• 한국전기전자재료학회논문지
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• 제26권6호
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• pp.425-428
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• 2013

In this paper, we present a novel hydrophilic coating material (Wellture Finetech, Korea) which can be utilized as a coating layer for anti-contamination for electrical and electronic system. The coating material was deposited on 4 inch silicon wafer with several different film thickness. The film thickness was controlled by spin coating speed. After curing of the film, we have scratched by permanent marker to check self-cleaning property of the film. Also we have executed several mechanical tests of the films. As the spin coating speed is increased, the film thickness was thinned from 230 nm to 125 nm. Contact angle of the film was lowered from $30^{\circ}$ to $12^{\circ}$ as the spin coating speed is increased from 700 to 2,500 rpm. On permanent marker scratched film surface coated at 1,000 rpm, we have poured regular city water to investigate self cleaning property of the film. The scratches were gradually separated from the film surface due to super-hydrophilicity of the film. Hardness of spin coated film was 9H measured by ASTM D3363 method. and adhesion of all film was 5B tested by ASTM D3359 method. Also, to get exact hardness value of the film, we have utilized a nano-indenter. As spin speed is increased, the hardness of film was increased from 3 GPa to 5 GPa.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.29-32
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• 2005

Poly (methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observeed by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for different thermal treatment temperature. PMMA films were showed proper dielectric constant and breakdown voltage. Above the glass transition temperature PMMA films degraded. C-V measured at various frequencies, dielectric constant increased a little. The absence of hysteresis in the C-V characteristics, which eliminate the possibility of mobile charges in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.329-329
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• 2013

본 연구에서는 PEDOT:PSS와 crystalline-ITO (c-ITO) 박막 계면에서의 화학적 반응을(박리 및 용해 특성)을 관찰하기위해 spin-coating 및 droplet dropping을 통하여 PEDOT:PSS 용액을 코팅하고 이후 화학적 거동에 따른 전기적, 광학적 및 구조적 특성 변화를 관찰하였다. 강산성을 띄는 PEDOT:PSS (Al 4083) 박막의 코팅 전, 0.4T sodalime glass 위에 열처리를 통하여 성막된 c-ITO 투명전극을 15분 동안 상압 오존 공정을 통하여 계면처리함으로써 다른 변수의 영향을 배제하였으며, 표면 처리 후 spin-coating 및 droplet dropping method를 통하여 PEDOT:PSS를 코팅하여 c-ITO와 PEDOT:PSS 계면사이의 화학적 반응의 영향을 시간 경과에 따라 분석하였다. PEDOT:PSS 코팅 후 솔밴트 제거를 위해 hot plate를 이용하여 $110^{\circ}C$로 열처리되었다. Spin-coating 방법과는 달리 droplet dropping 방법을 통해 형성된 c-ITO 투명전극/PEDOT:PSS 계면에서는 spin coating에서 적용된 동일한 공정변수적용에도 불구하고 PEDOT:PSS의 산성으로 인한 ITO 투명전극 표면에서의 화학적 조성변화가(In, Sn, O의 조성의 변화) 발생됨을 x-ray photoelectron spectroscopy 결과를 통해 확인하였다. 뿐만 아니라 계면 조성반응 변화에 따른 전기적 특성 및 광학적 투과율의 열화가 발생됨을 Hall measurement 측정과 UV/Vis spectrometer 결과를 통하여 도출하였다. 본 결과를 통해 c-ITO/PEDOT:PSS 사이에서 발생되는 내산특성/계면 화학변화가 유기태양전지에서의 산화물 투명전극과 유기물 계면 열화현상에 영향을 받을 수 있음을 나타낸다.

• 정보저장시스템학회논문집
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• 제2권3호
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• pp.178-183
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• 2006

A Blu-ray disc, which has a more than 25GB optical capacity, has been known as a promising next-generation optical disc format. It commonly has a 1.1 mm thick substrate and a 0.1 mm thick cover layer for beam transmitting and the protection of the reflecting surface. The cover layer is generally formed by the spin coating process. However, in conventional spin coating, small bumps are formed along the rim of the disc, which results in the fatal reading error. Numerical simulation of the thin film flow behaviors during spin coating with the commercial solver and optimal spinning conditions was obtained. Thickness distribution of the cover layer according to the variation of substrate's edge shape could be calculated as well. By modifying the shape of the substrate edge shape, the bumps along the disc rim could be minimized, and it was proved that the chamfered edge, around $5{\sim}10$ degree, is the simplest and most effective way to minimize the bumps.

• 센서학회지
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• 제26권5호
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• pp.366-369
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• 2017

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1999년도 추계연구발표회 논문개요집
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• pp.82-83
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• 1999

• Macromolecular Research
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• 제10권2호
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• pp.67-74
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• 2002

New immunoprotecting membranes were prepared by spin coating the amphiphilic random multiblock copolymers of poly(ethylene glycol) (PEG) and poly(tetramethylene ether glycol) (PTMEG) or poly(dimethyl siloxane) (PDMS) on porous Durapore(R) membrane. The copolymer coating was intended to make a biocompatible, immunoprotecting diffusional barrier and the supporting porous substrate was for mechanical stability and processability. By filling Durapore(R) membrane pores with water, the penetration of coating solution into the pores was minimized during the spin coating process. A single coating process produced a completely covered thin surface layer (~1 ${\mu}{\textrm}{m}$ in thickness) on the porous substrate membrane. The permselectivity of the coated layer was influenced by PEG block length, polymer composition, and thickness of the coating layer. A composite membrane with the coating layer prepared with PEG 2 K/PTMEG 2 K block copolymer showed that its molecular weight cut-of fat any 40 based on dextran was close to the molecular size of IgG (Mw = 150 kDa). However, IgG permeation was detected from protein permeation test, while glucose oxidase (Mw = 186 kDa) was not permeable through the coated membrane.

• Bulletin of the Korean Chemical Society
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• 제26권3호
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• pp.418-422
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• 2005

By introducing spin-coating method to the evaporation induced self-assembly (EISA) process, a simple and reproducible route in controlling the mesophase of silica thin films has been developed for the first time in this work. When a comparatively solvent-rich Si-sol (The atomic ratio of TEOS : F127 : HCl : $H_2O$ : EtOH = 1 : 0.006 : 0.2 : 9.2 : 30) was used as coating solution, the mesophase of resultant silica films was selectively controlled by adjusting the spin-on speed. The cubic mesophase has been obtained from the coating at a low rpm, such as 600 rpm, while the 2-D hexagonal mesophase is formed at a high rpm, such as 2,500 rpm. At a medium coating speed, a mixture of cubic and hexagonal mesophase has been found in the fabricated films. The present results confirm that the evaporation rate of volatile components at initial step is critical for the determination of mesopore structures during the EISA process.

• 전기전자학회논문지
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• 제27권1호
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• pp.78-84
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• 2023

본 논문에서는 컬러 용액을 사용하여 스핀 코팅 방식으로 Building Integrated Photovoltaic(BIPV) 시스템용 전면 컬러 유리를 구현하였다. 컬러 유리 구현을 위해 진주광택 안료와 다양한 용액를 사용하여 컬러 용액에 적합한 용액을 조사하였다. 조사한 용액 중 자외선 광 경화제인 NOA series의 경우 다른 용액보다 우수한 코팅성과 컬러 재현성을 가진 컬러 유리를 구현할 수 있었다. NOA 65 기반의 컬러 용액으로 스핀 코팅하여 구현한 컬러 유리는 가시광선 및 근적외선 파장 대역에서 최대 86%의 높은 투과율을 보였으며 시간에 따른 컬러 유리의 광학적 특성의 변화가 미미하여 BIPV용 컬러 유리 구현을 위한 컬러 용액으로 적합하였다. 스핀 코팅 방식을 활용한 용액 공정 방식은 기존의 물리적 증착 방식이나 나노 입자를 활용한 컬러 유리 제작 공정보다 쉽고 빠르게 컬러 유리를 제작할 수 있어 BIPV용 전면 컬러 유리 제작 공정이 용이해질 것으로 기대된다.

• 반도체디스플레이기술학회지
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• 제23권1호
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• pp.88-91
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• 2024

The europium doped yttrium oxide (Y₂O₃:Eu³⁺) thin film was formed on a Si substrate by the conventional spin-coating process followed by rapid thermal annealing (RTA) treatment. The spinning profiles such as rotation speed, acceleration and holding times were controlled during the spin-coating process for the best condition of the Y₂O₃:Eu³⁺ thin film. The RTA treatment was conducted for several temperature in order to crystallize the spin coated film. The Y₂O₃:Eu³⁺ thin film presented best performance in the conditions of 4000 rpm, 30 s and 10 s of rotation speed, acceleration time and holding time, respectively, at a fixed RTA temperature of 900 ℃.