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A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution

  • Kim, Sangyun;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.2 no.2
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    • pp.153-164
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    • 2018
  • In semiconductor manufacturing, critical dimensions indicate the features of patterns formed by the semiconductor process. The purpose of measuring critical dimensions is to confirm whether patterns are made as intended. The deposition process for an organic light emitting diode (OLED) forms a luminous organic layer on the thin-film transistor electrode. The position of this organic layer greatly affects the luminescent performance of an OLED. Thus, a system for measuring the position of the organic layer from outside of the vacuum chamber in real-time is desired for monitoring the deposition process. Typically, imaging from large stand-off distances results in low spatial resolution because of diffraction blur, and it is difficult to attain an adequate industrial-level measurement. The proposed method offers a new superresolution single-image using a conversion formula between two different optical systems obtained by a deep learning technique. This formula converts an image measured at long distance and with low-resolution optics into one image as if it were measured with high-resolution optics. The performance of this method is evaluated with various samples in terms of spatial resolution and measurement performance.

Creep of stainless steel under heat flux cyclic loading (500-1000℃) with different mechanical preloads in a vacuum environment using 3D-DIC

  • Su, Yong;Pan, Zhiwei;Peng, Yongpei;Huang, Shenghong;Zhang, Qingchuan
    • Smart Structures and Systems
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    • v.24 no.6
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    • pp.759-768
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    • 2019
  • In nuclear fusion reactors, the key structural component (i.e., the plasma-facing component) undergoes high heat flux cyclic loading. To ensure the safety of fusion reactors, an experimental study on the temperature-induced creep of stainless steel under heat flux cyclic loading was performed in the present work. The strains were measured using a stereo digital image correlation technique (3D-DIC). The influence of the heat haze was eliminated, owing to the use of a vacuum environment. The specimen underwent heat flux cycles ($500^{\circ}C-1000^{\circ}C$) with different mechanical preloads (0 kN, 10 kN, 30 kN, and 50 kN). The results revealed that, for a relatively large preload (for example, 50 kN), a single temperature cycle can induce a residual strain of up to $15000{\mu}{\varepsilon}$.

Laboratory/Field evaluation and calibration method of low-cost PM sensor for indoor PM2.5, PM10 measurement (실내 미세먼지 측정을 위한 저가형 PM 센서의 실험실/현장 평가 및 보정 방법)

  • Doheon, Kim;Dongmin, Shin;Jungho, Hwang
    • Particle and aerosol research
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    • v.18 no.4
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    • pp.109-127
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    • 2022
  • Recently, low-cost particulate matter (PM) sensors have been widely used in monitoring mass concentration. Maintaining the accuracy of the sensors is important and requires rigorous performance evaluation and calibration. In this study, two commercial low-cost PM sensors(LCS), Plantower PMS3003 and Plantower PMS7003, were evaluated in the laboratory and field with a reference-grade PM monitor (GRIMM 11-D). Laboratory evaluation was conducted with single/mixed particles of PSL (Poly Styrene Latex) in an acrylic chamber at 20℃ and relative humidity of 20%. Field evaluation was conducted inside a building of Yonsei University (Shinchon) from February 12 to March 31, 2022. In both evaluations, LCS measured values became different from reference measured values when the relative humidity was high or the outdoor air PM10/PM2.5 ratio was high. Based on the field evaluation, the LCS measured values were corrected through four different regression analysis models. As a result, the multivariate polynomial regression analysis model showed highest matching with the reference PM monitor (PM2.5 >0.9, PM10 >0.85). In this model, the PM10/PM2.5 ratio and relative humidity were chosen as independent variables.

A Study on Combustion Characteristics of Non-Circular Grain in Hybrid Rocket for RATO (Rocket-Assisted Take Off) System (RATO(Rocket-Assisted Take Off) 시스템 적용을 위한 하이브리드 로켓 비단공형 연료 그레인 기초 연소특성 연구)

  • Su Jin Kim;Su Han Ko;Sul Hee Kim;Gyeong Mo Kim;Seong Geun Lee;Ye Chan Han;Hee Jang Moon
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.30 no.4
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    • pp.184-190
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    • 2022
  • In an attempt to apply hybrid rocket to the RATO (Rocket-Assisted Take Off) system, combustion characteristics of the non-circular grain were figured out in this study. Having larger combustion area, it was reconfirmed that the non-circular grain has advantages over regression rate, characteristic velocity and chamber pressure in which all gave higher values. Experiments were performed to understand the effect of the non-circular grain geometry over time where local regression rates depending on grain location were analyzed. It was found that the regression rate of five distinct locations were different. Partial conclusion driven was that these differences are due to the heat transfer caused by dissimilar distances from the flame layer. Besides, as combustion duration increased, the fuel port became circular, and the regression rate converged to a single value over the whole grain.

Two-Step Etching Characteristics of Single-Si by the Plasma Etching Techique (플라즈마 식각방법에 의한 단결정 실리콘의 Two-Step 식각특성)

  • Lee, Jin Hee;Park, Sung Ho;Kim, Mal Moon;Park, Sin Chong
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.24 no.1
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    • pp.91-96
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    • 1987
  • Plasma etching can obtain less damaged etch surface than reactive ion etching. This study was performed to get anisotropic etching characteristics of Si using two step etching technique with C2CIF5 and SF6 gas mixture. The results show that the etch rate and aspect ratio of silicon was increased with increment of SF6 contents. The bulging phenomenon on trench side wall in the plasma one-step etching technique was eliminated by the two step etching technique. The anisotropy was decreased from 12(at 120m Torr) to 2.2(at 400m Torr) with increasing the chamber pressure. At the low rf power (350 watts) anisotrpy of silicon was obtained 7 lower than that of high rf power (650 watts. A:~9). In Summary we obtained anisotropic etching profiles of silicon with e 6\ulcornerm depth by using the plasma two-step etching technique.

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Evaluation of Filtration Performance Efficiency of Commercial Cloth Masks (시판되고 있는 유사마스크 제품의 여과효율성능 비교평가)

  • Jang, Ji Young;Kim, Seung Won
    • Journal of Environmental Health Sciences
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    • v.41 no.3
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    • pp.203-215
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    • 2015
  • Objectives: This study was designed to evaluate the filtration efficiencies and pressure drops of five commercial cloth masks (4 plate type, 1 cup type) in comparison to the performance of a class 1 disposable respirator (reference respirator). A further objective was to evaluate the effects of the number of layers and wash treatment independently on filtration efficiencies and pressure drops. Methods: Polydisperse NaCl aerosols were generated in an aerosol chamber and their concentrations were measured by an optical particle counter (OPC) in the size range of $0.3{\sim}10{\mu}m$ (five channels). Results: The filtration efficiencies of the five cloth masks and the reference respirator were D: 9.5%, C: 18.5%, E: 23.6%, A: 28.5%, B: 29.7% and R: 91.1%, respectively, and the pressure drops through them were C, D: 0.8 Pa, E: 1.7 Pa, B: 6.4 Pa, A: 42.7 Pa and R: 19.3 Pa, respectively. The filtration efficiencies of the cloth masks and reference respirator were below the class 1 respirator criterion (${\geq}94.0%$) of the Ministry of Employment and Labor (MOEL) and Ministry of Food and Drug Safety (MFDS). The pressure drops satisfied the class 1 respirator criterion (${\leq}70Pa$) of MOEL and MFDS. When the cloth masks were folded into two and four layers, the filtration efficiencies of cloth masks A, B, C, D (plate type) increased 1.7-4.6 times, and 2.3-6.8 times, respectively, compared to the efficiencies of the same products in a single layer. Pressure drops increased as the number of layers was increased. The filtration efficiency of cloth mask E with a liner was 1.3 times higher than that of the same mask without a liner, and the pressure drop was lower in the no-liner configuration. After a single washing, the filtration efficiencies of all the cloth mask products decreased 1.04-4.0 times compared to those of the same products intact. For the cloth masks C and E, their filtration efficiencies were significantly decreased after washing (p<0.05). The pressure drops of all cloth masks were 1.2-2.0 times lower after washing. Conclusions: The filtration efficiencies of the five cloth masks were below 30% and did not improve greatly by increasing the number of layers. After a single washing, their performances decreased. Considering the above and other issues identified with cloth masks, such as poor fit and stretched fibers through use, people should not expect protection against particulate matters from the cloth masks on the market.

A Study on the Estimation of Regional Myocardial Blood Flow in Experimental Canine Model with Coronary Thrombosis using Rb-82 Dynamic Myocardial Positron Emission Tomography (실험 개에서 Rb-82 심근 Dynamic PET 영상을 이용한 국소 심근 혈류 예측의 기본 모델 연구)

  • Kwark, Cheol-Eun;Lee, Dong-Soo;Kang, Keon-Wook;Hwang, Eun-Kyung;Jeong, Jae-Min;Chang, Kee-Hyun;Chung, June-Key;Lee, Myung-Chul;Seo, Joung-Don;Koh, Chang-Soon
    • The Korean Journal of Nuclear Medicine
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    • v.29 no.1
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    • pp.48-53
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    • 1995
  • This study investigates a simple mathematical model for the quantitative estimation of regional myocardial blood flow in experimental canine coronary artery thrombosis using Rb-82 dynamic myocardial positron emission tomography. The coronary thrombosis was induced using the new catheter technique by narrowing the lumen of coronary vessel gradually, which finally led to partial obstruction of coronary artery. Ten Rb-82 dynamic myocardial PET scans were performed sequentially for each experiment using our 5, 10 and 20 second acquisition protocol, respectively, and three regions of interest were drawn on the transaxial slices, one on left ventricular chamber for input function and the other two on normal and decreased perfusion segments for the flow estimation in those regions. Single compartment model has been applied to the measured sets of regional PET data, and the rate constants of influx to myocardial tissue were calculated for regional myocardial flow estimates with the three parameter fits of raw data by the Levenberg-Marquardt method. The results showed that, (1) single compartment model suggested by Kety-Schmidt could be used for the simple estimation of regional myocardial blood flow, (2) the calculated regional myocardial blood flow estimates were dependent on the selection of input function, which reflected partial volume effect and left ventricular wall motion, and (3) mathematically fitted input and tissue time activity curves were more suitable than the direct application of the measured data in terms of convergence.

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Development of Standard Method for Quality Innovation to Strengthen Global Competitiveness and Create Management Performance of Small and Medium-sized Manufacturing Firms (중소 제조기업의 글로벌 품질경쟁력 강화 및 경영성과 창출을 위한 품질혁신 표준방법론 개발)

  • Park, Jong Kab;Kim, Youn Sung
    • Journal of Korean Society for Quality Management
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    • v.46 no.4
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    • pp.843-862
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    • 2018
  • Purpose: The purpose of this study was to develop quality innovation techniques specialized for the small and medium-sized businesses. which account for the majority of Korean companies, were having a hard time utilizing the widely recognized quality innovation techniques due to resource constraints. Methods: First, we do review the existing Single PPM and 6 Sigma. And investigate the utilization of these methods including Toyota Production System. Second, we devised a four-step problem-solving methodology based on recent trends in quality innovation such as Simple, Speedy, and Smart. Third, we do survey on frequently used tools for quality innovation. Many opinion leaders including quality consultants and professors answered and gave us valuable comments about our selected quality tools. Finally, we do specify and map tools to each step of PASS. Results: In 2017, 167 companies participated in the quality innovation support business for small businesses according to the Korea Chamber of Commerce & Industry. We conducted performance checks on 167 companies that had completed the "PASS" projects. For the purpose of evaluating improvement performance, the survey was carried out using a structured questionnaire during the field visit of these companies mentioned above. For the reference, 165 out of 167 companies (98.8 % response rate) responded to the questionnaire and conducted performance analysis based on it. According to the survey, 97.6 percent of the respondents were very satisfied with their overall satisfaction with the quality innovation support projects for small and medium sized enterprises in 2017. Also, 93.3 % of the respondents were satisfied with the results of level of the target achievement. As a result, 160 companies (97.0 % of the participating companies) hope to partic ipate in the quality improvement project using "PASS" once again. Conclusion: In this paper, we introduce the new quality innovation methodology, which is named as 'PASS', It could support the long-range business plan of the small and medium-sized businesses to achieve total customer satisfaction resulting in increased market share and improved profit margin. The most small companies can use this "PASS" technique more easily, quickly and most efficiently than their existing known quality innovation techniques such as Six Sigma and Single PPM, etc.

Motional kinematics of Frozen-thawed Korean native cattle semen use of computer aided semen analysis(CASA) system (컴퓨터 정액자동분석에 의한 동결융해 한우 정액의 운동특성 연구)

  • Lee, Kang-nam;Lee, Byeong-chun;Kim, Jung-tae;Park, Jong-im;Shin, Tae-young;Hwang, Woo-suk
    • Korean Journal of Veterinary Research
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    • v.38 no.4
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    • pp.898-908
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    • 1998
  • The aim of this experiments were to assess the time-interval change of motional characteristics in frozen-thawed semen of Korean native cattle (KNC) by using computer aided semen analysis (CASA) technology. Twenty-six KNC frozen semen straws were obtained from Korean KNC improvement department, livestock improvement main division, national livestock cooperatives federation in Korea. Specimens were allowed to thaw at $37^{\circ}C$ for 30 sec in water bath. Semen analysis was performed on semen image analysis system (SIAS, Medical supply, Korea) adjusted to the gate settings and used the semen droplet ($5{\mu}l$) placed on Makler counting chamber (Sefi medical instrument, Israel) prewarmed at $37^{\circ}C$. The same person used the same micropipette to fill the Makler counting chamber. A total of 150 or more of sperms were analysed in each specimen by a single trained person by scanning at least 5 to 10 fields. The measurement parameters in SIAS were as follows ; frame rate = 30 frames per sec, image capture = 1 sec, minimum motile speed = $10{\mu}m/s$, maximum countable sperm number = 400. Statistical analysis was done by Student t-test with use of the Sigma plot program on a IBM personal computer. The dancemean(DNM) and hyperactivated sperm(HYP) of frozen-thawed KNC semen kinematics were significantly decreased(p < 0.05) after 10 min of incubation at $37^{\circ}C$ water bath. But, wobble(WOB) of same sample semen was significantly increased(p < 0.05) after 10 min of incubation and significantly decrease(p < 0.05) after 60 min of same incubation. And, after 30 mim of incubation, significantly differences were found most of motion kinematics, motifity(MOT), curvilinear velocity(VCL), straight line velocity(VSL), average path velocity(VAP), amplitude of lateral head displacement(ALH), beat cross frequency(BCF), mean angular displacement(MAD), dance(DNC), on same sample semen. The DNM of KNC semen sample was variable kinematics after 30 min of incubation. Also, the linearity(LIN) and straightness(STR) was significantly decreased(p < 0.05) from 60 min of incubation. In conclusion, the AI within 30 min after thawing of frozen semen can be an effective method for obtaining high fertility rate in KNC reproductive program.

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Magmatic evolution of igneous rocks related with the Samrangjin caldera, southeastern Korea (삼랑진 칼데라에 관련된 화성암류의 마그마 진화)

  • 황상구;정창식
    • The Journal of the Petrological Society of Korea
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    • v.7 no.3
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    • pp.161-176
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    • 1998
  • There are exposed Samrangjin Tuff and intracaldera intrusions, of which rhyolitic rocks emplaced as postcollapsed central and ring intrusions within the Samrangjin caldera, and fine-grained granodiorite and biotite granite as regional tectonic intrusions nearby. The Samrangjin Tuff and the rhyolitic rocks are of a single Samrangjin magmatic system. Flow-banded rhyolite among rhyolitic rocks was emplaced in the outer part of the ring intrusions, rhyodacite in the inner part of the eastern ring, and porphyritic dacite and dacite porphyry in the inner part of the northwestern ring. Totally the Samrangjin Tuff and the rhyolitic rocks range from rhyolite to dacite in chemical composition. The Rb-Sr isotopic data of the Samrangjin Tuff and the rhyolitic rocks yield an age of $80.8{\pm}1.5(2{\sigma})$ Ma with the initial $^{87}Sr/^{86}Sr$ ratio of $0.70521{\pm}0.00010(2{\sigma})$. The continuous compositional zonations generally define a large stratified magma system in the postcollapse magma chamber. The Sr isotopic data suggest that the compositional zonations might have resulted from the fractional crystallization of a parental dacitic magma.

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