• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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• pp.158-159
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• 2006

The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multilayer interconnection layers. In order to reduce the RC delay, low-k materials will be used for inter-metal dielectric (IMD) materials. We have developed self-consistent simulation tool that includes neutral-species transport model, based on the relaxation continuum (RCT) model. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatiotemporal steady state profile could be obtained.

• 한국화재소방학회논문지
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• 제23권5호
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• pp.143-152
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• 2009

초고층건물의 수직통로에서 발생하는 연돌효과의 기체역학적 특성과 관련된 차압과 중성대의 위치 계산 및 연돌효과 발생의 가시화를 위하여 3가지 형태의 개구부를 갖는 단일 단순수직통로에 대하여 CFD 모델을 사용하여 수치해석을 하였다. 연돌효과의 차압은 이론식 계산 결과와 비교 시 수직통로의 높이가 높아질수록 차이가 커진다. 중성대 위치는 연돌효과 초기(t = 10s)에 Type A의 경우 수직통로의 높이가 30m 미만인, Type B의 경우 30m 이상인 모델에서 이론식 계산 결과와의 편차가 5% 미만으로 잘 일치한다. 따라서 수직통로 높이가 30m 이상인 다중개구부 수직통로(Type B)의 경우 CFD 모델을 사용하여 중성대 위치를 계산하는 것이 가능하다. 연돌효과의 가시화를 통하여 연돌효과의 공기 유동 현상을 쉽게 이해할 수 있다.

• KIEE International Transactions on Electrophysics and Applications
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• 제11C권4호
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• pp.107-112
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• 2001

Laser Thomson scattering measurements of electrom temperature and density in a neutral loop discharge (NLD) plasma were performed in order to reveal the electron behavior around the neutral loop (NL). The experimental results were examined by using a simulation model that included effects of a three dimensional electromagnetic field with spatial decay of the RF electric field, and the limitation of the spatial extent of the electron motion and collision effect. From the experiments and modeling of the electron behavior, it was found that NLD plasma posses the electron temeprature $T_{e}$ and density ne peaks around the NL is essential for the formation of plasma. Also, the optimum condition of plasma production could be simply estimated by the calculation of $U_{av}$ and $F_{0}$././.

• 전기학회논문지
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• 제58권11호
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• pp.2236-2241
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• 2009

In this study, the electron behavior was investigated numerically in order to obtain guidelines for design and operation of a new plasma source by a magnetic neutral loop discharge (NLD). The optimum plasma production was investigated by using a 3-dimensional simulation model which enables the electron behavior calculation from source region to downstream region. The results showed that the high-density plasma produced around the magnetic neutral loop (NL) is transferred from the NL region to the downstream region along magnetic force lines. Also the avaraged electron energy is increased with the normalized RF electric field (F), which can be used to characterize the plasma production efficiency of NLD system. Considering the relation between F and plasma production, in-depth plasma control can be achieved at a given specific process condition.

• 조명전기설비학회논문지
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• 제17권1호
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• pp.103-111
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• 2003

교육용 건물에는 개인용 컴퓨터와 같은 비선형 부하가 증가하여, 중성선에는 많은 고조파 전류가 흐른다. 3상 4선식 배전 계통을 채용하는 중성선에 과다한 고조파 전류가 흐르면 중성선 도체 과열과 보호 시스템의 오동작등 많은 고조파 장해를 일으킨다. 본 논문에서는 현장에서 실측한 고조파 전류와 전압으로 고조파 해석용 3상 등가회로를 구성하였다. 실측한 값과 MATLAB으로 시뮬레이션한 값을 수치와 그래프로 비교 검토 하였다. 또한 중성선 고조파 전류 저감 대책으로 동조 수동 필터를 사례연구 시스템에 적용하여 고조파 저감 효과도 알아 보았다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 춘계학술대회 발표 논문집
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• pp.94-97
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• 2003

본 연구에서는 반도체제조에 필수적으로 사용되는 플라즈마장비의 성능을 예측.분석하여 개발 시간 및 비용의 절감과 장비의 성능을 극대화 할 수 있도록 이론적 전산모사 환경(VIP-SEPCAD)을 개발하고 있다. VIP-SEPCAD는 플라즈마의 물리.화학적 특성을 예측하는 plasma model, 중성화학종들의 반응 및 유돈 특성을 예측하는 neutral reaction-transport model, particle의 유동 특성을 예측하는 particle transport model, particle의 생성 및 성장 특성을 예측하는 particle formation-growth model, 식각 또는 증착되는 웨이퍼 표면변화를 예측하는 surface evolution model로 구성되어 있다. 현재 개발된 VIP-SEPCAD를 이용하여 산소 플라즈마의 특성과 각종 화학성분들의 분포를 예측하고 particle의 거동에 대하여 분석하였다.

• 전기학회논문지P
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• 제59권2호
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• pp.191-196
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• 2010

The electricity distribution system in Korea is adopting a multi-grounding system. Protection of this distribution system against lightning is performed by installing overhead ground wires over the high voltage wires, and connecting the overhead ground wires to the ground every 200 m. The ground resistance in this system is limited not to exceed $50\Omega$ and overhead ground wire and neutral wire are multiple parallel lines. Although overhead ground wire and neutral wire are installed in different locations on the same pole, this circuit configuration has duplicated functions of providing a return path for unbalanced currents and protecting the distribution system against induced lightning. Therefore, the purpose of this study is to analyze the induced lightning shielding effect according to the neutral wire installation structure of a 22.9kV distribution line in order to present a new 22.9kV distribution line structure model and characteristics. This study calculated induced lightning voltage by performing numerical analysis when an overhead ground wire is present in the multi-grounding type 22.9kV distribution line structure, and calculated the induced lightning shielding effect based on this calculated induced lightning voltage. In addition, this study proposed and analyzed an improved distribution line model allowing the use of both overhead wire and neutral wire to be installed in the current distribution lines. The result of MATLAB simulation using the conditions applied by Yokoyama showed almost no difference between the induced lightning voltage developed in the current line and that developed in the proposed line. This signifies that shielding the induced lightning voltage through overhead wire makes no difference between current and proposed distribution line structures. That is, this study found that the ground resistance of the overhead wire had an effect on the induced lightning voltage, and that the induced lightning shielding effect of overhead wire is small.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2006년도 PARALLEL CFD 2006
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• pp.306-308
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• 2006

Numerical simulations were carried out of the effects of momentum and heat produced by a plasma actuator on neutral flow. Momentum and heat generated during plasma discharge were modeled as a body force and heat source using results of experiments and DSMC of particle. These force and heat model were inserted into a Navier-Stokes equation and the flow around the plasma actuator could be explored by solving fluid dynamics only. Fluid simulation showed that force produced in DSMC generated a jet flow in the vicinity of the plasma actuator and heat accounted for density change.

• 한국태양에너지학회 논문집
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• 제37권6호
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• pp.1-12
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• 2017

The DC link of Grid-Connected 3-Phase 3-Level T-type Photovoltaic PCS (PV-PCS) consists of two series connected capacitors for using their neutral voltage. The mismatch between two capacitor characteristics and transient states happened in load change cause the imbalance of neutral voltage. As a result, PV-PCS performance is degraded and the system becomes unstable. In this paper, a mathematical model for analyzing the imbalance of neutral voltage is derived and a compensation method using offset voltage is proposed, where offset voltage adjusts the applying time of P-type and N-type small vectors. The validity of the proposed methods is verified by simulation and experiment.

• 조명전기설비학회논문지
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• 제18권3호
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• pp.120-127
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• 2004

스위칭 모드 전원 공급 장치와 같은 비선형 부하의 증가로, 3상 4선식 배전계통을 채용하는 중성선에 많은 고조파 전류가 흐른다. 중성선은 접지 시스템과 연결되어 있기 때문에 접지 임피던스는 중성선 고조파 전류에 영향을 끼친다고 알려져 있다. 현장에서 실측한 고조파 전류와 전압으로 고조파 해석용 3상 등가 회로를 구성하였다. 실측한 값과 MATLAB으로 시뮬레이션 한 값을 수치와 파형으로 비교 검토하였다. 또한 본 논문에서는 중성선 고조파 전류와 접지 임피던스와의 관계를 시뮬레이션을 통해 검증하였다.