• 제목/요약/키워드: Silicon mold

검색결과 116건 처리시간 0.026초

자기연마법을 응용한 미세금형부품의 초정밀 연마 (Ultra Precision Polishing of Micro Die and Mold Parts using Magnetic-assisted Machining)

  • 안병운;김욱배;박성준;이상조
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1832-1835
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    • 2003
  • This paper suggests the selective ultra precision polishing techniques for micro die and mold parts using magnetic-assisted machining. Fabrication of magnetic abrasive particle and their polishing performance are key technology at ultra precision polishing process of micro parts. Conventional magnetic abrasives have disadvantages. which are missing of abrasive particle and inequality between magnetic particle and abrasive particle. So, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Ferrite and carbonyl iron powder are used as magnetic particle where silicon carbide and Al$_2$O$_3$ are abrasive particle. Developed particles are analyzed using measurement device such as SEM. Possibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 2.927 $\mu\textrm{m}$ Rmax to 0.453 $\mu\textrm{m}$ Rmax.

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R/P 마스터 모델을 활용한 정밀주조 부품 및 쾌속금형 제작 공정기술의 개발 (Development of Rapid Tooling using Investment Casting & R/P Master Model)

  • 정해도;김화영
    • 한국주조공학회지
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    • 제20권5호
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    • pp.330-335
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    • 2000
  • Functional metal prototypes are often required in numerous industrial applications. These components are typically needed in the early stage of a project to determine form, fit and function. Recent R/P(Rapid Prototyping) part are made of soft materials such as plastics, wax, paper, these master models cannot be employed durable test in real harsh working environment. Parts by direct metal rapid tooling method, such as laser sintering, by now are hard to get net shape, pores of the green parts of powder casting method must be infiltrated to get proper strength as tool, and new type of 3D direct tooling system combining fabrication welding arc and cutting process is reported. But a system which can build directly 3D parts of high performance functional material as metal park would get long period of system development, massive investment and other serious obstacles, such as patent. In this paper, through the rapid tooling process as silicon rubber molding using R/P master model, and fabricate wax pattern in that silicon rubber mold using vacuum casting method, then we translated the wax patterns to numerous metal tool prototypes by new investment casting process combined conventional investment casting with rapid prototyping & rapid tooling process. With this wax-injection-mold-free investment casting, we developed new investment casting process of fabricating numerous functional metal prototypes from one master model, combined 3-D CAD, R/P and conventional investment casting and tried to expect net shape measuring total dimension shrinkage from R/P pare to metal part.

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필라멘트 와인딩 공법을 이용한 원통형 복합재 격자구조체 제작 공정 (Manufacturing Processes of Cylindrical Composite Lattice Structures using Filament Winding Method)

  • 임재문;신광복;이상우;손조화
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2017년도 제48회 춘계학술대회논문집
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    • pp.835-837
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    • 2017
  • 본 연구에서는 필라멘트 와인딩을 이용한 원통형 복합재 격자구조체의 제작 공정을 서술하였다. 원통형 복합재 격자구조체는 크게 네 단계의 제작 공정을 통해 제작된다. 격자 형상을 갖는 실리콘 금형을 맨드릴에 설치하고 연속 섬유를 실리콘 금형 위에 와인딩 한다. 섬유의 와인딩 후 모든 영역에서 동일한 두께를 갖도록 섬유 교차부의 압착 공정을 수행한다. 마지막으로 복합재 격자구조체를 오븐에서 경화하고 금형을 탈형한다. 제작된 제품의 치수는 설계 사양과 비교하여 2.4%의 오차가 발생하는 것을 확인하였다.

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실리콘 마이크로 몰드와 유리의 열-재흐름 현상을 이용한 초소수성 유리 표면 제작 및 젖음 특성 평가 (Fabrication and Characterization of Superhydrophobic Glass Surfaces Using Silicon Micro-mold and Thermal-reflow Process)

  • 김승준;공정호;이동윤;김종만
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.591-597
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    • 2012
  • This paper presents regularly micro-textured glass surfaces ensuring the superhydrophobic properties in the Cassie-Baxter regime. The proposed surfaces were fabricated simply and efficiently by filling the glass material into a silicon micro-mold with periodic micro-cavities based on a thermal-reflow process, resulting in a successful demonstration of the textured glass surface with periodically-arrayed micro-pillar structures. The static and dynamic wetting properties of the micro-textured glass surfaces were characterized by measuring the static contact angle (SCA) and contact angle hysteresis (CAH), respectively. In addition, the surface wettability was estimated theoretically based on Wenzel and Cassie-Baxter wetting theories, and compared with the experimental ones. Through the experimental and theoretical observations, it was clearly confirmed that the proposed micro-textured glass surfaces showed the slippery superhydrophobic behaviors in the Cassie-Baxter wetting mode.

Micro Mold 제작 및 RTP 공정에 의한 미세 패턴의 성형 (Micro Mold Fabrication and the Micro Patterning by RTP Process)

  • 김흥규;고영배;강정진;임성한;오수익
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2004년도 추계학술대회논문집
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    • pp.294-297
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    • 2004
  • RTP(Rapid Thermal Pressing) is to fabricate desired pattern on polymer substrate by pressing patterned mold against the substrate heated around glass transition temperature. For a successful RTP process, the whole process including heating, molding, cooling and demolding should be conducted 'rapidly' as possible. As the RTP process is effective in replicating patterns on flat large surface without causing shape distortion after cooling, it is being widely used for fabricating various micro/bio application components, especially with channel-type microstructures on surface. This investigation finally aims to develop a RTP process machine for mass-producing micro/bio application components. As a first step for that purpose, we intended to examine the technological difficulties for realizing mass production by RTP process. Therefore, in the current paper, 4 kinds of RTP machines were examined and then the RTP process was conducted experimentally for PMMA film by using one of the machines, HEX 03. The micro-patterned molds used for RTP experiment was fabricated from silicon wafer by semi-conduct process. The replicated micro patterns on PMMA films were examined using SEM and the causes of defect observed in the replicated patterns were discussed.

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광자결정 도파로 성형용 PDMS 스탬프 제작 (PDMS Stamp Fabrication for Photonic Crystal Waveguides)

  • 오승훈;최두선;김창석;정명영
    • 한국정밀공학회지
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    • 제24권4호
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    • pp.153-158
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    • 2007
  • Recently nano imprint lithography to fabricate photonic crystal on polymer is preferred because of its simplicity and short process time and ease of precise manufacturing. But, the technique requires the precise mold as an imprinting tool for good replication. These molds are made of the silicon, nickel and quartz. But this is not desirable due to complex fabrication process, high cost. So, we describe a simple, precise and low cost method of fabricating PDMS stamp to make the photonic crystals. In order to fabricate the PDMS mold, we make the original pattern with designed hole array by finding the optimal electron beam writing condition. And then, we have tried to fabricate PDMS mold by the replica molding with ultrasonic vibration and pressure system. We have used the cleaning process to solve the detaching problem on the interface. Using these methods, we acquired the PDMS mold for photonic crystals with characteristics of a good replication. And the accuracy of replication shows below 1% in 440nm at diameter and in 610nm at lattice constant by dimensional analysis by SEM and AFM.

몰드와 전자기파에 의한 PDP격벽의 성형에 관한 연구 (A Study on Plasma Display Panel Barrier Rib Fabrication by Mold and Electromagnetic Wave)

  • 손재혁;임용관;정영대;정성일;정해도
    • 한국정밀공학회지
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    • 제19권6호
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    • pp.176-183
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    • 2002
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper , Stripes of grooves of which width 48$\mu$m, depth 124$\mu$m , pitch 274$\mu$m was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6 nm Ra in grooving Si. Barrier ribs were farmed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waviness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

PDP 격벽 성형용 몰드 제작과 성형에 대한 연구 (A Study on Mold Fabrication and Forming for PDP Barrier Ribs)

  • 조인호;정상철;정해도;손재혁
    • 한국정밀공학회지
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    • 제18권5호
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    • pp.171-176
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    • 2001
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. Mold for forming barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing process such as screen printing, sand-blasting and photosensitive glass methods. Mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper, Stripes of grooves of which width 48${\mu}{\textrm}{m}$ and 270${\mu}{\textrm}{m}$, depth 124${\mu}{\textrm}{m}$, pitch 274${\mu}{\textrm}{m}$ was acquired by machining hard and brittle materials of WC, Silicon, Alumina with dicing saw blade. Maximum roughness of the bottom and sidewall of the grooves was respectively 120nm, 287nm in grooving WC. Maximum tilt angle caused by difference between upper-most width and lower-most width was 2$^{\circ}$. Maximum Radius of bottom curvatures was 7.75${\mu}{\textrm}{m}$. This results satisfies the specification for barrier ribs of 50 inch XGA PDP if the groove form of mold was fully transferred to the barrier ribs. Barrier ribs were formed with Silicone rubber mold, which is transferred from grooved hard materials. Silicone rubber mold has elasticity accommodating the waveness of lower glass plate of PDP.

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나노/마이크로 PDMS 채널 제작을 위한 마스크리스 실리콘 스템퍼 제작 및 레오로지 성형으로의 응용 (Maskless Fabrication of the Silicon Stamper for PDMS Nano/Micro Channel)

  • 윤성원;강충길
    • 소성∙가공
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    • 제13권4호
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    • pp.326-333
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    • 2004
  • The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as a potential application to fabricate the surface nanosctructures because of its operational versatility and simplicity. However, nanoprobe based on lithography itself is not suitable for mass production because it is time a consuming method and not economical for commercial applications. One solution is to fabricate a mold that will be used for mass production processes such as nanoimprint, PDMS casting, and others. The objective of this study is to fabricate the silicon stamper for PDMS casting process by a mastless fabrication technique using the combination of nano/micro machining by Nanoindenter XP and KOH wet etching. Effect of the Berkovich tip alignment on the deformation was investigated. Grooves were machined on a silicon surface, which has native oxide on it, by constant load scratch (CLS), and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structures was made because of the etch mask effect of the mechanically affected layer generated by nanoscratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved groove and convex structures were used as a stamper for PDMS casting process.

석고주조(石膏鑄造)한 Al-8.6% Si-3.6% Cu 합금(合金)의 기계적(機械的) 성질(性質)에 관(關)한 연구(硏究) (A Study on the Mechanical Properties of Al-8.6% Si-3.6% Cu Alloy Cast in Plaster Mold)

  • 여인동;김동옥;강인찬
    • 한국주조공학회지
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    • 제4권4호
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    • pp.5-13
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    • 1984
  • This paper is presented for showing the effect of cooling rate on dendrite arm spacing, correlated with the chilling power of molding materials (conventional plaster, foamed plaster, silica sand) and section thickness, and also showing relationship between dendrite arm spacing and mechanical properties for an aluminum - 8.6 percent silicon - 3.6 percent copper alloy. Local solidification time $(t_f)$ and secondary dendrite arm spacing (d) could be varied widely in accordance with the molding materials and casting thickness, and the following relationship is obtained: $d=9.4t_f\;^{0.31}$ A good correlation between dendrite arm spacing and mechanical properties such as ultimate tensile strength, yield strength, hardness was found, that is, mechanical properties decreased in a linear manner with increase in log of secondary dendrite arm spacing. Ultimate tensile strength in conventional plaster mold casting decreased by 15 percent comparing with the sand casting, where as in foamed plaster mold casting, it decreased by 30 percent comparing with the sand casting. From those results, it has been verified that DAS might be the most representative parameter for predicting mechanical properties varing with the different cooling condition.

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