• Journal of the Korean Society for Precision Engineering
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• v.34 no.2
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• Journal of Biosystems Engineering
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• v.30 no.1 s.108
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• pp.32-37
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• 2005

This study was conducted the slurry pig manure treatment by condensation drying of liquid from the slurry manure with a heat-pump and electric heater combined with air flow channel system. The system was designed as liquid and solid matters separation of slurry manure, and it can doing continuous input of slurry manure from a pig house, and it can operated year round use for pig farms. The separation of liquid and solid matters from slurry manure needed the prevention of solid accumulation in the system. The system was designed as closed space from outside air space for maximized evaporation of liquid and the condensation of liquid from slurry manure. The system can be operated the pig slurry manure treatment regardless of seasons in a yew. The separated evaporation water from the pig slurry manure by the heat-pump was satisfactorily pure water that can be used as washing water in livestock farms. The system can applicate to about 100 heads of pig, and the proper area of evaporation plate system was considered around $10\;m^2$. The input electrical energy of about 15 kWh which the cost equal to 250,000 won per month.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.4
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• pp.478-486
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• 2007

Numerical analysis had been performed to understand flow characteristics of the flue gas and slurry in the absorber of a flue gas desulphurization (FGD) system using computational fluid dynamics (CFD) technique. Two-fluid(Euler-Lagrangian) model had been employed to simulate physical phenomenon, which slurry particles injected through slurry spray nozzles fall down and bump into the flue gas inflowing through inlet duct. It was not necessary to adopt pre-defined pressure drop inside the absorber because interaction between flue gas and slurry particles was considered. Hundreds of slurry spray nozzles were considered with the spray velocity at the nozzles, swirl velocity and spreading angle. The results note that the flow disturbance of flue gas is found at the bottom of the absorber, and the current rising with high speed stream is observed in the opposite region of the inflow duct. The high speed stream is reduced as the flue gas goes up, because the high speed stream of flue gas dumps falling slurry particles due to momentum exchange between flue gas and slurry particles. In spite of some disproportion in slurry distribution inside the absorber, escape of slurry particles from the absorber facility is not observed. The pressure drop inside the absorber is mainly occurred at the bottom section.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1993.10a
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• pp.1395-1404
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• 1993

Application of water-saving self-feeders can reduce water consumption of pigs by more than 50% . so the feeding-watering system one of the most important way of the reduction of the slurry. Bioactive deep litter housing can eliminate slurry. Matured urine, faeces and litter can use for the purposes of soil conditioning and fertilizing . Water-saving slurry handling technology can halve manure dilution so it can double the nutrient content of the slurry. By using of straw bale biofilter for reducing emissions of pig houses makes fattening of pigs possible close to populated area. Developed rate control system for slurry application make avoiding over-fertilization possible , can fulfill better the demand of nutrient of plants. By means of computer aided manure utilization system area distribution of soil characteristics can determinate . The system is suitable for planning the utilization of manure and slurry in environment -friendly way.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 2000.11c
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• pp.784-791
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• 2000

To improve the uniformity of slurry spreading and to reduce the odor problem, a hose slurry spreader was developed, which spread the slurry near to the surface of the soil. First, the uniformity of slurry spreading was investigated. The best result of 8.1 ％ CV was obtained at the rotor speed of 250 rpm than any other speeds for the swine slurry, which contains 13.6% of dry matter. In case of dairy cattle slurry, which contains 8.2% of dry matter, the uniformity has the best result of CV 7.2% by high rotor speed of 330 rpm. A high speed of rotor has built a sufficient pressure in the distributor and discharged a uniform quantity of slurry through the hoses. Therefore, in practical use one should work with rotor speed over 300 rpm to maximize the uniformity of slurry spreading. Second, odor test was done with the swine slurry. While the conventional spreader shows ∑ value 440, the hose slurry spreader and its combination of disk harrow show ∑ value 258 and 184 respectively. With the air dilution sensual test and a 3-point odor bag, the conventional spreader shows 66.9 or 35.4 point and by the hose slurry spreader is 9.7 or 11.1 point. So, the developed spreader was found to have a greater effect on the reduction of odor problem. Finally, it is recommended to spread certain amount of the slurry for paddy field equivalent to the chemical fertilizer based on the N-content. It means 22 tons of swine slurry per ha. Since most of the livestock farms possess less arable land, a system of linking farms is necessary to utilize the slurry crossover the farms. The cost of slurry utilization including filling, transport spreading and brokerage is 3200-6800 Won/㎥ in accordance with the transport distance.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.11
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• pp.743-750
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• 2007

In this study, ice slurry generator using air cylinder was designed and manufactured to investigate the heat transfer characteristic of the ice slurry generator. The ice slurry generator has the same shape as the shell-and-tube type heat exchanger. Refrigerant is flowing in the shell side and ethylene glycol solution in the tube side. The experiment was conducted on performance of ice slurry generator using air cylinder with standard condition and the results are plotted on the time scale. The experimental tests on the various concentration of ethylene glycol solution, the various solution velocity in the tube side and the various tube size have been carried. For the above experimental conditions, ice making characteristics of the ice slurry generator are evaluated in terms of the overall heat transfer coefficient. And the experimental results show that the overall heat transfer coefficient of the system is increased as the tube size and the concentration of ethylene glycol decreases.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.8
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• pp.593-598
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• 2007

The present study has dealt with the measuring method of ice slurry viscosity using falling sphere viscometer. The experimental apparatus was composed by test section and high-speed video system. And the spheres used in this study were alumina and glass. The main parameters were ice packing factor (IPF) and falling velocity of sphere so the acquired results were discussed for these parameters. The viscosity of ice slurry was calculated by using measured falling velocity and moving distance at instantaneous time and the Stokes hypothesis was used for this calculation. It was clarified that possible measuring range was $IPF\;=\;0.06{\sim}0.14$ of this type of measuring device and measuring method. In addition, it was clarified that the viscosity of ice slurry increased to increase of ice packing factor (IPF) of ice slurry.

• Journal of Applied Reliability
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• v.16 no.4
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• pp.263-271
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• 2016

Purpose: A slurry pump for flue gas desulfurization system performs a role that discharges the slurry of a plaster shape in a thermal power plant. Since a slurry pump transfers the slurry by the centrifugal force, it has the friction wear in the impeller and liner because of the slurry. Methods: In this study, failure analysis and test evaluation on the slurry pump have been proposed and the process that reliability of the product improves through design improvement has been presented. And failure cause of typical failure case has been investigated and improvement design has been presented. Results: Reliability improvement is established by analysis of the test results of before and after acceleration test. Conclusion: This study can be provided to improve the product reliability through failure analysis of a slurry pump.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.120-124
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• 2004

본 연구는 Diluted Ceria 입자를 사용한 $SiO_2$(Oxide) CMP 현상에 대한 내용이다. Ceria Slurry의 경우 Silica Slurry와 비교하였을 때 Oxide Wafer 표면과 축합 화학반응을 일으키며 Chemistry Dominant한 CMP Mechanism을 따르고, Wafer Center Removal Rate(RR) Fast 의 특성을 가진다. Ceria Slurry의 문제점인 연마 불균일도를 해결하기 위해 Tribological System을 이용하였다. CMP Tribology는 Pad-Slurry 유막-Wafer의 System을 가지며 윤활막에 작용하는 마찰계수(COF)가 주요 인자이다. Tribology에 적용되는 Stribeck Curve를 통해 Slurry 윤활막의 두께(h) 정도를 예상할 수 있으며, 이 윤활막의 두께를 조절함으로써 Uniformity 향상이 가능하다. 이 Ceria Slurry CMP의 연마 불균일도를 향상시킬 수 있는 방법으로 pH 조절 및 점도 증가가 있다. Ceria 입자 CMP는 분산액의 pH 변화에 강한 작용을 받게 되며 PH5 근방에서 최적화된 Uniformity가 가능하다. 점도를 증가시키는 경우 유막 h가 증가하게 되어 Ceria Slurry의 유동이 균일 분포 상태에 가까워지며 Wafer Uniformity 향상이 가능하다.

• Asian-Australasian Journal of Animal Sciences
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• v.12 no.5
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• pp.758-765
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• 1999

Comparative studies of the effects of rates and frequency of application of dairy slurry on herbage yield and stand persistence of alfalfa and various forage grasses have not previously been conducted. The results being reported here are part of a larger study having a primary objective of comparing the effectiveness of alfalfa (Medicago sativa L.), various grasses and alfalfa-grass mixtures for utilizing nutrients from applied dairy slurry. The objectives of this part of the study were to evaluate the effects of various rates and frequencies of application of slurry on herbage yield and stand persistence of orchardgrass (Dactylis glomerata L.), reed canarygrass (Phalaris arundinacea L.), and alfalfa-orchanrdgreass and alfalfa-reed canarygrass mixtures managed as a 4-cutting management system. A randomized complete block design with treatments in a split plot arrangement with four replicates was used. The main plots consisted of 9 fertility treatments: 7 slurry rate and time of application treatments, one inorganic fertilizer treatment, and an unfertilized control. The sub-plots consisted of the two grasses and two alfalfa-grass mixture mentioned above. Slurry was composed from stored solids scraped from the alleyways of a free-stall housing barn and water added to form a slurry having about 8% solids. Manure was pumped from a liquid spreader tank into 10.4 L garden water cans for manual application to the plots. Herbage yields within species were generally unaffected by various rates of application in the first production year. Herbage yields of grasses and alfalfa-grass mixtures the second year were generally not affected by frequency of application for the same rate of slurry applied. Slurry application resulted in greater herbage yield increases in grasses than alfalfa-grass mixtures in the 4-cutting management system. In general, herbage dry matter yields of grasses from the dairy slurry treatments equaled or exceeded yields from the inorganic fertilizer treatment. Stand ratings of grasses and alfalfa-grass mixtures were not changed by manure application rates. In this study, the highest rate of slurry ($967kg\;total\;N\;ha^{-1}$ in 1995 plus $2,014kg\;N\;ha^{-1}$ in 1996) was not detrimental to herbage yields or stand persistence of any of the species. It was concluded that applying dairy slurry to these cool-season grasses and alfalfa-grass mixtures managed in a 4-cutting system is an acceptable practice from the standpoint of herbage yield and satnd persistence and by doing so the utilization of inorganic fertilizers can be reduced.