• Title/Summary/Keyword: Single layer ITO

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Properties of Indium Tin Oxide Multilayer Fabricated by Glancing Angle Deposition Method

  • Oh, Gyujin;Lee, Kyoung Su;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.367-367
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    • 2013
  • Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

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금속이 코팅된 PET필름의 수분침투 특성 평가

  • Choe, Yeong-Jun;Park, Gi-Jeong;Jo, Yeong-Rae
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.36.1-36.1
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    • 2009
  • OLED(organic light emitting diode)는 차세대 평판 디스플레이로 전자종이, 입는 디스플레이 등 flexible한 디스플레이로도 주목받고 있다. 하지만, OLED의 가장 큰 단점 중의 하나가 수분과 산소에 매우 민감하다는 것으로 이것은 OLED의 lifetime과 연결된다. 따라서 이에 대한 mechanism의 확립이 필요하다. 따라서 본 연구에서는, flexible한 OLED에 적용되는 금속 코팅막의 적층구조 및 기판의 노출온도에 따른 금속 코팅막의 수분침투 특성에 대해 MOCON의 weight gain test (WGT)를 통해 barrier layer에 대해 평가하고 이에 대한 mechanism을 확립하는데 그 목적이 있다. 금속 코팅막은 OLED의 cathode와 anode 재료로 많이 사용되는 Al과 ITO를 sputter장비를 이용해 single layer와 multi-layer의 두 가지 구조로 PET기판에 증착하였다. 또한, 노출온도에 따른 특성을 알아보고자 bare PET / ITO coated PET(single layer $50{\mu}m$) / Al coated PET(single layer $200{\mu}m$)의 세 가지 시편을 제작하였다. 이 시편을 각각 $25^{\circ}C$, $37.8^{\circ}C$, $50^{\circ}C$의 온도에서 test를 진행하였고 이 과정을 100%RH, 70%RH, 40%RH조건의 수분조건에서 진행하여 각각의 수분조건에서 각각의 온도에 따른 금속 코팅막의 수분침투 특성에 대한 mechanism을 확립하였다. 적층구조에 따른 수분침투 특성 평가 결과 multi-layer가 single layer보다 더 우수한 수분침투의 barrier 특성을 나타냈었다. 그리고 각 온도에 따른 test결과 온도가 증가할수록 barrier의 특성이 나빠짐이 보였다.

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Parametric Studies of Pulsed Laser Deposition of Indium Tin Oxide and Ultra-thin Diamond-like Carbon for Organic Light-emitting Devices

  • Tou, Teck-Yong;Yong, Thian-Khok;Yap, Seong-Shan;Yang, Ren-Bin;Siew, Wee-Ong;Yow, Ho-Kwang
    • Journal of the Optical Society of Korea
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    • v.13 no.1
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    • pp.65-74
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    • 2009
  • Device quality indium tin oxide (ITO) films are deposited on glass substrates and ultra-thin diamond-like carbon films are deposited as a buffer layer on ITO by a pulsed Nd:YAG laser at 355 nm and 532 nm wavelength. ITO films deposited at room temperature are largely amorphous although their optical transmittances in the visible range are > 90%. The resistivity of their amorphous ITO films is too high to enable an efficient organic light-emitting device (OLED), in contrast to that deposited by a KrF laser. Substrate heating at $200^{\circ}C$ with laser wavelength of 355 nm, the ITO film resistivity decreases by almost an order of magnitude to $2{\times}10^{-4}\;{\Omega}\;cm$ while its optical transmittance is maintained at > 90%. The thermally induced crystallization of ITO has a preferred <111> directional orientation texture which largely accounts for the lowering of film resistivity. The background gas and deposition distance, that between the ITO target and the glass substrate, influence the thin-film microstructures. The optical and electrical properties are compared to published results using other nanosecond lasers and other fluence, as well as the use of ultra fast lasers. Molecularly doped, single-layer OLEDs of ITO/(PVK+TPD+$Alq_3$)/Al which are fabricated using pulsed-laser deposited ITO samples are compared to those fabricated using the commercial ITO. Effects such as surface texture and roughness of ITO and the insertion of DLC as a buffer layer into ITO/DLC/(PVK+TPD+$Alq_3$)/Al devices are investigated. The effects of DLC-on-ITO on OLED improvement such as better turn-on voltage and brightness are explained by a possible reduction of energy barrier to the hole injection from ITO into the light-emitting layer.

Electro-optical properties of organic thin film EL device using PPV (PPV를 이용한 유기 박막 EL 소자의 전기-광학적특성)

  • Kim, Min-Soo;Park, Lee-Soon;Park, Se-Kwang
    • Journal of Sensor Science and Technology
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    • v.7 no.2
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    • pp.97-102
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    • 1998
  • Organic thin film EL devices using PPV(poly (p-phenylenevinylene)) as emitter were fabricated on various conditions and structures, their electro-optical properties were estimated. Fabricated EL devices had structures of single layer(ITO(indium tin oxide)/PPV/Mg), double layer(ITO/PVK(poly(N-vinylcarbazole))/PPV/Mg and ITO/PPV/Polymer matrix + PBD/Mg) and three layer (ITO/PVK/PPV/PS(polystyrene)+PBD(butyl-2-(4-bipheny])-5-(4-tert-butylphenyl-1,3,4-oxadiazole))/Mg), their electro-optical characteristics were compared with each other. In structure of double layer (ITO/PPV /Polymer matrix + PBD/Mg), the used polymer-matrices were PMMA(poly(methyl methacrylate), PC(polycarbonate), PS and MCH(side chain liquid crystalline homopolymer). When PS as a hole transport layer was used, the luminance characteristics on concentration of PBD was obtained. In results, current-voltage-luminance curves of fabricated devices had characteristics of tunneling effect and the device showed a stable light emitting.

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Effect of ZnO Buffer Layers on the Crystallization of ITO Thin Film at Low Temperature

  • Seong, Chung-Heon;Shin, Yong-Jun;Jang, Gun-Eik
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.4
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    • pp.208-211
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    • 2012
  • In the present study, a ZnO thin film, as a buffer layer of ITO (indium tin oxide) film was deposited on glass substrates by RF magnetron sputtering at low temperature of $150^{\circ}C$. In order to estimate the optical characteristics and compare with the experimental results in Glass/ZnO(100 nm)/ITO(35 nm) multilayered film, the simulation program, EMP (Essential Macleod Program) was adopted. The sheet resistance and optical transmittance of the films were measured using the four-point probe method and spectrophotometer, respectively. From X-ray diffraction patterns, all the films deposited at $150^{\circ}C$ demonstrated only the amorphous phase. Optical transmittance was the highest at a ZnO thickness of 100 nm. The ITO(35 nm)/ZnO(100 nm) film exhibits an optical transmittance of >92% at 550 nm. The multilayered film showed an electrical sheet resistance of 407 ${\Omega}/sq.$, which is significantly better than that of a single-layer ITO film without a ZnO buffer layer (815 ${\Omega}/sq.$).

Simulations of Transmittance for the ITO/Ag/ITO Multiple Transparent Electrode Layers by 3 Dimensional FDTD Method (3차원 FDTD 방법에 의한 ITO/Ag/ITO 다층 투명전극막의 투과도 시뮬레이션)

  • Kim, Ki Rak;Cho, Eou Sik;Kwon, Sang Jik
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.3
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    • pp.88-92
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    • 2020
  • As a highly conductive and transparent electrode, the optical transmittances of ITO/Ag/ITO were simulated and compared with the experimental results. The simulations are based on the finite-difference time-domain (FDTD) method in solving linear Maxwell equations. In our simulations, the computation domain is set in the XZ-plane with 3D dimension, and a plane wave with variable wavelengths ranging from 250 nm to 850 nm is incident in the z-direction at normal incidence to the ITO/Ag/ITO film surrounded by free-air space. As the results through both simulations and experiments, it was shown that the thickness combinations by the ITO layers of about 40 nm and the Ag layer of about 10 nm could be most suitable conditions as a high conductive transparent electrode having the transmittance similar to that of a single ITO layer.

Electrical Properties of Organic Photovoltaic Cell using CuPc/$C_{60}$ double layer (CuPc/$C_{60}$ 이중층을 이용한 유기 광기전 소자의 전기적 특성)

  • Lee, Dong-Shin;Park, Yong-Pil
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2008.05a
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    • pp.744-746
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    • 2008
  • Organic photovoltaic effects were studied in a device structure of ITO/CuPc/Al and ITO/CuPc/$C_{60}$/BCP/Al. A thickness of CuPc layer was varied from 10 nm to 50 nm, we have obtained that the optimum CuPc layer thickness is around 40 nm from the analysis of the current density-voltage characteristics in CuPc single layer photovoltaic cell. From the thickness-dependent photovoltaic effects in CuPc/$Cu_{60}$ heterojunction devices, higher power conversion efficiency was obtained in ITO/20nm CuPc/40nm $C_{60}$/Al, which has a thickness ratio (CuPc:$C_{60}$) of 1:2 rather than 1:1 or 1:3. Light intensity on the device was measured by calibrated Si-photodiode and radiometer/photometer of International Light Inc(IL14004).

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Effects of the Ag Layer Embedded in NIZO Layers as Transparent Conducting Electrodes for Liquid Crystal Displays

  • Oh, Byeong-Yun;Heo, Gi-Seok
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.1
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    • pp.33-36
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    • 2016
  • In the present work, a Ni-doped indium zinc oxide (NIZO) film and its multilayers with Ag layers were investigated as transparent conducting electrodes for liquid crystal display (LCD) applications, as a substitute for indium tin oxide (ITO) electrodes. By interposing the Ag layer between the NIZO layers, the loss of the optical transmittance occurred; however, the Ag layer brought enhancement of electrical sheet resistance to the NIZO/Ag/NIZO multilayer electrode. The twisted nematic cell based on the NIZO/Ag/NIZO multilayer electrode exhibited superior electro-optical characteristics than those based on single NIZO electrode and was competitive compared to those based on the conventional ITO electrode. An LCD-based NIZO/Ag/NIZO multilayer electrode may allow new approaches to conventional ITO electrodes in display technology.

Organic Photovoltaic Effects Depending on the Layer Thickness (CuPc/$C_{60}$를 이용한 유기 광기전 소자에서 유기층의 두께에 따른 특성)

  • Han, Wone-Keun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.535-536
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    • 2005
  • Organic photovoltaic effects were studied in a device structure of ITO/CuPc/Al and ITO/CuPc/$C_{60}$/BCP/Al. A thickness of CuPc layer was varied from 10 nm to 50 nm, we have obtained that the optimum CuPc layer thickness is around 40 nm from the analysis of the current density-voltage characteristics in CuPc single layer photovoltaic cell. From the thickness-dependent photovoltaic effects in CuPc/$C_{60}$ heterojunction devices, higher power conversion efficiency was obtained in ITO/20nm CuPc/40nm $C_{60}$/Al, which has a thickness ratio (CuPc:$C_{60}$) of 1:2 rather than 1:1 or 1:3. Light intensity on the device was measured by calibrated Si-photodiode and radiometer/photometer of International Light Inc(IL14004).

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Synthesis of PPV-PTV Alternating Copolymer and EL Devices Using the Polymer

  • 황도훈;정상돈;도래미;안택;심홍구;정태형
    • Bulletin of the Korean Chemical Society
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    • v.19 no.3
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    • pp.332-335
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    • 1998
  • An alternating copolymer of PPV and PTV, poly[2-methoxy-5-(3,7-dimethyl)octyloxy-1,4-phenylenevinylene-alt-2,5-thienylenevinylene] (DAPPV-PTV) has been synthesized and light-emitting properties of the polymer have been studied. A single layer EL device using DAPPV-PTV as an emitting layer between ITO and Al electrodes (ITO/DAPPV-PTV/Al) has been fabricated, and light emission of the device becomes visible at 3 V. The EL emission maximum of the device is about 620 nm. Double layer EL device using DAPPV-PTV and Alq3 (ITO/DAPPV-PTV/Alq3/Al) has also been fabricated. The double layer EL device shows two-color emission depending on the applied voltage. The device emits a pale green color from 8 V, and then the color turns to red at about 18 V.