• 한국재료학회지
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• 제14권10호
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• pp.701-706
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• 2004

Bismuth layered structure ferroelectric thin films, La-substituted $Bi_{4}Ti_{3}O_{12}$ ($Bi_{1-x}La_{x}Ti_{3}O_{12}$, x=0.75, BLT) were prepared on the $Pt(111)/Ti/SiO_2/Si(100)$ substrates by a sol-gel spin coating process. The thin films were annealed in various conditions, i.e., oxygen, nitrogen and vacuum atmospheres for various annealing time. We investigated the annealing condition effects on the grain orientation and ferroelectric properties. The measured XRD patterns revealed that the BLT thin films showed only $Bi_{4}Ti_{3}O_{12}$-type phase with random orientation. $La^{3+}$ ion substitution for $Bi^{3+}$ ion in perovskite layers of $Bi_{4}Ti_{3}O_{12}$ decreased the degree of c-axis orientation and increased the remanent polarization ($2P_{r}$). The remanent polarization ($2P_{r}$) and the coercive field ($2E_{c}$) of the BLT thin film annealed at $650^{\circ}C$ for 5 min in oxygen atmosphere were $87{\mu}C/cm^2$ and 182 kV/cm, respectively, at an applied electric field of 240 kV/cm. For all of the BLT thin films annealed in various conditions, the fatigue resistance was shown. The improvement of ferroelectric properties with La substitution in $Bi_{4}Ti_{3}O_{12}$ could be attributed to the changes in space charge densities and grain orientation in the thin film.

• 한국결정성장학회지
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• 제10권3호
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• pp.211-218
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• 2000

$PbZrO_3$의 전구체 용액을 준비하여 spin coating법으로 Pt/Ti/$SiO_2$/Si 기판 위에 박막을 입힌 후 두가지 방법으로 열처리하여 $PbZrO_3$박막 결정의 형성을 조사하였다. 즉, 하나는 $500^{\circ}C$, $550^{\circ}C$, $600^{\circ}C$, $650^{\circ}C$ 및 $700^{\circ}C$로 가열된 전기로 속에 직접 삽입하여 결정화시켰으며, 다른 한가지 방법은 동일한 온도조건하에서 급속가열방식(RTA)으로 열처리하여 박막을 결정화시켰다. 또 전기로에 삽입하여 $700^{\circ}C$에서 1분, 10분, 20분, 30분 동안 열처리하여 시간의 변화에 따른 결정의 형성과정도 살펴보았다. PZ 박막을 전기로에 직접 삽입한 경우 $600^{\circ}C$에서 30분간 그리고 RTA의 경우 $650^{\circ}C$에서 1분간 열처리 하였을 경우 결정이 형성되었고, $700^{\circ}C$의 전기로에 삽입한 경우에는 10분 이상의 시간이 요구되었다. 그러나 양호한 결정 grain의 형성을 위해서는 $700^{\circ}C$에서 30분간 열처리하는 것이 4가지 열처리 시간 중 가장 좋은 것으로 나타났다.

• 한국재료학회지
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• 제21권10호
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• pp.568-572
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• 2011

The preparation of $Y_2O_3$-doped $ZrO_2$ nanoparticles in Igepal CO-520/cyclohexane reverse micelle solutions is studied here. In this work, we synthesized nanosized $Y_2O_3$-doped $ZrO_2$ powders in a reverse micelle process using aqueous ammonia as the precipitant. In this way, a hydroxide precursor was obtained from nitrate solutions dispersed in the nanosized aqueous domains of a microemulsion consisting of cyclohexane as the oil phase, with poly (oxyethylene) nonylphenylether (Igepal CO-520) as the non-ionic surfactant. The synthesized and calcined powders were characterized by thermogravimetrydifferential thermal analysis (TGA-DTA), X-ray diffraction analysis (XRD) and transmission electron microscopy (TEM). The crystallite size was found to nearly identical with an increase in the water-to-surfactant (R) molar ratio. A FTIR analysis was carried to monitor the elimination of residual oil and surfactant phases from the microemulsion-derived precursor and the calcined powder. The average particle size and distribution of the synthesized $Y_2O_3$-doped $ZrO_2$ were below 5 nm and narrow, respectively. The TG-DTA analysis showed that the phase of the $Y_2O_3$-doped $ZrO_2$ nanoparticles changes from the monoclinic phase to the tetragonal phase at temperatures close to $530^{\circ}C$. The phase of the synthesized $Y_2O_3$-doped $ZrO_2$ when heated to $600^{\circ}C$ was tetragonal $ZrO_2$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술회의 초록집
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• pp.21-21
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• 2010

(Ba,Sr)$TiO_3$ (BST) thin film with a perovskite structure has potential for the practical application in various functional devices such as nonvolatile-memory components, capacitor, gate insulator of thin-film transistors, and electro-optic devices for display. Normally, the BST thin films derived from sol-gel and sputtering are amorphous or partially crystalline when processed below $600^{\circ}C$. For the purpose of integrating BST thin film directly into a Si-based read-out integrated circuit (ROIC), it is necessary to process the BST film below $400^{\circ}C$. The microstructural and electrical properties of low-temperature crystallized BST film were studied. The BST thin films have been fabricated at $350^{\circ}C$ by UV-assisted rapidly thermal annealing (RTA). The BST films are in a single perovskite phase and have well-defined electrical properties such as high dielectric constant, low dielectric loss, low leakage current density, and high breakdown voltage. Photoexcitation of the organics contained in the sol-gel-derived films by high-intensity UV irradiation facilitates elimination of the organics and formation of the single-crystalline phase films at low temperatures. The amorphous BST thin film was transformed to a highly (h00)-oriented perovskite structure by high oxygen pressure processing (HOPP) at as low as $350^{\circ}C$. The dielectric properties of BST film were comparable to (or even better than) those of the conventionally processed BST films prepared by sputtering or post-annealing at temperature above $600^{\circ}C$. When external pressure was applied to the well-known contractive BST system during annealing, the nucleation energy barrier was reduced; correspondingly, the crystallization temperature decreased. The UV-assisted RTA and HOPP, as compatible with existing MOS technology, let the BST films be integrated into radio-frequency circuit and mixed-signal integrated circuit below the critical temperature of $400^{\circ}C$.

• 한국세라믹학회지
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• 제36권9호
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• pp.982-990
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• 1999

YSZ/LSM composite cathode was fabricated by dip-coating of YSZ sol on the internal pore surface of a LSM cathode followed by sintering at low temperature (800-100$0^{\circ}C$) The YSZ coating significantly increased the TPB(Triple Phase Boundary) where the gas the electrode and the electrolyte were in contact with each other. Sinter the formation of resistive materials such as La2Zr2O7 or SrZrO3 was prevented due to the low processing temperature and TPB was increased due to the YSZ film coating the electrode resistance (Rel) was reduced about 100 times compared to non-modified cathode. From the analysis of a.c impedance it was shown that microstructural change of the cathode caused by YSZ film coating affected the oxygen reduction reaction. In the case of non-modified cathode the RDS (rate determining step) was electrode reactions rather than mass transfer or the oxygen gas diffusion in the experimental conditions employed in this study ($600^{\circ}C$-100$0^{\circ}C$ and 0,01-1 atm of Po2) for the YSZ film coated cathode however the RDS involved the oxygen diffusion through micropores of YSZ film at high temperature of 950-100$0^{\circ}C$ and low oxygen partial pressure of 0.01-0.03 atm.

• Journal of Information Display
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• 제13권4호
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• pp.151-157
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• 2012

A simple method of fabricating out-coupling structures was demonstrated via solution-processing to enhance light extraction from organic light-emitting diodes (OLEDs). Scattering layers were easily obtained by spin-coating an $SiO_2$ sol solution that contained $TiO_2$ particles. By introducing the scattering layer and the solution-processible corrugated structure as internal and external extraction layers, the OLEDs showed increased external quantum efficiency without a change in the electroluminescence spectrum compared to conventional devices. Using these solution-processible out-coupling structures, nearly all-solution-processed OLEDs with enhanced light extraction could be fabricated. The light extraction enhancement is attributed to the suppression by the out-coupling structures of the light-trapping that arose at the interface of the glass substrate and the air.

• Korean Chemical Engineering Research
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• 제51권6호
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• pp.774-779
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• 2013

용액공정이 가능한 5 nm 정도의 입경을 가지는 이산화티탄 단분산 나노졸을 솔-젤법을 통하여 합성하였다. 결정성 이산화티탄 나노졸의 저온 스핀코팅 공정을 통하여, 거친 표면을 가지는 FTO 투명전극 기판에 블록킹층을 형성하였다. 이산화티탄 나노졸을 블록킹층에 코팅을 함으로써 거친 FTO 표면을 점진적으로 완만하게 할 수 있었다. 1, 2.5, 5, 및 10 중량%의 결정성 이산화티탄 나노 졸을 FTO 투명전극 기판에 스핀코팅하여 29, 38, 62 및 226 nm 두께의 이산화티탄 블록킹층을 형성할 수 있었다. 5 및 10 중량%의 결정성 이산화티탄 나노 졸의 경우 제곱평균 48.7 nm의 표면조도를 가지는 FTO의 투명전극 표면을 효과적으로 평탄화할 수 있었으며 이로 인해 1차원 형태의 산화아연 나노막대를 효과적으로 기판에 수직으로 배향할 수 있었다.

• 한국결정성장학회지
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• 제11권2호
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• pp.67-70
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• 2001

Nanosize $SiO_2$composite particles have been synthesized within reverse micelle via metal alkoxide hydrolysis and condensation. The size of the particles can be controlled by manipulating the relative rates of the hydrolysis and condensation reactions of tetraethoxysilane (TEOS) within the microemulsion. The average size of synthesized particles was about in the size range 14~30nm. The effects of synthesis parameters, such as the molar ratio of water to TEOS, the molar ratio of water to surfactant, and the amount of base catalyst, are discussed.

• 한국인쇄학회지
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• 제14권1호
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• pp.1-15
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• 1996

In this paper, the preparation of lead zirconium titanate(PZT) thin film by sol-gel processing was descried. Thin film coated with thickness of 4${\mu}{\textrm}{m}$ on the stainless steel substrates using the multiple spin-coating process. The crystalline phases of PZT powder and film were investigated by X-ray diffraction pattern and PZT thin film has perovskite structure over 600 C annealing temperature. Corona charging characteristics of the ferroelectric PZT thin film at 600 C were investigated by electrophotographic measurement. A difference in the charging characteristics between positive and negative corona charging was found. The charge acceptance depended in the polarity of corona and the poling of film. According to the D-E hysteresis measurment, PZT thin film can be poled by corona charging without use of top electrode. The remnant polarization in the PZT thin film is generally in the order of 48$\mu$C/$\textrm{cm}^2$. From this results, the ferroelectric PZT thin film will be possible to apply for the add-on type imaging formation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 추계학술대회 논문집
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• pp.1.1-4
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• 1995

In this study, PLZT thin films in AFE region prepared by sol-gel processing were investigated. And PLZT stock solutions were spin-coated on ITO-glass. The PLZT thin films were annealed by RTA. Hysteresis curves, dielectric characteristics and optical transmittances were measured in order to investigates the characteristics far the thin films. The PLZT thin films were crystallized at 750$^{\circ}C$ for 5 mimutes by RTA and the rosette structure composed of perovskite observed in the thin films. In case La content was 2/90/10 antiferroelectric-ferroelectric phase boundary was 2/90/10 PLZT thin film, and its hysteresis curve was good for application of optical information storage.