• 제목/요약/키워드: Spray pyrolysis technique

검색결과 20건 처리시간 0.019초

스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터 제작 및 특성 분석 (The Study of nc-ZnO/ZnO Field-effect Transistors Fabricated by Spray-pyrolysis Process)

  • 조준희
    • 반도체디스플레이기술학회지
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    • 제21권3호
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    • pp.22-25
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    • 2022
  • Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.

스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터의 광학적 노출에 대한 열화 현상 분석 (The Instability Behaviors of Spray-pyrolysis Processed nc-ZnO/ZnO Field-effect Transistors Under Illumination)

  • 조준희
    • 반도체디스플레이기술학회지
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    • 제22권1호
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    • pp.78-82
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    • 2023
  • Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

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습식 분무 열분해 방법으로 제조한 코발트 도핑된 티타늄 산화막의 표면 및 광학적 특성 (Surface and Optical Characteristics of Cobalt Dopped-titanium Oxide Film Fabricated by Water Spray Pyrolysis Technique)

  • 송호준;박영준
    • 한국재료학회지
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    • 제15권3호
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    • pp.209-215
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    • 2005
  • Titanium dioxide films $(TiO_2)$ doped cobalt transition metal were prepared on titanium metal by water spray pyrolysis technique. Micro-morphology, crystalline structure, chemical composition and binding state of sample groups were evaluated using field emission scanning microscope(FE-SEM), X-ray diffractometer(XRD), Raman spectrometer, X-ray photoelectron spectrometer(XPS). $TiO_2$ films of rutile structure were predominately formed on all sample groups and $Ti_2O_3$ oxide was coexisted on the surface of cobalt doped-sample groups. The optical absorption peaks measured by using UV-VIS-NIR spectrophotometer were observed at specific wavelength region in sample groups doped cobalt ion. This result could be analyzed by introducing crystal field theory.

초음파 분무 열분해법에 의한 구형 $TiO_2$ 미분말의 합성 (Preparation of Spherical $TiO_2$Powders by Spray Pyrolysis Using Ultrasonic Atomization Technique)

  • 이종흔;조형진;박순자
    • 한국세라믹학회지
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    • 제28권10호
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    • pp.831-837
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    • 1991
  • Spherical TiO2 particles are prepared from TiCl4 aqueous solution by the spray pyrolysis method using ultrasonic atomization technique. The formation mechanism of TiO2 particles from atomized droplets it studied by varying the concentration of the source solution, reaction temperature, and the solvent. spherical TiO2 powders with almost the same normalized particle size distribution can be made reproducibly by changing the concentration of the source solution, and their mean sizes are in the range of 0.2~1.4${\mu}{\textrm}{m}$.

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Spray Pyrolysis에 의한 Manganese Oxide 입자의 제조 및 전기화학적 특성 (Preparation of Manganese Oxide Powders by Spray Pyrolysis and its Electrochemical Characterization)

  • 최원창;변동진;이중기;박달근;김현중
    • 한국재료학회지
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    • 제11권11호
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    • pp.936-940
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    • 2001
  • Spray pyrolysis is a favorable technique to form complex mixed-metal oxide powders with high purity in high temperature region. Manganese oxide powders were prepared by spray pyrolysis from an aqueous solution of $Mn(NO_3)_2$. Powders were formed in the temperature range of 500~$700^{\circ}C$ under the constant pressure of 300torr. All the powders have hydrous forms. When the temperature was increased, the size and the surface area of the particles decreased. An electrochemical capacitors were made with manganese oxide electrodes and KOH electrolyte. With the temperature decreased, capacitors showed high capacitance. Capacitor which was prepared with powders formed in the temperature $500^{\circ}C$ demonstrated specific capacitances as high as 83F/g.

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UVU characteristics of $YBO_{3}$:Tb green phosphor prepared by spray pyrolysis

  • Jung, Kyeong-Youl;Kim, Eun-Joung;Kang, Yun-Chan
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.1001-1004
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    • 2003
  • We applied the spray pyrolysis technique to prepare fine $YBO_{3}$:Tb particles with high photoluminescence, which could be used in the plasma display device as a green phosphor. Several preparation conditions were investigated in order to tail the vacuum ultraviolet characteristics of $YBO_{3}$:Tb particles when they were prepared by the spray pyrolysis. As a result, the optimized $YBO_{3}$:Tb particles showed the high photoluminescence intensity as well as fine size in comparison with the commercial one.

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초음파분무열분해에 의한 투명전도성 산화주석막의 제조 (Preparation of Transparent and Conducting Tin Oxide Films by the Ultrasonic Spray Pyrolysis)

  • 김상길;윤천호
    • 공업화학
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    • 제9권2호
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    • pp.214-219
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    • 1998
  • 초음파분무 열분해에 의하여 유리 기판 위에 투명전도성 산화주석막을 증착하였다. 증착변수가 산화주석막의 전기저항, 광투과도, 결정구조 및 두께에 미치는 영향을 조사하였다. 증착시간과 염화주석(IV)의 농도가 증가함에 따라, 증착된 산화주석막의 전기저항과 가시선 및 근적외선 영역에서의 광투과도가 감소함을 보여주었다. 공기중에서 열처리온도가 증가하면, 증착된 산화주석막은 전기저항과 광투과도가 증가함을 나타냈다. 본 연구결과는 초음파분무열분해가 단일과정으로서 양질의 투명전도막을 효율적으로 제조할 수 있는 유망한 증착기술임을 암시한다.

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분무열분해 전구체를 사용한 규산아연 형광물질의 합성에 관한 연구 (The preparation of Zinc-Silicate phosphors by noble technique)

  • 김영일;이경희
    • 한국결정성장학회지
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    • 제8권2호
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    • pp.370-376
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    • 1998
  • 분무열분해된 전구체로부터 수열반응에 의해 분말 Zinc-Silicate 형광물질 합성에 대하여 연구하였다. 열분해 전구체를 사용한 수열반응의 특징은 고상반응에서의 분쇄시의 불순물의 함유를 배제하였으며, $250^{\circ}C$의 수열반응에 의해 $\alpha-Zn_2SiO_4$ 분말합성이 가능하였다.

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초음파 분무 열분해법에 의한 $BaTiO_3$ 미분말의 제조 (Preparation of $BaTiO_3$ Fine Powders by Spray Pyrolysis Using Ultrasonic Atomization Technique)

  • 조형진;이종흔;박순자
    • 한국세라믹학회지
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    • 제28권11호
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    • pp.851-858
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    • 1991
  • Spherical fine BaTiO3 powders with an average diameter of 0.3${\mu}{\textrm}{m}$ to 0.9${\mu}{\textrm}{m}$ are prepared at 100$0^{\circ}C$ by the ultrasonic spray pyrolysis of solutions containing Ba(NO3)2 and TiCl4. Experimental variables are adjusted to produce BaTiO3 powders and its effect on the phase, the size and the morphology of the particles are investigated by XRD, SEM, TEM. Each particle consists of small primary particles and has a hollow around its center. The dependence of particle diameters on the concentrations of source solutions indicates that metal salt precursors are dried to precipitate solid particles and decompose to form BaTiO3 phase without gas phase reactions.

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$SnO_2$박막저항의 전기적 특성에 미치는 첨가제의 영향 (Effect of Dopants on Electrical Properties of $SnO_2$Thin Film Resistors)

  • 구본급;강병돈
    • 한국전기전자재료학회논문지
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    • 제13권8호
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    • pp.658-666
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    • 2000
  • Sb and Sb-Fe doped SnO$_2$film resistors were prepared by spray pyrolysis technique. The effects of Sb and Sb-Fe addition on TCR and electrical properties of SnO$_2$film resistors were studied. Also the dependence of electrical properties on the substrate temperature and substrate-nozzle distance was investigated. The Sn-Sb system with 7.9 mol% SbCl$_3$(STO-406) and Sn-Sb-Fe systems with 7.3 mol% SbCl$_3$+7.3 mol% FeCl$_3$(STO-407) and with 3.4 mol% SbCl$_3$+7.7mol% FeCl$_3$(STO-408) were prepared. Both of the systems Sn-Sb and Sn-Sb-Fe represented nonlinearity of TCR with temperature. As the amount of Fe increased TCR was shifted to positive direction. Decreasing Sb or increasing Fe caused resistivity to increase. Also increasing Fe caused the crystallization degree of rutile structure in SnO$_2$film to decrease. The electrical resistivity decreased with increasing substrate temperature The resistivity decreased with increasing substrate-nozzle distance in the ranges from 15 to 25 cm and increased rapidly at the distance over 25cm.

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