• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2095-2097
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• 2000

Applications of soft X-ray which corresponds to the wavelength of the order of 1 nm and to the photon energy of the order of 1 key respectively, requires intense sources. Only synchrotron sources were available recently. The development of a new laboratory-sized source of soft X-ray radiation is required for wide applications. This paper introduces the generation of soft X-ray using laser-induced plasma.

• 한국자기학회지
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• 제24권2호
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• pp.66-69
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• 2014

유한요소법으로 분할 표시한 연한 X-선 퍼짐관을 설계하였다. 연한 X-선관의 모양설계 및 구체적인 좌표를 설정하고 전자빔 궤적을 OPERA-3D SW 프로그램을 이용하여 시뮬레이션하였다. 음극과 양극인 텅스텐 필라멘트와 타겟에 인가한 전압, 온도, 열전자 일함수 등을 고정하였다. 필라멘트 십자형 모양을 구비한 퍼짐관의 구조에 따른 전자빔의 분포와 초점변화를 분석하여 반도체 공정상의 정전기장 제거용 연한 X-선 퍼짐관 설계를 최적화하였다.

• 천문학회보
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• 제36권2호
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• pp.149.2-149.2
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• 2011

We performed the cross-correlation analysis on energy-dependent light curves of the Z-type source GX 5-1. We observed X-ray delays of a few hundred seconds between hard (16-30 keV) and soft (2-5 keV) X-ray light curves. During these phenomena, the centroid frequency of horizontal branch oscillation (HBO) was found to shift to lower or higher frequency indicating towards the dynamical movement of a Compton cloud or an inner disk front. Both eastern and western approaches were used to unfold the X-ray continuum and systematic changes were observed in soft and hard X-ray spectral components. Simultaneous energy spectral and power density spectral study shows that the production of HBOs is closely related to the Comptonizing region rather than the accretion disk. We discuss the results in the context of re-condensation of coronal material in the inner accretion disk region.

• 진공이야기
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• 제1권1호
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• pp.17-20
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• 2014

This article introduces the basic concepts of various soft X-ray spectroscopies in the study of surface and interface electronic structures. Especially, recent results of X-ray photoelectron spectroscopy experiments on organic/inorganic thin films and a lead-free solder alloys will be discussed. Soft X-ray spectroscopies to understand the chemical and electrical properties would be of broad interest in the vacuum science communities.

• 천문학논총
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• 제8권1호
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• pp.199-206
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• 1993

We review recent systematic investigation of the X-ray spectra of early type galaxies by using the Einstein data base and present new results by the ROSAT observations. The Einstein data suggested that the galaxies with low X-ray to optical luminosity ratio may have another very soft component. ROSAT observations confirm its presence and call for further study to understand the nature of this very soft emission. The X-ray bright galaxies have emission temperature of ${\sim}\;0.8\;keV$ and show radial gradients in the sense that X-ray emission is softer and more absorbed in the inner region.

• Journal of Information Display
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• 제1권1호
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• pp.52-58
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• 2000

We observed that static electricity has an influence on the etching unformity of dry etching process. When the static electricity was applied from-200[V]to-1000[V] on glass substrates, the etching rate uniformity was changed to 1.5%-15%. In this experiment, the soft X-ray to neutralize static electricity was adopted as ore of neutralization methods. As an experimental result, soft X-ray irradiation improved neutralization capability on the surface of LCD glass substrate within the short time, about 15-30sec. The difference of etching rate uniformity was below 0.5%.

• 한국광학회지
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• 제3권2호
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• pp.86-91
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• 1992

Synchrotron 방사광으로 부터 soft X-ray, 광에너지 300-1200eV, 영역의 특정 파장을 선택할 수 있는 단색화 장치의 설계에 대하여 알아보았다. C.T.Chenㅡ이 새로운 제안에 의해 건설되어 그 성능이 기존의 여러 단색화 장치보다 우수하다고 알려진 Brookhaven National Laboratory의 CEM(cylindrical element monochromator) 형태인 Dragon beam line을 모델로 하여 PLS(Pohang Light Source) 방사광 가속기의 구조에 맞게 광학적 설계시 고려해야할 조건을 조사하였다.

• 한국안전학회지
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• 제32권2호
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• pp.34-37
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• 2017

In recent emerging industry, Display field becomes bigger and bigger, and also semiconductor technology becomes high density integration. In Flat Panel Display, there is an issue that electrostatic phenomenon results in fine dust adsorption as electrostatic capacity increases due to bigger size. Destruction of high integrated circuit and pattern deterioration occur in semiconductor and this causes the problem of weakening of thermal resistance. In order to solve this sort of electrostatic failure in this process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. X-ray Generating efficiency has an effect on soft X-ray Ionizer affects neutralizing performance. There exist variable factors such as type of anode, thickness, tube voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was measured according to target material thickness using MCNPX under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W), Gold(Au), Silver(Ag). At the result, Gold(Au) shows optimum efficiency. In Tube voltage 5 keV, optimal target thickness is $0.05{\mu}m$ and Largest energy of Light flux appears $2.22{\times}10^8$ x-ray flux. In Tube voltage 10 keV, optimal target Thickness is $0.18{\mu}m$ and Largest energy of Light flux appears $1.97{\times}10^9$ x-ray flux. In Tube voltage 15 keV, optimal target Thickness is $0.29{\mu}m$ and Largest energy of Light flux appears $4.59{\times}10^9$ x-ray flux.

• 한국광학회:학술대회논문집
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• 한국광학회 1996년도 Advance Program of 13th optics andquantum Electronics conference, 1996제13 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.90-90
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• 1996

• 한국광학회:학술대회논문집
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• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.80-80
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• 1997