• Title/Summary/Keyword: Soft-Lithography

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Measurement of EUV Emission and its Plasma Parameters Generated from the Coaxial Plasma Focus of Mather and Hypocycloidal Pinched Electrodes

  • Lee, Sung-Hee;Lee, Kyung-Ae;Hong, Young-June;Uhm, Han-Sup;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.332-332
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    • 2011
  • The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

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Fabrication of shape-controlled Au nanoparticle arrays for SERS substrates

  • Shin, Seon Mi;Choi, Kyeong Woo;Ye, Seong Ji;Kim, Young Yun;Park, O Ok
    • Advances in materials Research
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    • v.3 no.3
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    • pp.139-149
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    • 2014
  • Surface enhanced Raman Scattering (SERS) has attracted attention because the technique enables detection of various chemicals, even down to single molecular scale. Among the diverse candidates for SERS substrates, Au nanoparticles are considered promising due to their fine optical properties, chemical stability and ease of surface modification. Therefore, the fabrication and optical characterization of gold particles on solid supports is highly desirable. Such structures have potential as SERS substrates because the localized surface plasmon resonance of gold nanoparticles is very sensitive to combined molecules and environments. In addition, it is well-known that the properties of Au nanoparticles are strongly dependent on their shape. In this work, arrays of shape-controlled Au nanoparticles were fabricated to exploit their enhanced and reproducible optical properties. First, shape-controlled Au nanoparticles were prepared via seed mediated solution-phase synthesis, including spheres, octahedra, and rhombic dodecahedra. Then, these shape-controlled Au nanoparticles were arranged on a PDMS substrate, which was nanopatterned using soft lithography of poly styrene particles. The Au nanoparticles were selectively located in a pattern of hexagonal spheres. In addition, the shape-controlled Au nanoparticles were arranged in various sizes of PDMS nanopatterns, which can be easily controlled by manipulating the size of polystyrene particles. Finally, the optical properties of the fabricated Au nanoparticle arrays were characterized by measuring surface enhanced Raman spectra with 4-nitrobenezenethiol.

Nanostructuring the Polyimide Alignment Layer and Uniform Liquid Crystal Alignment by Solvent Assisted Micromolding (Solvent Assisted Micromolding을 이용한 Polyimide 나노구조 형성 및 이를 통한 균일 액정 배향)

  • Kim, Jongbok
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.12 no.1
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    • pp.72-77
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    • 2019
  • The display that provides information to us through the visual sense is a very important information transmission means by intuitively transmitting information, and the liquid crystal display (LCD) is the most widely used information transmission display. In this paper, we studied solvent assisted micromolding as an alternative for the rubbing that is essential to align the liquid crystals in LCD and successfully aligned the liquid crystal molecules by constructing the nanostructures on conventional polyimide alignment layer. When generating the nanostructures on the polyimide film, there was a competitive correlation between the dissolution effect of the polymer by the solvent and the capillary effect of the polyimide molecules into the nanostructures of the mold depending on the process temperature. It was possible to form nanostructures with high step by deriving the optimum temperature. These nanostructures were able to align the liquid crystal molecules uniformly and demonstrated that they could form a desirable pretilt angle.

Soft-lithography for Manufacturing Microfabricated-Circuit Structure on Plastic Substrate (플라스틱기판 미세회로구조 제조를 위한 소프트 석판 기술의 적용)

  • Park, Min-Jung;Ju, Heong-Kyu;Park, Jin-Won
    • Korean Chemical Engineering Research
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    • v.50 no.5
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    • pp.929-932
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    • 2012
  • Novel platform technology has been developed to replace the photolithography used currently for manufacturing semiconductors and display devices. As a substrate, plastics, especially polycarbonates, have been considered for future application such as flexible display. Other plastics, i.e. polyimide, polyetheretherketon, and polyethersulfone developed for the substrate at this moment, are available for photolithography due to their high glass transition temperature, instead of high price. After thin polystyrene film was coated on the polycarbonate substrate, microstructure of the film was formed with polydimethylsiloxane template over the glass transition temperature of the polystyrene. The surface of the structure was treated with potassium permanganate and octadecyltrimethoxysilane so that the surface became hydrophobic. After this surface treatment, the nanoparticles dispersed in aqueous solution were aligned in the structure followed by evaporation of the DI water. Without the treatment, the nanoparticles were placed on the undesired region of the structure. Therefore, the interfacial interaction was also utilized for the nanoparticle alignment. The surface was analyzed using X-ray photoelectron spectrometer. The evaporation of the solvent occurred after several drops of the solution where the hydrophilic nanoparticles were dispersed. During the evaporation, the alignment was precisely guided by the physical structure and the interfacial interaction. The alignment was applied to the electric device.

Preparation of Flexible 3D Porous Polyaniline Film for High-Performance Electrochemical pH Sensor (고성능 전기 화학 pH 센서를 위한 유연한 3차원 다공성 폴리아닐린 필름 제조)

  • Park, Hong Jun;Park, Seung Hwa;Kim, Ho Jun;Lee, Kyoung G.;Choi, Bong Gill
    • Applied Chemistry for Engineering
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    • v.31 no.5
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    • pp.539-544
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    • 2020
  • A three-dimensional (3D) porous polyaniline (PANI) film was fabricated by a combined photo-and soft-lithography technique based on a large-area nanopillar array, followed by a controlled chemical dilute polymerization. The as-obtained 3D PANI film consisted of hierarchically interconnected PANI nanofibers, resulting in a 3D hierarchical nanoweb film with a large surface and open porous structure. Using electrochemical measurements, the resulting 3D PANI film was demonstrated as a flexible pH sensor electrode, exhibiting a high sensitivity of 60.3 mV/pH, which is close to the ideal Nernstian behavior. In addition, the 3D PANI electrode showed a fast response time of 10 s, good repeatability, and good selectivity. When the 3D PANI electrode was measured under a mechanically bent state, the electrode exhibited a high sensitivity of 60.4 mV/pH, demonstrating flexible pH sensor performance.

Fabrication of Chemical Sensors for the Detection of Acidic Gas using 1,3-bisdicyanovinylindane (1,3-bisdicyanovinylindane을 이용한 산성가스 감지용 화학 센서 제작)

  • Song, Hwan-Moon;Park, Young-Min;Son, Young-A;Lee, Chang-Soo
    • Korean Chemical Engineering Research
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    • v.46 no.1
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    • pp.184-188
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    • 2008
  • This study presented simple and efficient fabrication of chemical sensors for the detection of acidic gas using 1,3-bisdicyanovinylindane as an indicator because it can be promising materials having property of the rapid color change according to the variation of pH. The dissociation of proton and dye in acidic condition as changing of ion pairs give rise to dramatically change the absorbance intensity of 1,3-bisdicyanovinylindane, which can be easily applied to the development of chemical sensors. In addition, indicator dyes having negatively charge in aqueous phase can be easily fabricated using layer-by-layer (LBL) methods by way of electrostatic interaction. For the proof of concept, we demonstrated the abrupt presentation of skeleton symbol on the chemical sensor, which could be resulted from the reaction of 1,3-bisdicyanovinylindane as background color with acidic gas. Thus, the rapid appearance of symbol will induce user's caution under the emergency condition. The presented chemical gas sensor using 1,3-bisdicyanovinylindane have strong advantages. First, the fabrication process of gas sensor was very simple and low-cost. Secondly, sensors reacted by acidic gas could be reused for several times. Finally, the chemical gas sensor would be environmentally friend, which can be a basic tool for the realization of eco-organic sensor device.

Fabrication and application of cell-based microfluidic chip for eye-irritation test of chemicals (화학 물질의 안자극 시험용 세포 기반 미세유체 칩의 제작 및 응용)

  • Cho, Sujin;Rhee, Seog Woo
    • Analytical Science and Technology
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    • v.34 no.6
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    • pp.275-283
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    • 2021
  • This study presents the development of cell-based microfluidic chips for the performance of acute eye irritation tests due to chemicals and examined some of their applications. Microfluidic chips were fabricated by photolithography and soft lithography, and they had three compartments with different areas for cell culture. Rabbit corneal epithelial cells were used for the eye irritation test. The death of cells cultured inside the chip was monitored at regular time intervals after treatment with an aqueous solution of chemicals, and the cell death rate constants were calculated based on the viability curve. The performance of the microfluidic chip was verified by examining the effects of cell-cell junctions, cell-substrate adhesion, and initial cell numbers compared to cell death rates. Eye irritation tests were performed at various concentrations of an aqueous solution of sodium dodecyl sulfate (SDS), a standard substance for the eye irritant test. The cells were exposed to the SDS aqueous solution for 300 s, and the resulting eye irritation was assessed by cell viability. Finally, the equation for calculating the toxicity score (TS) was derived based on the weighting factor for each compartment in the chip. The cell-based microfluidic chip developed in this study may be used for eye irritation tests from chemicals used in cosmetics and pharmaceuticals.