• 제목/요약/키워드: Sol-gel preparation

검색결과 428건 처리시간 0.023초

집적도를 높인 평면형 가스감지소자 어레이 제작기술 (New Fabrication method of Planar Micro Gas Sesnor Array)

  • 정완영
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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    • pp.727-730
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    • 2003
  • Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

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알콕사이드로부터 Seed가 첨가된 알루미나의 제조(I): 분말특성 (The Preparation of Seeded Alumina from Alkoxide (I): Powders)

  • 김창은;임광일;이해욱
    • 한국세라믹학회지
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    • 제29권5호
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    • pp.367-376
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    • 1992
  • The powder characteristics of seeded alumina prepared from alkoxide by sol-gel method were studied. When ${\alpha}$-Al2O3 seeded powders used, these ${\alpha}$ phase transformation temperatures decreased than those of unseeded powders by 110$^{\circ}C$ and fine powders under 0.1 $\mu\textrm{m}$ could be obtained. When Fe-nitrate added powders used, fast transformation rate resulted from ionic effects of Fe3+, but hard aggregated morphology exhibited. When ${\alpha}$-Al2O3 and Fe nitrate simultaneously added, these powders represented lower transformation temperature but resulted in microstructure with aggregated particles.

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금속 Alkoxide를 이용한 LAS계 내열세라믹스의 제조에 관한 연구(I) (Preparation of the LAS Ceramics for Heat Resistance using Metal Alkoxide (I))

  • 김형태;이응상
    • 한국세라믹학회지
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    • 제30권12호
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    • pp.987-992
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    • 1993
  • In order to synthesize the heat resistance ceramics of LAS system, we studied on preparing the fine powder with homogeneity by sol-gel method using metal alkoxide. Various results were obtained depending on the composition and process. When the amount of H2O added at initial stage is higher than 10mol/$\ell$, and when the amount of catalyst is 0.1mol/$\ell$, the particle size of synthesized hydrate becomes finer. On condition that partial prehydrolysis time of TEOS is more than 50 hours, the monosized fine powder is obtained(below 1${\mu}{\textrm}{m}$).

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Sol-Gel Processing for Preparation of Metal Oxide Films

  • Korobova Natalya;Soh, Dea-Wha
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.259-264
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    • 2000
  • Systematic research of metal alkoxide electrophoretic deposition has been developed. The formation mechanism of electrophoretic deposits has been offered. The structure study of dry and heat-treated electrophoretic deposits has been established. The concrete examples of one and bi-component oxide thin film formation were considered. The new approaches for thin film technology have developed on various substrates of different shapes and sizes. The correlation between thin film structure, mechanism of their formation, and physico-chemical properties has been determined.

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Oxidative Dimerization of Methane over Lead Aluminate Spinel Catalysts

  • 장종산;박상언
    • Bulletin of the Korean Chemical Society
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    • 제16권12호
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    • pp.1148-1152
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    • 1995
  • Oxidative dimerization of methane to C2-hydrocarbons was performed over lead aluminate spinel catalysts. These spinel catalysts were prepared by co-precipitation, aerogel, and sol-gel methods. The active phase of lead aluminate oxides was found to be PbAl2O4 spinel. The activities of the catalysts were strongly dependent on the preparation method as well as the composition of PbAl2O4 phase. The proper oxygen mobility of PbAl2O4 spinel oxides appeared to be important to get high catalytic activity and selectivity for C2-hydrocarbon formation.

졸-겔법에 의한 (YbxY1-x)MnO3강유전체 박막제조 (Preparation of Ferroelectric (YbxY1-x)MnO3 Thin Film by Sol-Gel Method)

  • 강승구;이기호
    • 한국세라믹학회지
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    • 제41권2호
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    • pp.170-175
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    • 2004
  • Y-acetate, Yb-acetate와 Mn-acetate를 출발물질로 사용하여 sol-gel 법으로 강유전성 (Y $b_{x}$ $Y_{1-x}$)Mn $O_3$ 박막을 제조하였다. Acetylaceton을 촉매로 사용하고 Reflux 법을 이용하여 안정한 (Y $b_{x}$ $Y_{1-x}$)Mn $O_3$ 전구체 용액을 얻었으며, 박막은 스핀 코팅방법으로 Si(100) 기판 위에 제조하였다 열처리 온도, 코팅용액의 Rw($H_2O$/alkoxide moi ratio)변화 등을 실험변수로 하여 박막의 결정상 변화를 연구하였다. X-선 회절분석 결과 YbMn $O_3$의 결정상을 얻기 위한 최저 열처리온도는 7$50^{\circ}C$이었으며, 최적 열처리 조건은 80$0^{\circ}C$였다 Rw를 1∼6 범위 내에서 조절하여 첨가한 결과, Rw=1의 조건에서 c-축 배향이 잘 발달된 hexagonal YbMn $O_3$ 단일 결정상을 얻었다. Si(100)기판 위에 제조된 (Y $b_{x}$ $Y_{1-x}$)Mn $O_3$ 박막은 x=0 또는 1인 경우 잔류분극(Pr)값이 약 200 nC/$ extrm{cm}^2$을 나타내었으나 0