• Title/Summary/Keyword: Spindle System Design

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Development of Wafer Grinding Spindle with Porous Air Bearings (다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발)

  • Donghyun Lee;Byungock Kim;Byungchan Jeon;Gyunchul Hur;Kisoo Kim
    • Tribology and Lubricants
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    • v.39 no.1
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

A Study on the Determination of the Oil Gap in the Hydrostatic Spindle System for a Crank Shaft Grinding Machine (크랭크 샤프트 연삭기용 유정압 스핀들의 유막 간격 선정에 관한 연구)

  • Park, Dong-Keun;Choi, Chi-Hyuk;Lee, In-Jae;Lee, Choon-Man
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.4
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    • pp.410-415
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    • 2011
  • A cylindrical type of self-controlled restrictor is designed for hydrostatic bearing of crank shaft for a grinding wheel spindle. The effect of operation parameters, clearance between spindle and housing on bearing stiffness are analyzed to determine the optimum conditions of operation parameters. The lowest values of the supply pressure and the loads by the theoretical and experimental results assuming oil film thickness and shape of pocket are compared.

The Stress Distribution Characteristics of HSK Tooling System According to Spindle Speed (고속가공기용 HSK 툴링시스템의 주축회전속도에 따른 응력분포특성)

  • Ku, Min-Su;Kim, Jeong-Suk;Kang, Ik-Soo;Park, Jin-Hyo;Lee, Jong-Hwan;Kim, Ki-Tae
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.6
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    • pp.852-858
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    • 2010
  • Recently, the high-tech industries, such as aerospace industry, auto industry, and electronics industry, are growing up considerably. Because of that, high machining accuracy and productivity of precision parts have been required. The tooling system is important part in the machining center. HSK tooling system is more suitable than BT tooling system for that of high speed machining center. It is because static stiffness and machining accuracy of HSK tooling system are higher than those of BT tooling system. In this paper, stress distribution characteristics of the HSK tooling System is analyzed according to the spindle speed. In order that, the mechanism and the force amplification principle of HSK tooling system are analyzed. The HSK tooling system is modelled by using a 3D modeling/design program. Then stress distribution characteristics of HSK tooling system are analyzed according to spindle speed by using the finite element analysis.

Structural Characteristics Analysis of a High-Speed Horizontal Machining Center with Built-in Motor and Linear Motors (냉장형 모터와 리니어 모터를 적용한 초고속 수평형 머시닝센터의 구조 특성 해석)

  • 김석일;조재완
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.10a
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    • pp.326-333
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    • 2004
  • This paper presents the structural characteristics analysis of a high-speed horizontal machining center with spindle speed of 50, 000rpm and feedrate of 120m/min. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motor and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guide. The structural analysis model of the high-speed horizontal machining center is constructed by the finite element method, and the validity of structural design is estimated based on the structural deformation of the high-speed horizontal machining center and spindle nose caused by the gravity and inertia forces.

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Micro-electrode machining characteristics using the Micro-EDM (마이크로 방전가공기를 이용한 미세전극 가공특성)

  • 안현민;김영태;박성준;이상조
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.1003-1007
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    • 2002
  • Micro-EDM is generally used far machining micro 3-D structure. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDG system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of applied voltage, capacitance, wire feed rate, spindle rotating speed, machining time. As a result of experiments, wire feed rate, machining time and capacitance is proportional to gap distance(material removal), the other parameters(applied voltage, spindle rotating speed) and relations between the parameters have little influence on machining.

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Development of a High-speed Line Center using Linear Motor Feed System and High-speed Spindle System (리니어 모터 이송계와 고속 주축을 적용한 초고속 라인 센터 개발)

  • 문홍만;백영종;조현택;최대봉
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.107-112
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    • 2003
  • The recent machine tools are requested so high-quality processing and productivity increasing. Therefore, it is so necessary to develop technology for high-speed and high-precision. This thesis touches on the development of high speed and intellectual line center. At first, the line center is necessary that strong structure, compact structure and light weight design for high-speed processing and transfer. So, it is necessary that examination of new materials and structures for light-weight and control devices for precision processing. So, it is going to make mention of the process of 1st model production for the above-mentioned based on test model production and evaluation.

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An Optimum Design of Herringbone Grooved Journal Bearings for Spindle Motor of Hard Disk Drive System (HDD 스핀들용 빗살무늬 저널베어링의 최적설계)

  • ;Y. Muraki;M. Tanaka
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2002.05a
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    • pp.530-532
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    • 2002
  • This paper presents an optimum design of herringbone grooved journal bearing for spindle motor of hard disk drive (HDD) system. In addition to the conventional “rectangular” groove, various groove profiles are designed. The stiffness and damping coefficients of the oil film and frictional torque are calculated and compared for tile various groove profiles. The “circular”, “valley”, and “reversed saw tooth” grooves do not produce high direct stiffness, since they partly increase the groove depths in the direction of lubricant flow, causing to reduce the pumping action of the bearing. The maximum direct stiffness can be obtained by the “rectangular”, “saw tooth”, and “step” grooves. With the same cross sectional area of the grooves, these three grooves have the same maximum stiffness, damping coefficients, and frictional torque. Among these recommendable grooves, the saw tooth groove may keep its original profile for long, enduring metal-to-metal contact during startup and shutdown.

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Modeling for M/C tools structure using system identification (System Identification을 이용한 공작기계구조물의 모델화에 관한 연구)

  • Hah, B.H.;Ro, S.H.;Kim, K.H.
    • Journal of the Korean Society for Precision Engineering
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    • v.10 no.1
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    • pp.142-146
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    • 1993
  • The vibrations of the main spindle of the M/C tools are most important in the consideration of the dymamic performance of the M/C tools. In order to resolve and predict the dynamic behaviour of the main syindle it is necessary to have the mathematical model of the system. The system identification is the procedure to provide us with the mathematical model of the procedure of the system identification of the main spindle of the M/C tools to predict the dynamic behaviour of the machine and further to have the basis for the design of M/C tools.

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Cutting force estimation using spindle and feeddrive motor currents in milling processes (밀링공정에서 이송모터와 주축모터의 전류신호를 이용한 절삭력 추정)

  • 김승철;정성종
    • 제어로봇시스템학회:학술대회논문집
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    • 1997.10a
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    • pp.1407-1410
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    • 1997
  • Advanced sensor design and filtering technology have been studied to obtain information for condition monitoring and diagnostics inmachining processes. To develope and economic monitoring system in end milling processes, indirect and reliable type of cutting force estimators were required. In this paper, an estimation method of cutting forces during end milling processes was studied through the measurement of current signals obtained from spindle and feeddrive motors. Cutting force and torque models were derived from the cutting geometry in down milling processes. Relationships between motor currents and cutting forces were also developed in the form of AC and DC components from the developed force models. The validity of the cutting force estimator was confirmed by the experiments under various cutting conditions.

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