• 제목/요약/키워드: Size Inspection

검색결과 643건 처리시간 0.024초

극자외선 리소그래피용 마스크의 결함 검출 (Defect Inspection of Extreme Ultra-Violet Lithography Mask)

  • 이문석
    • 대한전자공학회논문지SD
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    • 제43권8호
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    • pp.1-5
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    • 2006
  • 본 논문은 극자외선 리소그래피용 마스크의 결함을 극자외선을 이용하여 검출하는 방법과 기존의 가시광선을 이용하여 결함을 검출해 내는 시스템과 비교하고, 인위적으로 만들어진 결함을 이용하여 극자외선이 결함에 조사되었을 때의 반사되는 패턴을 분석하였다. 포커스된 극자외선을 래스터 스캔 방식으로 조사하면서 반사되는 극자외선의 세기를 비교함으로서 결함을 발견해 내는 시스템을 구축하였고, 이를 이용하여 기존의 가시광선을 이용하는 결함 검출 장비와 상관 실험을 진행하여 반사된 빛의 세기로 예측한 결함의 크기가 두 검출 방법 사이에 강한 상관관계를 가짐을 확인하였다. 또한, 인광판을 이용하여 극자외선이 결함에 조사되어 반사되는 패턴을 영상화하여 크기별, 결함의 종류별로 다른 프린지 패턴을 가지는 것을 확인하였다.

CAD 데이터 및 엑스레이 CT이미지 비교를 통한 다이캐스팅 부품의 내부 결함 검사방법 (Internal Defects Inspection of Die-cast Parts via the Comparison of X-ray CT Image and CAD Data)

  • 홍경택;심재홍
    • 반도체디스플레이기술학회지
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    • 제17권1호
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    • pp.27-34
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    • 2018
  • Industrially, die-casting products are formed through casting, and so the methods to inspect the defects inside them are very restrictive. External inspection methods including visual inspection, sampling judgment, etc. enables researchers to inspect possible external defects, but x-ray inspection equipment has been generally used to inspect internal ones. Recently, they have been also applying three-dimensional internal inspections using CT equipment. However, they have their own limitations in applying to the use of industrial inspection due to limited detection size and long calculation time. To overcome the above problems, this paper has suggested a method to inspect internal defects by comparing the CAD data of the product to be inspected with the 3D data of the CT image. In this paper, we proposed a method for fast and accurate inspection in three dimensions by applying x-ray inspection to find internal defects in industrial parts such as aluminum die casting products. To show the effectiveness of the proposed method, a series of experiments have been carried out.

패턴 매칭을 이용한 실시간 PCB 비전 검사 (Real-time PCB Vision Inspection Using Pattern Matching)

  • 이영아;박우석;고성제
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2003년도 하계종합학술대회 논문집 Ⅳ
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    • pp.2335-2338
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    • 2003
  • This paper presents a real-time PCB (Printed Circuit Board) vision inspection system. This system can detect the OPEN and SHORT of the PCB which of the line width is 150$\mu\textrm{m}$. Our PCB inspection system is based on the referential method. Since the size of the captured PCB image is very large, the image is divided into 512${\times}$512 images to apply the accurate alignment efficiently. To correct the misalignment between the reference image and the inspection image, pattern matching is performed. In order to implement the proposed algorithm in real-time, we use the SIMD instruction and the double buffering structures. Our experiential results show the effectiveness of the developed inspection algorithm.

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정밀제조를 위한 기하공차에서의 윤곽공차 사용 (A Profile Tolerance Usage in GD&T for Precision Manufacturing)

  • 김경욱;장성호
    • 산업경영시스템학회지
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    • 제40권2호
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    • pp.145-149
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    • 2017
  • One of the challenges facing precision manufacturers is the increasing feature complexity of tight tolerance parts. All engineering drawings must account for the size, form, orientation, and location of all features to ensure manufacturability, measurability, and design intent. Geometric controls per ASME Y14.5 are typically applied to specify dimensional tolerances on engineering drawings and define size, form, orientation, and location of features. Many engineering drawings lack the necessary geometric dimensioning and tolerancing to allow for timely and accurate inspection and verification. Plus-minus tolerancing is typically ambiguous and requires extra time by engineering, programming, machining, and inspection functions to debate and agree on a single conclusion. Complex geometry can result in long inspection and verification times and put even the most sophisticated measurement equipment and processes to the test. In addition, design, manufacturing and quality engineers are often frustrated by communication errors over these features. However, an approach called profile tolerancing offers optimal definition of design intent by explicitly defining uniform boundaries around the physical geometry. It is an efficient and effective method for measurement and quality control. There are several advantages for product designers who use position and profile tolerancing instead of linear dimensioning. When design intent is conveyed unambiguously, manufacturers don't have to field multiple question from suppliers as they design and build a process for manufacturing and inspection. Profile tolerancing, when it is applied correctly, provides manufacturing and inspection functions with unambiguously defined tolerancing. Those data are manufacturable and measurable. Customers can see cost and lead time reductions with parts that consistently meet the design intent. Components can function properly-eliminating costly rework, redesign, and missed market opportunities. However a supplier that is poised to embrace profile tolerancing will no doubt run into resistance from those who would prefer the way things have always been done. It is not just internal naysayers, but also suppliers that might fight the change. In addition, the investment for suppliers can be steep in terms of training, equipment, and software.

연질 고분자 발포체의 표면팽창을 통한 치수평가에 관한 연구 (Study on Size Evaluation by Surface Expansion for Soft Polymer Foam)

  • 김민우;조종래;김명훈
    • 한국기계가공학회지
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    • 제18권11호
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    • pp.63-68
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    • 2019
  • The dimensional quality of flexible foams is often difficult to be evaluated through general machine vision inspection methods due to the free deformation of the outer shape. For the evaluation of the dimensions of flexible foams, methods of estimating the size of the product through the expansion rate of the product surface are evaluated. Specimens with various dimensions and surface gratings are prepared, and the degree of surface expansion is measured through machine vision. The correlation, between the measured surface grid size and the actual size of test specimens, is analyzed. We further analyze the correlation between the size of test specimens and the position of the surface grid. This study provides a basis for estimating the actual dimensions of specimens by measuring the surface expansion of flexible foams.

Defect Estimation of a Crack in Underground Pipelines by CMFL type NDT System

  • Kim, Hui Min;Yoo, Hui Ryong;Cho, Sung Ho;Kim, Dong Kyu;Koo, Sung Ja;Park, Gwan Soo
    • Journal of international Conference on Electrical Machines and Systems
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    • 제2권4호
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    • pp.486-490
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    • 2013
  • A defect which is axially oriented with small size is hard to detect in conventional system. CMFL(Cricumferential Magnetic Flus Leakage) type PIG(Pipelines Inspection Gauge) in the NDT(Nondestructive Testing), is operated to detect this defect called axially oriented cracks in the pipe. It is necessary to decompose the size and shapes of cracks for the manintenance of underground pipelines. This article is focused on the decomposing method of the size and shape of the axially oriented cracks by using inspection signal data for defect.

Defect Estimation of a Crack in Underground Pipelines by CMFL Type NDT System

  • Kim, Hui Min;Park, Gwan Soo
    • Journal of Electrical Engineering and Technology
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    • 제9권6호
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    • pp.2218-2223
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    • 2014
  • A crack which is axially oriented with small size is hard to detect in conventional system. CMFL(Circumferential Magnetic Flux Leakage) type PIG(Pipelines Inspection Gauge) in the NDT(Nondestructive Testing), is operated to detect this defect called axially oriented cracks in the pipe. It is necessary to decompose the size and shapes of cracks for the maintenance of underground pipelines. This article is mainly focused on the decomposing method of the size and shape of the axially oriented cracks by using inspection signal data for defect.

가우시안보간과 적응스텝크기를 적용한 하이브리드 오토포커싱 (A Hybrid Automatic Focusing Method with Gaussian Interpolation and Adaptive Step Size)

  • 문순환;김경범
    • 반도체디스플레이기술학회지
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    • 제13권1호
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    • pp.51-55
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    • 2014
  • In this paper, an hybrid automatic focusing method has been proposed for speedy and reliable measurement and inspection in industry. It can improve reliability of focusing position by using not a focusing measure but the hybrid one that is incorporated with sobel operator and auto-correlation. Also, it can not only reduce control time of focusing position using adaptive step size, but also improve accuracy of focusing position by gaussian interpolation. Its performance is verified by experiments. It is expected that it can apply to optical system for measurement and inspection in industry fields.

OLED 패널의 기준패턴과 증착패턴의 크기 측정을 위한 패턴 동시 측정 시스템의 구현 (Implementing a Simultaneous Pattern Measurement System for Measuring the Size of the Standard Pattern and the Deposition Pattern of an OLED Panel)

  • 곽병호;최경주
    • 한국멀티미디어학회논문지
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    • 제22권2호
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    • pp.117-127
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    • 2019
  • Simultaneous pattern measurement system is new research subject for OLED panel inspection. It is defect inspection of OLED panel after deposition. This research suggests the system that calculates the size and center point of each patterns after obtaining standard and deposition pattern as one image. This system could be applied to OLED manufacturing process. The research result shows that the size and center point of each patterns could be obtained by displaying the standard pattern and deposition pattern in one image.

수출검사제도(輸出檢査制度)의 현황(現況)과 간소화방안(簡素化方案) (A Study on the Quality Inspection System for the Export Articles)

  • 이상용;조남호;김두한
    • 품질경영학회지
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    • 제6권1호
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    • pp.3-13
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    • 1978
  • It is worthwhile to know how the quality inspection is practised to assure the product quality for the export articles, and what problem is resulted from the current quality inspection system for the export articles. The aim of this paper is to survey the status of quality inspection system for the export articles and to design the quality inspection system for the export articles so as to not only solve the problems arising from the current system but also improve the product quality for the export articles. To find out the facts the survey is conducted by sending a prepared questionnaire both to the export industries and to the export quality inspection agencies authorized by the Ministry of Commerce and Industry. The export industries surveyed are selected to provide broad representation with respect to the type of industry as well as to the size of company. The survey shows that about 50 percent of the responding industries desire to discontinue the current quality inspection system for the export articles, and other 50 percent of them desire to continue it until all the export industries can make the best use of quality control techniques.

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