• Title/Summary/Keyword: SnZnO

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Etch selectivities of mask materials for anisotropic dry etching of gas sensing ZnO and SnO2 films (가스 센서용 ZnO, SnO2 박막의 이방성 식각을 위한 mask 재료의 식각 선택도 조사)

  • Park, Jong-Cheon;Cho, Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.4
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    • pp.164-168
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    • 2011
  • Etch selectivities of mask materials to ZnO and $SnO_2$ films were studied in $BCl_3$/Ar and $CF_4$/Ar inductively coupled plasmas for fabrication of nanostructure-based gas sensing layer with high aspect ratios. In $25BCl_3$/10Ar ICP discharges, selectivities of 5.1~6.1 were obtained for ZnO over Ni while no practical selectivity was obtained for ZnO over Al. High selectivities of 7 ~ 17 for ZnO over Ni were produced in $25CF_4$/10Ar mixtures. $SnO_2$ showed much higher etch rates than Ni and a maximum selectivity of 67 was observed for $SnO_2$ over Ni.

The Changes of CO Gas Sensing Properties of ZnO and $SnO_2$ with Addition $TiO_2$ ($TiO_2$첨가에 의한 ZnO와 $SnO_2$의 일산화탄소 감응특성 변화)

  • Kim, Tae-Won;Choi, U-Sung;Jun, Seon-Taek
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.312-316
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    • 1998
  • ZnO- TiO$_2$, and Sn0$_2$ - Ti0$_2$ ceramic composites doped with TiO$_2$ were prepared and their electrical and 1000ppm CO gas sensing properties were investigated. The phases of samples were analyzed by XRD, and the microsturctures of the fractured surface of samples were observed by SEM. A carbon monoxide gas sensitivity was de¬fined as the ratio of the resistance in dry air atmosphere(R$drt air$) to the resistance in 1000ppm CO gas atmosphere(R$_co$) The CO gas sensitivity of Smol% Ti0$_2$-added ZnO decreased about 1.7 times compared to that of pure ZnO. On the other hand, the maximum CO gas sensitivity of Ti0$_2$-added SnO$_2$ increased about 2.5 times compared to that of pure SnO$_2$. Therefore, the CO gas sensitivies of SnO$_2$-TiO$_2$ composite were better than those of ZnO- Ti0$_2$ and the temper¬ature range showing the maximum sensitivity for Sn0$_2$-TiO$_2$ composite was lower than that for ZnO- Ti0$_2$.

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Electrical and Optical Properties of ZnO/$SnO_2$:F Thin Films under the Hydrogen Plasma Exposure (ZnO/$SnO_2$:F 박막의 수소플라즈마 처리에 따른 전기적.광학적 특성 변화)

  • Kang, Gi-Hwan;Song, Jin-Soo;Yoon, Kyung-Hoon;Yu, Gwon-Jong;Han, Deuk-Young
    • Proceedings of the KIEE Conference
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    • 1993.07b
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    • pp.1147-1149
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    • 1993
  • ZnO/$SnO_2$:F bilayer films have been prepared by pyrosol deposition method to develop optimum transparent electrode for use in amorphous silicon solar cells. The solution for $SnO_2:F$ film was composed of $SnCl_4{\cdot}5H_2O,\;NH_4F,\;CH_3OH$ and HCl, and ZnO films have been deposited on the $SnO_2:F$ films by using the solution of $ZnO(CH_3COO){_2}{\cdot}2H_2O,\;H_2O\;and\;CH_3OH$. These films have been investigated the variation of electrical and optical properties under the hydrogen plasma exposure. The sheet resistance of the $SnO_2:F$ film was sharply increased and its transmittance was decreased with the blackish effect after plasma treatment. However, the ZnO/$SnO_2:F$ bilayer film was shown hydrogen plasma durability because the electrical and optical properties was almost unchanged more then 60 seconds exposure time.

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ZnO 첨가가 투명전도박막의 전기저항과 광투과도에 미치는 특성

  • Chae, Hong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.183-183
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    • 2010
  • 본 연구에서는 기존의 투명전도박막(ITO) 재료인 Sn 성분을 Zn로 치환하여, Zn의 성분함량 변 화에 따른 투명전도박막의 특성을 조사하기 위하여, Zn이 100% 치환된 $In_2O_{3(90wt%)}-ZnO_(10wt%)$ (IZO) 그리고 Zn이 3 %와 7 % 치환된 $In_2O_{3(90wt%)}-ZnO_{(3wt%)}-SnO_{2(7wt%)}$, $In_2O_{3(90wt%)}-ZnO_{(7wt%)}-SnO_{2(3wt%)}$ (IZTO) 등의 타겟을 제작하여 RF-magnetron sputtering 법으로 투명전도박막을 성장하였다. 각각의 박막에 대해서 전기적 특성조사와 가시광선영역에서의 광투과도 특성, 성막 특성, 그리고 구조적 특성을 조사하였다. Sn이 100% Zn으로 치환된 IZO 박막의 경우 조성 성분비가 90 : 10 wt.%에서 비저항 값이 $5.2{\times}10^{-4}\;{\Omega}cm$ 정도로 전기전도성이 매우 우수한 것으로 나타났으며, 또한 X-ray 회절패턴 분석결과 성분비에 관계없이 비정질구조임을 확인 하였다. Sn이 일부 Zn으로 치환된 IZTO 박막의 경우 성분비가 90(In) : 7(Zn) : 3(Sn) wt%의 경우 비저항 값은 $6.5{\times}10^{-4}\;{\Omega}cm$ 정도로 우수한 것으로 나타났으며, X-ray 회절패턴 분석결과 비정질 구조임을 확인하였다. 광학적 특성으로는 가시광선영역(400~780nm)에서 IZO, IZTO 박막은 85% 이상의 매우 우수한 투과율을 나타내었다.

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Synthesis of ZnS Phosphors for Low Voltage by $SnO_2$ Coating ($SnO_2$ 코팅에 의한 저전압형 ZnS계 형광체의 합성조건)

  • 김강덕;강승구;김영진;이기강;김정환;정영호;박용구;한정인;조경익
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.10a
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    • pp.165-172
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    • 1997
  • CRT용 고전압 형광체인 ZnS를 저전압용에 적용하기 위해 ZnS 분말표면에 졸-겔법으로 SnO$_2$코팅조건을 연구하였다. Sn의 코팅량은 Sn/ZnS=0.02~0.07 범위에서 변화시켰으며, 코팅된 ZnS분말의 열처리는 450~90$0^{\circ}C$/2hr 범위에서 수행하였다. Sn/ZnS=0.035일 때 최적의 코팅이 이루어졌으며, 과도한 열처리는 ZnS에서 ZnO로 상전이가 발생하므로 500~$600^{\circ}C$ 정도가 안전한 조건임이 규명되었다. Sn량이 증가할수록 코팅된 ZnS의 형광강도는 감소하였으나 저전압 형광특성은 향상될 수 있는 가능성을 보여주었다.

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Electrical Properties of TiO$_2$added ZnO (SnO$_2$가 첨가된 ZnO의 전기적성질)

  • 최우성;박춘배
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.221-223
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    • 1995
  • The electrical conductivity of SnO$_2$added ZnO was investigated using the DC and AC methods. The electrical conductivity of SnO$_2$added ZnO was decreased with increasing the concentration of SnO$_2$. The cal쳐lated effective dielectric constants of 3 mol%, 5 mo1%, and 7 mol% are ~7, ~13, and ~120, respectively. The factor of the decrease for the electrical conductivity seems to be the increase of the resistance of grain decreasing the size of grain.

Characterization of ZnO Nanorods and SnO2-CuO Thin Film for CO Gas Sensing

  • Lim, Jae-Hwan;Ryu, Jee-Youl;Moon, Hyung-Sin;Kim, Sung-Eun;Choi, Woo-Chang
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.6
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    • pp.305-309
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    • 2012
  • In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

Comparative Cycling Performance of Zn2GeO4 and Zn2SnO4 Nanowires as Anodes of Lithium- and Sodium Ion Batteries (Zn2GeO4와 Zn2SnO4 나노선의 리튬 및 소듐 이온전지 성능 비교 연구)

  • Lim, Young Rok;Lim, SooA;Park, Jeunghee;Cho, Won Il;Lim, Sang Hoo;Cha, Eun Hee
    • Journal of the Korean Electrochemical Society
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    • v.18 no.4
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    • pp.161-171
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    • 2015
  • High-yield zinc germanium oxide ($Zn_2GeO_4$) and zinc tin oxide ($Zn_2SnO_4$) nanowires were synthesized using a hydrothermal method. We investigated the electrochemical properties of these $Zn_2GeO_4$ and $Zn_2SnO_4$ nanowires as anode materials of lithium ion battery and sodium ion battery. The $Zn_2GeO_4$ and $Zn_2SnO_4$ nanowires showed excellent cycling performance of the lithium ion battery, with a maximum capacity of 1021 mAh/g and 692 mAh/g after 50 cycles, respectively, with a high Coulomb efficiency of 98 %. For the first time, we examined the cycling performance of $Zn_2GeO_4$ and $Zn_2SnO_4$ nanowires for sodium ion batteries. The maximum capacity is 168 mAh/g and 200 mAh/g after 50 cycles, respectively, with a high Coulomb efficiency of 97%. These nanowires are expected as promising electrode materials for the development of high-performance lithium ion batteries as well as sodium ion batteries.

Formation and Color of the Spinel Solid Solution in CoO-ZnO-$Fe_2O_3$-$TiO_2$-$SnO_2$ System (CoO-ZnO-$Fe_2O_3$-$TiO_2$-$SnO_2$계 Spinel 고용체의 생성과 발색에 관한 연구)

  • 이응상;이진성
    • Journal of the Korean Ceramic Society
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    • v.28 no.11
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    • pp.897-907
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    • 1991
  • This study was conducted to research the formation and the color development of CoO-ZnO-Fe2O3-TiO2-SnO2 system for the purpose of synthesizing the spinel pigments which are stable at high temperature. After preparing CoO-ZnO-Fe2O3, in which CoO causes the color, as a basic composition, $\chi$CoO.(1-$\chi$)ZnO.Fe2O3 system, $\chi$CoO.(1-$\chi$)ZnO.TiO2 system and $\chi$CoO.(1-$\chi$)ZnO.SnO2 system were prepared with $\chi$=0, 0.2, 0.5, 0.7, 1.0 mole ratio respectively. The manufacturing was carried out at 128$0^{\circ}C$ for 90 minutes. These specimens were analyzed by the reflectance measurement and the X-ray diffraction analysis and the results were summarized as follows: 1. All of the specimens formed the spinel structure and were colored with stable yellow or blue. 2. As the content of CoO and Fe2O3 in the specimens being increased, the reflectance of each specimen was measured becoming lower and the colors were changed from yellow to greyish blue and from blue to dark blue. 3. As the substituting amount of Co2+ ion for Zn2+ ion in $\chi$CoO-ZnO-TiO2-SnO2 system being increased, the colors were changed from blue to greyish blue. The colors were changed from yellow to grayish green owing to the tetrahedral Co2+ ions being increased, the octahedral Co2+ ions being decreased with increasing the amount of Sn4+ ions. 4. CoO-ZnO-Fe2O3-TiO2-SnO2 system, in which Zn2+ was substituted with Co2+ and Fe3+ was substituted with Ti4+ and Sn4+, easily formed the spinel structure without regard to the amount of substitution or the ion owing to the selectivity of the coordination number: 4 of Zn2+, 4 of Co2+, 6 of Fe3+ or 6 of Ti4+ and Sn4+.

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Formation and Color of the Spinel Solid Solution in NiO-ZnO-$Fe_2O_3$-$TiO_2$-$SnO_2$ System (NiO-ZnO-$Fe_2O_3$-$TiO_2$-$SnO_2$ 계 Spinel 고용체의 생성과 발색에 관한 연구)

  • 이응상;이진성
    • Journal of the Korean Ceramic Society
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    • v.28 no.4
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    • pp.305-314
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    • 1991
  • This study was conducted to research the formation and the color development of NiO-ZnO-Fe2O3-TiO2-SnO2 system for the purpose of synthesizing the spinel pigments which are stable at high temperature. After preparing ZnO-Fe2O3 as a basic composition, {{{{ chi }}NiO.(l-{{{{ chi }})ZnO.Fe2O3 system, {{{{ chi }}NiO.(l-{{{{ chi }})ZnO.TiO2 system, and {{{{ chi }}NiO.(l-{{{{ chi }})ZnO.SnO2 system were prepared with {{{{ chi }}=0, 0.2, 0.5, 0.7, 1 mole ratio respectively. The manufacturing was carried out at 128$0^{\circ}C$ for 30 minutes. The reflectance measurement and the X-ray analysis of these specimens were carried out and the results were summarized as follows. 1. In the specimens which included NiO, it was difficult for the spinel structure to be formed. 2. As increasing the contents of NiO and Fe2O3, all the groups which were yellow or green colored changed to brown. 3. NiO-ZnO-Fe2O3 system and NiO-ZnO-TiO2 system formed the spinel structure and the illmenite structure appeared in NiO-TiO2 system.

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