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Effect of surface damage remove etching of Reactive Ion Etching for Crystalline silicon solar cell

  • Park, Jun-Seok;Byeon, Seong-Gyun;Park, Jeong-Eun;Lee, Yeong-Min;Lee, Min-Ji;Im, Dong-Geon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.404-404
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    • 2016
  • 태양전지 제작 시 표면에 피라미드 구조를 형성하면 입사되는 광의 흡수를 높여 광 생성 전류의 향상에 기여한다. 일반적인 KOH를 이용한 습식 표면조직화 공정은 평균 10%의 반사율을 보였으며, 유도 결합 플라즈마를 이용한 RIE 공정은 평균 5.4%의 더 낮은 반사율을 보였다. 그러나 RIE 공정을 이용한 표면조직화는 낮은 반사율과 서브 마이크론 크기의 표면 구조를 만들 수 있지만 플라즈마 조사에 의한 표면 손상이 많이 발생하게 된다. 이러한 표면 손상은 태양전지 제작 시 표면에서 높은 재결합 영역으로 작용하게 되어 포화 전류(saturation currents, $J_0$)를 증가시키고 캐리어 수명(carrier lifetime, ${\tau}$)을 낮추는 결함 요소로 작용한다. 이러한 플라즈마에 의한 표면 손상을 제거하기 위해 HF, HNO3, DI-water를 이용하여 DRE(Damage Remove Etching) 공정을 진행하였다. DRE 공정은 HF : DI-water 솔루션과 HNO3 : HF : DI-water 솔루션의 두 가지 공정을 이용하여 공정 시간을 가변하며 진행하였다. 포화전류($J_0$), 캐리어 수명(${\tau}$), 벌크 캐리어 수명(Bulk ${\tau}$)을 비교를 하기위해 KOH, RIE, RIE + DRE 공정을 진행한 세 가지 샘플로 실험을 진행하였다. DRE 공정을 적용할 경우 공정 시간이 지날수록 반사도가 높아지는 경향을 보였지만, 두 번째의 최적화된 솔루션 공정에서 $2.36E-13A/cm^2$, $42{\mu}s$$J_0$, Bulk ${\tau}$값과 가장 높은 $26.4{\mu}s$${\tau}$를 얻을 수 있었다. 이러한 결과는 오제 재결합(auger recombination)이 가장 많이 발생하는 지역인 표면과 불균일한 도핑 영역에서 DRE 공정을 통해 나아진 표면 특성과 균일한 도핑 프로파일을 형성하게 되어 재결합 영역과 $J_0$가 감소 된 것으로 판단된다. 높아진 반사도의 경우 $SiN_x$를 이용한 반사방지막을 통해 표면 반사율을 1% 이내로 내릴 수 있어 보완이 가능하였다. 본 연구에서는 RIE 공정 중 플라즈마에 의해 발생하는 표면 손상 제거를 통하여 캐리어 라이프 타임의 향상된 조건을 찾기 위한 연구를 진행하였으며, 기존 RIE 공정에 비해 반사도의 상승은 있지만 플라즈마로 인한 표면 손상을 제거하여 오제 재결합에 의한 발생하는 $J_0$를 낮출 수 있었고 높은 ${\tau}$값인 $26.4{\mu}s$의 결과를 얻어 추후 태양전지 제작에 향상된 효율을 기대할 수 있을 것으로 기대된다.

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Influence of relative distance between heater and quartz crucible on temperature profile of hot-zone in Czochralski silicon crystal growth (쵸크랄스키법 실리콘 성장로에서 핫존 온도분포 경향에 대한 히터와 석영도가니의 상대적 위치의 영향)

  • Kim, Kwanghun;Kwon, Sejin;Kim, Ilhwan;Park, Junseong;Shim, Taehun;Park, Jeagun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.5
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    • pp.179-184
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    • 2018
  • To lessen oxygen concentrations in a wafer through modifying the length of graphite heaters, we investigated the influence of relative distance from heater to quartz crucible on temperature profile of hot-zone in Czochralski silicon-crystal growth by simulation. In particular, ATC temperature and power profiles as a function of different ingot body positions were investigated for five different heater designs; (a) typical side heater (SH), (b) short side heater-up (SSH-up), (c) short side heater-low (SSH-low), (d) bottom heater without side heater (Only-BH), and (e) side heater with bottom heater (SH + BH). It was confirmed that lower short side heater exhibited the highest ATC temperature, which was attributed to the longest distance from triple point to heater center. In addition, for the viewpoint of energy efficiency, it was observed that the typical side heater showed the lowest power because it heated more area of quartz crucible than that of others. This result provides the possibility to predict the feed-forward delta temperature profile as a function of various heater designs.

A Study on the Distribution Characteristics of Terpene at the Main Trails of Mt. Mudeung (무등산 주요 탐방로에서 테르펜 분포특성 연구)

  • Lee, Dae-Haeng;Kim, Min-Hee;Park, Ok-Hyun;Park, Kang-Soo;An, Sang-Su;Seo, Hee-Jeong;Jin, Seung-Hyun;Jeong, Won-Sam;Kang, Yeong-Ju;An, Ki-Wan;Kim, Eun-Sun
    • Journal of Environmental Health Sciences
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    • v.39 no.3
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    • pp.211-222
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    • 2013
  • Objectives: A great number of people visit forests for their bountiful healing factors. We investigated the quantity of terpene and analyzed the correlations with meteorological and environmental factors at Mt. Mudeung in order to support public health. Methods: The terpene amounts were investigated along 11 main trails using stainless steel tube packed by Tenax TA (150 mg) and Carbopack B (130 mg) during March to November 2012. Terpene amounts of 20 species (${\alpha}$-pinene, camphene, etc.), and meteorological and environmental factors were investigated in the field. Results: Terpene of 16 species was released from the forest and total terpene amounts were 2,080 pptv at the site of Chamaecyparis obtusa, the highest among 11 sites, nearby the first reservoir on Mt. Mudeung. Terpene concentrations in the forest were nine to 23 times higher than found in urban areas. Total terpene amounts had positive correlations with temperature, humidity, carbon dioxide and oxygen (p<0.01) with $R^2$ of 0.345, 0.369, 0.591, 0.145, respectively, from April to July. Wind speed and solar radiation in the forest had a negative correlation with terpene amounts and showed statistical insignificance with p-values of 0.118 and 0.233, respectively. Conclusions: This study suggests that the amounts of terpene around Mt. Mudeung are indeed higher, so visitors may enjoy a therapeutic walk in the forest with a healing effect. These results showed the forest was very effective for improving human health.

Efficiency of Soil and Fertilizer Nitrogen in relation to Rice Variety and Application Time, Using $^{15}N$ Labelled Fertilizer -I. N.P.K. simple trials in farmers fields- (중질소(重窒素)를 이용한 수도품종(水稻品種) 및 시용시기(施用時期)에 따른 토양 및 시비질소(施肥窒素)의 효율 -제1보(第一報). 농가포장(農家圃場)에서의 NPK 단순시험(單純試驗)-)

  • Park, Hoon;Park, Young-Sun;Lee, Choon-Soo
    • Applied Biological Chemistry
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    • v.24 no.4
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    • pp.230-237
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    • 1981
  • For the investigation of efficient use of fertilizer nitrogen NPK simple trials were carried out using newly bred Tongil line(japonica indica hybrid selection) and the leading local varieties with sulfur coated area in fields for two years. The yield of Tongil line was higher than that of leading local varieties by 16% in the cool year and 23% is warm year with high solar radiation from NPK simple trials including SCU and 2-split application which were carried in 130 fields at 32 locations. Warm year increased yield by 9% in Tongil but only 3% in the local than the cool year did. Optimum nitrogen level was higher in Tongil by 3.8㎏ in the cool year and 5.5㎏ in warm year than for the local. Yearly variation of optimum nitrogen in the carne variety was greater than varietal variation in the same Year. Two-split application resulted in 1 to 2% of inconsistent yield variation. Sulfur coated urea increased yield by average 2 to 4% even at 20% reduced rate of nitrogen. It was remarkably effective in same $(27{\sim}39%)$, virgin (20%) and unmatured (10%) soils.

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A Study on Performance Comparison of Multipurpose Function Electronic Measurement Reference Station Prototype System using LED and Gyro Sensor (LED 및 자이로센서를 이용한 다기능 전자측량기준점 프로토타입 시스템의 성능비교에 관한 연구)

  • Park, Sung-Kyun;Jung, Se-Hoon;Park, Dong-Gook;Sim, Chun-Bo
    • The Journal of the Korea institute of electronic communication sciences
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    • v.8 no.8
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    • pp.1247-1255
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    • 2013
  • In this paper, We proposes multipurpose function electronic measurement reference station prototype system based on LED and Gyro Sensor. This system have developed to possible with real time data collection and landscape illumination and surrounding diastrophism monitoring for that analyze problems of existing planted reference station. Hardware for the proposed system consists of a gyro sensor module to detect diastrophism, GPS module to process location information, environment sensor module to process surrounding environmental data and CDMA wireless data communication to send the collected data to server. In addition, this paper intends to enhance system management and future usability in a way that applies LED, QR-code, RFID and Solar cell module to outer side of electronic measurement reference station to improve usability of H/W for electronic measurement reference station. Lastly, this paper conducted current amount evaluation to supply stabilized electricity with its various functions in the proposed multipurpose function electronic measurement reference station and it's proved that this system can be stably operated with its electricity loss factor of 2.29% loss factor. And this paper conducted a qualitative comparison with existing electronic measurement reference station system in order to evaluate superiority of the proposed electronic measurement reference station.

A Case Study on the Meteorological Observation in Spring for the Atmospheric Environment Impact Assessment at Sangin-dong Dalbi Valley, Daegu (대기환경영향평가를 위한 대구광역시 상인동 달비골의 봄철 기상관측 사례분석)

  • Park, Jong-Kil;Jung, Woo-Sik;Hwang, Soo-Jin;Yoon, Ill-Hee;Park, Gil-Un;Kim, Sin-Ho;Kim, Seok-Cheol
    • Journal of Environmental Science International
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    • v.17 no.9
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    • pp.1053-1068
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    • 2008
  • This study aims to produce fundamental database for Environment Impact Assessment by monitoring vertical structure of the atmosphere due to the mountain valley wind in spring season. For this, we observed surface and upper meteorological elements in Sangin-dong, Daegu using the rawinsonde and automatic weather system(AWS). In Sangin-dong, the weather condition was largely affected by mountains when compared to city center. The air temperature was low during the night time and day break, and similar to that of city center during the day time. Relative humidity also showed similar trend; high during the night time and day break and similar to that of city center during the day time. Solar radiation was higher than the city, and the daily maximum temperature was observed later than the city. The synoptic wind during the measurement period was west wind. But during the day time, the west wind was joined by the prevailing wind to become stronger than the night time. During the night time and daybreak, the impact of mountain wind lowered the overall temperature, showing strong geographical influence. The vertical structure of the atmosphere in Dalbi valley, Sangin-dong had a sharp change in air temperature, relative humidity, potential temperature and equivalent potential temperature when measured at the upper part of the mixing layer height. The mixing depth was formed at maximum 1896m above the ground, and in the night time, the inversion layer was formed by radiational cooling and cold mountain wind.

Changes in Quality Characteristics of Gochujang Prepared with Different Ingredients and Meju Starters (고추장 재료와 종균 첨가에 따른 고추장의 품질 변화)

  • Park, Eui-Seong;Heo, Ju-Hee;Ju, Jaehyun;Park, Kun-Young
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.45 no.6
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    • pp.880-888
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    • 2016
  • Changes in quality characteristics of gochujang prepared with different ingredients (white rice, barley, sorghum and millet, bamboo salt) and meju starters were studied. The gochujang samples were fermented for 6 weeks at $40^{\circ}C$ and analyzed for changes in their physicochemical properties and sensory characteristics. Eight different gochujang samples were prepared: WR-SS-AB, WR-SS-ABL, WR-BS-AB, WR-BS-ABL, MG-SS-AB, MG-SS-ABL, MG-BS-AB, MG-BS-ABL (WR: white rice, MG: mixed grains, SS: solar salt, BS: bamboo salt, AB: Aspergillus oryzae/Bacillus subtilis starter meju, ABL: Aspergillus oryzae/Bacillus subtilis/Lactobacillus plantarum starter meju). There were significant differences between experimental groups in terms of moisture content, pH, acidity, and color value. All gochujang samples showed increased moisture contents and pH as well as increased acidity and amino-type nitrogen during fermentation. MG-BS-ABL showed the highest contents of amino-type nitrogen and free amino acids after 6 weeks of fermentation compared with other experiment groups. In addition, MG-BS-ABL showed the highest sensory analysis score, including appearance, flavor, taste, and overall acceptability after the fermentation of samples. Based on the results, MG-BS-ABL exhibited similar quality characteristics as general gochujang but showed the highest sensory scores and contents of amino-type nitrogen and free amino acids. These results might be due to the high protein contents of mixed grains and high mineral contents of bamboo salt and fermented products from mixed probiotic starters.

The effects of hydrogen treatment on the properties of Si-doped Ga0.45In0.55P/Ge structures for triple junction solar cells

  • Lee, Sang-Su;Yang, Chang-Jae;Ha, Seung-Gyu;Kim, Chang-Ju;Sin, Geon-Uk;O, Se-Ung;Park, Jin-Seop;Park, Won-Gyu;Choe, Won-Jun;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.143-144
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    • 2010
  • 3-5족 화합물 반도체를 이용한 집광형 삼중 접합 태양전지는 40% 이상의 광변환 효율로 많은 주목을 받고 있다[1]. 삼중 접합 태양전지의 하부 셀은 기계적 강도가 높고 장파장을 흡수할 수 있는 Ge이 사용된다. Ge위에 성장될 III-V족 단결정막으로서 Ge과 격자상수가 일치하는 GaInP나 GaAs가 적합하고, 성장 중 V족 원소의 열확산으로 인해 Ge과 pn접합을 형성하게 된다. 이때 GaInP의 P의 경우 GaAs의 As보다 확산계수가 낮아 태양전지 변환효율향상에 유리한 얇은 접합 형성이 가능하고, 표면 에칭효과가 적기 때문에 GaInP를 단결정막으로 선택하여 p-type Ge기판 위 성장으로 단일접합 Ge구조 제작이 가능하다. 하지만 이종접합 구조 성장으로 인해 발생한 계면사이의 전위나 미세결함들이 결정막내부에 존재하게 되며 이러한 결함들은 광학소자 응용 시 비발광 센터로 작용할 뿐 아니라 소자의 누설전류를 증가시키는 원인으로 작용하여 태양전지 변환효율을 감소시키게 된다. 이에 결함감소를 통해 소자의 전기적 특성을 향상시키고자 수소 열처리나 플라즈마 공정을 통해 수소 원자를 박막내부로 확산시키고, 계면이나 박막 내 결함들과 결합시킴으로서 결함들의 비활성화를 유도하는 연구가 많이 진행되어 왔다 [2][3]. 하지만, 격자불일치를 갖는 GaInP/Ge 구조에 대한 수소 열처리 및 불순물 준위의 거동에 대한 연구는 많이 진행되어 있지 않다. 따라서 본 연구에서는 Ga0.45In0.55P/Ge구조에 수소 열처리 공정을 적용을 통하여 단결정막 내부 및 계면에서의 결함밀도를 제어하고 이를 통해 태양 전지의 변환효율을 향상시키고자 한다. <111> 방향으로 $6^{\circ}C$기울어진 p-type Ge(100) 기판 위에 유기금속화학증착법 (MOCVD)을 통해 Si이 도핑된 200 nm의 n-type GaInP층을 성장하여 Ge과 단일접합 n-p 구조를 제작하였다. 제작된 GaInP/Ge구조를 furnace에서 250도에서 90~150분간 시간변화를 주어 수소열처리 공정을 진행하였다. 저온 photoluminescence를 통해 GaInP층의 광학적 특성 변화를 관찰한 결과, 1.872 eV에서 free-exciton peak과 1.761 eV에서 Si 도펀트 saturation에 의해 발생된 D-A (Donor to Acceptor)천이로 판단되는 peak을 검출할 수 있었다. 수소 열처리 시간이 증가함에 따라 free-exciton peak 세기 증가와 반가폭 감소를 확인하였고, D-A peak이 사라지는 것을 관찰할 수 있었다. 이러한 결과는 수소 열처리에 따른 단결정막 내부의 수소원자들이 얕은 불순물(shallow impurity) 들로 작용하는 도펀트들이나, 깊은 준위결함(deep level defect)으로 작용하는 계면근처의 전위, 미세결함들과의 결합으로 결함 비활성화를 야기해 발광세기와 결정질 향상효과를 보인 것으로 판단된다. 본 발표에서는 상술한 결과를 바탕으로 한 수소 열처리를 통한 박막 및 계면에서의 결함준위의 거동에 대한 광분석 결과가 논의될 것이다.

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Mechanical Properties of a High-temperature Superconductor Bearing Rotor in a 10 kWh Class Superconductor Flywheel Energy Storage System (10 kWh급 초전도 베어링 회전자의 기계적 특성 평가)

  • Park, B.J.;Jung, S.Y.;Kim, C.H.;Han, S.C.;Park, B.C.;Han, S.J.;Doo, S.G.;Han, Y.H.
    • Progress in Superconductivity
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    • v.13 no.1
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    • pp.58-63
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    • 2011
  • Recently, superconductor flywheel energy storage systems (SFESs) have been developed for application to a regenerative power of train, a power quality improvement, the storage of distributed power sources such as solar and wind power, and a load leveling. As the high temperature superconductor (HTS) bearings offer dynamic stability without the use of active control, accurate analysis of the HTS bearing is very important for application to SFESs. Mechanical property of a HTS bearing is the main index for evaluating the capacity of an HTS bearing and is determined by the interaction between the HTS bulks and the permanent magnet (PM) rotor. HTS bearing rotor consists of PM and iron collector and the proper dimension design of them is very important to determine a supporting characteristics. In this study, we have optimized a rotor magnet array, which depends on the limited bulk size and performed various dimension layouts for thickness of the pole pitch and iron collector. HTS bearing rotor was installed into a single axis universal test machine for a stiffness test. A hydraulic pump was used to control the amplitude and frequency of the rotor vibration. As a result, the stiffness result showed a large difference more than 30 % according to the thickness of permanent magnet and iron collector. This is closely related to the bulk stiffness controlled by flux pining area, which is limited by the total bulk dimension. Finally, the optimized HTS bearing rotor was installed into a flywheel system for a dynamic stability test. We discussed the dynamic properties of the superconductor bearing rotor and these results can be used for the optimal design of HTS bearings of the 10kWh SFESs.

Performance Characteristics of p-i-n Type Organic Thin-film Photovoltaic Cell with CuPc: $F_4$-TCNQ Hole Transport Layer (CuPc: $F_4$-TCNQ 정공 수송층이 도입된 P-i-n형 유기 박막 태양전지의 성능 특성 연구)

  • Park, So-Hyun;Kang, Hak-Su;Senthilkumar, Natarajan;Park, Dae-Won;Choe, Young-Son
    • Polymer(Korea)
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    • v.33 no.3
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    • pp.191-197
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    • 2009
  • We have investigated the effect of strong p-type organic semiconductor $F_4$-TCNQ-doped CuPc hole transport layer on the performance of p-i-n type bulk heterojunction photovoltaic device with ITO/PEDOT:PSS/CuPc: $F_4$-TCNQ(5 wt%)/CuPc:C60(blending ratio l:l)/C60/BCP/LiF/Al, architecture fabricated via vacuum deposition process, and have evaluated the J-V characteristics, short-circuit current ($J_{sc}$), open-circuit voltage($V_{oc}$), fill factor(FF), and power conversion efficiency(${\eta}_e$) of the device. By doping $F_4$-TCNQ into CuPc hole transport layer, increased absorption intensity in absorption spectra, uniform dispersion of organic molecules in the layer, surface uniformity of the layer, and enhanced injection currents improved the current photovoltaic device with power conversion efficiency(${\eta}_e$) of 0.16%, which is still low value compared to silicone solar cell indicating that many efforts should be made to improve organic photovoltaic devices.