• Title/Summary/Keyword: SnZnO

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Fabrication and Characterization of Portable Electronic Nose System using Gas Sensor Array and Artificial Neural Network (가스센서 어레이와 인공 신경망을 이용한 소형 전자코 시스템의 제작 및 특성)

  • 홍형기;권철한;윤동현;김승렬;이규정
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.99-102
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    • 1997
  • An electronic nose system is an instrument designed far mimicking human olfactory system. It consists generally of gas (odor) sensor array corresponding to olfactory receptors of human nose and artificial neural network pattern recognition technique based on human biological odor sensing mechanism. Considerable attempts to develop the electronic nose system have been made far applications in the fields of floods, drinks, cosmetics, environment monitoring, etc. A portable electronic nose system has been fabricated by using oxide semiconductor gas sensor array and pattern recognition technique such as principal component analysis (PCA) and back propagation artificial neural network The sensor array consists of six thick film gas sensors whose sensing layers are Pd-doped WO$_3$ Pt-doped SnO$_2$ TiO$_2$-Sb$_2$O$_3$-Pd-doped SnO$_2$ TiO$_2$-Sb$_2$O$_{5}$-Pd-doped SnO$_2$+Pd filter layer, A1$_2$O$_3$-doped ZnO and PdCl$_2$-doped SnO$_2$. As an application the system has been used to identify CO/HC car exhausting gases and the identification has been successfully demonstrated.d.

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Preparation of Intrinsic ZnO Films at Low Temperature Using Oxidation of ZnS Precursor and Characterizion of the Films

  • Park, Do Hyung;Cho, Yang Hwi;Shin, Dong Hyeop;Ahn, Byung Tae
    • Current Photovoltaic Research
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    • v.1 no.2
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    • pp.115-121
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    • 2013
  • ZnO film has been used for CIGS solar cells as a buffer layer as itself or by doping Mg and Sn; ZnO film also has been used as a transparent conducting layer by doping Al or B for solar cells. Since ZnO itself is a host material for many applications it is necessary to understand the electrical and optical properties of ZnO film itself with various preparation conditions. We prepared ZnO films by converting ZnS precursor into ZnO film by thermal annealing. ZnO film was formed at low temperature as low as $500^{\circ}C$ by annealing a ZnS precursor layer in air. In the air annealing, the electrical resistivity decreased monotonically with increasing annealing temperature; the intensity of the green photoluminescence at 505 nm increased up to $750^{\circ}C$ annealing. The electrical resistivity further decreased and the intensity of green emission also increased in reducing atmospheres. The results suggest that deep-level defects originated by oxygen vacancy enhanced green emission, which reduce light transmittance and enhance the recombination of electrons in conduction band and holes in valence. More oxidizing environment is necessary to obtain defect-free ZnO film for higher transparency.

Relationship Between Coefficient of Thermal Expansion and Glass Transition Temperature in Phosphate Glasses (인산염유리의 선팽창계수와 유리전이온도의 관계)

  • 전재삼;차명룡;정병해;김형순
    • Journal of the Korean Ceramic Society
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    • v.40 no.11
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    • pp.1127-1131
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    • 2003
  • Phosphate glasses known for low melting temperature glasses in electrical parts has been recently used in wide area with modification of thermal properties using alkali oxides. It is our purpose to find a correlation between thermal expansion coefficient, glass transition temperature and melting temperature through investigating thermal properties in P$_2$O$\sub$5/-SnO-ZnO-SiO$_2$/B$_2$O$_3$. As a result, the product of thermal expansion coefficient and the glass transition temperature in the glasses is found to be a constant value would be a unique value for knowing one of thermal properties.

Fabrication of oxide semiconductor thin film gas sensor array (산화물 반도체 박막 가스센서 어레이의 제조)

  • 이규정;김석환;허창우
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.4 no.3
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    • pp.705-711
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    • 2000
  • A thin film oxide semiconductor micro gas sensor array which shows only 60 mW of power consumption at an operating temperature of $300^{\circ}C$ has been fabricated using microfabrication and micromachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double-layer structure of $0.1\mum\; thick\; Si_3N_4 \;and\; 1 \mum$ thick phosphosilicate glass (PSG) prepared by low-pressure chemical-vapor deposition (LPCVD) and atmospheric-pressure chemical-vapor deposition (APCVD), respectively. The sensor array consists of such thin film oxide semiconductor sensing materials as 1 wt.% Pd-doped $SnO_2,\; 6 wt.% A1_2O_3-doped\; ZnO,\; WO_3$/ and ZnO. Baseline resistances of the four sensing materials were found to be stable after the aging for three days at $300^{\circ}C$. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials.

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Fabrication and yield improvement of oxide semiconductor thin film gas sensor array (산화물 반도체 박막 가스센서 어레이의 제조 및 수율 개선)

  • 이규정;류광렬;허창우
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.6 no.2
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    • pp.315-322
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    • 2002
  • A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric-pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.% Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

Study on Corrosion Characteristics of Zr-Sn and Zr-Nb-Sn Alloys (Zr-Sn 및 Zr-Nb-Sn 합금의 부식특성에 관한 연구)

  • Jeon, Chi-Jung;Jeong, Yong-Hwan;Kim, Seon-Jin
    • Korean Journal of Materials Research
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    • v.9 no.4
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    • pp.378-385
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    • 1999
  • To evaluate the effect of Sn on the corrosion behavior of Zr alloys for nuclear fuel claddings, the corrosion tests on the binary Zr-xSn and the ternary Zr-0.4Nb-xSn alloys were performed in water at $360^{\circ}C$. The binary alloys containing 0.5, 0.8 and 1.5wt.% Sn showed the transition corrosion rate at 15 days. On the other hand, the binary alloy containing 2.0wt.% Sn showed a good corrosion resistance without the transition of corrosion rate up to 80 days. The corrosion rate of the ternary alloy increased with increasing Sn content. The difference of corrosion behaviors between binary and ternary alloys is considered due to the different solubility of Sn, Nb content and precipitates. The corrosions of Zr-xSn and Zr-0.4Nb-xSn alloys would be controlled by the fraction of tetragonal-$ZrO_2$and the amount of hydrogen pick-up.

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Suppression of Charge Recombination Rate in Nanocrystalline SnO2 by Thin Coatings of Divalent Oxides in Dye-Sensitized Solar Cells

  • Lee, Chae-Hyeon;Lee, Gi-Won;Kang, Wee-Kyung;Lee, Doh-Kwon;Ko, Min-Jae;Kim, Kyoung-Kon;Park, Nam-Gyu
    • Bulletin of the Korean Chemical Society
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    • v.31 no.11
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    • pp.3093-3098
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    • 2010
  • The core-shell $SnO_2$@AO (A=Ni, Cu, Zn and Mg) films were prepared and the effects of coatings on photovoltaic properties were investigated. Studies on X-ray photoelectron spectroscopy, energy dispersive X-ray analysis and transmission electron microscopy showed the formation of divalent oxides on the surface of $SnO_2$ nanoparticles. It was commonly observed that all the dye-sensitized core-shell films exhibited higher photovoltage than the bare $SnO_2$ film. Transient photovoltage measurements confirmed that the improved photovoltages were related to the decreased time constants for electron recombination.

Indium-free Sn based oxide thin-film transistors using a solution process

  • Im, Yu-Seung;Kim, Dong-Rim;Jeong, Ung-Hui;Kim, Si-Jun;Kim, Hyeon-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.251-251
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    • 2011
  • 본 연구에서는 Zr이 도핑 된 ZnSnO (ZZTO) 기반의 물질을 액상공정을 이용하여 합성하고, 박막트랜지스터를 제작하였다. 출발 물질로써 지르코늄 클로라이드 (ZrCl4), 아연 아세테이트 디하이드레이트 ($Zn(CH_3COO)_2{\cdot}2H_3O$), 틴 클로라이드 ($SnCl_2$)를 아연과 주석 프리커서의 비율을 4:7로 고정하고, 지르코늄 프리커서의 몰비를 변형시켜 제작하였다. 제작된 솔루션은 0.25몰의 몰 농도로 고정하였다. 솔벤트로는 2-메톡시에탄올 (2-methoxyethanol)을 사용하였으며, 준비된 솔루션은 $0.2{\mu}m$ 필터를 이용하여 필터링을 실시하였다. Heavily doped p+ Si 기판에 열적 산화법을 이용하여 120 nm 두께의 $SiO_2$를 성장시킨 것을 게이트 및 게이트 절연막으로 이용하였으며, 스핀코팅을 이용하여 ZZTO 박막을 코팅하였다. 코팅 된 기판은 $300^{\circ}C$에서 $500^{\circ}C$ 사이로 2시간 열처리를 실시하였으며, 마지막으로 소오스/드레인을 스퍼터링법으로 Al을 증착하였다. Zr 함량비, 열처리 온도, 제작된 솔루션의 온도에 따른 박막단계를 파악하기 위해 X-ray photoelectron spectroscopy (XPS), thermogravimetry differential thermal analyzer (TG-DTA), X-ray diffractometer (XRD), high-resolution transmission electron microscopy (HR-TEM), Hall-effect measurement, UV-Vis spectroscopy 분석을 실시하였으며, 제작된 소자는 semiconductor analyzer (HP4156C)를 이용하여 측정하였다.

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