• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.37-40
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• 2003

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

• 소성∙가공
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• 제28권1호
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• pp.21-26
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• 2019

Direct Laser Melting (DLM) of $Ti-xTiH_2$ (mixing ratio x = 2, 5, 10 wt.%) blended powder is characterized by producing porous titanium parts. When a high energy laser is irradiated on a $Ti-TiH_2$ blended powder, hydrogen gas ($H_2$) is produced by the accompanying decomposition of the $TiH_2$ powder, and acts as a pore-forming and activator. The hydrogen gas trapped in a rapidly solidified molten pool, which generates porosity in the deposited layer. In this study, the effects of a $TiH_2$ mixing ratio and the associated processing parameters on the development of a porous titanium were investigated. It was determined that as the content of $TiH_2$ increases, the resulting porosity density also increases, due to the increase of $H_2$ produced by $TiH_2$. Also, porosity increases as the scan speed increases. As fast solidified melting pools do not provide enough time for $H_2$ to escape, the faster the scan speed, the more the resulting $H_2$ is captured by the process. The results of this study show that the mixing ratio (x) and laser machining parameters can be adjusted to actively generate and control the porosity of the DLM parts.

• 공업화학
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• 제19권6호
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• pp.633-639
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• 2008

상전환법을 이용하여 폴리설폰, n-메틸피롤리돈과 톨루엔으로 이루어진 제막용액으로부터 고분자 분리막이 제조되었다. 톨루엔은 폴리설폰에 대한 비용매로서 제막용액에 첨가되었으며, 침지용 비용매로는 이소프로필알코올이 사용되었다. 제조된 모든 분리막은 밀집 형상의 표면층과 스폰지 형상의 하부층으로 구성된 이중구조 형태의 비대칭성 구조를 보였다. 첨가된 톨루엔은 제막용액의 열역학적 성질을 변화시켜 열역학적 상분리를 촉진하는 역할을 할 수 있음을 보였으며, 제조된 분리막은 톨루엔을 첨가에 의해 막의 표면층 두께가 증가하는 특성을 보였다. 분리막의 투과 특성을 측정한 결과, 톨루엔이 첨가되었을 때 밀집 표면층의 두께 증가에도 불구하고 거의 동일한 배제율을 유지하면서 투과플럭스는 5배 이상 증대하는 효과를 보였다.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1997년도 추계학술발표회논문집(1)
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• pp.719-725
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• 1997

This paper presents results of experimental studies on the heat transfer and solidification of the molten metal pool with overlying coolant with boiling. The metal pool is heated from the bottom surface and coolant is injected onto the molten metal pool. As a result, the crust, which is a solidified layer, may form at the top of the molten metal pool. Heat transfer is accomplished by a conjugate mechanism, which consists of the natural convection of the molten metal pool, the conduction in the crust layer and the convective boiling heat transfer in the coolant. This work examines the crust formation and the heat transfer rate on the molten metal pool with boiling coolant. The simulant molten pool material is tin (Sn) with the melting temperature of 232$^{\circ}C$. Demineralized water is used as the working coolant. The crust layer thickness was ostensibly varied by the heated bottom surface temperature of the test section, but not much affected by the coolant injection rate. The correlation beかeon the Nusselt number and the Rayleigh number in the molten metal Pool region of this study is compared against the crust formation experiment without coolant boiling and the literature correlations. The present experimental results are higher than those from the experiment without coolant boiling, but show general agreement with the Eckert correlation, with some deviations in the high and low ends of the Rayleigh number. This discrepancy is currently attributed to concurrent rapid boiling of the coolant on top of the metal layer.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 The Korea-Japan Plastics Processing Joint Seminar
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• pp.27-32
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• 2003

The wavelike flow mark phenomenon is one of the surface defects that can arise during the injection stage of the injection molding process. We have performed a numerical analysis using a finite element method for the injection molding to verify the validity of 'Go-over' hypothesis. Also, we have compared the results of numerical analysis with available experimental data. Numerical analysis results of the flow marks are qualitatively in good agreement with experimental data of reference, but are quantitatively deviated from experimental data in a consistent manner. A parametric study has been performed to examine the correlative effects of various injection molding processing parameters and material properties on the flow mark size.

• 한국생산제조학회지
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• 제9권2호
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• pp.66-71
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• 2000

Laser induced surface hardening of Tool steel(STC5) can be achieved either with or without surface melting. In trans-formation hardening as the surface is heated to a temperature below its melting point and is rapidly cooled solidified microstructures are usually much finer and stronger than those of the base matals. For this reason surface modification of tool steel by YAG laser irradiation has been studied as a function of processing parameters such as power density pulse width defocusing distance and molten depth. The high energy density changes and refines the microstructure of the near surface layer. In the case of beam passes martensite formed in the melt zone exhibited very high vickers hardness values. Molten depth and width depend on defocusing distance and energy of black color painting is more absorptive than other color painting.

• 한국해양공학회지
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• 제15권4호
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• pp.60-65
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• 2001

Thermal spray coating is formed by a process in which melted particles flying with high speed towards substrate, then crash and spread on the substrate surface cooled and solidified in a very short time, Stacking of the particles makes coating. In this study, the exfoliation of $Al_2$O$_3$ and Ni-4.5wt.%Al thermally sprayed coating which were deposited by an atmospheric plasma spray apparatus are investigated using an AE method. A tensile test is conducted on notch specimens in a stress range below the elastic limit of substrate. The wave forms of AE generated from the three coating specimens can be classified by FFT analysis into two types which low frequency(type I waveform is considered to corresponds exfoliation of coating layers and type II waveform corresponds the plastic deformation of notch tip or the resultant fracture of coating. The fracture of the coating layers can estimate by AE event and amplitude, because AE features increase when the deformation generates.

• Journal of Information Display
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• 제6권1호
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• pp.1-7
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• 2005

We propose new fabrication methods of a pixel-isolated liquid crystal (LC) structure for flexible display applications. In the LC structure fabricated through the proposed method, the patterned interpixel walls for sustaining the cell thickness are supported by the solidified polymer layer through anisotropic phase separation of LC/polymer composite, causing the alignment of the LC molecules to have very good mechanical stability against external pressure. In addition, we show that such pixel-isolating walls can be made by the stamping method which can be applied to fabricate large size plastic LCDs by roll-to-roll processing.

• 설비공학논문집
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• 제6권3호
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• pp.182-192
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• 1994

This paper focuses on the investigation of the heat transfer phenomena that occur inside the cylindrical tube. The inclination of the tube is adopted as a principal parameter varying from vertical to horizontal. The phase change material employed in this experiment is 99 percent pure n-docosane paraffin($C_{22}$ $H_{46}$). It is found that the amount of solidified mass during a prescribed solidifying period is not sensitive to the inclination of the tube but to the local layer thickness. It is studied that the latent energy is the largest contributor to the total extracted energy. The sensible energy($E_{s1}$, $E_{s2}$, $E_{s3}$) may not be negligible at the large wall-subcooling and initial-liquid-superheating, also at the first step of solidifying.

• 정보저장시스템학회논문집
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• 제1권2호
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• pp.192-196
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. The nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. In nano-injection molding process, since the solidified layer, generated during the polymer filling, deteriorates transcribability of nano patterns by preventing the polymer melt from filling the nano cavities, an injection-mold system was constructed to actively control the stamper surface temperature using MEMS heater and sensors. The replicated polymeric patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth. The replicated polymeric patterns can be applied to high density patterned media.