• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.3
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• pp.319-325
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• 2017

Through silicon via (TSV) technology is extensively used in 3D IC integrations. The special structure of the TSV is realized by CMP (Chemically Mechanical Polishing) process with a high Cu removal rate and, low dishing, yielding fine topography without defects. In this study, we investigated the electrochemical behavior of copper slurries with various inhibitors in the Cu CMP process for advanced TSV applications. One of the slurries was carried out for the most promising process with a high removal rate (${\sim}18000{\AA}/Min$ @ 3 psi) and low dishing (${\sim}800{\AA}$), providing good microstructure. The effects of pH value and $H_2O_2$ concentration on the slurry corrosion potential and Cu static etching rate (SER) were also examined. The slurry formula with a pH of 6 and 2% $H_2O_2$, hadthe lowest SER (${\sim}75{\AA}/Min$) and was the best for TSV CMP. A novel Cu TSV CMP process was developed with two CMPs and an additional annealing step after some of the bulk Cu had been removed, effectively improving the condition of the TSV Cu surface and preventing the formation of crack defects by variations in wafer stress during TSV process integration.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.3
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• pp.37-41
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• 2012

The wafer level stacking with Cu-to-Cu bonding becomes an important technology for high density DRAM stacking, high performance logic stacking, or heterogeneous chip stacking. Cu CMP becomes one of key processes to be developed for optimized Cu bonding process. For the ultra low-k dielectrics used in the advanced logic applications, Ti barrier has been preferred due to its good compatibility with porous ultra low-K dielectrics. But since Ti is electrochemically reactive to Cu CMP slurries, it leads to a new challenge to Cu CMP. In this study Ti barrier/Cu interconnection structure has been investigated for the wafer level 3D integration. Cu CMP wafers have been fabricated by a damascene process and two types of slurry were compared. The slurry selectivity to $SiO_2$ and Ti and removal rate were measured. The effect of metal line width and metal density were evaluated.

• Journal of Animal Environmental Science
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• v.4 no.1
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• pp.21-28
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• 1998

This study was carried out to estimate the economic impacts on operation cost and curtail the bulking agent between two kinds of plants in swine farms. Bulking agents and Plants have a variety of roles in the fields of the composting for livestock manure and also represent an economic problem in terms of plant operation costs and compost production. Two farms which have rotary(size of reactor : 10${\times}$35${\times}$1.5m) or bucket(size of reactor : 10${\times}$68${\times}$2m) plants were used for 24 weeks for bucket conveyor system, which are composed of refilling rice hull as a bulking agent every 3 weeks till decreasing volume, for 4 weeks for rotary conveyor system, which has continuous compost production system without refilling rice hull, respectively. Composts was produced in 24 weeks in the bucket conveyor system, in 4 weeks in the rotary conveyor system, respectively. The results are as follows : 1. The tissue change of Rice hull at the composts of 45 days pursuant to composting steps was more crumbling in bucket conveyor system than in rotary conveyor system. 2. Microbial counts of the final composts for safety and quality showed that total bacteria counts was 1.01${\times}$108 cfu/g in bucket conveyor system, 2.82${\times}$108 cfu/g in rotary conveyor system, Salmonella was 0.3${\times}$102 cfu/g in bucket conveyor system, 7.6${\times}$102 cfu/g in rotary conveyor system, colifom bacteria was 0.5${\times}$106 cfu/g in bucket conveyor system, 1.5${\times}$106cfu/g in rotary conveyor system, fungi 1.24${\times}$106 cfu/g in bucket conveyor system, 0.01${\times}$106 cfu/g in rotary conveyor system, respectively. However, Any system used in this trial could not be met the regulation of A grade compost of EPA and USA. 3. C:N ratio according to the composting was more rapidly changed in bucket conveyor system with 64.5 of 5 days compost to 25.4 of final products than in rotary conveyor system with 26.7 of 5 days compost to 25.9 of final products. 4. Based on the mechanical characteristics of plants used in trial and compared with Rotary conveyor system, the Bucket conveyor system in which has 0.72 ㎥/㎥ of bulking agent capacity per slurry could be curtailed 1.78 ㎥of rice hull for disposal of waste, 1㎥. It was proper facilities to produce composts quantitative in Rotary conveyor system, and to treat waste quantitative and obtain good results in compost quality in Bucket conveyor system.

• Proceedings of the Korean Geotechical Society Conference
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• 2002.03a
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• pp.673-678
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• 2002

Laboratory calibration chamber tests for cone penetrometers, pressuremeters and dilatometers in cohesionless soil specimens have been conducted by numerous researchers. However, there have been only few applications to compacted or preconsolidated cohesive soils. Therefore, for the first time, Calibration Chamber System was developed in Korea University. This can be attributed to the extremely time consuming and laborious process involved in the preparation of large cohesive soil specimens in addition to other complexities involving instrumentation for pore pressure monitoring and the need for maintaing saturation by back pressure. Chamber System with similar principle as LSU Chamber System was made of more strengthen and complementary form by increasing system diameter(1.2m), carrying out 1st and 2nd consolidation process in one system for smooth and safe work, accurate Data Aquisition.

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.188-188
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• 2007

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.193-193
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• 2007

• Proceedings of the SAREK Conference
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• 2004.06a
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• pp.72-72
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• 2004

• Proceedings of the SAREK Conference
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• 2004.06a
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• pp.78-78
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• 2004

• Journal of Animal Environmental Science
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• v.8 no.1
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• pp.9-16
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• 2002

This study was conducted to develope the new solid separating system which can be efficiently and economically removed the solid parts in high pollutants concentration of pig slurry. The pollutants concentration, BOD$_{5}$ , COD and SS of the slurry used in this study was 15,990($\pm$2,389)mg/l, 20,004($\pm$5,512)mg/l and 26,486($\pm$5,935)mg/l, respectively. After removal of solid part in slurry, the pollutants concentration, BOD$_{5}$, COD and SS was change into 5,617($\pm$690)mg/l, 5,553($\pm$633)mg/land 1,456($\pm$341)mg/l, respectively in the Fixed biological membrane tank. The reduction of the pollutants concentration of suspend liquid through membrane will be allowed to greatly improve the water purification by an Activated sludge method. This separating system consisted of a temporary storage, a circulating tank and a Fixed Biological membrane tank. A temporary storage which has a draining system of screw type and an aeration device played a tremendous role in draining the solid by filled an aeration of 0.3 l/min. A Fixed Biological membrane tank of which a styrofoam filled in a 2/3 volume as a Biological media was fixed by a stainless steel net (pore size : 0.5mm) to separate the liquid layer of influx in them. The separating system efficiency factors were the speed of screw motor, cycle number of slurries in a circulating tank and moisture contents of solid effluent through the screw path. Although the pollutants concentration was very variable in temporary storage, the final concentration of $BOD_5$ and SS, except COD of the suspended liquid in a Fixed biological membrane were not different regardless of cycle number of a circulating tank. Moisture contents of effluent from temporary storage was 73% under the speed 1 ppm of screw motor and 62% under the 1/4rpm of it.

• Journal of Animal Environmental Science
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• v.18 no.3
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• pp.191-200
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• 2012

This study was conducted to investigate the effects of application of cattle slurry on forage productivity and environmental pollution in rice paddy land. Cropping systems used in this study consisted of two designs, such as whole crop rice applied with standard fertilizer (MWRS) and whole crop rice applied with cattle slurry (MWRC). The field experiments were conducted on the clay loam at Backsanmyun, Kimje, Chunlabukdo province in Korea for three years (May 2006 to Apr. 2009). This study was arranged in completely randomized design with three replicates. The yield of dry matter of whole crop rice in MWRS was similar as compared with that of MWRC. The contents of crude protein of whole crop rice in MWRS significantly increased as compared with those of MWRC (P<0.05). However, the contents of acid detergent fiber (ADF), neutral detergent fiber (NDF) and total digestible nutrients (TDN) of whole crop rice were hardly influenced by cattle slurry application. The pH, and contents of T-N, $P_2O_5$ and organic matter (OM) in soil samples collected at the end of the experiment increased as compared with those at the beginning of the experiment. After the end of experiment, the concentrations of exchangeable cations (Ca, Na, Mg and K) in soil samples collected at the end of the experiment were remarkably higher than those at the beginning of the experiment (P<0.05). The concentrations of $NO_3$-N and $NH_4$-N in discharge water in MWRS, MWRC and DWBRC were higher in 2008 than those in 2007. But the concentration of $PO_4$-P in discharge water was hardly influenced by the cropping system during experimental period. The concentrations of $NO_3$-N, $NH_4$-N and $PO_4$-P in leaching water were hardly influenced by application of cattle slurry.