees of the correlations for the major elements become low with the ages. Positive correlations are shown in the Al-Mn, Ti, Mn-Ti, Mg-Ca, Ca-K, Ba-Cs, Y and Cs-Y pairs. Comparisons with ginsengs of the same ages from the different areas suggest that generally, the 2 years in the shale and 3 and 4 years in the granite area are distinctive. Relative ratios(granite/ shale area) of the ginsengs are below 1 in the major elements except Mn in the 2 year ginsengs and above 1 in the other elements except Mg and Na in the 4 year. Relative ratios(granite/ phyllite area) of the ginsengs are high in the 3 year from the phyllite area. In the relative ratios(weathered/field soils) of the soils, numbers of the elements showing the ratios of above 1 increase from the shale, to phyllite and granite in the case of the major elements, but decrease in the case of the trace elements. These results suggest that major elements are high in the granite while trace elements are high in the shale area. In the relative ratios between field soils and ginsengs(field soils/ginseng), the shale area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Y and Tl, of several ten times in the MnO, MgO and Ba and of several times in the CaO contents. These results suggest that ginseng contents are significantly different from the field soils in the $Al_2O_3$, $TiO_2$, Y and Tl, but similar in the CaO contents. The phyllite area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Y, Tl and Be, of several ten times in the MnO, MgO, $Na_2O$ and Ba, and of several times to ten times in the CaO, $K_2O$ and Sr contents. These results suggest that ginseng contents are significantly different from those of the field soils in the $Al_2O_3$, $TiO_2$, Y, Tl and Be, but similar in the CaO, $K_2O$ and Sr contents. The granite area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Tl and Be, of several ten times in the Ba, and of several times to ten times in the MgO and CaO contents. Of the other elements, differences of several times to ten times are shown in the MnO, $K_2O$ and Sr contents. These results suggest that ginseng contents are significantly different from those of the field soils in the $Al_2O_3$, $TiO_2$, Tl and Be, but similar in the $K_2O$ and Sr contents. Comparisons among the different ages from the same area suggest that, in the case of shale area, differences of several hundred times in the $Al_2O_3$ and $TiO_2$, of the several ten times in the MnO, MgO and Ba and several times in the CaO and $K_2O$ are shown in the 2 year ginsengs. Differences of several hundred times in the $Al_2O_3$, $TiO_2$, Cs, Y, Tl and Be, of above several ten times in the MnO, MgO, $K_2O$ and Ba, and of several times in the CaO and Sr are shown in the 3 year ginsengs. Differences of several hundred to thousand times in the $Al_2O_3$, of above several hundred times in the $TiO_2$, Cs and Y, and of several ten times in the MnO, MgO, $K_2O$ and Ba, and of several times in the $Na_2O$ are shown in the 4 year ginsengs. These relationships suggest that, regardless of the localities in the shale area, $Al_2O_3$ contents of the soils show big differences from those of the ginsengs. Regardless of the ages of ginsengs, comparisons with the overall average contents of each area show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Cs and Tl and of several ten times in the MnO. These overall relationships suggest that the $Al_2O_3$, $TiO_2$, Cs and Tl contents of the soils are higher than those of the ginsengs, show big differences between two and low different contents are found in the MnO. In detail, differences of several hundred times in the Y, and ten times in the MgO and Sr, and of several times in the CaO, $Na_2O$, $K_2O$ in the case of shale area, are shown. These results suggest that the soils are higher than the ginsengs in the Y and significantly differences in Y, and moderately differences in the MgO and Sr, and low differences in the CaO, $Na_2O$ and $K_2O$ are shown between soils and ginsengs.

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Growth and electrical properties of Pb(Zr, Ti)$O_3$ thin films by sol-gel method (솔-젤 법을 이용한 Pb(Zr, Ti)$O_3$ 박막의 성장 및 전기적 특성에 관한 연구)

  • 김봉주;전성진;이재찬;유지범
    • Journal of the Korean Vacuum Society
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    • v.8 no.4A
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    • pp.425-431
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    • 1999
  • $Pb(Zr_{0.52}, Ti_{0.48})O_3$ (PZT) thick films as an actuating material with conducting oxides, $(La_{0.5}Sr_{0.5}) CoO_3$ (LSCO), have been fabricated by sol-gel method for Optical Micro-Electro-Mechanical System (MEMS) devices, in which PZT/LSCO/SiO2 structures were used. In order to improve the adhesion to LSCO solution in order to enhance the wetting behavior of a water-based LSCO precursor solution and further to improve the adhesion between LSCO and $SiO_2$ layers. PZT films were made using 1-3 propanediol based precursor solution which has a high viscosity and a boiling point appropriate for thick film fabrication. In the precursor solution, Ti-propoxied and Zr-propoxied are partially substituted with acetylacetone to achieve the solution stability while maintaining reactivity. Crack free PZT films (0.8~1$\mu\textrm{m}$) have been successfully fabricated at crystallization temperatures above $700^{\circ}C$. Dielectric constants and dielectric losses of the PZT films were 900~1200and 2~5%, respectively. Piezoelectric constant $d_{33}$ of the PZT films constrained by a substrate were 200pm/V at 100kV/cm.

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