• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.6-11
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• 2016

For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

• Wind and Structures
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• v.19 no.4
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• pp.353-370
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• 2014

A new method is proposed in this study for estimating the damping ratio of a super tall building under strong wind loads with short-time measured acceleration signals. This method incorporates two main steps. Firstly, the power spectral density of wind-induced acceleration response is obtained by the wavelet transform, then the dynamic characteristics including the natural frequency and damping ratio for the first vibration mode are estimated by a nonlinear regression analysis on the power spectral density. A numerical simulation illustrated that the damping ratios identified by the wavelet spectrum are superior in precision and stability to those values obtained from Welch's periodogram spectrum. To verify the efficiency of the proposed method, wind-induced acceleration responses of the Guangzhou West Tower (GZWT) measured in the field during Typhoon Usagi, which affected this building on September 22, 2013, were used. The damping ratios identified varied from 0.38% to 0.61% in direction 1 and from 0.22% to 0.59% in direction 2. This information is expected to be of considerable interest and practical use for engineers and researchers involved in the wind-resistant design of super-tall buildings.

• Elastomers and Composites
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• v.45 no.4
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• pp.291-297
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• 2010

Strut insulator in a vehicle is an important part to prevent noise and vibration which is created for driving on the road. Most of the viscoelastic-mounts are made of rubber and natural rubber is the key ingredient. These rubber products show well performance for the initial time, but they will degrade after they are exposed to a high temperature circumstance and a cyclic load. NVH performance and comfort in a vehicle were decreased by these degradation of the rubber. In this study, spring displacement in a vehicle was measured to make a profile in the simulation test performed with an acceleration sensor. In addition, acceleration level, rubber permanent deformation and hardness of the rubber were measured according to drive distance and vehicle model.

• International Journal of Automotive Technology
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• v.6 no.6
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• pp.599-604
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• 2005

A functional suspension model is proposed as a kinematic describing function of the suspension, that represents the relative wheel displacement in polynomial form in terms of the vertical displacement of the wheel center and steering rack displacement. The relative velocity and acceleration of the wheel is represented in terms of first and second derivatives of the kinematic describing function. The system equations of motion for the full vehicle dynamic model are systematically derived by using velocity transformation method of multi-body dynamics. The comparison of test and simulation results demonstrates the validity of the proposed functional suspension modeling method. The model is computationally very efficient to achieve real-time simulation on TMS 320C6711 150 MHz DSP board of HILS (hardware-in-the-loop simulation) system for ECU (electronic control unit) evaluation of semi-active suspension.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.1
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• pp.168-178
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• 2002

The purpose of this study is to develop an optimal performance design ova concrete median barrier using the design of experiment and crash simulation which is done by Pam-Crash, one of the commercial crash simulation software. A formula of characteristic value was suggested to obtain an optimal performance design considering all of von Mises stress, volume and acceleration at center of gravity of a heavy truck. An optimal design of a concrete median barrier was obtained by the analysis of variance based on design of experiment and crash simulation. A crash simulation with the optimal design was accomplished in order to verify the suitability of the suggested formula and the proper application of the design of experiment. The obtained optimal design was satisfied for a domestic design regulation of a concrete median barrier.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1996.06c
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• pp.379-392
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• 1996

A mathematic model was developed for the simulation of sideways overturning of agricultural tractors on slopes. The overturning motion was described as a combination of the rotational motions with respect to the first and second tipping axes using the principle of conservation of angular mementum. A stability criterion was also established in terms of angular acceleration of tractor about the second tipping axis. Verification of the proposed model was provided by comparing the stability boundaries predicted by computer simulation with those observed experimentally for an equivalent 1/6 scaled mode tractor. A good agreement was shown between the simulation and experimental results.

• Transactions of the Korean Society of Automotive Engineers
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• v.11 no.2
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• pp.217-223
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• 2003

The power steering system has been adopted in most vehicle system for an easy maneuverability. In this paper, a hydraulic power steering(HPS) model for the computer simulation is developed and used to power steering simulation. The simulation shows that the steering wheel torque with HPS model is less than that without HPS model. In addition, the shimmy vibration at the steering wheel is also simulated and compared to the test data. The lateral displacement of the steering wheel is calculated by imposing the lateral acceleration of the knuckle as a vibration input. The frequency response of the steering wheel is in a good agreement to the test data.

• Journal of Mechanical Science and Technology
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• v.15 no.8
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• pp.1090-1096
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• 2001

In this paper, new methods for efficiently solving linear acceleration equations of multibody dynamic simulation exploiting sparsity for real-time simulation are presented. The coefficient matrix of the equations tends to have a large number of zero entries according to the relative joint coordinate numbering. By adequate joint coordinate numbering, the matrix has minimum off-diagonal terms and a block pattern of non-zero entries and can be solved efficiently. The proposed methods, using sparse Cholesky method and recursive block mass matrix method, take advantages of both the special structure and the sparsity of the coefficient matrix to reduce computation time. The first method solves the η$\times$η sparse coefficient matrix for the accelerations, where η denotes the number of relative coordinates. In the second method, for vehicle dynamic simulation, simple manipulations bring the original problem of dimension η$\times$η to an equivalent problem of dimension 6$\times$6 to be solved for the accelerations of a vehicle chassis. For vehicle dynamic simulation, the proposed solution methods are proved to be more efficient than the classical approaches using reduced Lagrangian multiplier method. With the methods computation time for real-time vehicle dynamic simulation can be reduced up to 14 per cent compared to the classical approach.

• International Journal of Automotive Technology
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• v.7 no.4
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• pp.469-475
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• 2006

In this paper, an optimal suspension system with preview of the road input is synthesized for a half tracked vehicle. The main goal of this research is to improve the ride comfort characteristics of a fast moving tracked vehicle in order to maintain the driver's driving capability. Several different kinds of preview control algorithms are evaluated with active or semi-active suspension systems. The road information estimated from the motion of the 1st road-wheel is adequate to make the best use of the preview control algorithm for tracked vehicles. The ride-comfort characteristics of the tracked vehicle are more dependent on pitching angular acceleration than heaving acceleration. The pitching motion is reduced by the suspension system with hard outer suspensions and soft inner suspensions. Simulation results show that the performance of sky-hook algorithms for ride comfort nearly follow that of full state feedback algorithms.

• International Journal of Control, Automation, and Systems
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• v.1 no.1
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• pp.93-100
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• 2003

Accuracy in maneuvering target tracking using multiple models relies upon the suit-ability of each target motion model to be used. To construct multiple models, the interacting multiple model (IMM) algorithm and the adaptive IMM (AIMM) algorithm require predefined sub-models and predetermined acceleration intervals, respectively, in consideration of the properties of maneuvers. To solve these problems, this paper proposes the GA-based IMM method as an intelligent tracking method for a maneuvering target. In the proposed method, the acceleration input is regarded as an additive process noise, a sub-model is represented as a fuzzy system to compute the time-varying variance of the overall process noise, and, to optimize the employed fuzzy system, the genetic algorithm (GA) is utilized. The simulation results show that the proposed method has a better tracking performance than the AIMM algorithm.