• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.122-129
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• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• Transactions of the Society of Information Storage Systems
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• v.1 no.2
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• pp.115-120
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• 2005

As a popularity of a portable digital device such as a cellular phone, a digital camera and a MP3 player is spreading, the demand of the mobile storage device increases rapidly. A bluray technology using 405nm laser diode and objective lens having high NA(Numerical Aperture), 0.85, satisfies a miniaturization and a high capacity which are the requirements of the portable device. To develop SFFOP(small form factor optical pickup), it is prerequisite to minimize the number of optical components and establish evaluation and assembly method of micro optical pickup system as well as mass production method of micro optical component. To minimize optical elements of optical pickup, there have been many researches to use P-HOE(Polarized Holographic Optical Element) due to its extremely small size and versatile function. However, P-HOE is handled and assembled very accurately in SFFOP. In this paper, static error signal detection method is developed for an alignment of P-HOE in SFFOP. Using developed static error signal detection method, P-HOE can be aligned very accurately with real time result of static error signals of pickup such as FES(focusing error signal) and TES(Tracking Error Signal). The developed static error signal detection method is verified by the evaluation of commercialized DVD Pickup. And finally. developed static error signal detection method is applied for the assembly of P-HOE in SFFOP system satisfies specification of BD(Blu-ray Disk).