• 한국결정성장학회지
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• 제32권1호
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• pp.1-6
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• 2022

본 연구에서는 PVT(Physical Vapor Transport) 방법을 이용하여 반도체 식각 공정용 소재로 사용되는 링 모양의 SiC(Silicon carbide) 단결정을 제조하였다. 흑연 도가니 내부에 원기둥 형태의 흑연 구조물을 배치하여 PVT법에 의한 링 모양의 SiC 단결정을 성장시켰다. 단결정 기판을 시드로 사용하여 성장한 경우 크랙이 없는 우수한 특성의 포커스링을 얻을 수 있었다. 단결정 포커스링과 CVD 포커스링의 에칭 특성을 살펴본 결과 단결정 포커스링의 에칭속도가 줄어들었고, 단결정 포커스링이 우수한 내플라즈마성을 보여준다고 할 수 있다.

• 한국결정성장학회지
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• 제7권1호
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• pp.27-40
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• 1997

The heat in Czochralski method is transfered by all transport mechanisms such as convection, conduction and radiation and convection is caused by the temperature difference in the molden pool, the rotations of crystal or crucible and the difference of surface tension. This study delvelops the simulation model of Czochralski growth by using the finite difference method with fixed grids combined with new latent heat treatment model. The radiative heat transfer occured in the surfce of the system is treated by calculating the view factors among surface elements. The model shows that the flow is turbulent, therefore, turbulent modeling must be used to simulate the transport phenomena in the real system applied to 8" Si single crystal growth process. The effects of a cusp magnetic field imposed on the Czochralski silicon melt are studied by numerical analysis. The cusp magnetic field reduces the natural and forced convection due to the rotation of crystal and crucible very effectively. It is shown that the oxygen concentration distribution on the melt/crystal interface is sensitively controlled by the change of the magnetic field intensity. This provides an interesting way to tune the desired O concentration in the crystal during the crystal growing.

• 한국결정성장학회지
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• 제16권5호
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• pp.189-197
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• 2006

[$AgGaSe_2$] 단결정 박막을 수평 전기로에서 합성한 $AgGaSe_2$ 다결정을 증발원으로하여, hot wall epitaxy(HWE) 방법으로 증발원과 기판(반절연성-GaAs(100))의 온도를 각각 $630^{\circ}C,\;420^{\circ}C$로 고정하여 성장하였다. 이때 단결정 박막의 결정성은 광발광 스펙트럼과 이중결정 X-선 요동곡선(DCRC)으로 부터 구하였다. $AgGaSe_2$의 광흡수 스펙트럼으로부터 구한 온도에 의존하는 에너지 밴드갭 $E_g(T)$는 Varshni 공식에 fitting한 결과 $E_g(T)=1.9501eV-(8.79x10^{-4}eV/K)T^2(T+250K)$를 잘 만족하였다. 성장된 $AgGaSe_2$ 단결정 박막을 Ag, Ga, Se 분위기에서 각각 열처리하여 10K에서 photoluminescience(PL) spectrum을 측정하여 점 결함의 기원을 알아보았다. PL 측정으로 부터 얻어진 $V_{Ag},\;V_{Se},\;Ag_{int}$, 그리고 $Se_{int}$는 주개와 받개로 분류되어졌다. $AgGaSe_2$ 단결정 박막을 Ag 분위기에서 열처리하면 p형으로 변환됨을 알 수 있었다. 또한, Ga 분위기에서 열처리하면 열처리 이전의 PL 스펙트럼을 보이고 있어서, $AgGaSe_2$ 단결정 박막에서 Ga은 안정된 결합의 형태로 있기 때문에 자연 결함의 형성에는 관련이 없음을 알았다.

• 한국결정성장학회지
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• 제25권1호
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• pp.1-5
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• 2015

AlN 단결정의 특별한 용도로 이를 개발하기 위한 노력이 전 세계적으로 매우 활발하게 이루어지고 있다. 이러한 AlN을 기반으로 하는 자외선 LED는 생활, 의학, 자동자 등에 유용한 용도로서 살균, 정화, 경화 및 분석 등 분야에 이용된다. 이에 실험을 통해 PVT법으로 카본 도가니를 사용하여 AlN 단결정을 성장시켰으며 실험 중 3가지 형태의 도가니를 이용하여 성장에 미치는 영향을 분석하였으며, 그 온도 조건은 $1900{\sim}2100^{\circ}C$이고 실험 압력으로는 1~200 Torr였다. 그 결과, 높이가 높은 형태의 도가니를 사용할 경우 증발량은 기준 형태보다 증가 하는데 그쳤다. 반면, 넓은 형태의 도가니는 더욱 많은 증발양의 증가를 보였으며, 기준 형태에 비하여 훨씬 안정하다는 것을 알았다. 또한, 제한된 크기의 도가니를 이용한 PVT법에서의 도가니 형태의 변화에 따른 결과는 성장률에 따른 최적 조건, 성장 결정의 품질변화 및 성장 조건 안정성에 영향을 주는 것을 알았다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.237-242
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• 2001

The stochiometric mix of evaporating materials for the CuGaSe$_2$ single crystal thin films was prepared from horizontal furnace. To obtain the single crystal thin films, CuGaSe$_2$ mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the Hot Wall Epitaxy (HWE) system. The source and substrate temperature were 610$^{\circ}C$ and 450$^{\circ}C$, respectively The crystalline structure of single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). From the photocurrent spectrum by illumination of perpendicular light on the c-axis of the CuGaSe$_2$ single crystal thin film, we have found that the values of spin orbit splitting Δ So and the crystal field splitting ΔCr were 91 meV and 249.8 meV at 20 K, respectively. From the Photoluminescence measurement on CuGaSe$_2$ single crystal thin film, we observed free excition (Ex) existing only high quality crystal and neutral bound exiciton (D$^{\circ}$,X) having very strong peak intensity. Then, the full-width-at-half-maximum(FWHM) and binding energy 7f neutral acceptor bound excision were 8 meV and 35.2 meV, respectivity. By Haynes rule, an activation energy of impurity was 355.2 meV

• 한국재료학회지
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• 제2권1호
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• pp.52-57
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• 1992

용응인상법에 의해 융성시킨 $LiNbO_3$ 단결정의 거시적 결함은 단결정 육성인자인 성장속도, 온도구배 및 결정회전속도에 강하게 영향을 받았다. Cell 구조가 형성되지 않고 결정의 직경제어가 용이하며 결정성장 후 냉각시 에도 crack이 발생되지 않는 1" 직경의 $LiNbO_3$ 단결정의 성장조건은 온도기울기 $70~100^{circ}C/cm$, 성장속도 5~10 mm/hr, 결정회전속도 40 rpm 이었다. 이었다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.109-113
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• 1997

• 한국소음진동공학회논문집
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• 제24권11호
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• pp.890-897
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• 2014

This work investigated the electromechanical performance of a cantilevered vibration energy harvester incorporating the single crystal PMN-PZT, manufactured with the most recent technology of solid-state single crystal growth. The performances of single crystal PMN-PZTs with two different crystallographic axes such as [011] and [001] are compared with those of PZT ceramics. From the investigations, it is shown that the [001]-poled PMN-PZT is advantageous for the excitations containing single dominant frequency component, while the single crystal [011]-$d_{32}$ is superior in terms of the energy storage density and energy conversion efficiency.

• 한국결정성장학회지
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• 제13권1호
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• pp.15-18
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• 2003

High purity single crystalline calcium fluoride ($CaF_2$) has excellent optical transmission characteristics down to deep UV and is therefore selected as the main optical material for the next generation of lithography apparatus operating at wavelength of 157 nm. The growth of large sized $CaF_2$ single crystals with the required properties for this optical application can be achieved only by optimizing the crystal growth process by the aid of numerical simulation. This needs especially a precise calculation of the heat transport and temperature distribution in the solid and liquid $CaF_2$ under crystal growth conditions. As $CaF_2$ is considered to be semitransparent, the internal radiative heat transfer in $CaF_2$ plays an decisive role in the simulation of the heat transport. On the other hand it is very difficult to obtain quantitative experimental data for evaluating numerical models as $CaF_2$ is extremely corrosive at high temperatures. In this work we present a newly developed experimental technique to perform temperature measurements in $CaF_2$-crystal as well as in the melt under conditions of crystal growth process. These experimental results are compared to calculated temperature data, which were obtained by using different numerical models concerning the internal heat transfer in semitransparent $CaF_2$. It will be shown, that an advanced model, which was developed by the authors, gives a much better agreement with experimental data as a standard model, which was taken from the literature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.239-242
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• 2004

A stoichiometric mixture of evaporating materials for $CdIn_2S_4$ single crystal thin films was prepared from horizontal furnace. To obtain the single crystal thin films, $CdIn_2S_4$ mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by hot wall epitaxy(HWE) system. The source and substrate temperatures were $630^{\circ}C$ and $420^{\circ}C$ respectively. The crystalline structure of single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction(DCXD). The carrier density and mobility of $CdIn_2S_4$ single crystal thin films measured from Hall effect by van der Pauw method are $9.01{\times}10^{16}\;cm^{-3}$ and $219\;cm^2/V{\cdot}s$ at 293 K, respectively. From the optical absorption measurement, the temperature dependence of energy band gap on $CdIn_2S_4$ single crystal thin films was found to be $E_g(T)\;=\;2.7116\;eV\;-\;(7.74{\times}10^{-4}\;eV)T^2/(T+434)$. After the as-grown $CdIn_2S_4$ single crystal thin films was annealed in Cd-, S-, and In-atmospheres, the origin of point defects of $CdIn_2S_4$ single crystal thin films has been investigated by the photoluminescence(PL) at 10 K.