• 한국세라믹학회지
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• 제45권9호
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• pp.507-511
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• 2008

A "C-sphere" specimen geometry was used to determine the failure strength distributions of a commercially-available bearing-grade silicon nitride ($Si_3N_4$) with ball diameters of 12.7 and 25.4 mm. Strengths for both diameters were determined using the combination of failure load, C-sphere geometry, and finite element analysis and fitted using two-parameter Weibull distributions. Effective areas of both diameters were estimated as a function of Weibull modulus and used to explore whether the strength distributions predictably scaled between each size. They did not. That statistical observation suggested that the same flaw type did not limit the strength of both ball diameters indicating a lack of material homogeneity between the two sizes. Optical fractography confirmed that. It showed there were two distinct strength-limiting flaw types common to both ball diameters, that one flaw type was always associated with lower strength specimens, and that a significantly higher fraction of the 25.4-mm-diameter C-sphere specimens failed from it. Predictable strength-size-scaling would therefore not result as a consequence of this because these flaw types were not homogenously distributed and sampled in both C-sphere geometries.

• 한국표면공학회지
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• 제41권6호
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• pp.331-334
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• 2008

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

• 센서학회지
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• 제22권6호
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• pp.433-438
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• 2013

In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1659-1662
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• 2003

The mass measurement of solid density standards using weight exchanger is described. KRISS(Korea Research Institute od Standards and Science) has several solid density standards. Their mass have been measured manually only using a mass comparator(Mettler, 1kg - 0.01mg). However, the uncertaity of the manual mass measurement is up to 300 microgarm much more than 32 microgram of advanced NMIS(National Metrology Institutes) for 1 kg silicon sphere which is primary density standards due to an eccentric error and buoyancy correction error. The new system with a weight exchanger is designed and built to improve the measurement accuracy. It comprises a weight exchager, a mass comparator, air density instruments, and application program for automatic measurement. It is evaluated by measuring several elements in an air tight chamber to verify the performance of it.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1083-1086
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• 2005

Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

• Journal of Mechanical Science and Technology
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• 제17권11호
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• pp.1638-1649
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• 2003

A study is made on the characterization of damage tolerance by spherical indentation in hardly coated layer structure with modest elastic modulus mismatch. A hard silicon nitride is prepared for the coating material and silicon nitride with 5wt% of boron nitride composites for underlayer. Hot pressing to eliminate the effect of interface delamination during the fracture makes strong interfacial bonding. The elastic modulus mismatch between the layers is not only large enough to suppress the surface crack initiation from the coating layer but sufficiently small to prevent the initiation of radial crack from the interface. The strength degradation of the layer structure after sphere contact indentation does not significantly occur, while the degradation of silicon nitride-boron nitride composite is critical at a high load and high number of contacts.

• 한국세라믹학회지
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• 제48권4호
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• pp.288-292
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• 2011

In this study, we investigated the mechanical behavior of carbon fiber reinforced silicon carbide composites by indentation stress. Relatively porous and dense fiber reinforced ceramic composites were fabricated by liquid silicon infiltration (LSI) process. Densification of fiber composite was controlled by hardening temperature of preform and consecutive LSI process. Load-displacement curves were obtained during indentation of WC sphere on the carbon fiber reinforced silicon carbide composites. The indentation damages at various loads were observed, and the elastic modulus were predicted from unloading curve of load-displacement curve.

• 대한기계학회논문집A
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• 제20권12호
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• pp.3847-3855
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• 1996

In order to study the relationship between static and cynamic behaviors of silion caride, both quasi-static indentaiton and impact experiments of spherical particle have been conducted. The difference inmaterial behavior when using the two mehtods suggests a loading rate difference in the damate pattrern and fracture strength of silicon carbide. This investigation showed some difference in damage pattern according to particla property, especially inthe case of particle impact. There was no differences in deformation behaviors according to the loading rate when the crater profiles were compared with each other at the same contact radius. From the result of residual strength evaluation, it was found that the strength degradation began at the initiation of ring crack and its behavior was colsely related to morphologies of the damage developed which was also dependent upon the extent of deformation atthe loaidng point. In the case of static indentation, there didnot exist the particle property effects onthe strength degradation behavior.

• 한국세라믹학회지
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• 제42권8호
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• pp.537-541
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• 2005

Silicon nitride is one of the most successful engineering ceramics, owing to a favorable combination of properties, including high strength, high hardness, low thermal expansion coefficient, and high fracture toughness. However, the impact damage behavior of $Si_3N_4$ ceramics has not been widely characterized. In this study, sphere and explosive indentations were used to characterize the static and dynamic damage behavior of $Si_3N_4$ ceramics with different microstructures. Three grades of $Si_3N_4$ with different grain size and shape, fine-equiaxed, medium, and coarse-elongated, were prepared. In order to observe the subsurface damaged zone, a bonded-interface technique was adopted. Subsurface damage evolution of the specimens was then characterized extensively using optical and electron microscopy. It was found that the damage response depends strongly on the microstructure of the ceramics, particularly on the glassy grain boundary phase. In the case of static indentation, examination of subsurface damage revealed competition between brittle and ductile damage modes. In contrast to static indentation results, dynamic indentation induces a massive subsurface yield zone that contains severe micro-failures. In this study, it is suggested that the weak glassy grain boundary phase plays an important role in the resistance to dynamic fracture.

• 한국세라믹학회지
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• 제43권8호
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• pp.492-497
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• 2006

SiC coating has been introduced as protective layer in TRISO nuclear fuel particle of High Temperature Gas cooled Reactor (HTGR) due to excellent mechanical stability at high temperature. In order to inhibit the failure of the TRISO particles, it is important to evaluate the fracture strength of the SiC coating layer. ]n present work, thin silicon carbide coating was fabricated using chemical vapor deposition process with different microstructures and thicknesses. Processing condition and surface status of substrate.affect on the microstructure of SiC coating layer. Sphere indentation method on trilayer configuration was conducted to measure the fracture strength of the SiC film. The fracture strength of SiC film with different microstructure and thickness were characterized by trilayer strength measurement method nanoindentation technique was also used to characterize the elastic modulus and th ε hardness of the SiC film. Relationships between microstructure and mechanical properties of CVD SiC thin film were discussed.