• Title/Summary/Keyword: Small area variation

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Plasma Impedance Monitoring with Real-time Cluster Analysis for RF Plasma Etching Endpoint Detection of Dielectric Layers

  • Jang, Hae-Gyu;Chae, Hui-Yeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.123.2-123.2
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    • 2013
  • Etching endpoint detection with plasma impedance monitoring (PIM) is demonstrated for small area dielectric layers inductive coupled plasma etching. The endpoint is determined by the impedance harmonic signals variation from the I-V monitoring system. Measuring plasma impedance has been examined as a relatively simple method of detecting variations in plasma and surface conditions without contamination at low cost. Cluster analysis algorithm is modified and applied to real-time endpoint detection for sensitivity enhancement in this work. For verification, the detected endpoint by PIM and real-time cluster analysis is compared with widely used optical emission spectroscopy (OES) signals. The proposed technique shows clear improvement of sensitivity with significant noise reduction when it is compared with OES signals. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as end point detection.

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Application of MCC and Inverse Method for the AVHRR/SST (해수면 온도분포에 대한 최대상관계수법과 역행렬법의 적용)

  • 이태신;정종률
    • Korean Journal of Remote Sensing
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    • v.11 no.1
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    • pp.19-29
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    • 1995
  • The surface velocities were estimated by the Maximum Cross Correlation(MCC) method and an inverse method from AVHRR/SST. In the results of MCC, discontinuous flow fields were estimated in the case that cross correlation coefficient was above 0.5 but these flow pattern disappeared when cross correlation coefficient was above 0.9. This estimation was conspicuous near SST patterns of eddies. In the results of inverse method, flow field was continuous and eddy motion was estimated definitely but the velocity was overstimated in compared with MCC result over the area of small temperature gradient. This result may be due to temperature error included in SST calculated and spatial variation of heat flux.

Relationship between Yield and Weather Elements of Barley in Sunchon Area, Korea

  • Kwon, Byung-Sun
    • Plant Resources
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    • v.7 no.1
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    • pp.54-59
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    • 2004
  • This study was conducted to investigate the relationships between yearly variations of weather elements and productivity in rice. In addition, coefficients of correlation among yield and yield components were used to find out the relationships between weather elements and productivity. Coefficients of variance (C.V.) of air temperature mean was considerable with 25%, but the variation by duration of sunshine was small in May. Culm length and number of spikes were great with c.v. of 21.5, 16.4%, respectively. Coefficients of correlation between temperatures of cultivation in May and yield were positive correlations. Coefficients of correlation between precipitation and sunshine of cultivation period from Oct. to May and yield were negative correlations. Coefficients of correlation amount the culm length, number of spikes, 1,000 grains wt. of seed, and yield were positively significant at the level of 1 %, respectively.

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Effect of interflow and baseflow on nutrient runoff characteristics in agricultural area

  • Lee, Yunhee;Oa, Seong-Wook
    • Membrane and Water Treatment
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    • v.10 no.1
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    • pp.83-89
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    • 2019
  • The most common way of reducing non-point source pollutants from agricultural areas is the installation of reservoirs. However, this method is only effective for surface runoff of settleable pollutants. This study was conducted to estimate the effect of interflow, baseflow, and surface runoff on pollutant runoff in a small agricultural catchment. Runoff of organic matters, SS, and T-P were directly proportional to the rainfall variation, while ammonia and nitrate were inversely proportional to the amount of rainfall. The interflow and baseflow was only 46% of the total stream flow, but the nitrate load reached 78%. The interflow as a nutrient transport pathway should be considered for managing a stream water quality. It requires careful attention and appropriate control methodology such as vegetation to consider the influence by interflow. The reservoir as a dry extended detention pond (DEDP) has function of nutrient captor.

An Experimental Study on the Energy Separation in the Ratio of Nozzle Area of a tow Pressure Vortex Tube (저압용 보텍스튜브의 노즐면적비에 따른 에너지 분리특성에 관한 실험적 연구)

  • 오동진;최정원
    • Journal of Energy Engineering
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    • v.13 no.1
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    • pp.34-39
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    • 2004
  • The process of energy separation in a low pressure vortex tube with compressed air as a working medium is studied in detail. Experimental data of the temperature of the cold and hot air leaving the vortex tube are presented. The variation of the maximum wall temperature along the inner surface of a vortex tube and the temperature distribution in a vortex tube provide useful information about the location of the stagnation point of the flow field at the axis of the vortex tube Analysis of the results enabled to find the optimum ratio of nozzle area and the optimum shape of an orifice. From this optimum geometric setup of a low pressure and big vortex tube the effectiveness of energy separation was better than a high pressure and small vortex tube.

The Change of Beach Processes at the Coastal Zone with the Impact of Tide (조석(潮汐)의 영향(影響)이 있는 연안(沿岸)해역(海域)에서의 해안과정(海岸過程)의 변화(變化))

  • Kim, Sang-Ho;Lee, Joong-Woo
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2002.05a
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    • pp.257-262
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    • 2002
  • Numerical model introduced in this study combines wave refraction-diffraction, breaking, bottom friction, lateral mixing, and critical shear stress and three sub-models for simulating waves, currents, and bottom change were briefly discussed. Simulations of beach processes and harbor sedimentation were also described at the coast neighboring Bangpo Harbor, Anmyundo, Chungnam, where the area has suffered from accumulation of drifting sand in a small fishing harbor with a wide tidal range. We also made model test for the case of a narrow tidal range at Nakdong river's estuary area to understand the effect of water level variation on the littoral drift. Simulations are conducted in terms of incident wave direction and tidal level. Characteristics of wave transformation, nearshore current, sediment transport, and bottom change are shown and analyzed. We found from the simulation that the tidal level impact to the sediment transport is very important and we should apply the numerical model with different water level to analyze sediment transport mechanism correctly. Although the model study gave reasonable description of beach processes and harbor sedimentation mechanism, it is necessary to collect lots of field observation data, including waves, tides and bottom materials, etc. for better prediction.

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Wearable Personal Network Based on Fabric Serial Bus Using Electrically Conductive Yarn

  • Lee, Hyung-Sun;Park, Choong-Bum;Noh, Kyoung-Ju;SunWoo, John;Choi, Hoon;Cho, Il-Yeon
    • ETRI Journal
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    • v.32 no.5
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    • pp.713-721
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    • 2010
  • E-textile technology has earned a great deal of interest in many fields; however, existing wearable network protocols are not optimized for use with conductive yarn. In this paper, some of the basic properties of conductive textiles and requirements on wearable personal area networks (PANs) are reviewed. Then, we present a wearable personal network (WPN), which is a four-layered wearable PAN using bus topology. We have designed the WPN to be a lightweight protocol to work with a variety of microcontrollers. The profile layer is provided to make the application development process easy. The data link layer exchanges frames in a master-slave manner in either the reliable or best-effort mode. The lower part of the data link layer and the physical layer of WPN are made of a fabric serial-bus interface which is capable of measuring bus signal properties and adapting to medium variation. After a formal verification of operation and performances of WPN, we implemented WPN communication modules (WCMs) on small flexible printed circuit boards. In order to demonstrate the behavior of our WPN on a textile, we designed a WPN tutorial shirt prototype using implemented WCMs and conductive yarn.

Factors Determining Cesarean Section Frequency Rates of the OBGY Clinics in Metropolitan Area (수도권 소재 산부인과의원의 제왕절개율과 관련 요인분석)

  • Kim, Yun-Mi;Go, Su-Kyoung
    • Women's Health Nursing
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    • v.8 no.3
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    • pp.389-401
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    • 2002
  • This study aims to find factors that affect variations in cesarean section frequency rates among OBGY clinics in Metropolitan areas. The factors include patient, medical supplier characteristics and economic factors. This study is a cross-sectional analysis using health insurance delivery claims from July to December 2000 and files of the NHIC(national health insurance corporation). Multiple regression was used to analyze the dependent variable of cesarean section frequency rate at each clinic. The results are as follows : Cesarean section frequency rate is increasing in proportion to the number of the following patients : repeated caesarean section, disproportion, obstructed labour, fetal distress, emergency caesarean section and self-employed patients. There are geographic variations as well. Cesarean section frequency rates are higher in Inchon and Gyonggi province than in Seoul. The higher number of total delivery the clinic has, the lower rate of cesarean section it has. Clinics with high frequency rates in 1999 showed higher rates the next year. Further research is required to develop evidence based delivery modes and change strategies for increasing normal delivery and activating midwife clinics.

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A study of seasonal variation of the residual flow before and after Saemangeum reclamation (새만금간척전 .후 잔차류의 계절변화에 관한 연구)

  • 신문섭
    • Proceedings of the Korean Society of Agricultural Engineers Conference
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    • 1999.10c
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    • pp.155-161
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    • 1999
  • The land reclamation area of Saemangeum(Kunsan) is located between 126$^{\circ}$10' E~126$^{\circ}$50' E and 35$^{\circ}$35' N~356$^{\circ}$05'N at the western coast of the Korean peninsula. The are many small islands including extensive areas of semi-diurnally flooded and dewatered tidal flats. The reclamation area of Saemangeum has a range of 5.6m spring tide and the maximum tidal current speed is about 1.41m s-1 in ordinary spring tide. Most of the sediments deposited on the tidal flats are transported from the Geum river, the Manjyung river and The Dongjin river. The soil in this area consists of silty sand with the depth of 10m to 30m . The wind in winter is strong from the direction of northwest. In the past twenty years, land reclamation projects for agricutural purpose or industrial cocmplex have been mostly implemented along the western coast of Korea. Saemangeum coastal area is being constructed the33km sea dike and 40, 100ha reclamation area. The purpose of this study is to find the residual circulations in four seasons after the dike construction by a robust diagnostic and prognostic numerical model. Heat flux at the sea surface in January ,May , August , October was asopted on the basis on the daily inflow of solar radiation at the earth surface, assuming an average atomospheric transmission and no clouds , as a function of latitude and time of year(George L.P.J.E William, 1990). The discharge from the Geum , the Mankyung and the Dongjin rivers was adopted on the basis of experience formula of river flow in January , May ,August, October (The M. of C.Korea, 1993) . Water temperature and salinity along the open boundaries are obtained from the results of field observation s.

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Characteristics of Leaf Morphology and Genetic Variation of the Rare Woody Plant, Berchemia racemosa var. magna (희귀수종 먹넌출 엽의 형태적 특성과 유전변이)

  • Song, Jeong-Ho;Lim, Hyo-In;Jang, Kyung-Hwan;Han, Jingyu
    • Korean Journal of Plant Resources
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    • v.26 no.5
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    • pp.613-618
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    • 2013
  • This study was conducted to investigate the morphological characteristics of leaf and the genetic diversity of Berchemia racemosa var. magna which is only found in Anmyeon Island of South Korea. ANOVA test showed that there were significant differences among individuals within population in all 10 leaf characteristics. Average characteristics of 39 individuals were 11.8 cm in leaf length, 7.1 cm in leaf width, 1.67 in leaf index, 5.4 cm in upper 1/3 width, 6.2 cm in lower 1/3 width, 3.6 cm in petiole length, 0.19 mm in leaf thickness, 11.5 ea. in number of veins (left), 11.4 ea. in number of veins (right) and 61.7 $cm^2$ in leaf area, respectively. Except for leaf thickness (18.8%), petiole length (21.7%) and leaf area (22.0%), the coefficients of variation of most leaf characteristics were relatively low (<15.0%). A total of 50 bands was generated from 8 selected I-SSR primers. The estimates of genetic variation were 1.719 in effective number of alleles ($A_e$), 26.0% in proportion of polymorphic bands (P), 0.410 in expected heterozygosity ($H_e$) and 0.598 in Shannon's diversity index (S.I.), respectively. In spite of the small number and the limited distribution, the B. racemosa var. magna population in Anmyeon Island showed high genetic diversity.