• 제목/요약/키워드: Spin coating process

검색결과 284건 처리시간 0.025초

Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성 (Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method)

  • 박준식;장연태;박효덕;최승철;강성군
    • 한국재료학회지
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    • 제12권3호
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    • pp.211-214
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    • 2002
  • Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

저온도포열분해에 의해 제조된 Pb(Zr, Ti)O$_3$ 박막의 에피탁시와 결정화도에 미치는 전열처리 시간의 영향 (Effect of Prefiring Time on Epitaxy and crystallinity of Pb(Zr, Ti)O$_3$ Thin Films in Low Temperature Pyrolysis)

  • 황규석;이형민;김병훈
    • 한국세라믹학회지
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    • 제35권9호
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    • pp.969-973
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    • 1998
  • Pb(Zr, Ti)O3 (PZT) (Zr:Ti= 52: 48) thin films were prepared on MgO(100) substrates by dipping-py-rolysis process using metal naphthenates as starting materials. Thin films were fabricated by spin coating technique and the precursor films were prefired at 20$0^{\circ}C$ in air for 0.5, 1, 2, 3, and 24 h followed by final heat treatment at 75$0^{\circ}C$ for 30min. Film prefired for 24 h lost orientational properties and pole figure analysis showed the lost of the epitaxial relationship between the films and substrate while highly a/c-axis oriented thin films were obtained for the samples prefired for 1, 2, and 3h.

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Video Phone Tube用 형광박의 제조에 관한 연구 (A Study on Manufacture of Phosphor Screen for Video Phone Tube)

  • 우진호
    • 한국인쇄학회지
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    • 제22권2호
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    • pp.123-138
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    • 2004
  • The video phone tube (VPT) of monochrome CRT have utilized home door phone, fish-finder and the rear watch monitors. Phosphor screen formation is made by electrodeposition spin coating and thermal transfer methods etc. Recently, thermal transfer method was developed, as a novel method, to form the phosphor surface for mnonchrom VPT. This method have advantages of simple process, automatization, clean environment, saving raw material and saving running-cost. In this study, it was developed new phosphor of VPT, and tested about phosphor paste properties. An experimental studies of VPT as a new phosphor property and improved VPT's manufacturing process shortening and brightness. As thermal transper method is a paste processing, it is important that rheology of phosphor effects on the formation of phosphor screen. Hence this paper was studied rheology properties of phosphor paste and the formation of phosphor screen had looked most suitable condition. Experimented thermal separation properties of low calcination temperature resin and the result analyzed comparison by TGA. Also, examined calcination properties to reduce remaining binder phosphor.

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INVESTIGATIONS OF CONDUCTION MECHANISM OF ORGANIC MOLECULES USED AS BUFFER HOLE INJECTING LAYER IN OLEDS

  • Shekar, B. Chandar;Rhee, Shi-Woo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.966-969
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    • 2003
  • Thin film capacitors with Al-Polymer-Al sandwich structure were fabricated. The bottom and top aluminium (Al) electrodes were deposited by vacuum evaporation and copper phthalocyanine (CuPc), polyaniline-emeraldine base (Pani-EB) and cobalt phthalocyanine/polyaniline - emeraldine base (CoPc /Pani-EB) blend films (which can be used as buffer hole injection layer in OLEDs) were deposited by spin coating technique. X-ray diffractograms indicated amorphous nature of the polymer films whose thicknesses were measured by capacitance and Rutherford Backscattering Spectrometry (RBS) methods. AC conduction studies revealed that the conduction mechanism responsible in these films is variable range hopping of polarons. From D.C conduction studies, it is observed that, the nature of conduction is ohmic in the lower fields and at higher fields the dominating D.C conduction is of Poole-Frenkel type.

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스크린 인쇄법 및 열전사법에 의한 VPT 형광막의 형성연구 (A Study on VPT phosphor screen formed by screen printing and thermal transfer method)

  • 조미정;남수용
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.593-594
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    • 2006
  • A novel thermal transfer method was developed to form the phosphor screen for VPT(Video Phone Tube). This method have advantages of simple process, clean environment, saving raw material and running-cost comparison of electrodeposition, spin coating of conventional methods. But now applying phosphor screen for thermal transfer method has been formed three layers (phosphor layer, ITO layer and thermal adhesive layer) on the PET film as substrate. This is complex process, run to waste of raw-material and require of high cost. Also ITO paste at present has been imported from Japan. To improve these problems, we have manufactured phosphor screen formed by two layers (phosphor layer and ITO layer). We have developed ITO paste that had both conductive and excellent thermal transfer abilities, made it of domestic raw-material.

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졸-겔법에 의한 이트리안 안정화 지프코니아박막의 결정화 (Crystallization of Yttria-Stabilized-Zirconia Film by Sol-Gel Process)

  • 서원찬;조차제;윤영섭;황운석
    • 한국표면공학회지
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    • 제30권3호
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    • pp.183-190
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    • 1997
  • Fabrication and crystallization characteristics of yttria($T_2O_3$) stabilized zirconia(YSZ) thin film by sol-gel process were studied. YSZ sol was synthesized with zirconium n-propoxide($Zr(OC_3H_7)_4)$) and yttrium nitrate pentahydrate ($Y(NO_3)_3.5H_2O$). YSZ film was prepared by depositing the polymeric sol on porous $Al_2O_3$ substrate by spin-coating, and the film characteristics were investigated by FRIR, TG-DTA, XRD, DSC, optical microscopy and SEM. The film topology was uniform and cracks were not found. It was found that the annealing temperature and the concentration of stabilizer affect the crystallization of YSZ film. The YSZ film began to crystallize from amorphous to tetragonal phase at 40$0^{\circ}C$, and it was not converted to cubic structure until $1100^{\circ}C$. It seemed that the grains were formed over $700^{\circ}C$and the average grain size was obtained about 0.2$\mu\textrm{m}$.

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Synthesis of Highly Concentrated ZnO Nanorod Sol by Sol-gel Method and their Applications for Inverted Organic Solar Cells

  • Kim, Solee;Kim, Young Chai;Oh, Seong-Geun
    • Korean Chemical Engineering Research
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    • 제53권3호
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    • pp.350-356
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    • 2015
  • The effects of the zinc oxide (ZnO) preparing process on the performance of inverted organic photovoltaic cells (OPVs) were explored. The morphology and size of ZnO nanoparticles were controlled, leading to more efficient charge collection from device and higher electron mobility compared with nanospheres. Nanosized ZnO particles were synthesized by using zinc acetate dihydrate and potassium hydroxide in methanol. Also, water was added into the reaction medium to control the morphology of ZnO nanocrystals from spherical particles to rods, and $NH_4OH$ was used to prevent the gelation of dispersion. Solution-processed ZnO thin films were deposited onto the ITO/glass substrate by using spin coating process and then ZnO films were used as an electron transport layer in inverted organic photovoltaic cells. The analyses were carried out by using TEM, FE-SEM, AFM, DLS, UV-Vis spectroscopy, current density-voltage characteristics and solar simulator.

나노 임프린트 기술을 이용한 폴리머 도파로 기반의 브래그 격자형 파장 필터 (Polymeric Wavelength Filter Based on a Bragg Grating Using Nanoimprint Technique)

  • 안세원;이기동;김도환;진원준;이상신
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권5호
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    • pp.267-271
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    • 2006
  • A polymeric waveguide-type wavelength filter based on a Bragg grating has been proposed and fabricated using the simple nanoimpring technique, for the first time to our knowledge. An ultraviolet transparent stamp with the single-mode waveguide pattern incorporating a surface-relief-type Bragg grating was specially designed selective dry-etching process. Using this stamp, the device fabrication was substantially involving just a single-step process of imprint followed by polymer spin-coating. The achieved maximum reflection was higher than 25 dB at the center wavelength of 1569 nm. And the 3-dB bandwidth was 0.8 nm for the device length of 1.5 cm.

Printing Technology for Bulk-Heterojunction Organic Photovoltaic Cells: Inkjet and Aerosol-Jet Printing

  • 윤성철;정재욱;김동환;임종선;이창진
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.11.1-11.1
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    • 2009
  • Bulk-heterojunction type organic photovoltaic cells have been remarkably improved due to the development of efficient donors and post treatment process. However, most of researchers have studied on the OPVs using spin-coating method during the past decade. To commercialize the OPVs, much cheaper printing process should be developed such as inkjet, screen, gravure, and so on. In this study, we have focused on the development of printing technology using Inkjet and Aerosol-Jet printing, which can offer reliable device performance. Finally, 4.5% power conversion efficiency can be achieved under AM 1.5 1sun light illumination, which is the highest value in printed OPVs. We reveal that substantial improvement can be realized by highly efficient bulk heterojunction after printing. Also, we can confirm these two printing methods are promising fabrication methods for large area OPVs. Also, flexible and large area (18 cm2) printed OPVs have been fabricated and device performance will be discussed in detail.

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CONDUCTIVE SnO$_2$ THIN FILM FABRICATION BY SOL-GEL METHOD

  • Lee, Seung-Chul;Lee, Jae-Ho;Kim, Young-Hwan
    • 한국표면공학회지
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    • 제32권3호
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    • pp.456-460
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    • 1999
  • Transparent conducting tin (IV) oxide thin films have been studies and developed for the electrode materials of solar cell substrate. Fabrication of tin oxide thin films by sol-gel method is process development of lower cost photovoltaic solar cell system. The research is focused on the establishment of process condition and development of precursor. The precursor solution was made of tin isopropoxide dissolved in isopropyl alcohol. The hydrolysis rate was controlled by addition of triethanolamine. Dip and spin coating technique were applied to coat tin oxide on borosilicate glass. The resistivity of the thin film was lower than 0.1Ω-cm and the transmittance is higher than 90% in a visible range.

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